Patents Assigned to Matrix Semiconductor
  • Publication number: 20040207001
    Abstract: There is provided a floating gate transistor, such as an EEPROM transistor, and method of making the transistor using two masking steps. The method of making a transistor includes patterning a floating gate layer using a first photoresist mask to form a floating gate rail and doping an active area using the floating gate rail as a mask to form source and drain regions in the active area. The method also includes patterning a control gate layer, a control gate dielectric layer, the floating gate rail, a tunnel dielectric layer and the active area using a second photoresist mask to form a control gate, a control gate dielectric, a floating gate, a tunnel dielectric and a channel island region.
    Type: Application
    Filed: May 20, 2004
    Publication date: October 21, 2004
    Applicant: MATRIX SEMICONDUCTOR, INC.
    Inventors: Igor G. Kouznetsov, Andrew J. Walker
  • Patent number: 6807119
    Abstract: An array of transistors includes a plurality of charge storage transistors and a plurality of dummy transistors interspersed with the plurality of charge storage transistors. Each of the plurality of the dummy transistors is made using the same photolithographic masking steps as each of the plurality of the charge storage transistors. A method of operating the array includes programming and/or erasing the array of transistors, and reading the plurality of charge storage transistors but not the plurality of dummy transistors.
    Type: Grant
    Filed: December 23, 2002
    Date of Patent: October 19, 2004
    Assignee: Matrix Semiconductor, Inc.
    Inventors: Luca Fasoli, Alper Ilkbahar, Roy Scheuerlein
  • Publication number: 20040184296
    Abstract: A multiple-mode memory includes a three-dimensional array of word lines, bit lines and memory cells. The memory cells are arranged in multiple vertically stacked layers. In some layers the memory cells are implemented as field-programmable write-once memory cells, and in other layers the memory cells are implemented as field-programmable re-writable memory cells. In this way, both re-writability and permanent data storage are provided in an inexpensive, single-chip solution. Additional types and numbers of types of memory cells can be used.
    Type: Application
    Filed: March 29, 2004
    Publication date: September 23, 2004
    Applicant: Matrix Semiconductor, Inc.
    Inventors: Michael A. Vyvoda, Christopher S. Moore
  • Publication number: 20040177229
    Abstract: The preferred embodiments described herein provide a memory device and methods for use therewith. In one preferred embodiment, a method is presented for using a file system to dynamically respond to variability in an indicated minimum number of memory cells of first and second write-once memory devices. In another preferred embodiment, a method for overwriting data in a memory device is described in which an error code is disregarded after a destructive pattern is written. In yet another preferred embodiment, a method is presented in which, after a block of memory has been allocated for a file to be stored in a memory device, available lines in that block are determined. Another preferred embodiment relates to reserving at least one memory cell in a memory device for file structures or file system structures. A memory device is also provided in which file system structures of at least two file systems are stored in the same memory partition.
    Type: Application
    Filed: March 22, 2004
    Publication date: September 9, 2004
    Applicant: Matrix Semiconductor, Inc.
    Inventors: Roger W. March, Christopher S. Moore, Daniel T. Brown
  • Patent number: 6784517
    Abstract: A three-dimensional memory array includes a plurality of rail-stacks on each of several levels forming alternating levels of X-lines and Y-lines for the array. Memory cells are formed at the intersection of each X-line and Y-line. The memory cells of each memory plane are all oriented in the same direction relative to the substrate, forming a serial chain diode stack. In certain embodiments, row and column circuits for the array are arranged to interchange function depending upon the directionality of memory cells in the selected memory plane. High-voltage drivers for the X-lines and Y-lines are each capable of passing a write current in either direction depending on the direction of the selected memory cell. A preferred bias arrangement reverse biases only unselected memory cells within the selected memory plane, totaling approximately N2 memory cells, rather than approximately 3N2 memory cells as with prior arrays.
    Type: Grant
    Filed: September 24, 2002
    Date of Patent: August 31, 2004
    Assignee: Matrix Semiconductor, Inc.
    Inventors: Bendik Kleveland, N. Johann Knall
  • Patent number: 6780711
    Abstract: A very high density field programmable memory is disclosed. An array is formed vertically above a substrate using several layers, each layer of which includes vertically fabricated memory cells. The cell in an N level array may be formed with N+1 masking steps plus masking steps needed for contacts. Maximum use of self alignment techniques minimizes photolithographic limitations. In one embodiment the peripheral circuits are formed in a silicon substrate and an N level array is fabricated above the substrate.
    Type: Grant
    Filed: September 23, 2002
    Date of Patent: August 24, 2004
    Assignee: Matrix Semiconductor, INC
    Inventors: Mark G. Johnson, Thomas H. Lee, Vivek Subramanian, Paul Michael Farmwald
  • Patent number: 6780683
    Abstract: A three-dimensional, field-programmable, non-volatile memory includes multiple layers of first and second crossing conductors. Pillars are self-aligned at the intersection of adjacent first and second crossing conductors, and each pillar includes at least an anti-fuse layer. The pillars form memory cells with the adjacent conductors, and each memory cell includes first and second diode components separated by the anti-fuse layer. The diode components form a diode only after the anti-fuse layer is disrupted.
    Type: Grant
    Filed: December 6, 2002
    Date of Patent: August 24, 2004
    Assignee: Matrix Semiconductor, Inc.
    Inventors: Mark G. Johnson, James M. Cleeves, Johan Knall
  • Patent number: 6781878
    Abstract: A method of selecting numbers of sub-array groups for simultaneous operation to optimize bandwidth biases a number of sub-array groups and compares a circuit state value, preferably voltage, to a reference parameter to determine if the operation can successfully be preformed for that number of sub-array groups. The comparison may be repeated with ifferent numbers of sub-array groups biased to find the optimum number of sub-array groups for the operation.
    Type: Grant
    Filed: August 12, 2002
    Date of Patent: August 24, 2004
    Assignee: Matrix Semiconductor, Inc.
    Inventors: Bendik Kleveland, Roy E. Scheuerlein
  • Publication number: 20040159860
    Abstract: A semiconductor device comprises two transistors where a gate electrode of one transistor and source or drain of another transistor are located in the same rail. A monolithic three dimensional array contains a plurality of such devices. The transistors in different levels of the array preferably have a different orientation.
    Type: Application
    Filed: February 18, 2004
    Publication date: August 19, 2004
    Applicant: Matrix Semiconductor, Inc.
    Inventors: Kedar Patel, Alper Ilkbahar, Roy Scheuerlein, Andrew J. Walker
  • Patent number: 6778974
    Abstract: The preferred embodiments described herein provide a memory device and method for reading data stored in a portion of a memory device unreadable by a file system of a host device. In one preferred embodiment, a memory device is provided comprising a first portion that is readable by a file system of a host device and a second portion that is unreadable by the file system of the host device. The first portion stores program code operative to enable the host device to read the second portion. In operation, after the memory device is connected with the host device, the program code is provided to the host device, and the host device reads the data stored in the second portion of the memory device. Other preferred embodiments are provided, and each of the preferred embodiments described herein can be used alone or in combination with one another.
    Type: Grant
    Filed: February 2, 2001
    Date of Patent: August 17, 2004
    Assignee: Matrix Semiconductor, Inc.
    Inventors: Christopher S. Moore, Roger W. March, Daniel T. Brown
  • Patent number: 6777773
    Abstract: A memory cell for a three-dimensional intergrated circuit memory is disclosed. The cell includes a very highly doped semiconductor regions with a doping level of 1020 atoms cm−3 or higher. An antifuse region is disposed between the heavily doped region and a more lightly doped region.
    Type: Grant
    Filed: June 27, 2002
    Date of Patent: August 17, 2004
    Assignee: Matrix Semiconductor, Inc.
    Inventor: N. Johan Knall
  • Patent number: 6770939
    Abstract: An apparatus including a circuit of n circuit levels formed over a substrate from a first level to a nth level, wherein n is greater than one, and each of the n circuit levels has a material parameter change that is at least in part caused by a thermal processing operation that is applied to more than one of the n circuit levels simultaneously. An apparatus including a circuit of a plurality of circuit levels, each of the plurality of circuit levels having substantially similar material parameters.
    Type: Grant
    Filed: September 26, 2002
    Date of Patent: August 3, 2004
    Assignee: Matrix Semiconductor, Inc.
    Inventors: Vivek Subramanian, James M. Cleeves, N. Johan Knall, Calvin K. Li, Michael A. Vyvoda
  • Publication number: 20040145005
    Abstract: A semiconductor device contains a word line, a charge storage region located above the word line, an active layer located above the charge storage region, a patterned etch stop layer located above a first portion of the active layer, and bit lines located over a portion of the etch stop layer and over second portions of the active layer.
    Type: Application
    Filed: January 14, 2004
    Publication date: July 29, 2004
    Applicant: MATRIX SEMICONDUCTOR, INC.
    Inventor: Michael A. Vyvoda
  • Patent number: 6768185
    Abstract: The present invention is directed to novel antifuse arrays and their methods of fabrication. According to an embodiment of the present invention an array comprises a plurality of first spaced apart rail-stacks having a top semiconductor material. A fill dielectric is located between the first plurality of spaced apart rail-stacks wherein the fill dielectric extends above the top surface of the semiconductor material. An antifuse material is formed on the top of the semiconductor material of the first plurality of spaced apart rail-stacks. A second plurality of spaced apart rail-stacks having a lower semiconductor material is formed on the antifuse material. In the second embodiment of the present invention the array comprises a first plurality of spaced apart rail-stacks having a top semiconductor material. A fill dielectric is located between the first plurality of spaced apart rail-stacks wherein the fill dielectric is recessed below the top surface of the semiconductor material.
    Type: Grant
    Filed: April 1, 2002
    Date of Patent: July 27, 2004
    Assignee: Matrix Semiconductor, Inc.
    Inventors: James M. Cleeves, Michael A. Vyvoda, N. Johan Knall
  • Patent number: 6768661
    Abstract: A multiple-mode memory includes a three-dimensional array of word lines, bit lines and memory cells. The memory cells are arranged in multiple vertically stacked layers. In some layers the memory cells are implemented as field-programmable write-once memory cells, and in other layers the memory cells are implemented as field-programmable re-writable memory cells. In this way, both re-writability and permanent data storage are provided in an inexpensive, single-chip solution. Additional types and numbers of types of memory cells can be used.
    Type: Grant
    Filed: June 27, 2002
    Date of Patent: July 27, 2004
    Assignee: Matrix Semiconductor, Inc.
    Inventors: Michael A. Vyvoda, Christopher S. Moore
  • Patent number: 6767816
    Abstract: A three-dimensional memory array includes a plurality of rail-stacks on each of several levels forming alternating levels of X-lines and Y-lines for the array. Memory cells are formed at the intersection of each X-line and Y-line. The memory cells of each memory plane are all oriented in the same direction relative to the substrate, forming a serial chain diode stack. In certain embodiments, row and column circuits for the array are arranged to interchange function depending upon the directionality of memory cells in the selected memory plane. High-voltage drivers for the X-lines and Y-lines are each capable of passing a write current in either direction depending on the direction of the selected memory cell. A preferred bias arrangement reverse biases only unselected memory cells within the selected memory plane, totaling approximately N2 memory cells, rather than approximately 3N2 memory cells as with prior arrays.
    Type: Grant
    Filed: September 24, 2002
    Date of Patent: July 27, 2004
    Assignee: Matrix Semiconductor, Inc.
    Inventors: Bendik Kleveland, N. Johan Knall
  • Patent number: 6765813
    Abstract: Support circuitry for a three-dimensional memory array is formed in a substrate at least partially under the three-dimensional memory array and defines open area in the substrate under the three-dimensional memory array. In one preferred embodiment, one or more memory arrays are formed at least partially in the open area under the three-dimensional memory array, while in another preferred embodiment, logic circuitry implementing one or more functions is formed at least partially in the open area under the three-dimensional memory array. In yet another preferred embodiment, both one or more memory arrays and logic circuitry are formed at least partially in the open area under the three-dimensional memory array. Other preferred embodiments are provided, and each of the preferred embodiments can be used alone or in combination with one another.
    Type: Grant
    Filed: June 27, 2002
    Date of Patent: July 20, 2004
    Assignee: Matrix Semiconductor, Inc.
    Inventors: Roy E. Scheuerlein, J. James Tringali, Colm P. Lysaght, Alper Ilkbahar, Christopher S. Moore, David R. Friedman
  • Patent number: 6754102
    Abstract: A three-dimensional memory array includes a plurality of rail-stacks on each of several levels forming alternating levels of X-lines and Y-lines for the array. Memory cells are formed at the intersection of each X-line and Y-line. The memory cells of each memory plane are all oriented in the same direction relative to the substrate, forming a serial chain diode stack. In certain embodiments, row and column circuits for the array are arranged to interchange function depending upon the directionality of memory cells in the selected memory plane. High-voltage drivers for the X-lines and Y-lines are each capable of passing a write current in either direction depending on the direction of the selected memory cell. A preferred bias arrangement reverse biases only unselected memory cells within the selected memory plane, totaling approximately N2 memory cells, rather than approximately 3N2 memory cells as with prior arrays.
    Type: Grant
    Filed: September 24, 2002
    Date of Patent: June 22, 2004
    Assignee: Matrix Semiconductor, Inc.
    Inventors: Bendik Kleveland, Roy E. Scheuerlein
  • Publication number: 20040108573
    Abstract: A thin dielectric layer grown on a silicide layer can be used in many semiconductor devices. Such a grown dielectric, which may be, for example, a silicon oxide, silicon nitride, or silicon oxynitride dielectric layer, can advantageously be used as a dielectric antifuse. Such an antifuse paired with a diode or diode portions can operate as a memory cell, which is unprogrammed before rupture and programmed after rupture. Memory cell types using a dielectric grown on a silicide include Schottky diode portions separated by an antifuse, a Schottky diode separated from an adjacent conductor by an antifuse, and a junction diode separated from an adjacent conductor by an antifuse.
    Type: Application
    Filed: December 3, 2003
    Publication date: June 10, 2004
    Applicant: MATRIX SEMICONDUCTOR, INC.
    Inventor: S. Brad Herner
  • Publication number: 20040100827
    Abstract: A nonvolatile multibank memory on a die with multiple read, write, and erase circuits, allowing more than one bank to be read, written, erased, or tested independently. Such a multibank memory arrangement is used advantageously in a monolithic three dimensional memory formed above a substrate, leaving unused substrate area available in which the additional circuitry and related cache memory can be formed.
    Type: Application
    Filed: November 27, 2002
    Publication date: May 27, 2004
    Applicant: Matrix Semiconductor, Inc.
    Inventors: Luca G. Fasoli, Roy E. Scheuerlein