Abstract: A scanning laser projector includes a scanning mirror that moves in a sinusoidal motion on at least one axis. Pixels are displayed by modulating a laser beam that is reflected by the scanning mirror. Pixels are generated using light pulses of different duty cycles based on the position and/or angular velocity of the laser beam.

Abstract: An exit pupil expander (904), operable as a numerical aperture expander and suitable for use with high angle of incidence scanned laser projection systems, includes a microlens array (910) and a varied thickness optical element (900). The varied thickness optical element can be configured to transform a principal beam (953) of a received scan cone (952) to be substantially orthogonal with an output of the exit pupil expander (904) or major surface of the microlens array (910). Further, the varied thickness optical element (900) can be configured to cause the received scan cone (952) to exit the varied thickness optical element (900) substantially symmetrically about the principal beam (953). The varied thickness optical element (900) can also be configured to introduce a controlled amount of spread to the received scan cone (952). The varied thickness optical element (900) is useful in correcting distortion, such as keystone distortion introduced by high angle of incidence feed.

Abstract: A cellular-type PD unit is proposed and a plurality of the cellular-type PD units is used in pairs in a multi-axis magnetic lens for focusing a plurality of charged beams. First type PD units or second type PD units (called as hybrid PD unit as well) can be applied to cellular-type PD units to flexibly construct sub-lenses. Furthermore, magnetic shielding plates with a plurality of through openings can be placed above and/or below the multi-axis magnetic lens to make magnetic flux leaking out of the multi-axis magnetic lens vanish away rapidly outside the magnetic shielding plates.

Abstract: An assembly for a charged particle detection device of high detection efficiency is described. The assembly comprising a metal grid for applying attractive potential to lure charged particles; a scintillator disc to absorb the energy from impinging charged particle and reemit the energy in form of light or photons; a light guide to transmit light or photons; and a photomultiplier tube (PMT) cohere with the end of light guide to receive light or photons from light guide and convert it into current signal. A light guide with a bullet-head-shaped front portion ensures total reflection of light propagating within the light guide. A frustum-cone-shaped scintillator disc releases the light that originally trapped in the scintillator disc due to the shape of scintillator.

Abstract: An actuated stylus conditionally occludes or exposes a reflector. The actuation mechanism may be mechanical, electrical, or a combination. When the reflector is occluded and the stylus is in the field of view of an interactive projection, no light is reflected back to the projection system. When the reflector is exposed, light is reflected back to the projection system. The reflector may be exposed in a time coded sequence to encode information such as a stylus ID and user action.

Abstract: A scanning projector includes a scanning mirror that sweep a beam in two dimensions. The beam is created by multiple laser light sources, at least two of which create light at substantially the same wavelength. The two light sources at the same wavelength may be driven at different times, or may be driven simultaneously (equally or unequally).

Abstract: A method for heating a substrate in a vacuum environment and a system therefor is provided. The system includes a chamber capable of holding the substrate located in the vacuum environment and a light source capable of projecting a light beam only on a portion of the substrate. The method includes the following steps. First, the substrate is placed in the vacuumed chamber. Thereafter, the light beam emitted from the light source is projected on the portion of the substrate, such that the portion is significantly heated before whole the substrate is heated. When the light beam is a charged particle beam projected by a charged particle beam assembly and projected on defects located on the substrate, the defects are capable of being identified by an examination result provided by an examination assembly after termination of light beam projection.

Abstract: A method of classifying the defects on a wafer having some same chips and corresponding system is provided. After receiving images formed by scanning the wafer using a charged particle beam, these images are examined such that both defective images and defect-free images are found. Then, the defect-free images are translated into a simulated layout of the chip, or a database is used to provide the simulated layout of the chip. Finally, the defects on the defective images are classified by comparing the images with the simulated layout of the chip. The system has some modules separately corresponds to the steps of the method.

Abstract: The present invention provides two ways to form a special permeability discontinuity unit inside every sub-lens of a multi-axis magnetic lens, which either has a simpler configuration or has more flexibility in manufacturing such as material selection and mechanical structure. Accordingly several types of multi-axis magnetic lens are proposed for various applications. One type is for general application such as a multi-axis magnetic condenser lens or a multi-axis magnetic transfer lens, another type is a multi-axis magnetic non-immersion objective which can require a lower magnetomotive force, and one more type is a multi-axis magnetic immersion objective lens which can generate smaller aberrations. Due to using permeability-discontinuity units, every multi-axis magnetic lens in this invention can also be electrically excited to function as a multi-axis electromagnetic compound lens so as to further reduce aberrations thereof and/or realize electron beam retarding for low-voltage irradiation on specimen.

Abstract: The present invention generally relates to dynamic focus adjustment for an image system. With the assistance of a height detection sub-system, present invention provides an apparatus and methods for micro adjusting an image focusing according the specimen surface height variation by altering the field strength of an electrostatic lens between objective lens and sample stage/or a bias voltage applied to the sample surface. Merely by way of example, the invention has been applied to a scanning electron inspection system. But it would be recognized that the invention could apply to other system using charged particle beam as observation tool with a height detection apparatus.

Abstract: A transparent screen includes a microlens array. The microlens array includes microlenses that are individually rotated to reflect a projected image to a common eyebox. The microlenses may have a dichroic coating to reflect narrowband light. An automotive windshield may include an embedded microlens array as part of a head up display. Eyewear includes an eyepiece with a rotated microlens array and a projector to project content on the microlens array.

Abstract: A method for forming a memory cell transistor is disclosed which includes providing a substrate, forming a trench structure in the substrate, depositing a conductive substance on the surface of the substrate to form a conductive member inside the trench structure, forming one or more dielectric layers on the surface of the substrate, forming one or more first conductive layers on top of the dielectric layers, and etching the first conductive layers and the dielectric layers to form a hole structure extending through the first conductive and the dielectric layers, reaching to the substrate surface. One or more second conductive layers may be formed on top of the first conductive layers, with the second conductive layer material filling the hole structure.

Abstract: A method of inspecting for plug-to-plug short (short circuit) defects on a sample is disclosed. A charged particle beam for imaging the sample is repeatedly line-scanned over the sample with a line-to-line advancement direction perpendicular to the line-scan direction. The method includes scanning the sample with a line-to-line advancement along a first and a second direction, to obtain a first and a second image of the sample, respectively. Then, the method includes identifying plug patterns, represented in the obtained images with abnormal grey levels, as abnormal plug patterns. Next, the method compares the locations of the abnormal plug patterns to determine the presence of plug-to-plug short defects on the sample.

Abstract: A display system includes a substrate guided relay and a scanning projector. The scanning projector exhibits a brightness variation on a resonant scanning axis, and the substrate guided relay exhibits a brightness variation along a length of an output coupler. The scanning projector includes a brightness compensation circuit to compensate for both the brightness variation caused by the resonant scanning and the brightness variation along the length of the output coupler.

Abstract: The present invention discloses a structure and a method for determining a defect in integrated circuit manufacturing process. Test keys are designed for the structure to be the interlaced arrays of grounded and floating conductive cylinders, and the microscopic image can be predicted to be an interlaced pattern of bright voltage contrast (BVC) and dark voltage contrast (DVC) signals for a charged particle beam imaging system. The system can detect the defects by comparing patterns of the detected VC signals and the predicted VC signals.

Abstract: A projection apparatus includes a shutter mechanism to prevent light from reaching an image plane during calibration of light sources. The shutter mechanism may include liquid crystal material that exhibits an effective index of refraction that varies with applied voltage. During calibration, a light beam is shuttered, light sources are driven by calibration data, and optical power is measured.

Abstract: A method and system for detecting or reviewing defective contacts on a semiconductor device are disclosed. In a first embodiment, the method and system comprise providing a positive charge sufficient enough to turn on a gate of an associated MOS device and scanning an area of interest within the MOS device with a primary electron beam of proper landing energy to generate image. The method and system include analyzing the signal of contacts and identify the open contacts. In a second embodiment, the method and system comprises pre-scanning or irradiating the wafer surface defect with an accessory beam, a plurality of times, to achieve positive charged/sufficient to turn on the gate on the associated MOS devices of the wafer; and scanning the at least a portion of the device circuits with a primary electron beam of proper landing energy to generate images wafer or area of interest. The method and system include analyzing the signal and/or image of contacts and identify the open contacts.

Abstract: This invention provides a test structure for inspecting word line array fabricated by SADP process, wherein the test structure comprises a contour circuit to cover one end of the WL array, and is alternatively float and ground to the word line array. The word line array then can be inspected by using E-beam inspection tool to identify open and short defects.

Abstract: Briefly, in accordance with one or more embodiments, an image or projection cone is projected onto a projection surface via a raster scan to generate the image, or in a light cone. Movements of two or more input sources with respect to projection cone are detected, and a determination is made whether the input sources have crossed a crossover line in the projection cone. If the input sources have moved greater than a threshold amount after crossing the crossover line, position data between the input sources may be exchanged to reflect proper position data for the input sources.

Abstract: A substrate guided relay includes multiple output couplers and multiple light valves positioned between the substrate and the output couplers. The number of light valves may be equal to the number of output couplers, or may be more or less than the number of output couplers. The light valves may be enabled sequentially, or may be enabled based on the position of a user's eye. The light valves may include liquid crystal material.