Patents Assigned to Research Corp.
  • Patent number: 7337671
    Abstract: Disclosed are moveable microstructures comprising in-plane capacitive microaccelerometers, with submicro-gravity resolution (<200 ng/?Hz) and very high sensitivity (>17 pF/g). The microstructures are fabricated in thick (>100 ?m) silicon-on-insulator (SOI) substrates or silicon substrates using a two-mask fully-dry release process that provides large seismic mass (>10 milli-g), reduced capacitive gaps, and reduced in-plane stiffness. Fabricated devices may be interfaced to a high resolution switched-capacitor CMOS IC that eliminates the need for area-consuming reference capacitors. The measured sensitivity is 83 mV/mg (17 pF/g) and the output noise floor is ?91 dBm/Hz at 10 Hz (corresponding to an acceleration resolution of 170 ng/?Hz). The IC consumes 6 mW power and measures 0.65 mm2 core area.
    Type: Grant
    Filed: June 1, 2006
    Date of Patent: March 4, 2008
    Assignee: Georgia Tech Research Corp.
    Inventors: Farrokh Ayazi, Babak Vakili Amini, Reza Abdolvand
  • Publication number: 20080038448
    Abstract: In one embodiment a chamber body enabling semiconductor processing equipment to be at least partially housed in the chamber body, the semiconductor processing equipment being configured to process a substrate using fluids is disclosed. The chamber body being comprised of a base material implemented to form the chamber body, the chamber body defined by at least a bottom surface and wall surfaces that are integrally connected to the bottom surface to enable capture of overflows of fluids during the processing of the substrate over the chamber body. Additionally, the base material is metallic. The chamber body also has a primer coat material disposed over and on the base material. The primer coat material has metallic constituents to define an integrated bond with the base material along with non-metallic constituents. The chamber body further includes a main coat material disposed over and on the primer coat material.
    Type: Application
    Filed: March 30, 2007
    Publication date: February 14, 2008
    Applicant: LAM RESEARCH CORP.
    Inventors: Arnold Kholodenko, Wing Cheng, Helen Cheng, Mark Mardelboym, Grant Peng, Katrina Mikhaylichenko
  • Patent number: 7327000
    Abstract: In a method of making graphite devices, a preselected crystal face of a crystal is annealed to create a thin-film graphitic layer disposed against selected face. A preselected pattern is generated on the thin-film graphitic layer. A functional structure includes a crystalline substrate having a preselected crystal face. A thin-film graphitic layer is disposed on the preselected crystal face. The thin-film graphitic layer is patterned so as to define at least one functional structure.
    Type: Grant
    Filed: December 14, 2005
    Date of Patent: February 5, 2008
    Assignee: Georgia Tech Research Corp.
    Inventors: Walt A. DeHeer, Claire Berger, Phillip N. First
  • Patent number: 7328366
    Abstract: Methods and systems for a reciprocal backup of data, including files, directories, and application data are provided. Example embodiments provide a Reciprocal Backup System (“RBS”), which enables users of two or more computer systems connected over a network to engage each other for automated reciprocal backup needs using peer-to-peer computing techniques. The peer computer systems negotiate a reciprocal backup relationship where each provides the other with backup storage in a secure fashion. The intermittent nature of some partners is handled automatically by the RBS, which supports fully automated and scheduled backups as well as immediate backup and restoration of data objects. In one embodiment, the RBS comprises reciprocal backup system partner support and one or more storage repositories. The RBS partner support includes a reciprocal backup manager and scheduler and a reciprocal backup agent. These components cooperate to provide the backup and restoration operations of the RBS.
    Type: Grant
    Filed: May 4, 2004
    Date of Patent: February 5, 2008
    Assignee: Cascade Basic Research Corp.
    Inventor: Eric Michelman
  • Publication number: 20080025535
    Abstract: Embodiments include system architectures and processes for handling the provisioning, management and control of media renderers. A plurality of media renderers are organized into a plurality of zones. Provisioning is performed dynamically as mobile media sources move between zones. Media renderers are dynamically detected, resources are allocated, and the system is configured for playback without noticeable interruption of the streaming and rendering of the media.
    Type: Application
    Filed: July 13, 2007
    Publication date: January 31, 2008
    Applicant: BLACKFIRE RESEARCH CORP.
    Inventor: Ravi Rajapakse
  • Patent number: 7322826
    Abstract: A skeletal system comprising at least two bones and soft tissue. The soft tissue comprises a body and at least two protrusions. Each of the at least two protrusions have an end. At least one of the ends is attached to a first bone and at least one of the ends is attached to a second bone. The soft tissue further comprises a core having a first elasticity and a cladding having a second elasticity. The first elasticity is substantially less than the second elasticity, such that the core substantially limits the elongation of the cladding.
    Type: Grant
    Filed: September 8, 2004
    Date of Patent: January 29, 2008
    Assignee: Medical Accessories and Research Corp.
    Inventor: Mike Zeeff
  • Publication number: 20080020171
    Abstract: The present invention provides a lubricant for recording media that does not readily decompose, and which has high adhesion to recording media, and a magnetic disk that is durable against continuous sliding under high-speed rotation. The present invention provides a lubricant for recording media containing: a perfluoropolyether compound represented by Formula (1), R1—CH2CF2O—(CF2CF2O)m—(CF2O)n—CF2CH2—R2??(1) wherein R1 represents R represents a C1-4 haloalkyl group, R2 represents —OCH2CH(OH)CH2OH, and m and n are each independently 1-30; and another perfluoropolyether compound represented by Formula (2), R1—CH2CF2O—(CF2CF2O)m—(CF2O)n—CF2CH2—R3??(2) wherein R1, m and n are as defined above and R3 represents —OCH2CH(OH)CH2OCH2CH(OH)CH2OH. The present invention also provides a magnetic disk having a lubricating layer essentially consists of such a lubricant.
    Type: Application
    Filed: July 14, 2005
    Publication date: January 24, 2008
    Applicant: MATSUMURA OIL RESEARCH CORP.
    Inventors: Akinobu Wakabayashi, Yasuo Sakane
  • Patent number: 7321424
    Abstract: In a self-referencing instrument for measuring electromagnetic radiation, a mounting member to which a sample can be coupled moves the sample such that, in a first position, the electromagnetic radiation impinges on the sample, and, in a second position, the electromagnetic radiation does not impinge on the sample. A detection unit receives the electromagnetic radiation from the sample and generates a sample signal when the sample is in the first position, and the detection unit receives the electromagnetic radiation from the source and generates a reference signal when the sample is in the second position. A processor coupled to the detection unit processes the reference signal and the sample signal. This results in a continuous, accurate reference measurement, and permits the instrument to efficiently compensate for error, while offering accurate measurements.
    Type: Grant
    Filed: August 4, 2005
    Date of Patent: January 22, 2008
    Assignee: Acton Research Corp.
    Inventor: James A. McCandless
  • Publication number: 20080006307
    Abstract: An apparatus for generating a fluid meniscus to be formed on a surface of a substrate is provided including a housing where the housing includes a housing surface to be placed proximate to a substrate surface of the substrate. The housing further includes a process configuration receiving region that is surrounded by the housing surface. The apparatus also includes a process configuration insert which has an insert surface where the process configuration insert is defined to fit within the process configuration receiving region of the housing such that the insert surface and the housing surface define a proximity face that can be placed proximate to the substrate surface of the substrate.
    Type: Application
    Filed: September 21, 2007
    Publication date: January 10, 2008
    Applicant: Lam Research Corp.
    Inventors: Carl Woods, Michael Smith, John Parks
  • Publication number: 20070285869
    Abstract: A method for removing a substrate that is attached to a bipolar electrostatic chuck (ESC) by application of a bipolar ESC voltage is provided which includes discontinuing the bipolar ESC voltage after processing a current substrate, and determining a monopolar component error of the processing. The method also includes correcting the monopolar component error for a subsequent substrate.
    Type: Application
    Filed: March 19, 2007
    Publication date: December 13, 2007
    Applicant: Lam Research Corp.
    Inventor: Arthur Howald
  • Publication number: 20070275651
    Abstract: An air-pressure-control system, the system comprising a system inlet, a system outlet, and a variable-speed fan configured to operate at a speed. A motor controller in communication with the fan is configured to control the speed of the fan. A differential-pressure transducer configured to monitor an air pressure at the system inlet and an air pressure at the system outlet. A closed-loop pressure controller in communication with the motor controller and differential-pressure transducer, wherein the pressure controller is configured to vary the speed of the fan based on the pressure differential between the inlet and outlet of the system, thereby controlling a pressure within a space. An ultraviolet kill chamber may be disposed between the inlet and outlet to expose airborne particulate to UV radiation. The system may also have a filter located within an air-flow path between the system inlet and system outlet.
    Type: Application
    Filed: May 24, 2007
    Publication date: November 29, 2007
    Applicant: American Innovative Research Corp.
    Inventor: David W. Palmer
  • Patent number: 7299964
    Abstract: Disclosed are systems or apparatuses and methods for forming a junction between conductive fibers that are incorporated into a fabric. Briefly, one method includes the steps of removing insulation from two intersecting individually insulated conductive fibers to expose the individually conductive fibers, bringing the exposed individually conductive fibers into contact with each other at a junction point, and forming a molecular bond between the conductive fibers at the junction point. Also disclosed are systems for forming a junction between conductive fibers that are incorporated into a fabric.
    Type: Grant
    Filed: January 15, 2004
    Date of Patent: November 27, 2007
    Assignee: Georgia Tech Research Corp.
    Inventors: Sundaresan Jayaraman, Sungmee Park
  • Publication number: 20070235409
    Abstract: Method for processing a substrate are provided. The processing occurs when the substrate is moved between cluster tools. One method includes providing the substrate to a cluster tool, and the cluster tool is configured to move the substrate into a meniscus processing module having at least one proximity head. The proximity head is configured to perform operations including applying a fluid onto a region of a surface of the substrate, such the fluid is continuously flown so as to substantially fill the region between a surface of the proximity head and the surface of the substrate. An operation of removing the fluid from the region by applying a vacuum force through the proximity head is also provided. The applying and removing is operated substantially simultaneously so that the fluid forms a controlled fluid meniscus that remains between the surface of the substrate and the surface of the proximity head when the proximity head is positioned over the substrate.
    Type: Application
    Filed: May 31, 2007
    Publication date: October 11, 2007
    Applicant: Lam Research Corp.
    Inventors: Carl Woods, John de Larios
  • Publication number: 20070210860
    Abstract: An operational amplifier including: a differential pair of transistors coupled to a pair of input signals; and a pair of floating-gate transistors coupled to the differential pair of transistors, wherein the pair of floating-gate transistors are operable for reducing an offset voltage of the operational amplifier.
    Type: Application
    Filed: August 30, 2006
    Publication date: September 13, 2007
    Applicant: Georgia Tech Research Corp.
    Inventors: Paul Hasler, Venkatesh Srinivasan, Guillermo Serrano, Jordan Gray
  • Patent number: 7266267
    Abstract: Input/output (I/O) interconnects, fluidic I/O interconnects, electrical, optical, and fluidic I/O interconnects, devices incorporating the I/O interconnects, systems incorporating the I/O interconnects, and methods of fabricating the I/O interconnects, devices, and systems, are described herein.
    Type: Grant
    Filed: October 28, 2005
    Date of Patent: September 4, 2007
    Assignee: Georgia Tech Research Corp.
    Inventors: Muhannad S. Bakir, James D. Meindl
  • Patent number: 7262075
    Abstract: A low-temperature process that combines high-aspect-ratio polymer structures with electroless copper plating to create laterally compliant MEMS structures. These structures can be used as IC-package interconnects that can lead to reliable, low-cost and high-performance nano wafer-level packaging. High-aspect-ratio low CTE polyimide structures with low stress, high toughness and strength were fabricated using plasma etching. The dry etching process was tuned to yield a wall angle above 80 degrees leading to an aspect ratio higher than 4. The etching process also leads to roughened sidewalls for selective electroless plating on the sidewalls of the polymer structures. These fabricated structures show reduction in the stresses at the interfaces and superior reliability as IC-package nano interconnects. Metal-coated polymer structures from MEMS fabrication techniques can provide low-cost high-performance solutions for wafer-level-packaging.
    Type: Grant
    Filed: January 10, 2005
    Date of Patent: August 28, 2007
    Assignee: Georgia Tech Research Corp.
    Inventors: Ankur Aggarwal, Pulugurtha Markondeya Raj, Rao R. Tummala
  • Patent number: 7253788
    Abstract: Alternating impedance electromagnetic bandgap (AI-EBG) structures, systems incorporating AI-EBG structures, and methods of making AI-EBG structures, are disclosed.
    Type: Grant
    Filed: October 28, 2005
    Date of Patent: August 7, 2007
    Assignee: Georgia Tech Research Corp.
    Inventors: Jinwoo Choi, Madhavan Swaminathan, Vinu Govind
  • Patent number: 7215831
    Abstract: A system is provided for that improves video quality and resolution. The system include a processor configured with logic to estimate an image from at least one observed image to produce an estimated image, the observed image having a lower spatial resolution than the estimated image. The processor is further configured with logic to simulate steps of an imaging process and compression process and update the estimated image with statistical and/or deterministic information if further optimization is needed, otherwise designate the estimated image as a solution.
    Type: Grant
    Filed: April 26, 2002
    Date of Patent: May 8, 2007
    Assignee: Georgia Tech Research Corp.
    Inventors: Yucel Altunbasak, Russell Mersereau, Bahadir Kursat Gunturk
  • Publication number: 20070082299
    Abstract: Methods and systems for defining metal features to be part of a liquid crystal display (LCD) is provided. The method is applied to a glass substrate, and the glass substrate has a blanket conductive metal layer (e.g., a barrier layer) defined on the glass substrate or a layer of the glass substrate. An inverse photoresist mask is applied over the blanket conductive metal layer. A plating meniscus is then formed over the inverse photoresist mask. The plating meniscus contains at least an electrolytic solution and a plating chemistry, where the plating meniscus forms metal features in regions over the blanket conductive metal layer not covered by the inverse photoresist mask.
    Type: Application
    Filed: April 4, 2006
    Publication date: April 12, 2007
    Applicant: Lam Research Corp.
    Inventor: Jeffrey Marks
  • Patent number: 7201060
    Abstract: An apparatus and methods for determining in situ pore fluid and soil properties at a particular subsurface location are disclosed. In one embodiment, the apparatus comprises a penetrating tip member configured to penetrate soil. The apparatus further comprises an attachment module coupled to the penetrating tip member. The attachment module includes at least one mandrel that includes a piezo sensor. An in situ measurement of pore pressure is obtained by the piezo sensor at a depth that corresponds to the location of the at least one mandrel on the attachment module.
    Type: Grant
    Filed: October 24, 2003
    Date of Patent: April 10, 2007
    Assignee: Georgia Tech Research Corp.
    Inventors: James David Frost, Jason Theodore DeJong, Gregory L. Hebeler