Abstract: Detection of periodically repeating nanovoids is indicative of levels of substrate contamination and may aid in reduction of contaminants on substrates. Systems and methods for detecting nanovoids, in addition to, systems and methods for cleaning and/or maintaining cleanliness of substrates are described.

Abstract: A polymerizable composition includes an organic modified silicate selected from the group consisting of silsesquioxanes having the composition RSiO1.5, partially condensed alkoxysilanes, organically modified silicates having the composition RSiO3 and R2SiO2, and partially condensed orthosilicates having the composition SiOR4, where R is an organic substituent; a decomposable organic compound; a photoinitiator; and a release agent. The composition polymerizes upon exposure to UV radiation to form an inorganic silica network, and the decomposable organic compound decomposes upon exposure to heat to form pores in the inorganic silica network. The composition may be used to form a patterned dielectric layer in an integrated circuit device. A metallic film may be disposed on the patterned dielectric layer and then planarized.

Abstract: Systems, methods, and processes for forming imprint lithography templates from a multi-layer substrate are described. The multi-layer substrate may include a block copolymer layer positioned on a substrate layer. The block copolymer layer may include two or more domains. At least one domain may have a different composition sensitivity than another domain such that the domains have different reactions to a specific process. Reaction of the domains to the specific process may provide a pattern in the block copolymer layer. The pattern may be transferred into the substrate layer to form the imprint lithography template.

Abstract: A displacement detection mechanism for a vibrationally driven cantilever includes a vibration frequency detector comprised of an LC resonator that detects a change of capacitance between the cantilever and a sample surface due to a change of vibration of the cantilever, and an F-V converter or an FM demodulator that detects a voltage based on the vibration frequency, whereby displacement of the cantilever can be detected. The displacement detection mechanism can be used in a scanning probe microscope to perform shape measurement and physical property measurement without the presence of light.

Abstract: Edge field patterning of a substrate having full fields and partial fields may include patterning using a template having multiple mesas with each mesa corresponding to a field on the substrate. Polymerizable material may be deposited solely between the template and the full fields of the substrate. A non-reactive material may be deposited between the template and partial fields of the substrate.

Abstract: This disclosure provides an electrical switch based on tunneling electric contacts. Electrodes of the switch are formed to have reciprocal apparent contact surfaces, each smooth such that a compressed (in contact) composite mean asperity height between these surfaces is significantly smaller than an electron tunneling length of the switch. A movement mechanism is used to physically move one or both electrodes to vary the gap between electrodes to be greater than/less than the electron tunneling length. In select embodiments, the movement mechanism is electrically actuated and is amenable to relatively high frequency operation. The nano smooth surfaces provide for a tunneling switch where current flow is not primarily dependent on contact force between electrodes, and leads to a highly conductive ON state exceeding high performance, high-contact force mechanical switches, while also being amenable to high frequency operation.

Abstract: The present invention is directed towards a choice of the shape of the patterned fields for Level 0 (patterned by imprint or photolithography or e-beam, etc.) and Level 1 (patterned by imprint) such that these shapes when tessellated together eliminate the open areas causes by the moats.

Abstract: An imprint lithography imprinting stack includes a substrate and a polymeric adhesion layer adhered to the substrate. The polymeric adhesion layer includes polymeric components with an extended backbone length of at least about 2 nm. The backbones of the polymeric components may be substantially aligned in a planar configuration on the surface of the substrate, such that a thickness of the polymeric adhesion layer is less than about 2 nm.

Abstract: A battery electrode composition is provided comprising anode and cathode electrodes and an electrolyte ionically coupling the anode and the cathode. At least one of the electrodes may comprise a plurality of active material particles provided to store and release ions during battery operation. The electrolyte may comprise an aqueous metal-ion electrolyte ionically interconnecting the active material particles. Further, the plurality of active material particles may comprise a conformal, metal-ion permeable coating at the interface between the active material particles and the aqueous metal-ion electrolyte. The conformal, metal-ion permeable coating impedes water decomposition at the aforesaid at least one of the electrodes.

Abstract: A focused ion beam apparatus includes a gas field ion gun unit having an emitter, an ion source gas supply unit for supplying different ion source gases to the emitter, a heater for heating the emitter, and an extraction electrode. A storage section stores, for each gas of a plurality of different types, set values of emitter temperature, gas pressure, extraction voltage to be applied to an extraction electrode, image contrast and image brightness. An input section selects and inputs one of the gas types. A control section reads, from the storage section, the set values of emitter temperature, gas pressure, extraction voltage, image contrast and image brightness, which correspond to the input gas type, and sets a heater, a gas control section, a voltage control section, and an adjustment section for the contrast and brightness of the image.

Abstract: The disclosure provides methods and materials for preparing bridging films. In one aspect, the bridging films are non-porous and are suitable for protecting adjacent porous films. For example, the bridging films contact a porous film and protect the porous film from transfer of gases and/or liquids into the pores of the porous film. In another example, bridging films protect the porous film from abrasion.

Abstract: The disclosure provides methods and materials for preparing a titania nanoparticle product. For example, titania nanoparticle products having desirable optical properties such as a desirable refractive index are prepared according to the methods provided herein.

Abstract: Traditional solar control applications rely on thin metal films to reflect EM radiation with wavelengths longer than that of the visible spectrum. Unfortunately such films also block radiation in cellular, GPS, and radio frequency bands. In one aspect, the disclosure provides a selectively-blocking filter that uses one or more optical filters tuned to a specific range(s) of wavelengths (e.g. for blocking IR radiation), while readily transmitting other wavelengths (e.g. both visible light and cellular/GPS signals). The filters can be manufactured on both flexible and rigid substrates.

Abstract: A metal or metal-ion battery composition is provided that comprises anode and cathode electrodes along with an electrolyte ionically coupling the anode and the cathode. At least one of the electrodes includes active material particles provided to store and release ions during battery operation. Each of the active material particles includes internal pores configured to accommodate volume changes in the active material during the storing and releasing of the ions. The electrolyte comprises a solid electrolyte ionically interconnecting the active material particles.

Abstract: A microporous carbon matrix material composition for use in supercapacitor electrodes may be produced by depositing carbon on a sacrificial zeolite template via one of several methods (e.g., hydrothermal or solvo-thermal deposition, sub-atmospheric vapor phase deposition, or high-pressure infiltration of hydrocarbon vapors). The deposition produces a carbon-coated zeolite intermediary. A surface layer of carbon formed on the carbon-coated zeolite intermediary may then be refined and the refined carbon-coated zeolite intermediary may be etched to produce a microporous carbon matrix having a substantially uniform structure and substantially aligned pores. In some embodiments, the carbon-coated zeolite intermediary may be annealed after deposition.

Abstract: Provided are an X-ray analyzer and a mapping method for an X-ray analysis which, in a inspection for a harmful substance contained in, for example, a material or a composite electronic component, enable determination as to whether a sample is normal or abnormal to be performed visually based on an image obtained by the X-ray mapping analysis. In the X-ray analyzer, an X-ray mapping image of a sample which is confirmed to be normal in advance is obtained as a reference mapping image. A mapping analysis is performed on a inspection sample. A difference from the reference mapping image is obtained for each pixel, to thereby display a difference mapping image. A region in which the amount of specific element is larger than a reference amount is displayed with high brightness, and hence an abnormal portion may be easily found.

Abstract: A cross section processing method to be performed on a sample by irradiating the sample having a layer or a structure of an organic substance on a surface at a cross section processing position thereof with a focused ion beam using a focused ion beam apparatus includes: a protective film forming step for forming a protective film on the surface of the layer or the structure of the organic substance by irradiating the surface of the sample including the cross section processing position with the focused ion beam under the existence of source gas as the protective film; and a cross section processing step for performing cross section processing by irradiating the cross section processing position formed with the protective film with the focused ion beam at a voltage higher than an accelerating voltage in the protective film forming step.

Abstract: Durable coatings and methods for producing the same are provided, where the coatings may include porous coatings encapsulated with a hardening solution that permeates into the porous structure of the film prior to curing. Curing of the hardening solution within the film provides for a durable coating having sufficient durability for use in many different applications, such as optical applications. Any convenient porous coatings may be used in the subject methods. Also provided are methods for forming a coating formulation, where the formulation includes porous coating particles dispersed in a carrier and the porous coating particles may be optionally encapsulated with a hardening solution prior to dispersion.

Abstract: The disclosure provides materials, apparatuses, and methods for making multilayer coatings with a high degree of efficiency and control. In some aspects, for example, coatings are described having multiple layers of nanoparticles and a polyelectrolyte, wherein the nanoparticles form tightly packed monolayers. The interface between monolayers may include polyelectrolyte material. One or more aspects of such monolayers and interfaces are controllable.

Abstract: An electron microscope has a focused ion beam column positioned relative to an electron beam column so that the focused ion beam substantially perpendicularly intersects the electron beam. A backscattered electron detector is positioned relative to the focused ion beam column so that the direction normal to a detection plane of the backscattered electron detector is substantially perpendicular to the direction of the focused ion beam. The backscattered electron detector is configured and positioned to detect backscattered electrons released in a spread of at least about 70 degrees in width from the surface of the section by irradiation of the section with the electron beam 1a.