Abstract: A scanning projector includes an optical filter. The optical filter exhibits a variable attenuation as a function of position. The scanning projector may scan sinusoidally in at least one dimension. The variable attenuation of the optical filter compensates for brightness variations due to sinusoidal scanning.

Abstract: A retractable optic conditionally redirects an image from a scanning laser projector. The retractable optic may be coupled to a mobile device, a mobile device case, or may be part of an attachment. The retractable optic includes a reflective surface that has a free-form shape defined by a polynomial that is a function of two independent, transverse coordinate variables.

Abstract: A method for filtering noises in an image scanned by charged particles includes steps of grouping pixels with similar types in the image into a plurality of pixel groups; and removing noises for each pixel group in the image according to a corresponding noise model to obtain the scanned image with better quality and/or contrast. A system for filtering noises in an image scanned by charged particles is also disclosed.

Abstract: In imaging system (100), a spatial light modulator (101) is configured to produce images (102) by scanning a plurality light beams (104,105,106). A first optical element (107) is configured to cause the plurality of light beams to converge along an optical path (114) defined between the first optical element and the spatial light modulator. A second optical element (115) is disposed between the spatial light modulator and an output of the imaging system. The first optical element and the spatial light modulator are arranged such that an image plane (117) is created between the spatial light modulator and the second optical element. The second optical element is configured to collect the diverging light (118) from the image plane and collimate it. The second optical element then delivers the collimated light to a pupil (120) on the other side of the second optical element relative to the spatial light modulator.

Abstract: A scanning projector includes a scanning mirror that sweep a beam in two dimensions. Tangential distortion in a fast-scan dimension is compensated by incorporating a tangent function when determining the light beam location and interpolating pixel data. Tangential distortion in a slow-scan dimension is compensated by driving the scanning mirror nonlinearly in the slow scan dimension such that the light beam sweeps across the display surface at a constant rate.

Abstract: A scanning laser projector includes a scanning mirror that moves in a sinusoidal motion on at least one axis. Pixels are displayed by modulating a laser beam that is reflected by the scanning mirror. Pixels are generated using light pulses of different duty cycles based on the position and/or angular velocity of the laser beam.

Abstract: This invention provides a phase detector with more than two detector units on a printed circuit layer. A detector set includes a pair of detector units or one detector unit, and a detector row includes a plurality of detector sets in one line. The phase detector includes a plurality of detector rows and each row has a detector set in one period, wherein all detector units are interleaved to have the same interval between any two adjacent detector units, which is defined as a pitch and the pitch is equal to one period dividing the detector pair number, which is the half sum of the number of one detector set for all rows.

Abstract: A method of inspecting an EUV reticle is proposed, which uses an original design layout information to align the plurality of patterns on an image, which is got by scanning the surface of an EUV reticle, such that the defect can be identified and classified according to the aligned patterns. In the scanning process, a step of conditioning surface charge is followed by a step of inspecting surface of the EUV reticle wherein the step of conditioning surface can neutralize the surface charge and the step of inspecting can obtain an image of the EUV reticle. The method of inspecting an EUV reticle also tuning a retarding electrode to attract more secondary electrons such that the greylevels of different patterns may be shown and the defect can be identified and classified.

Abstract: An imaging method and apparatus for forming images of substantially the same area on a sample for defect inspection within the area are disclosed. The disclosed method includes line-scanning the charged particle beam over the area to form a plurality of n*Y scan lines by repeatedly forming a group of n scan lines for Y times. During the formation of each group of n scan lines, an optical beam is, from one line scan to another, selectively illuminated on the area prior to or simultaneously with scanning of the charged particle beam. In addition, during the formation of each group of n scan lines, a condition of illumination of the optical beam selectively changes from one line scan to another. The conditions at which individual n scan lines are formed are repeated for the formation of all Y groups of scan lines.

Abstract: Regions are defined in projected content to create a virtually segmented display. When reflections are received from objects within a defined region, the reflections are recognized and passed to a user interface circuit. When reflections are received from objects outside a defined region, the reflections are gated and not recognized.

Abstract: Briefly, in accordance with one or more embodiments, a closed loop feedback system for electronic beam alignment in a scanned beam display comprises a light source to emit one or more light beams, a controller to provide a control signal to drive the light source, a scanning platform to receive the one or more light beams and scan the light beams in a scanning pattern to project an image, and an alignment detector to provide a feedback signal indicative of beam position information of the light beams in the far field to the controller. An optic may be disposed in the beam path to magnify and/or to transform beam position information into the far field for the one or more alignment detectors. The controller adjusts the control signal in response to the feedback signal received from the alignment detector to maintain alignment of the light beams in a far field.

Abstract: The luminance of a laser diode is a function of laser diode drive current. The luminance is also a function of other factors, such as age and temperature. A laser projection device includes laser diodes to generate light in response to a commanded luminance, and also includes photodiodes to provide a measured luminance. The commanded luminance and measured luminance are compared, and drive currents for the laser diodes are adjusted to compensate for changes in laser diode characteristics.

Abstract: A method for characterizing identified defects during charged particle beam inspection of a sample is disclosed. The method comprises obtaining a voltage contrast image of the sample by using a charged particle beam imaging apparatus at an inspection temperature; identifying, from the voltage contrast image, the presence of at least one defect on the sample; providing reference data of the sample, wherein the reference data represents at least one reference defect on the sample; comparing the location or geographical distribution of the identified defects and the reference defects on the sample to correlate the identified defects with the inspection temperature thereby characterizing the identified defects.

Abstract: Briefly, in accordance with one or more embodiments, a beam scanner may comprise a nanophotonics chip to provide a scanned output beam. The nanophotonics chip comprises a substrate, a grating in-coupler formed in the substrate to couple a beam from a light source into the substrate, a modulator to modulate the beam, and a photonic crystal (PC) superprism to provide a scanned output beam that is scanned in response to the modulated beam.

Abstract: A bifocal head-up display system includes a projector, at least one projection surface in an intermediate image plane, and relay optics to direct a display image to a reflector in a vehicle operator's field of view. The display image includes two image portions focused at different distances from the vehicle operator. A first image portion focused at a first distance may include information related to vehicle operation, and a second image portion focused at a second distance may include to information related to extra-vehicular objects.

Abstract: A structure for discharging an extreme ultraviolet mask (EUV mask) is provided to discharge the EUV mask during the inspection by an electron beam inspection tool. The structure for discharging an EUV mask includes at least one grounding pin to contact conductive areas on the EUV mask, wherein the EUV mask may have further conductive layer on sidewalls or/and bottom. The inspection quality of the EUV mask is enhanced by using the electron beam inspection system because the accumulated charging on the EUU mask is grounded.

Abstract: A scanning projector includes a mirror that scans in two dimensions, at least one of which is sinusoidal. A digital phase lock loop locks to the sinusoidal movement of the mirror. A free-running pixel clock is provided. An interpolation component interpolates pixel intensity data from adjacent pixels based on the position of the mirror when a pixel clock arrives.

Abstract: A beam combiner has a first coating on a first side capable of imparting a first polarization rotation, and a second coating on a second side capable of imparting a second polarization rotation. A first beam impinging on the first side passes through the first and second coatings as a first beam component. Second and third beams impinging on the second side partially reflect off the second coating as a second beam component, and partially transmit through the second coating to reflect off the first coating and exit through the second coating as a third beam component. The first, second and third beam components are disposed at selected positions and have respective selected polarizations as a combined beam spot. The positions and polarization of the beams components result in a projected image having increased allowable brightness and/or having reduced speckle.

Abstract: The present invention generally relates to a detection unit of a charged particle imaging system. More particularly, portion of the detection unit can move into or out of the detection system as imaging condition required. With the assistance of a Wein filter (also known as an E×B charged particle analyzer) and a movable detector design, the present invention provides a stereo imaging system that suitable for both low current, high resolution mode and high current, high throughput mode. Merely by way of example, the invention has been applied to a scanning electron beam inspection system. But it would be recognized that the invention could apply to other system using charged particle beam as an observation tool.

Abstract: The present invention provides a charged particle beam apparatus which employs LVSEM to inspect sample surface with a throughput much higher than the prior art. The high throughput is realized by providing a probe current and a FOV both several times of those of the prior art. Accordingly several means are proposed to avoid obvious degradation of image resolution due to the increases in Coulomb effect and geometric aberrations, and increase efficiency and uniformity of secondary charged particle collection.