Patents Assigned to MPI Corporation
  • Publication number: 20210373048
    Abstract: A probe head includes upper and lower die units, and a linear probe inserted therethrough and thereby defined with tail, body and head portions. A first bottom surface of the upper die unit and a second top surface of the lower die unit face each other, thereby defining an inner space wherein the body portion is located and includes a plurality of sections each having front width larger than or equal to back width, including a narrowest section whose upper and lower ends have a distance from the first bottom surface and the second top surface respectively. The head and tail portions are offset from each other along two horizontal axes and the body portion is thereby curved. The present invention is favorable in dynamic behavior control of the linear probe which is easy in manufacturing, lower in cost and has more variety in material.
    Type: Application
    Filed: May 25, 2021
    Publication date: December 2, 2021
    Applicant: MPI Corporation
    Inventors: TZU-YANG CHEN, CHIN-YI LIN, CHEN-RUI WU, SHENG-YU LIN, MING-TA HSU, CHIA-JU WEI
  • Patent number: 11162996
    Abstract: A probing apparatus includes a carrier having an opening, a supporter disposed on the carrier in a way that its bottom surface faces toward the carrier, its top surface for disposition of a wafer, and its light permeable portion allowing light to pass through the top and bottom surfaces corresponding in position to the opening, an air heating device having a covering plate and an air supply unit, and a probing device having a probe protruding out of the bottom surface of the air heating device. A thermal air source provides thermal air to a heating space between the bottom surface of the air heating device and the top surface of the supporter through an air supply passage of the air supply unit. The probing apparatus can test light emitting efficiency of a light emitting chip in the wafer and heat the chip at the same time.
    Type: Grant
    Filed: September 30, 2020
    Date of Patent: November 2, 2021
    Assignee: MPI CORPORATION
    Inventors: Wen Pin Chuang, Yi Ching Lo, Hao Duan
  • Patent number: 11150269
    Abstract: A probe head includes a probe seat, a first spring probe penetrating through upper, middle and lower dies of the probe seat for transmitting a first test signal, and at least two shorter second spring probes penetrating through the lower die for transmitting a second test signal with higher frequency. Two second spring probes are electrically connected in a way that top ends thereof are abutted against two electrically conductive contacts on a bottom surface of the middle die electrically connected by a connecting circuit therein. The lower die has a communicating space and at least two lower installation holes communicating therewith and each accommodating a second spring probe partially located in the communicating space. The probe head is adapted for concurrent high and medium or low frequency signal tests, meets fine pitch and high frequency testing requirements and prevents probe cards from too complicated circuit design.
    Type: Grant
    Filed: August 11, 2020
    Date of Patent: October 19, 2021
    Assignee: MPI CORPORATION
    Inventors: Hui-Pin Yang, Shang-Jung Hsieh, Yu-Wen Chou, Ching-Fang Yu, Huo-Kang Hsu, Chin-Tien Yang
  • Patent number: 11144198
    Abstract: A control method of a touch display apparatus applicable to a probe station is provided. The probe station includes a movable element. The movable element is a chuck stage, a camera stage, a probe platen, or a positioner. The control method of a touch display apparatus includes displaying a first window and a second window on a touch display apparatus; displaying an operation interface on the first window and displaying a real-time image on the second window; and detecting a touch instruction generated on the operation interface, where the movable element moves according to the touch instruction.
    Type: Grant
    Filed: March 26, 2019
    Date of Patent: October 12, 2021
    Assignee: MPI CORPORATION
    Inventors: Chien-Hung Chen, Guan-Jhih Liou, Lin-Lin Chih, Stojan Kanev
  • Patent number: 11143674
    Abstract: A probe head includes a linear probe which is flattened at least one of tail, body and head portions thereof and thereby defined with first and second width axes, along which each of the tail, body and head portions is defined with first and second widths, and upper and lower die units having upper and lower installation holes respectively, wherein the tail and head portions are inserted respectively, which are offset from each other along the second width axis so that the body portion is curved. The first and second widths of the body portion are respectively larger and smaller than the first and second widths of at least one of the tail and head portions. As a result, the probes of the same probe head are consistent in bending direction and moving behavior and prevented from rotation, drop and escape.
    Type: Grant
    Filed: July 1, 2019
    Date of Patent: October 12, 2021
    Assignee: MPI CORPORATION
    Inventors: Tzu Yang Chen, Chia Ju Wei
  • Publication number: 20210311095
    Abstract: A probe card and a probe module thereof are provided. The probe card includes a first strengthening board, a fixed frame, a probe module, and a slidable frame. The first strengthening board includes a top surface, a bottom surface, and a mounting hole. An inner wall of the mounting hole is formed with an inner flange. The fixed frame is disposed on the top surface of the first strengthening board and surrounds the mounting hole. The probe module is disposed in the mounting hole and includes an outer flange including a physical region and multiple gap regions. The physical region abuts against the inner flange of the first strengthening board. The slidable frame is disposed on an inner wall of the fixed frame and is slidable between a released position and a fixed position. Multiple pressing portions are disposed on an inner wall of the slidable frame.
    Type: Application
    Filed: April 2, 2021
    Publication date: October 7, 2021
    Applicant: MPI Corporation
    Inventors: Chung-Yen Huang, Chih-Wei Wen, Sheng-Feng Xu, Fuh-Chyun Tang, Chih-Hao Ho
  • Publication number: 20210185211
    Abstract: A light emitting element detecting method and a light emitting element detecting equipment adapted for the method are discloses. The method includes the steps of generating a first control signal to open a shutter of an image capturing device which captures an image toward a light outlet of a light emitting element, generating a pulse signal to light up the light emitting element, generating a second control signal to close the shutter of the image capturing device and obtaining a detection image, and determining the light emitting status of the light outlet of the light emitting element according to the detection image. As a result, the present invention can accurately detect whether the light outlet of the light emitting element has the problem of emitting no light or flashing.
    Type: Application
    Filed: December 10, 2020
    Publication date: June 17, 2021
    Applicant: MPI CORPORATION
    Inventors: PING-YING WU, YUNG-CHIN LIU, HSUAN-CHIAO HUANG
  • Publication number: 20210181120
    Abstract: An optical inspection system includes a brightness inspection module for inspecting the brightness of a light emitting element, an integrated inspection module for inspecting the near field optical characteristic and the beam quality factor of the light emitting element, and a far field inspection module for inspecting the far field optical characteristic of the light emitting element. As a result, the optical inspection system is space-saving and capable of reducing the distance and time of the movement of the device under test.
    Type: Application
    Filed: December 10, 2020
    Publication date: June 17, 2021
    Applicant: MPI CORPORATION
    Inventors: PING-YING WU, CHIU-WANG CHEN, YUNG-CHIN LIU
  • Publication number: 20210183047
    Abstract: An image processing method includes the steps of lighting up at least a part of light emitting units of a light emitting device; capturing a plurality of detection images corresponding to a plurality of sections of the light emitting device respectively, wherein each section includes a plurality of lighted-up light emitting units, each detection image includes a plurality of light spots respectively corresponding to the light emitting units of the associated section, and every two adjacent sections have an overlap area including at least one lighted-up light emitting unit; and stitching the detection images of the adjacent sections together by taking the light spots corresponding to at least one lighted-up light emitting unit of the overlap area as alignment reference spots, so that the light emitting statuses of all the light emitting units are presented by a single image.
    Type: Application
    Filed: December 10, 2020
    Publication date: June 17, 2021
    Applicant: MPI CORPORATION
    Inventors: PING-YING WU, YUNG-CHIN LIU
  • Patent number: 11036390
    Abstract: A display method of a display apparatus is provided. The method includes: displaying, on a touch display apparatus, a first window and a second window that overlap with each other, where the first window is smaller than the second window; displaying a first image on the first window, and displaying a second image on the second window, where the second image is an image captured by the camera module in real time; displaying the first image on the second window and displaying the second image on the first window according to the first touch instruction; and displaying the first image on the first window and displaying the second image on the second window according to the second touch instruction.
    Type: Grant
    Filed: March 12, 2019
    Date of Patent: June 15, 2021
    Assignee: MPI CORPORATION
    Inventors: Chien-Hung Chen, Guan-Jhih Liou, Lin-Lin Chih, Stojan Kanev
  • Publication number: 20210156907
    Abstract: An optical test equipment includes a chuck, a light receiving device corresponding in position to an opening of the chuck, a transparent heating plate disposed on the chuck or light receiving device in a way that the bottom surface of the transparent heating plate faces toward the light receiving device for a wafer to be disposed on the top surface of the transparent heating plate, allowing light to pass through the top and bottom surfaces and being powered to generate heat to heat the wafer, and a probing device including a seat and a probe protruding from the seat toward the top surface of the transparent heating plate for probing a light emitting chip of the wafer. The equipment can perform light emitting efficiency test to the light emitting chip on the wafer before dicing and heat the light emitting chip at the same time.
    Type: Application
    Filed: November 17, 2020
    Publication date: May 27, 2021
    Applicant: MPI CORPORATION
    Inventors: WEN PIN CHUANG, YI CHING LO
  • Publication number: 20210156903
    Abstract: A probing apparatus includes a carrier having an opening, a supporter disposed on the carrier in a way that its bottom surface faces toward the carrier, its top surface for disposition of a wafer, and its light permeable portion allowing light to pass through the top and bottom surfaces corresponding in position to the opening, an air heating device having a covering plate and an air supply unit, and a probing device having a probe protruding out of the bottom surface of the air heating device. A thermal air source provides thermal air to a heating space between the bottom surface of the air heating device and the top surface of the supporter through an air supply passage of the air supply unit. The probing apparatus can test light emitting efficiency of a light emitting chip in the wafer and heat the chip at the same time.
    Type: Application
    Filed: September 30, 2020
    Publication date: May 27, 2021
    Applicant: MPI CORPORATION
    Inventors: WEN PIN CHUANG, YI CHING LO, HAO DUAN
  • Publication number: 20210133948
    Abstract: A wafer testing method adapted to test a thin wafer. The thin wafer is combined with a vacuum-release substrate to form a wafer-assembly, and the wafer-assembly is placed in a wafer cassette. The vacuum-release substrate is attached to a front surface of the wafer with an attaching force which is sensitive to air pressure. The method includes the following steps. First, taking out the wafer-assembly from the wafer cassette, then transferring the wafer-assembly to a warpage-detection-device and placing the wafer-assembly on a first stage of the warpage-detection-device. Then, detecting warpage of the wafer. If the warpage of the wafer is less than a warpage threshold, the wafer-assembly is taken out from the first stage, and the wafer-assembly is turned over to place the wafer-assembly on a second stage. Then, applying negative pressure to the vacuum-release substrate to eliminate the attaching force. Then, removing the vacuum-release substrate.
    Type: Application
    Filed: October 23, 2020
    Publication date: May 6, 2021
    Applicant: MPI Corporation
    Inventors: Chien-Yu Chen, Han-Yu Chuang, Po-Han Peng
  • Patent number: 10996239
    Abstract: A method of positioning probe tips relative to pads includes: focusing on each of the probe tips in a first image as viewed by a microscope and collecting the coordinates of the corresponding probe tip relative to a first reference point in the first image; focusing on each of the pads in a second image as viewed by the microscope and collecting the coordinates of the corresponding pad relative to a second reference point in the second image, a relative position of the second reference point to the first reference point being predetermined; matching the pads with the probe tips when the quantity of the probe tips and the pads are equal while minimizing a maximum value of the distances calculated between each of the probe tips and the corresponding pad; and moving the probe tips to touch the pads with the maximum value minimized.
    Type: Grant
    Filed: May 12, 2020
    Date of Patent: May 4, 2021
    Assignee: MPI CORPORATION
    Inventors: Ingo Berg, Chien-Hung Chen, Frank Fehrmann, Sebastian Giessmann
  • Patent number: 10976363
    Abstract: A wafer inspection method was provided. A motorized chuck stage is controlled by a control rod to be displaced between an upper position and a lower position of an adjustment range along a Z-axis direction, to change a relative position of a wafer on the motorized chuck stage relative to a probe. The control rod is movable between an upper limit position and a lower limit position in a displacement range. The wafer inspection method includes: determining a position of the control rod in the displacement range based on a measurement signal; determining a moving direction and a moving distance of the control rod based on a change of the measurement signal; generating a control signal based on the moving distance of the control rod; and controlling, based on the control signal, the motorized chuck stage and a camera stage to be displaced the same distance.
    Type: Grant
    Filed: December 7, 2018
    Date of Patent: April 13, 2021
    Assignee: MPI CORPORATION
    Inventors: Lin-Lin Chih, Chien-Hung Chen, Guan-Jhih Liou, Yu-Hsun Hsu
  • Publication number: 20210102992
    Abstract: An adjustable probe device includes fixed and movable probes, at least one of which is a signal probe having a coaxial structure. The movable probe is linearly slidable with a ground unit thereof abutted against a ground unit of the fixed probe. Another adjustable probe device includes a first movable probe for being grounded, and fixed and second movable probes both having a coaxial structure. Any of the two movable probes is selectable to be a functioning probe in a way that the contact ends of the functioning and fixed probes are located on a same plane for contacting two pads of a DUT at the same time, and the functioning probe is linearly slidable with a ground unit thereof abutted against a ground unit of the fixed probe. As a result, the probe interval is adjustable, lowering the cost of the impedance testing apparatus for circuit boards.
    Type: Application
    Filed: September 28, 2020
    Publication date: April 8, 2021
    Applicant: MPI CORPORATION
    Inventors: YANG-HUNG CHENG, YA-HUNG LO, CHIEN-HSUN CHEN, CHIA-NAN CHOU, CHUNG-YEN HUANG, SHOU-JEN TSAI, FUH-CHYUN TANG
  • Publication number: 20210055344
    Abstract: A wafer inspection method, wherein a motorized chuck stage is controlled by a control rod to be displaced between an upper position and a lower position along Z-axis direction, to change a relative position of a wafer on the motorized chuck stage relative to a probe. The control rod is movable between an upper and an lower limit positions. The wafer inspection method includes: determining a position of the control rod based on a measurement signal; determining a first moving direction and a moving distance of the control rod based on a change of the measurement signal; generating a control signal based on the moving distance of the control rod; controlling the motorized chuck stage to be displaced along a second moving direction opposite to the first moving direction; and controlling an objective lens module to keep focusing on the wafer when the motorized chuck stage is on the move.
    Type: Application
    Filed: November 10, 2020
    Publication date: February 25, 2021
    Applicant: MPI Corporation
    Inventors: Lin-Lin Chih, Chien-Hung Chen, Guan-Jhih Liou, Yu-Hsun Hsu
  • Publication number: 20210048452
    Abstract: A probe head includes a probe seat, a first spring probe penetrating through upper, middle and lower dies of the probe seat for transmitting a first test signal, and at least two shorter second spring probes penetrating through the lower die for transmitting a second test signal with higher frequency. Two second spring probes are electrically connected in a way that top ends thereof are abutted against two electrically conductive contacts on a bottom surface of the middle die electrically connected by a connecting circuit therein. The lower die has a communicating space and at least two lower installation holes communicating therewith and each accommodating a second spring probe partially located in the communicating space. The probe head is adapted for concurrent high and medium or low frequency signal tests, meets fine pitch and high frequency testing requirements and prevents probe cards from too complicated circuit design.
    Type: Application
    Filed: August 11, 2020
    Publication date: February 18, 2021
    Applicant: MPI CORPORATION
    Inventors: Hui-Pin YANG, Shang-Jung HSIEH, Yu-Wen CHOU, Ching-Fang YU, Huo-Kang HSU, Chin-Tien YANG
  • Publication number: 20210048451
    Abstract: A probe head includes a probe seat having upper, middle and lower dies, an electrically conductive layer inside the probe seat, a first spring probe penetrating through the probe seat, and at least two shorter second spring probes penetrating through the lower die in a way that top ends of the second spring probes are located inside the probe seat and abutted against the electrically conductive layer. Another probe head includes the aforesaid probe seat, an electrically conductive layer partially inside the probe seat and partially outside the probe seat, a first spring probe penetrating through the probe seat, and a shorter second spring probe penetrating through the lower die in a way that a top end of the second spring probe is located inside the probe seat and abutted against the electrically conductive layer. As such, fine pitch requirement and different high frequency testing requirements are fulfilled.
    Type: Application
    Filed: August 11, 2020
    Publication date: February 18, 2021
    Applicant: MPI CORPORATION
    Inventors: Chin-Tien YANG, Hui-Pin YANG, Shang-Jung HSIEH, Tsung-Yi CHEN, Yu-Hao CHEN, Jhin-Ying LYU
  • Patent number: D922396
    Type: Grant
    Filed: June 6, 2018
    Date of Patent: June 15, 2021
    Assignee: MPI CORPORATION
    Inventors: Lin-Lin Chih, Guan-Jhih Liou, Chien-Hung Chen, Yung-Chin Liu