Abstract: A three dimensional programmable connector used in a burn-in test system for manufactured integrated circuits is provided with a plurality of planar electrodes which are selectively connectable to each other and to a load board on which the integrated circuit is mounted. To implement the selective connection, programming pins are inserted in channels formed in the three-dimensional programmable connector in discrete configurations associated with various routing schemes depending on the particular wiring configuration desired, thereby enabling efficient, repeatable and cost-effective testing and analysis of the integrated circuit.

Abstract: Multiple integrated circuit dice can be simultaneously engaged for probe testing by providing a wedge card having a plurality of needle probes mounted thereon and extending along two orthogonal directions with the probe cards being planarized below a first major surface. Each wedge card can then engage at least two integrated circuits simultaneously. The wedge cards and manipulators can be mounted on a probe card around a central opening for testing integrated circuit die through the opening, alternatively, the probe card and manipulator can be mounted to two movable rods attached to respective pairs of manipulators mounted on a platen around the semiconductor wafer with the rods and manipulators moving the wedge card and manipulator along two axes (X,Y) with the wedge card manipulator moving the wedge card in a third axis (Z).