Patents Assigned to MKS Instruments, Inc.
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Patent number: 9947514Abstract: An RF supply system in which a bias RF generator operates at a first frequency to provide a bias RF output signal and a source RF generator operates at a second frequency to provide a source RF output signal. The RF output power signals are applied to a load, such as a plasma chamber. The source RF generator detects a triggering event. In response to the triggering event, the source RF generator initiates adding frequency offsets to the source RF output signal in order to respond to impedance fluctuations in the plasma chamber that occur with respect to the triggering event. The triggering event detected by the source RF generator can be received from the bias RF generator in the form of a control signal that varies in accordance with the bias RF output signal.Type: GrantFiled: August 15, 2016Date of Patent: April 17, 2018Assignee: MKS Instruments, Inc.Inventors: Aaron T. Radomski, Sang Won Lee, Larry J. Fisk, II, Jonathan W. Smyka
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Patent number: 9927317Abstract: Devices and corresponding methods are provided to operate a hot cathode ionization pressure gauge (HCIG). A transistor circuit can be configured to pass the electron emission current with low input impedance and to control cathode bias voltage. Emission current and cathode bias voltage can be controlled independently of each other, without a servo settling time. HCIGs can be calibrated with respect to leakage current.Type: GrantFiled: July 9, 2015Date of Patent: March 27, 2018Assignee: MKS Instruments, Inc.Inventor: Douglas C. Hansen
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Patent number: 9876476Abstract: A radio frequency (RF) control system including a RF generator having a power amplifier that outputs a RF signal and a controller. A matching network receives the RF signal and generates at least one RF output signal. In a first mode of operation, the controller enables adjustment of the frequency of the RF signal and a tune element of the matching network to achieve an impedance match and in a second mode of operation the controller enables adjustment of only the tune element of the matching network to achieve an impedance match while the frequency is adjusted to a target frequency. The RF controls system operates in a continuous and pulse mode of operation.Type: GrantFiled: August 18, 2015Date of Patent: January 23, 2018Assignee: MKS Instruments, Inc.Inventors: David J. Coumou, Ross Reinhardt, Yuriy Elner, Daniel M. Gill
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Patent number: 9865426Abstract: Improvements in the supply of high-frequency electrical power to ozone-producing cells can be accomplished using the systems and techniques described herein. Application of a DC-DC converter operating at a switching frequency substantially greater than a load frequency, supports generation of a high-voltage AC for powering such cells, while allowing for reductions in component size and reductions in a quality factor of a load tuning circuit. Controllable power inverters used in obtaining one or more of the switching and load frequencies can be controlled using feedback techniques to provide stable, high-quality power to ozone-producing cells under variations in one or more of externally supplied power and load conditions. An inrush protection circuit can also be provided to selectively introduce a current-limiting resistance until an input DC bus has been sufficiently initialized as determined by measurements obtained from the DC bus.Type: GrantFiled: February 29, 2016Date of Patent: January 9, 2018Assignee: MKS Instruments, Inc.Inventors: Ken Tran, Feng Tian, Xing Chen, Franklin Lee
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Patent number: 9850123Abstract: Stress relief structures and methods that can be applied to MEMS sensors requiring a hermetic seal and that can be simply manufactured are disclosed. The system includes a sensor having a first surface and a second surface, the second surface being disposed away from the first surface, the second surface also being disposed away from a package surface and located between the first surface and the package surface, a number of support members, each support member extending from the second surface to the package surface, the support members being disposed on and operatively connected to only a portion of the second surface. The support member are configured to reduce stress produced by package-sensor interaction.Type: GrantFiled: October 19, 2016Date of Patent: December 26, 2017Assignee: MKS Instruments, Inc.Inventors: Lei Gu, Stephen F. Bart
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Patent number: 9846074Abstract: A mass flow controller comprises: a first flow meter constructed and arranged to measured flow rate of mass through the mass flow controller; a second flow meter constructed and arranged to measure flow rate of mass through the mass flow controller; a control valve constructed and arranged so as to control the flow rate of mass through the mass flow controller in response to a control signal generated as a function of the flow rate as measured by one of the flow meters; and a system controller constructed and arranged to generate the control signal, and to provide an indication when a difference between the flow rate of mass as measured by the first flow meter and the flow rate of mass as measured by the second flow meter exceeds a threshold.Type: GrantFiled: January 20, 2012Date of Patent: December 19, 2017Assignee: MKS Instruments, Inc.Inventor: Junhua Ding
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Publication number: 20170350779Abstract: A pressure sensor includes a piezoelectric substrate having a generally planar structure and an anchor location fixing the piezoelectric substrate at the periphery of the planar structure of the piezoelectric substrate. The planar structure of the piezoelectric substrate has a first region having a first characteristic thickness adjacent to the anchor location, and a second region have a second characteristic thickness at a middle region of the substrate. The second characteristic thickness is less than the first characteristic thickness such that the planar structure in the second region is displaced relative to the neutral axis of the planar structure such that while undergoing bending the second region has either mostly compressive or mostly tensile stress.Type: ApplicationFiled: May 23, 2017Publication date: December 7, 2017Applicant: MKS Instruments, Inc.Inventors: Srinivas Tadigadapa, Nishit Goel, Stephen Bart
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Publication number: 20170345622Abstract: A plasma applicator includes a plasma discharge tube and a microwave cavity at least partially surrounding a portion of the plasma discharge tube. Microwave energy is coupled to the microwave cavity via a coupling iris. At least two orthogonal dimensions of the microwave cavity are selected such that the microwave energy in the microwave cavity propagates in a transverse electric (TE) mode. Primary electric fields generated from the microwave energy combine with an evanescent electric field generated from the coupling iris, such that a combined electric field in the microwave cavity is substantially uniform along the longitudinal axis of the plasma discharge tube. A plurality of radial microwave chokes is disposed over an exterior of the plasma discharge tube. Positions of the microwave chokes are such that microwave energy propagating in the TE mode and a transverse electric magnetic (TEM) mode is attenuated.Type: ApplicationFiled: May 27, 2016Publication date: November 30, 2017Applicant: MKS Instruments, Inc.Inventors: Mohammad Kamarehi, Chaolin Hu, Olivia Keller
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Patent number: 9831066Abstract: A plasma applicator includes a plasma discharge tube and a microwave cavity at least partially surrounding a portion of the plasma discharge tube. Microwave energy is coupled to the microwave cavity via a coupling iris. At least two orthogonal dimensions of the microwave cavity are selected such that the microwave energy in the microwave cavity propagates in a transverse electric (TE) mode. Primary electric fields generated from the microwave energy combine with an evanescent electric field generated from the coupling iris, such that a combined electric field in the microwave cavity is substantially uniform along the longitudinal axis of the plasma discharge tube. A plurality of radial microwave chokes is disposed over an exterior of the plasma discharge tube. Positions of the microwave chokes are such that microwave energy propagating in the TE mode and a transverse electric magnetic (TEM) mode is attenuated.Type: GrantFiled: May 27, 2016Date of Patent: November 28, 2017Assignee: MKS Instruments, Inc.Inventors: Mohammad Kamarehi, Chaolin Hu, Olivia Keller
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Publication number: 20170328756Abstract: Calibration of a valve in a vacuum system and providing a diagnostic indication in the vacuum system using the calibration includes measuring conductance of the valve as a function of angular valve position and generating a conductance calibration map or function for use during operation of the valve. An actual angular valve position is set based on the received set point angular valve position and a difference between the measured valve conductance and a predefined metric of conductance versus angular valve position. An actual system conductance and a difference between the actual system conductance and a reference system conductance for the system are determined. The diagnostic indication of a fault in the system is generated based on the actual angular valve position of the valve and the difference between the actual system conductance and the reference system conductance for the system.Type: ApplicationFiled: April 28, 2017Publication date: November 16, 2017Applicant: MKS Instruments, Inc.Inventors: David Brian Chamberlain, Vladislav Davidkovich, Scott Benedict, Gordon Hill
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Patent number: 9806685Abstract: A wide dynamic range trans-impedance amplifier includes a first trans-impedance amplifier configured to receive a first input current and produce a first voltage as a function of the first input current, and a second trans-impedance amplifier configured to receive a second input current and produce a second voltage as a function of the second input current. A current steering element causes a first portion of current from a current source to flow to the first trans-impedance amplifier until the first current portion reaches the first threshold current, and causes a second portion of current from the current source to flow to the second trans-impedance amplifier, until the second current portion reaches the second threshold current. The second current portion is current from the current source that exceeds the first threshold current. The wide dynamic range trans-impedance amplifier may receive, for example, ion collector current from a hot cathode ionization gauge (HCIG).Type: GrantFiled: May 13, 2016Date of Patent: October 31, 2017Assignee: MKS Instruments, Inc.Inventor: Douglas C. Hansen
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Patent number: 9796603Abstract: The invention provides, in one aspect, a system for recirculating ozonated liquid. The system includes a contactor including at least two inlets and at least two outlets. The contactor is in fluid communication with a first liquid source at a first contactor inlet and a second liquid source at a second contactor inlet, and the second contactor inlet receives gas that purges at least a portion of gas from liquid received at the first contactor inlet. The purged gas exits the contactor at a first contactor outlet. The contactor is in fluid communication with the second liquid source at a second contactor outlet, and the contactor drains at least a portion of the liquid in the contactor, the drained liquid exiting the contactor at the second contactor outlet. The contactor includes a third inlet in fluid communication with the first liquid source, the third inlet allowing the first liquid source to release liquid at an ambient pressure.Type: GrantFiled: February 2, 2017Date of Patent: October 24, 2017Assignee: MKS Instruments, Inc.Inventors: Johannes Heinrich Seiwert, Ulrich Alfred Brammer, Martin Blacha, Gerhard Joachim Schnaiter
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Patent number: 9797797Abstract: A cold cathode ionization vacuum gauge includes an extended anode electrode and a cathode electrode surrounding the anode electrode along its length and forming a discharge space between the anode electrode and the cathode electrode. The vacuum gauge further includes an electrically conductive guard ring electrode interposed between the cathode electrode and the anode electrode about a base of the anode electrode to collect leakage electrical current, and a discharge starter device disposed over and electrically connected with the guard ring electrode, the starter device having a plurality of tips directed toward the anode and forming a gap between the tips and the anode.Type: GrantFiled: November 10, 2014Date of Patent: October 24, 2017Assignee: MKS Instruments, Inc.Inventors: Gerardo A. Brucker, Timothy C. Swinney, Brandon J. Kelly, Alfred A. Funari, Michael N. Schott, Kristian S. Schartau
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Publication number: 20170292633Abstract: A cooled isolation valve includes a valve body, a stationary element coupled to the valve body, and a movable closure element movable with respect to the stationary element between a closed position in which the movable closure element and the stationary element are brought together and an open position. One of the movable closure element and the stationary element includes a sealing element. In the closed position of the movable closure element, the sealing element provides a seal between the movable closure element and the stationary element. A fluid channel is formed in contact with the movable closure element and movable with the movable closure element with respect to the stationary element, such that a fluid in the fluid channel effects heat transfer in the movable closure element. A bellows of the isolation valve can include a metallic substrate with a ceramic coating.Type: ApplicationFiled: April 4, 2017Publication date: October 12, 2017Applicant: MKS Instruments, Inc.Inventors: Gordon Hill, David F. Broyer, David C. Neumeister, Bradly Raymond Lefevre
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Patent number: 9748864Abstract: A power supply circuit includes a power amplifier that receives a direct current (DC) voltage from a first power source. A control signal applied to the power amplifier causes the power amplifier to convert the DC voltage to an alternating current (AC) output signal. The AC output signal is applied to a transformer that includes a first winding, a second winding, and a third winding. The first winding receives the AC output signal and the second winding receives an output current that varies in accordance with the AC output signal to apply current to a load. A rectifier includes a plurality of diodes configured to rectify a voltage across the third winding and clamp the voltage at the load. Return power from the third winding may be returned to the first power source.Type: GrantFiled: June 26, 2015Date of Patent: August 29, 2017Assignee: MKS Instruments, Inc.Inventor: Ky Luu
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Patent number: 9739708Abstract: Described herein is a spectroscopic system and method for measuring and monitoring the chemical composition and/or impurity content of a sample or sample stream using absorption light spectroscopy. Specifically, in certain embodiments, this invention relates to the use of sample pressure variation to alter the magnitude of the absorption spectrum (e.g., wavelength-dependent signal) received for the sample, thereby obviating the need for a reference or ‘zero’ sample. Rather than use a reference or ‘zero’ sample, embodiments described herein obtain a spectrum/signal from a sample-containing cell at both a first pressure and a second (different) pressure.Type: GrantFiled: October 11, 2016Date of Patent: August 22, 2017Assignees: MKS Instruments, Inc., Pason Systems Corp.Inventor: Vidi A. Saptari
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Patent number: 9736920Abstract: Methods and apparatus for igniting a process plasma within a plasma chamber are provided. One or more self-resonating devices are positioned within a plasma chamber relative to a plasma generation volume within the plasma chamber. The plasma generation volume is defined by the plasma chamber. Each of the self-resonating devices generates an ignition plasma. The ignition plasmas cause a partial ionization of an ignition gas. The partially ionized ignition gas allows for ignition of a process plasma by applying an electric field to the plasma generation volume.Type: GrantFiled: February 6, 2015Date of Patent: August 15, 2017Assignee: MKS Instruments, Inc.Inventors: Shaun T. Smith, Steven R. Walther, Chen Wu
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Patent number: 9721758Abstract: A radio frequency (RF) control system including a RF generator having a power amplifier that outputs a RF signal and a controller. A matching network receives the RF signal and generates a plurality of RF output signals. The matching network includes a ratio tuning element to vary a ratio of power between the plurality of RF output signals. The first controller communicates a ratio control signal to the matching network, and the matching network controls the ratio tuning element in accordance with the ratio control signal. The RF controls system operates in a continuous and pulse mode of operation. The controller can also control the rise or fall of a pulse edge or a level or duration of incremental changes in the pulse edge.Type: GrantFiled: July 13, 2015Date of Patent: August 1, 2017Assignee: MKS Instruments, Inc.Inventors: David J. Coumou, Ross Reinhardt, Yuiry Elner, Daniel M. Gill
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Patent number: 9714919Abstract: A method of detecting specific gas species in an ion trap, the specific gas species initially being a trace component of a first low concentration in the volume of gas, includes ionizing the gas including the specific gas species, thereby creating specific ion species. The method further includes producing an electrostatic potential in which the specific ion species are confined in the ion trap to trajectories. The method also includes exciting confined specific ion species with an AC excitation source having an excitation frequency, scanning the excitation frequency of the AC excitation source to eject the specific ion species from the ion trap, and detecting the ejected specific ion species. The method further includes increasing the concentration of the specific ion species within the ion trap relative to the first low concentration prior to scanning the excitation frequency that ejects the ions of the specific gas species.Type: GrantFiled: March 13, 2013Date of Patent: July 25, 2017Assignee: MKS Instruments, Inc.Inventors: Gerardo A. Brucker, Timothy C. Swinney, G. Jeffery Rathbone
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Patent number: 9686821Abstract: Heater modules are configured for streamlined daisy chain connectivity that includes front end and intermediate daisy chain power injection, water resistant heater assemblies, and shielding. A power injection device is configured with connectivity for insertion of power into heater modules that are in front and intermediate daisy chain positions while enabling data communications between heater modules positioned on opposite sides of the power injection locations.Type: GrantFiled: April 28, 2014Date of Patent: June 20, 2017Assignee: MKS Instruments, Inc.Inventors: Jeffrey D. Kiernan, Karl Hausmann, Paul Dozoretz