Patents Assigned to Nova Ltd.
  • Publication number: 20240302284
    Abstract: A method and system are presented for use in measuring one or more characteristics of patterned structures. The method comprises: performing measurements on a patterned structure by illuminating the structure with exciting light to cause Raman scattering of one or more excited regions of the pattern structure, while applying a controlled change of at least temperature condition of the patterned structure, and detecting the Raman scattering, and generating corresponding measured data indicative of a temperature dependence of the detected Raman scattering; and analyzing the measured data and generating data indicative of spatial profile of one or more properties of the patterned structure.
    Type: Application
    Filed: February 7, 2024
    Publication date: September 12, 2024
    Applicant: NOVA LTD.
    Inventor: Yonatan OREN
  • Publication number: 20240295436
    Abstract: A polarized Raman Spectrometric system for defining parameters of a polycrystalline material, the system comprises a polarized Raman Spectrometric apparatus, a computer-controlled sample stage for positioning a sample at different locations, and a computer comprising a processor and an associated memory. The polarized Raman Spectrometric apparatus generates signal(s) from either small sized spots at multiple locations on a sample or from an elongated line-shaped points on the sample, and the processor analyzes the signal(s) to define the parameters of said polycrystalline material.
    Type: Application
    Filed: March 9, 2024
    Publication date: September 5, 2024
    Applicant: NOVA LTD.
    Inventors: Gilad BARAK, Yonatan OREN
  • Patent number: 12066385
    Abstract: A method for use in measuring one or more characteristics of patterned structures, the method including providing measured data comprising data indicative of at least one Raman spectrum obtained from a patterned structure under measurements using at least one selected optical measurement scheme each with a predetermined configuration of at least one of illuminating and collected light conditions corresponding to the one or more characteristics to be measured, processing the measured data, and determining, for each of the at least one Raman spectrum, a distribution of Raman-contribution efficiency (RCE) within at least a part of the structure under measurements, being dependent on characteristics of the structure and the predetermined configuration of the at least one of illuminating and collected light conditions in the respective optical measurement scheme, and analyzing the distribution of Raman-contribution efficiency and determining the one or more characteristics of the structure.
    Type: Grant
    Filed: March 15, 2022
    Date of Patent: August 20, 2024
    Assignee: NOVA LTD
    Inventors: Gilad Barak, Yanir Hainick, Yonatan Oren, Vladimir Machavariani
  • Publication number: 20240271926
    Abstract: A method for semiconductor device metrology. The method may include creating a time-domain representation of wavelength-domain measurement data of light reflected by a three dimensional (3D) patterned structure of a semiconductor device; selecting one or more relevant peaks of the time-domain representation and at least one irrelevant portion of the time-domain representation. One or more relevant peaks occur during one or more relevant time periods; and are associated with corresponding relevant reference peaks that are associated with different versions of a reference 3D patterned structure.
    Type: Application
    Filed: June 3, 2022
    Publication date: August 15, 2024
    Applicant: NOVA LTD.
    Inventors: Dror SHAFIR, Zvi Gorohovsky, Jacob Ofek, Daphna Peimer, Tal Heilpern, Dana Szafranek, Gilad BARAK, Smadar Ferber
  • Publication number: 20240264538
    Abstract: A measurement system for use in optical metrology, the measurement system which includes a control system configured and operable to carry out the following: (i) receive raw measured data generated by a measurement unit that is configured and operable for performing normal-incidence spectral interferometric measurements on a sample and generating the raw measured data indicative of spectral interferometric signals measured on the sample for a number of different optical path differences (OPDs) between sample and reference arms using infrared wavelengths; (ii) extract, from the raw measured data, a portion of spectral interferometric signals describing variation of signal intensity with a change of an optical path difference OPD during interferometric measurements, said portion of the spectral interferometric signals being independent of interferometric signals returned from a bottom portion of the sample in response to said illuminating electromagnetic field; and (iii) directly determine, from the extracted p
    Type: Application
    Filed: January 3, 2024
    Publication date: August 8, 2024
    Applicant: NOVA LTD.
    Inventors: Gilad BARAK, Amir Shayari
  • Patent number: 12057355
    Abstract: Controlling semiconductor device manufacture by acquiring training scatterometric signatures collected at training locations on training semiconductor wafers and corresponding to locations within a predefined design of a training semiconductor device, the training signatures collected after predefined processing steps during manufacture of the device on the training wafers, acquiring manufacturing outcome data associated with the training locations, training a prediction model using the training signatures and the manufacturing outcome data, and applying the prediction model to a candidate scatterometric signature to predict a manufacturing outcome, the candidate signature collected at a candidate location on a candidate semiconductor wafer, the candidate location corresponding to a location within the same predefined design of a candidate semiconductor device, the candidate signature collected after any of the processing steps during manufacture of the candidate device on the candidate wafer.
    Type: Grant
    Filed: April 28, 2020
    Date of Patent: August 6, 2024
    Assignee: NOVA LTD
    Inventors: Michael Shifrin, Avron Ger
  • Patent number: 12038271
    Abstract: A system and methods for OCD metrology are provided including receiving training data for training an OCD machine learning (ML) model, including multiple pairs of corresponding sets of scatterometric data and reference parameters. For each of the pairs, one or more corresponding outlier metrics are by calculated and corresponding outlier thresholds are applied whether a given pair is an outlier pair. The OCD MIL model is then trained with the training data less the outlier pairs.
    Type: Grant
    Filed: January 7, 2021
    Date of Patent: July 16, 2024
    Assignee: NOVA LTD
    Inventors: Eitan A. Rothstein, Yongha Kim, Ilya Rubinovich, Ariel Broitman, Olga Krasnykov, Barak Bringoltz
  • Publication number: 20240210322
    Abstract: A method, a system, and a non-transitory computer readable medium for Raman spectroscopy.
    Type: Application
    Filed: January 2, 2024
    Publication date: June 27, 2024
    Applicant: NOVA LTD.
    Inventors: Eyal Hollander, Gilad BARAK, Elad Schleifer, Yonatan OREN, Amir Shayari
  • Patent number: 11994374
    Abstract: A measurement system is presented configured for integration with a processing equipment for applying optical measurements to a structure.
    Type: Grant
    Filed: November 17, 2019
    Date of Patent: May 28, 2024
    Assignee: NOVA LTD.
    Inventors: Elad Dotan, Moshe Vanhotsker, Shimon Yalov, Valery Deich, Roi Ringel, Beni Shulman, Yosi Bar On, Shahar Bassan
  • Patent number: 11946875
    Abstract: A method for use in optical measurements on patterned structures, the method including performing a number of optical measurements on a structure with a measurement spot configured to provide detection of light reflected from an illuminating spot at least partially covering at least two different regions of the structure, the measurements including detecting light reflected from the at least part of the at least two different regions within the measurement spot, the detected light including interference of at least two complex electric fields reflected from the at least part of the at least two different regions, and being therefore indicative of a phase response of the structure, carrying information about properties of the structure.
    Type: Grant
    Filed: September 27, 2022
    Date of Patent: April 2, 2024
    Assignee: NOVA LTD.
    Inventors: Gilad Barak, Dror Shafir, Yanir Hainick, Shahar Gov
  • Publication number: 20240085805
    Abstract: A semiconductor device metrology including creating a time-domain representation of wavelength-domain measurement data of light reflected by a patterned structure of a semiconductor device, selecting a relevant and irrelevant portion of the time-domain representation, and determining one or more measurements of one or more parameters of interest of the patterned structure by performing model-based processing using the relevant portion of the time-domain representation.
    Type: Application
    Filed: January 28, 2022
    Publication date: March 14, 2024
    Applicant: NOVA LTD.
    Inventors: Gilad BARAK, Amir Sagiv, Yishai Schreiber, Jacob Ofek, Zvi Gorohovsky, Daphna Peimer
  • Publication number: 20240085333
    Abstract: A method, a system, and a non-transitory computer readable medium for accurate Raman spectroscopy. The method may include executing at least one iteration of the steps of: (i) performing, by an optical measurement system, a calibration process that comprises (a) finding a misalignment between a region of interest defined by a spatial filter, and an impinging beam of radiation that is emitted from an illuminated area of a sample, the impinging beam impinges on the spatial filter; and (b) determining a compensating path of propagation of the impinging beam that compensates the misalignment; and (ii) performing a measurement process, while the optical measurement system is configured to provide the compensating path of propagation of the impinging beam, to provide one or more Raman spectra.
    Type: Application
    Filed: August 18, 2023
    Publication date: March 14, 2024
    Applicant: NOVA LTD.
    Inventors: Elad Schleifer, Yonatan Oren, Amir Shayari, Eyal Hollander, Valery Deich, Shimon YALOV, Gilad BARAK
  • Patent number: 11927481
    Abstract: A polarized Raman Spectrometric system for defining parameters of a polycrystalline material, said system comprising: a polarized Raman Spectrometric apparatus, a computer-controlled sample stage for positioning a sample at different locations, and a computer comprising a processor and an associated memory.
    Type: Grant
    Filed: December 28, 2022
    Date of Patent: March 12, 2024
    Assignee: NOVA LTD.
    Inventors: Gilad Barak, Yonatan Oren
  • Patent number: 11929291
    Abstract: Controlling an etch process applied to a multi-layered structure, by calculating a spectral derivative of reflectance of an illuminated region of interest of a multi-layered structure during an etch process applied to the multi-layered structure, identifying in the spectral derivative a discontinuity that indicates that an edge of a void formed by the etch process at the region of interest has crossed a layer boundary of the multi-layered structure, determining that the crossed layer boundary corresponds to a preselected layer boundary of the multi-layered structure, and applying a predefined control action to the etch process responsive to determining that the crossed layer boundary corresponds to the preselected layer boundary of the multi-layered structure.
    Type: Grant
    Filed: August 23, 2021
    Date of Patent: March 12, 2024
    Assignee: NOVA LTD.
    Inventors: Gil Loewenthal, Shay Yogev, Yoav Etzioni
  • Publication number: 20240068964
    Abstract: A method, a system, and a non-transitory computer readable medium for evaluating x-ray signals. The method may include calculating an estimated field for each of multiple non-perturbed objects, the multiple non-perturbed objects represent perturbances of the perturbed object; the perturbances are of an order of a wavelength of the non-diffused x-ray signals; and evaluating the non-diffused x-ray signals based on the field of the multiple non-perturbed objects.
    Type: Application
    Filed: December 30, 2021
    Publication date: February 29, 2024
    Applicant: NOVA LTD.
    Inventors: Shahar Gov, Daniel Kandel, Heath POIS, Parker Lund, Michal Haim YACHINI, Vladimir Machavariani
  • Patent number: 11906434
    Abstract: A method and system are presented for use in measuring one or more characteristics of patterned structures. The method comprises: performing measurements on a patterned structure by illuminating the structure with exciting light to cause Raman scattering of one or more excited regions of the pattern structure, while applying a controlled change of at least temperature condition of the patterned structure, and detecting the Raman scattering, and generating corresponding measured data indicative of a temperature dependence of the detected Raman scattering; and analyzing the measured data and generating data indicative of spatial profile of one or more properties of the patterned structure.
    Type: Grant
    Filed: April 5, 2022
    Date of Patent: February 20, 2024
    Assignee: NOVA LTD.
    Inventor: Yonatan Oren
  • Patent number: 11906451
    Abstract: A monitoring system and method are provided for determining at least one property of an integrated circuit (IC) comprising a multi-layer structure formed by at least a layer on top of an underlayer. The monitoring system receives measured data comprising data indicative of optical measurements performed on the IC, data indicative of x-ray photoelectron spectroscopy (XPS) measurements performed on the IC and data indicative of x-ray fluorescence spectroscopy (XRF) measurements performed on the IC. An optical data analyzer module analyzes the data indicative of the optical measurements and generates geometrical data indicative of one or more geometrical parameters of the multi-layer structure formed by at least the layer on top of the underlayer.
    Type: Grant
    Filed: September 20, 2021
    Date of Patent: February 20, 2024
    Assignees: Nova Ltd., GLOBALFOUNDRIES U.S. INC.
    Inventors: Wei Ti Lee, Heath A. Pois, Mark Klare, Cornel Bozdog, Alok Vaid
  • Patent number: 11900028
    Abstract: Scatterometry analysis for a patterned structure, in which a patterned structure model is provided having a selected number of virtual segment data pieces indicative of a respective number of segments of the patterned structure along Z-axis through the structure, the segment data pieces processed for determining a matrix comprising Z-axis derivatives of electromagnetic elds' response of the segment to incident eld based on Maxwell's equations' solution, transforming this matrix into an approximated response matrix corresponding to the electromagnetic eld interaction between two different points spaced along the Z-axis, the transformation preferably carried out by a GPU, and comprises embedding the matrix in a series expansion of the matrix exponential term, the approximated response matrices for all the segment data pieces are multiplied for determining a general propagation matrix utilized to determine a scattering matrix for the patterned structure.
    Type: Grant
    Filed: April 6, 2021
    Date of Patent: February 13, 2024
    Assignee: NOVA LTD
    Inventors: Ruslan Berdichevsky, Eyal Grubner, Shai Segev
  • Publication number: 20240044819
    Abstract: A method and system are presented for use in X-ray based measurements on patterned structures. The method comprises: processing data indicative of measured signals corresponding to detected radiation response of a patterned structure to incident X-ray radiation, and subtracting from said data an effective measured signals substantially free of background noise, said effective measured signals being formed of radiation components of reflected diffraction orders such that model based interpretation of the effective measured signals enables determination of one or more parameters of the patterned structure, wherein said processing comprises: analyzing the measured signals and extracting therefrom a background signal corresponding to the background noise; and applying a filtering procedure to the measured signals to subtract therefrom signal corresponding to the background signal, resulting in the effective measured signal.
    Type: Application
    Filed: July 3, 2023
    Publication date: February 8, 2024
    Applicant: NOVA LTD.
    Inventor: Gilad BARAK
  • Patent number: 11885737
    Abstract: A method and system are presented for use in measuring on patterned samples, aimed at determining asymmetry in the pattern. A set of at least first and second measurements on a patterned region of a sample is performed, where each of the measurements comprises: directing illuminating light onto the patterned region along an illumination channel and collecting light reflected from the illuminated region propagating along a collection channel to be detected, such that detected light from the same patterned region has different polarization states which are different from polarization of the illuminating light, and generating a measured data piece indicative of the light detected in the measurement. Thus, at least first and second measured data pieces are generated for the at least first and second measurements on the same patterned region. The at least first and second measured data pieces are analyzed and output data is generated being indicative of a condition of asymmetry in the patterned region.
    Type: Grant
    Filed: December 28, 2020
    Date of Patent: January 30, 2024
    Assignee: Nova Ltd.
    Inventors: Dror Shafir, Gilad Barak, Shay Wolfling, Michal Haim Yachini, Matthew Sendelbach, Cornel Bozdog