Abstract: An iterferometric modulator array is integrated with collapsible cavity MEMS electrical switches. The electrical switches may have similar physical geometry as the display elements. The switches may form row or column select functions for the display.

Abstract: A two-terminal, variable capacitance device is described that is constructed by connecting multiple MEMS devices having different actuation or “pull in” voltages in parallel.

Abstract: A microelectromechanical systems device having support structures formed of sacrificial material surrounded by a protective material. The microelectromechanical systems device includes a substrate having an electrode formed thereon. Another electrode is separated from the first electrode by a cavity and forms a movable layer, which is supported by support structures formed of a sacrificial material.

Abstract: A MEMS-based display device is described, wherein an array of interferometric modulators are configured to reflect light through a transparent substrate. The transparent substrate is sealed to a backplate and the backplate may contain electronic circuitry fabricated on the backplane. The electronic circuitry is placed in electrical communication with the array of interferometric modulators and is configured to control the state of the array of interferometric modulators.

Abstract: This disclosure provides systems, methods and apparatus, including computer programs encoded on computer storage media, for measuring a distance. In one aspect, the method includes actuating or releasing an interferometric modulator having a first surface and a second surface and measuring a distance between the first and second surfaces at a plurality of times during the actuation or release. In another aspect, the method includes illuminating, with a first laser beam having a first wavelength and with a second laser beam having a second wavelength different from the first wavelength, an interferometric modulator having a distance between a first surface which is at least partially reflective and a second surface which is at least partially absorptive, measuring a first intensity of the first laser beam modulated by the interferometric modulator and a second intensity of the second laser beam modulated by the interferometric modulator, and determining the distance based on the measured intensities.

Abstract: This disclosure provides systems, methods and apparatus for providing illumination by using a light guide to distribute light. In one aspect, the light guide has a light input edge into which light is injected and transverse edges transverse to the light input edge. The transverse edges are smooth and act as specular reflectors. The light input edge is rough and provides a diffusive interface. The light emitters are adjacent and centered along the light input edge, with the pitch of the light emitters being about ?L, where ?L is the distance between the transverse edges divided by the number of light emitters. The light guide can be provided with light turning features that redirect light out of the light guide. In some implementations, the redirected light can be applied to illuminate a display.

Abstract: An interferometric modulating device is provided with a thermal expansion balancing layer on a side of the movable flexible layer opposite the movable reflector such that when temperature changes the distance between the movable reflector and the optical stack does not change significantly, thereby leading to stable color. Additionally, an interferometric modulating device is provided with a stiffening layer between the movable flexible layer and the movable reflector and at least one hollow void exists on the surface where the movable reflector and the stiffening layer contact each other so that the movable reflector is more rigid to bending, thereby reducing the temperature sensitivity of the movable reflector.

Abstract: A multi-state light modulator comprises a first reflector. A first electrode is positioned at a distance from the first reflector. A second reflector is positioned between the first reflector and the first electrode. The second reflector is movable between an undriven position, a first driven position, and a second driven position, each having a corresponding distance from the first reflector. In one embodiment, the three positions correspond to reflecting white light, being non-reflective, and reflecting a selected color of light. Another embodiment is a method of making the light modulator. Another embodiment is a display including the light modulator.

Abstract: Methods and systems for providing a light device that can emit light and sense light are disclosed. In one embodiment, a lighting device includes a light guide having a planar first surface, the light guide configured such that at least some ambient light enters the light guide through the first surface and propagates therein, and at least one light detector disposed along an edge of the light guide, the at least one detector optically coupled to the light guide to receive light propagating therein. The light detector can be configured to produce a control signal. In some embodiments, the lighting device also includes at least one light turning feature disposed on the first surface, the at least one light turning feature configured to direct light incident into the light guide through the first surface.

Abstract: The present disclosure provides systems, methods and apparatus for producing holographic displays using an electromechanical systems device. In one aspect, the method can be implemented to allow for simultaneous modulation of phase and amplitude of light in a display device composed of a plurality of pixels. A light source can provide sufficiently coherent light to a light guide, which can direct the light to a plurality of reflective members. The reflective members can reflect the light to a pinhole-lenslet array. The combination of the pinhole-lenslet array and the reflective members can act as a spatial light modulator, modulating the phase and amplitude of the light reflected by the reflective members. The lenslet can focus the light to a plane at the opening of the pinhole, wherein the light can exit the pinhole to be viewed in combination with light from additional pixels, and can be viewed as a holographic image.

Abstract: This disclosure provides systems, methods, and apparatus for encapsulated electromechanical systems. In one aspect, a release path includes a release hole through an encapsulation layer. The release path exposes a portion of a first sacrificial layer that extends beyond a second sacrificial layer in a horizontal direction. This allows the first sacrificial layer and the second sacrificial layer to later be etched through the release path. The corresponding electromechanical system device includes a shell layer encapsulating a mechanical layer. A conformal layer seals a release hole that extends through a shell layer. A portion of the conformal layer blocks the opening of the release passage within the release hole. The release passage has substantially the same vertical height as a gap that defines the spacing between the mechanical layer and a substrate.

Abstract: A method for sensing the actuation and/or release voltages of a electromechanical system or a microelectromechanical device include applying a varying voltage to the device and sensing its state and different voltage levels. In one embodiment, the device is part of a system comprising an array of interferometric modulators suitable for a display. The method can be used to compensate for temperature dependent changes in display pixel characteristics.

Abstract: The present disclosure provides systems, methods, and apparatus for sensing the location(s) of conductive objects disposed near a sensor array. In one aspect, a sensor array includes a conductive row and a conductive column formed of non-transparent material(s). At least a portion of the conductive row overlaps at least a portion of the conductive column and each of the conductive rows and columns include sensing elements. The sensing elements at least partially define volumes including non-conductive and optically transparent material(s) to limit the loss of light that passes therethrough.

Abstract: This disclosure provides systems, methods and apparatus, including a display device that includes an overlying holographic film. In one aspect, the holographic film includes a hologram that is configured to turn light incident on the film. The light is turned towards the display device at desired angles. The display can be formed of interferometric modulators and the turned light can be reflected off the display, and towards a viewer, to form an image. For light that is incident on the film at angles outside of a view cone, the holographic film is provided with holographic light turning features that turn this light so that it is reflected off the display at angles within a view cone of the display.

Abstract: This disclosure provides substrate stacks for use in photovoltaic cells and methods of manufacturing the same. In one aspect, a substrate stack can include a substrate layer having at least one surface with an RMS roughness value that is greater than 9 nm. The substrate stack can also include a transparent conductive oxide layer disposed over the substrate layer. The transparent conductive oxide layer can include at least a first surface with an RMS roughness value that is greater than 9 nm and a second surface with an RMS roughness value that is greater than 9 nm. The RMS roughness value of the second surface can be greater than the RMS value of the first surface.

Abstract: A micro-electro-mechanical systems (MEMS) pixel for display and touch position sensing includes a substrate and a capacitive element. The capacitive element includes one or more pixels having a first conductive platelet above the substrate, and a second conductive platelet above and spaced apart from the first conductive platelet, the two platelets forming the capacitive element. A connection to each platelet provides for applying a voltage, wherein the platelet separation changes according to the applied voltage. A transparent dielectric plate, spaced apart from and positioned opposite the substrate, covers the at least one pixel. A capacitance sensing circuit attached to the connection to each platelet of the pixel senses changes in capacitance not resulting from the applied voltage.

Abstract: This disclosure provides systems, processes, and apparatus implementing and using techniques for fabricating flexible integrated circuit (IC) device layers. In one implementation, a sacrificial layer is deposited on a substrate. The sacrificial layer can include amorphous silicon or molybdenum, by way of example. One or more electronic components are formed on the sacrificial layer. A polymer coating is provided on the one or more electronic components to define a coated device layer. The sacrificial layer is removed to release the coated device layer from the substrate. The sacrificial layer can be removed using a xenon difluoride gas or by etching, for example. Coated device layers made in accordance with this process can be stacked. The substrate can be formed of glass, silicon, a plastic, a ceramic, a compound semiconductor, and/or a metal, depending on the desired implementation. The electronic component(s) can include a passive component such as a resistor, an inductor, or a capacitor.

Abstract: Methods and devices to measure threshold voltages of electro-mechanical systems devices are disclosed. The threshold voltages are determined based on which of multiple test voltages cause the devices to change states. State changes of the device are detected by monitoring integrated current or charge used to drive the test voltages.

Abstract: A multi-state light modulator comprises a first reflector. A first electrode is positioned at a distance from the first reflector. A second reflector is positioned between the first reflector and the first electrode. The second reflector is movable between an undriven position, a first driven position, and a second driven position, each having a corresponding distance from the first reflector. In one embodiment, the three positions correspond to reflecting white light, being non-reflective, and reflecting a selected color of light. Another embodiment is a method of making the light modulator. Another embodiment is a display including the light modulator.

Abstract: A MEMS-based display device is described, wherein an array of interferometric modulators are configured to reflect light through a transparent substrate. The transparent substrate is sealed to a backplate and the backplate can contain electronic circuitry for controlling the array of interferometric modulators. The backplate can provide physical support for device components, such as electronic components which can be used to control the state of the display. The backplate can also be utilized as a primary structural support for the device.