Abstract: A microelectromechanical systems device fabricated on a pre-patterned substrate having grooves formed therein. A lower electrode is deposited over the substrate and separated from an orthogonal upper electrode by a cavity. The upper electrode is configured to be movable to modulate light. A semi-reflective layer and a transparent material are formed over the movable upper electrode.

Abstract: An interferometric mask covering a reflective conductive ribbon that electrically interconnects a plurality of photovoltaic cells is disclosed. Such an interferometric mask may reduce reflections of incident light from the conductors. In various embodiments, the mask reduces reflections, so that a front and back electrode pattern appears black or similar in color to surrounding features of the device. In other embodiments, the mask may modulate reflections of light such that the electrode pattern matches a color in the visible spectrum.

Abstract: Another embodiment has a method of driving a display device including an array of MEMS elements is disclosed. The MEMS elements are characterized by a preferred set of drive potential differences including preferred positive and preferred negative actuation potential differences, preferred positive and preferred negative hold potential differences, and a preferred release potential difference, where the preferred set of drive potential differences is symmetric about a voltage differing from 0V by an offset ?V. Another embodiment has a reduced set of supply voltages are used, while maintaining the charge balancing effects of applying potential differences of opposite polarity without visible artifacts.

Abstract: A package structure and method of packaging for an interferometric modulator. A transparent substrate having an interferometric modulator formed thereon is provided. A backplane is joined to the transparent substrate with a seal where the interferometric modulator is exposed to the surrounding environment through an opening in either the backplane or the seal. The opening is sealed after the transparent substrate and backplane are joined and after any desired desiccant, release material, and/or self-aligning monolayer is introduced into the package structure.

Abstract: Various embodiments include interferometric optical modulators comprising a substrate layer having a thickness between about 0.1 mm to about 0.45 mm thick and a method for manufacturing the same. The interferometric modulator can be integrated together with a diffuser in a display device. The thin substrate permits use of a thicker diffuser. The thinner substrate may increase resolution and reduce overall thickness of the inteferometric modulator. The thicker diffuser may provide increased diffusion and durability.

Abstract: This disclosure provides systems, methods and apparatus for providing illumination by using a light guide to distribute light. In one aspect, the light guide includes a light turning film over an optically transmissive supporting layer. The light turning film may be formed of a material deposited in the liquid state. The light turning film may be formed of a photodefinable material, which may be glass, such a spin-on glass, or may be a polymer. In some other implementations, the glass is not photodefinable. The light turning film may have indentations that define light turning features and a protective layer may be formed over those indentations. The protective layer may also be formed of a glass material, such as spin-on glass. The light turning features in the light guide film may be configured to redirect light out of the light guide, for example, to illuminate a display.

Abstract: This disclosure provides systems, methods and apparatus for providing illumination by using a light guide to distribute light. In one aspect, the light guide has a surface, such as an edge, into which light is injected. The surface is treated to create a diffusive interface with a light source. For example, the surface may be subjected to abrasion to form a frosted surface that acts as the diffusive interface, or a diffusive structure may be attached to the edge, with the attached diffusive structure functioning as the diffusive interface. The diffusive interface diffuses light entering into the light guide, and can thereby increase the uniformity of light propagating within the light guide. The light guide may be provided with light turning features that redirect light out of the light guide. In some implementations, the redirected light may be applied to illuminate a display.

Abstract: This disclosure provides systems, methods and apparatus for providing illumination by using a light guide to distribute light. In one aspect, a passivation layer is attached to the light guide of an illumination device. The passivation layer may be an optically transparent moisture barrier and may have a thickness and refractive index which allows it to function as an anti-reflective coating. The passivation layer may protect moisture-sensitive underlying features, such as metallized light turning features that may be present in the light guide. The light turning features may be configured to redirect light out of the light guide. In some implementations, the redirected light may be applied to illuminate a display.

Abstract: The present disclosure provides systems, methods and apparatus to illuminate displays. In one aspect, an illumination device with a light guide can include both faceted and holographic light turning features. The holographic light turning features can be provided between the facets. The facets can eject light out of the light guide. The holographic light turning features also can eject light out of the light guide, or can collimate the light so that it propagates more nearly parallel to the major surfaces of the light guide, or both eject and collimate light. The ejected light can be used to illuminate a display.

Abstract: Methods and apparatus are provided for controlling a depth of a cavity between two layers of a light modulating device. A method of making a light modulating device includes providing a substrate, forming a sacrificial layer over at least a portion of the substrate, forming a reflective layer over at least a portion of the sacrificial layer, and forming one or more flexure controllers over the substrate, the flexure controllers configured so as to operably support the reflective layer and to form cavities, upon removal of the sacrificial layer, of a depth measurably different than the thickness of the sacrificial layer, wherein the depth is measured perpendicular to the substrate.

Abstract: An optical accelerometer and method of determining an acceleration are disclosed. In one aspect, an accelerometer includes a light source, a substrate, a light guide attached to a first side of the substrate and configured to redirect light from the light source through the substrate. The accelerometer also includes a light detector, a proof mass attached to a second side of the substrate via one or more springs, wherein the second side is opposite the first side and wherein motion of the proof mass alters a characteristic of the light from the light source reaching the light detector, and a processor configured to determine an acceleration based on the characteristic of the light reaching the light detector.

Abstract: In order to minimize the footprint of a display module, a frontlight system positioned over a first surface of a substrate may be used. The frontlight system may include an edgebar positioned over the first surface of a display substrate, and a Z-shaped reflector having a first planar portion overlying the edgebar and a second planar portion adhered to the first surface of the substrate or layers overlying the first surface of the substrate. Such a reflector may be located wholly within the footprint of the display substrate, minimizing the footprint of the display module.

Abstract: A transmissive micromechanical device includes a substrate, an optical stack over the substrate and a moveable membrane over the optical stack. The moveable membrane may include a partially reflective mirror and be configured to move from a first position to a second position. When the movable membrane is in the first position the transmissive micromechanical device is configured to pass light of a predetermined color and when the movable membrane is in the second position, the micromechanical device is configured to block substantially all of light incident on the substrate.

Abstract: A display device which can provide configuration information to the driver circuit and methods of manufacturing and operating the same are disclosed. In one embodiment, a display device comprises a display array and a collection of links configured to store information related to the display array.

Abstract: The present disclosure provides systems, methods and apparatus to collimate light. In one aspect, a manifold to collimate light can be used to illuminate a display or project an image. The manifold can be formed of optically transmissive material and can have a backside for receiving light from a light source and a front wall, opposite the backside, for outputting collimated light. The front wall can include a plurality of lens. The upper and bottom walls of the manifold can extend along a curve from the backside to the front wall. The manifold can be hollowed, with an internal cavity that opens to the backside. The manifold can be configured to collimate light propagating in directions extending out of a plane, while light propagating from the light source in directions within the plane is not collimated or is less collimated.

Abstract: This disclosure provides systems, methods, and apparatus for producing roughness in an electromechanical device by nucleation under plasma CVD conditions. In one aspect, a substrate and at least a first layer are provided. The disclosure further provides gas phase nucleating particles under plasma CVD conditions and depositing a first layer, where the particles are incorporated into the first layer to create roughness in the first layer. The roughness may be transferred to a second layer by conformal deposition of the second layer over the first layer. The roughness of the second layer corresponds to the roughness of the first layer, where the first layer has a roughness greater than or equal to about 20 ? root mean square (RMS).

Abstract: Methods and systems for electrical sensing, measurement and characterization of display elements are described. An embodiment includes integrating the electrical sensing, measurement and characterization with the display drive scheme. This embodiment allows for measurement of DC or operational hysteresis voltages and/or response times of interferometric modulator MEMS devices, for example, to be fully integrated with the display driver IC and/or the display drive scheme. Another embodiment allows these measurements to be performed and used without resulting in display artifacts visible to a human user. Another embodiment allows the measurement circuitry to be integrated with the display driver IC and/or the display drive scheme re-using several existing circuitry components and features, thus allowing for integration of the measurement method and its use relatively easily.

Abstract: A spatial light modulator includes an array of elements to modulate light in accordance with image data. The modulator has a display panel having first and second surfaces arranged adjacent to the array of elements such that the second surface is directly adjacent the array of elements to allow a viewer to view an image produced by modulation of light The modulator may also include a light source to provide light to the display panel and illumination dots on the first surface of the display panel to reflect light from the source to the array of elements.

Abstract: A system and method of reducing color shift in a display includes an interferometric modulator display configured to reflect light from at least one light source and through at least one converging optical element in an optical path from the light source to a viewer via the display. In one embodiment, the converging optical element comprises a diffractive optical element.

Abstract: An interference modulator (Imod) incorporates anti-reflection coatings and/or micro-fabricated supplemental lighting sources. An efficient drive scheme is provided for matrix addressed arrays of IMods or other micromechanical devices. An improved color scheme provides greater flexibility. Electronic hardware can be field reconfigured to accommodate different display formats and/or application functions. An IMod's electromechanical behavior can be decoupled from its optical behavior. An improved actuation means is provided, some one of which may be hidden from view. An IMod or IMod array is fabricated and used in conjunction with a MEMS switch or switch array. An IMod can be used for optical switching and modulation. Some IMods incorporate 2-D and 3-D photonic structures. A variety of applications for the modulation of light are discussed. A MEMS manufacturing and packaging approach is provided based on a continuous web fed process.