Abstract: Embodiments of MEMS devices comprise a conductive movable layer spaced apart from a conductive fixed layer by a gap, and supported by rigid support structures, or rivets, overlying depressions in the conductive movable layer, or by posts underlying depressions in the conductive movable layer. In certain embodiments, both rivets and posts may be used. In certain embodiments, these support structures are formed from rigid inorganic materials, such as metals or oxides. In certain embodiments, etch barriers may also be deposited to facilitate the use of materials in the formation of support structures which are not selectively etchable with respect to other components within the MEMS device.
Type:
Grant
Filed:
May 2, 2011
Date of Patent:
January 1, 2013
Assignee:
QUALCOMM MEMS Technologies, Inc.
Inventors:
Jeffrey B. Sampsell, Clarence Chui, Manish Kothari, Mark W. Miles, Teruo Sasagawa, Wonsuk Chung, Ming-Hau Tung
Abstract: This disclosure provides systems, methods and apparatus for a MEMS device. In one aspect, an electromechanical systems apparatus includes a substrate, a stationary electrode positioned over the substrate, a movable electrode spaced from the stationary electrode by a gap, and at least one support structure extending above the movable electrode. The support structure includes an inorganic dielectric layer and a polymer layer.
Abstract: This disclosure provides systems, methods and apparatus for touch systems. In one aspect, the touch system can include at least one light guide optically coupled to at least one light source and at least one optical detector. The light guide can be configured to transmit light from at least one light source across the surface in at least one direction and to receive at least a portion of the transmitted light reflected in an opposite direction in response to at least one reflecting object on the surface. The touch system also can include a touchscreen transceiver. The touch system can be configured to determine a location of at least one reflecting object on the surface by identifying a position of where the light guide or the touchscreen transceiver receives the reflected light and by determining time-of-flight of the transmitted light and the reflected light.
Abstract: This disclosure provides systems, methods and apparatus for an imaging system that includes a light guide having light-turning features that are configured to receive ambient light incident on the light guide, including light scattered from a scene to be imaged, and to direct the received ambient light towards an image sensor. The light-turning features may have angle-discriminating properties so that some light-turning features capture light incident upon the light guide at certain angles of incidence, but not others. Light scattered from multiple parts of a scene to be imaged may then be directed to correlated locations on an image sensor, which provides electronic data representing an image.
Type:
Application
Filed:
June 21, 2011
Publication date:
December 27, 2012
Applicant:
QUALCOMM MEMS Technologies, Inc.
Inventors:
Russell Wayne Gruhlke, Ye Yin, Zheng-wu Li
Abstract: A voltage-controlled capacitor and methods for forming the same are described. A mechanical conductor membrane of the voltage-controlled capacitor is movable to and from a first position and a second position. An amount of capacitance can vary with the movement of the mechanical conductor membrane. A microelectromechanical systems (MEMS) voltage-controlled capacitor can be used in a variety of applications, such as, but not limited to, RF switches and RF attenuators.
Abstract: An interferometric display comprises a backlight with light extraction features formed from a desiccant material within the display. A light source is positioned at one or more edges or corners of the back glass, and the desiccant based features patterned in or on the back glass remove unwanted moisture and create uniform light extraction from the back glass.
Abstract: A method and system for reducing power consumption in a display includes driving a display comprising a plurality of display elements having selectable resolution, wherein the display device is configured to operate at a plurality of selectable operational modes. In a first operational mode, data at a first resolution is provided to the display at a first data rate, and in a second operational mode, data at a second resolution is provided to the display at a second data rate.
Abstract: A method and apparatus for displaying image data on a display device is disclosed. In some embodiments, the method includes updating at least a portion of the display device based on image update data identifying pixels that changed from the preceding image to the following image.
Abstract: A system and method for processing video data are disclosed. In one aspect, a method includes generating halftone data for a first video frame and generating halftone data for a second video frame. The method further includes, to reduce at least one visual artifact, selectively copying the halftone data for the first video frame into the halftone data for the second video frame, the selectively copying being based upon a comparison between an adaptive threshold and the change resulting due to the copying of the data, in the human visual system model-based perceptual error of the halftone data for the second video frame.
Abstract: Methods and devices are provided for selectively allowing light to pass through a substantially transparent substrate or blocking the light, at least to some degree. Some embodiments provide a plurality of reflective vanes that can be positioned in at least two positions. According to some such implementations, when the vanes are in an open position, incident light is allowed to pass through the window. The light may reflect from two or more vanes before passing through the window. When a sufficient voltage is applied between vane electrodes and other electrodes, the vanes are pulled down, reflecting back at least some of the incident light. The voltage may be controlled according to detected temperature, ambient light intensity, etc.
Type:
Grant
Filed:
June 15, 2009
Date of Patent:
December 4, 2012
Assignee:
Qualcomm MEMS Technologies, Inc.
Inventors:
Srinivasan Sethuraman, Clayton Ka Tsun Chan
Abstract: The efficiency of an etching process may be increased in various ways, and the cost of an etching process may be decreased. Unused etchant may be isolated and recirculated during the etching process. Etching byproducts may be collected and removed from the etching system during the etching process. Components of the etchant may be isolated and used to general additional etchant. Either or both of the etchant or the layers being etched may also be optimized for a particular etching process.
Type:
Grant
Filed:
September 12, 2008
Date of Patent:
December 4, 2012
Assignee:
QUALCOMM MEMS Technologies, Inc.
Inventors:
Ion Bita, Evgeni Gousev, Ana Londergan, Xiaoming Yan
Abstract: A system and method for an optical component that masks non-active portions of a display and provides an electrical path for one or more display circuits. In one embodiment an optical device includes a substrate, a plurality of optical elements on the substrate, each optical element having an optical characteristic which changes in response to a voltage applied to the optical element, and a light-absorbing, electrically-conductive optical mask disposed on the substrate and offset from the plurality of optical elements, the optical mask electrically coupled to one or more of the optical elements to provide electrical paths for applying voltages to the optical elements. In another embodiment, a method of providing an electrical signal to optical elements of a display comprises electrically coupling an electrically-conductive light-absorbing mask to one or more optical elements, and applying a voltage to the mask to activate the one or more optical elements.
Abstract: Rendering an image pixel in a composite display is disclosed. In some embodiments, an image pixel is mapped to a plurality of temporal pixels, and the image pixel is rendered in a composite display using at least a subset of the plurality of temporal pixels to which it is mapped, with the intensity of the image pixel spread across the subset of temporal pixels.
Abstract: Microelectronic devices may be fabricated while being protected from damage by electrostatic discharge. In one embodiment, a shorting circuit is connected to elements of the microelectronic device, where the microelectronic device is part of a chip-on-glass system. In one aspect of this embodiment, a portion of the shorting circuit is in an area of a substrate where a microchip is bonded. In another embodiment, shorting links of the shorting circuit are comprised of a fusible material, where the fusible material may be disabled by an electrical current capable of fusing the shorting links.
Abstract: This disclosure provides systems, methods and apparatus for illumination devices. In one aspect, an illumination device having a longitudinal axis includes a light source and a light guide. The light guide has a peripheral edge, a transmissive illumination surface, a center portion, and an upper surface. The transmissive illumination surface is oriented perpendicular to the longitudinal axis and disposed between the center portion and the peripheral edge. The upper surface is oriented relative to the illumination surface to define an angle ? therebetween. In some implementations, the angle ? can be greater than 15 degrees, for example.
Abstract: This disclosure provides implementations of electromechanical systems resonator structures, devices, apparatus, systems, and related processes. In one aspect, resonator apparatus includes a first conductive layer including a first electrode and a second electrode. The first electrode is coupled to receive a first input signal, and the second electrode is coupled to provide a first output signal. A piezoelectric layer includes a piezoelectric material. The piezoelectric layer has a first side and a second side opposite the first side. The first side is proximate the first conductive layer, and the second side is electrically isolated from ground. In some examples, the second side of the piezoelectric layer can be exposed and/or electrically de-coupled from one or more components.
Type:
Application
Filed:
May 19, 2011
Publication date:
November 22, 2012
Applicant:
QUALCOMM MEMS TECHNOLOGIES, INC.
Inventors:
Changhan Yun, Sang-June Park, Chi Shun Lo, Jonghae Kim, Je-Hsiung Lan, Sanghoon Joo
Abstract: Embodiments of MEMS devices include a movable layer supported by overlying support structures, and may also include underlying support structures. In one embodiment, the residual stresses within the overlying support structures and the movable layer are substantially equal. In another embodiment, the residual stresses within the overlying support structures and the underlying support structures are substantially equal. In certain embodiments, substantially equal residual stresses are be obtained through the use of layers made from the same materials having the same thicknesses. In further embodiments, substantially equal residual stresses are obtained through the use of support structures and/or movable layers which are mirror images of one another.
Abstract: Electromechanical systems resonator structures, devices, circuits, and systems are disclosed. In one aspect, an oscillator includes an active component and a passive component connected in a feedback configuration. The passive component includes one or more contour mode resonators (CMR). A CMR includes a piezoelectric layer disposed between a first conductive layer and a second conductive layer. The conductive layers include an input electrode and an output electrode. The passive component is configured to output a first resonant frequency and a second resonant frequency, which is an odd integer harmonic of the first resonant frequency. The active component is configured to output a signal including the first resonant frequency and the second resonant frequency. This output signal can be a substantially square wave signal, which can serve as a clock in various applications.
Type:
Application
Filed:
May 13, 2011
Publication date:
November 15, 2012
Applicant:
QUALCOMM MEMS TECHNOLOGIES, INC.
Inventors:
Jonghae Kim, Je-Hsiung Lan, Changhan Yun, Chi Shun Lo, Matthew Nowak
Abstract: Charge balanced display data writing methods use write and hold cycles of opposite polarity during selected frame update periods. A release cycle may be provided to reduce the chance that a given display element will become stuck in an actuated state.
Abstract: An apparatus and method for driving a display a display. Two switches for each common line are used to couple the common line to a respective first and second hold voltage supply lines. A third switch for each common line is used to couple the common line to a drive line. A waveform generator is used to generate the driving waveform on the drive line.