Patents Assigned to Rigaku Corporation
  • Patent number: 11698353
    Abstract: Provided are a quantitative analysis method, a quantitative analysis program, and an X-ray fluorescence. The quantitative analysis method includes: a step of acquiring a representative composition set to represent contents of analysis components; a step of acquiring a plurality of comparative compositions, in each of which the content of one of the analysis components of the representative composition is changed by a predetermined content; a detection intensity calculation step of calculating a detection intensity indicating an intensity of fluorescent X-rays detected under the influence of the geometry effect through use of an FP method with respect to a virtual sample having a thickness set in advance and being indicated by each of the representative composition and the comparative compositions; and a step of calculating a matrix correction coefficient for each of the analysis components based on the detection intensity.
    Type: Grant
    Filed: December 4, 2020
    Date of Patent: July 11, 2023
    Assignee: RIGAKU CORPORATION
    Inventors: Yoshiyuki Kataoka, Yasushi Kusakabe
  • Patent number: 11698352
    Abstract: Provided are an X-ray fluorescence spectrometer and a control method for an X-ray fluorescence spectrometer which are capable of preventing deterioration and breakage of a sample, and contamination of an inside of an apparatus even when an abnormality occurs in the X-ray fluorescence spectrometer. The X-ray fluorescence spectrometer includes: a measuring unit including: a moving mechanism configured to move a sample between a standby position and a measurement position; an X-ray source; a detector; and a first control unit; and an information processing unit including: an analysis unit; and a second control unit configured to control the measuring unit by communicating with the first control unit, the first control unit including retreat controller configured to perform retreat control for causing the moving mechanism to retreat the sample present at the measurement position to the standby position when communication between the first control unit and the second control unit is interrupted.
    Type: Grant
    Filed: March 24, 2021
    Date of Patent: July 11, 2023
    Assignee: RIGAKU CORPORATION
    Inventors: Yoshihisa Yamamoto, Yasujiro Yamada, Shinya Hara
  • Publication number: 20230194443
    Abstract: According to an aspect of the present invention, provided is an information processing apparatus comprising a memory configured to store a program; and a processor configured to execute a program so as to output a parameter result in relation to a thin film by inputting a profile result in relation to an intensity of X-ray from the thin film to a neural network, wherein the neural network is a neural network that is allowed to machine-learn teacher data using profile data in relation to an intensity of X-ray from a thin film as input data and using parameter data in relation to the thin film as output data.
    Type: Application
    Filed: November 22, 2022
    Publication date: June 22, 2023
    Applicant: Rigaku Corporation
    Inventors: Akihiro HIMEDA, Takumi OHTA
  • Publication number: 20230184699
    Abstract: According to an aspect of the present invention, provided is an information processing apparatus, comprising: a processor configured to execute a program so as to output a diagnostic result diagnosing an analysis profile result by inputting an input profile result in relation to an intensity of X-ray from a thin film and the analysis result of the input profile result to a neural network, wherein the neural network is a neural network that is allowed to machine-learn teacher data using input profile data in relation to an intensity of X-ray from a thin film and analysis profile data obtained from the input profile data as input data, and using diagnostic data obtained by diagnosing the analysis profile data as output data.
    Type: Application
    Filed: November 16, 2022
    Publication date: June 15, 2023
    Applicant: RIGAKU CORPORATION
    Inventors: Akihiro HIMEDA, Takumi OHTA
  • Publication number: 20230187017
    Abstract: Electron density map specifying circuitry is configured to accurately reproduce an electron density map of a macromolecule in a solution having a dynamically fluctuating structure. For example, the electron density map circuitry generates a plurality of electron density maps from a measured X-ray scattering profile acquired by measuring a sample, calculates an index representing a degree of coincidence between an X-ray scattering profile calculated from each of the plurality of electron density maps and the measured X-ray scattering profile, and selects a representative electron density map from the plurality of electron density maps based on the calculated index.
    Type: Application
    Filed: December 6, 2022
    Publication date: June 15, 2023
    Applicant: RIGAKU CORPORATION
    Inventors: Takashi SATO, Takashi MATSUMOTO, Tomokazu HASEGAWA
  • Publication number: 20230160840
    Abstract: There is provided a technique for non-destructively and relatively easily acquiring orientation information of an anisotropic material even for a large-sized object. An object is irradiated with X-rays in a tangential direction of a curved anisotropic material from a radiation source of a phase-contrast X-ray optical system. A scattering image is then obtained using a detection signal of X-rays having penetrated through the object. Structure information of the anisotropic material is acquired based on the scattering image.
    Type: Application
    Filed: November 18, 2022
    Publication date: May 25, 2023
    Applicants: RIGAKU CORPORATION, TOYOTA JIDOSHA KABUSHIKI KAISHA
    Inventors: Masashi KAGEYAMA, Kenichi OKAJIMA, Masaru KURIBAYASHI, Yuzo MIURA, Yuichi NAGAMATSU
  • Patent number: 11656190
    Abstract: An X-ray fluorescence spectrometer of the present invention includes: a determination module (21) configured to determine, with respect to every one of measurement lines that correspond to secondary X-rays having intensities to be measured, whether or not a ratio of a theoretical intensity in thin film calculated on the basis of an assumed thickness and known contents of respective components to a theoretical intensity in bulk calculated on the basis of the known contents of the respective components exceeds a predetermined threshold; and a saturation thickness quantification module (23) configured to, according to a positive determination by the determination module (21), calculate a saturation thickness with respect to each of the measurement lines, at which the theoretical intensity saturates, on the basis of the known contents of the respective components and to adopt a largest saturation thickness as a quantitative value of a thickness.
    Type: Grant
    Filed: September 10, 2021
    Date of Patent: May 23, 2023
    Assignee: Rigaku Corporation
    Inventors: Shinya Hara, Yasujiro Yamada, Hisashi Homma
  • Publication number: 20230152248
    Abstract: A correction amount specifying apparatus comprises circuitry for storing diffraction data including a combination of the diffraction angle of the irradiation X-rays with respect to the sample rotation angle and the sample surface height, the diffraction data being acquired by irradiating X-rays to a standard sample that is an aggregate of isotropic and stress free crystal particles, determining a first correspondence relationship based on the diffraction data, and specifying a correction amount of the sample surface height with respect to a desired sample rotation angle and a desired diffraction angle based on the first correspondence relationship.
    Type: Application
    Filed: November 17, 2022
    Publication date: May 18, 2023
    Applicant: Rigaku Corporation
    Inventors: Takuya KIKUCHI, Tetsuya OZAWA, Ryuji MATSUO
  • Patent number: 11636995
    Abstract: An X-ray generation device includes: a sealed X-ray tube including a cathode and an anode; a magnetic field generation portion applying a magnetic field to the electron beam, the magnetic field extending in a first direction, which crosses a traveling direction of the electron beam; and a rotary drive system configured to rotate the sealed X-ray tube, the anode having a surface including a first region and a second region arranged on one side and another side, with respect to a straight division line, the first region having a first metal arranged therein, and the second region having a second metal arranged therein, the second metal being different from the first metal, and by means of the rotary drive system rotating the sealed X-ray tube, the sealed X-ray tube being arranged with respect to the magnetic field generation portion so that the straight division line lies along the first direction.
    Type: Grant
    Filed: March 26, 2021
    Date of Patent: April 25, 2023
    Assignee: RIGAKU CORPORATION
    Inventors: Masahiro Nonoguchi, Masashi Kageyama
  • Publication number: 20230115151
    Abstract: A control apparatus, system, method and program that enable simultaneous measurement of counts of multiple energy ranges in an efficient configuration are provided. A control apparatus 200 for controlling an X-ray detector 100 and outputting a measurement result comprises a setting section 220 configured to set the energy range of X-rays to be detected for each unit region of the X-ray detector 100, a data management section 250 configured to acquire a count value of the set energy range for each unit region as measurement data by a result of the X-ray measurement, and an outputting section 270 configured to output the measurement data. Thus, counting of multiple energy ranges can simultaneously be measured.
    Type: Application
    Filed: December 22, 2020
    Publication date: April 13, 2023
    Applicant: Rigaku Corporation
    Inventors: Takuto SAKUMURA, Yasukazu NAKAYE, Tetsuya OZAWA, Kazuyuki MATSUSHITA
  • Publication number: 20230097836
    Abstract: Correcting artifacts by motion according to reconstruction of a CT image includes circuitry configured to acquire a projection image of 360-degree scanning; calculate a motion amount using parameters by setting a motion model including the parameters; calculate a relative motion amount of a projection data from the projection data of the projection image and opposite data thereto; prepare a fixed-point equation including the motion amount and the relative motion amount; determine the parameters in the motion model by self-consistently solving the fixed-point equation; and correct the projection image using the motion amount.
    Type: Application
    Filed: September 19, 2022
    Publication date: March 30, 2023
    Applicant: Rigaku Corporation
    Inventor: Takumi OTA
  • Patent number: 11609192
    Abstract: Provided is an energy-dispersive X-ray fluorescence spectrometer capable of easily determining reliability of a result of quantitative analysis and quickly recognizing an abnormality in measurement conditions, an X-ray fluorescence spectrometer, a sample, preprocessing for the sample, or the like. The energy-dispersive X-ray fluorescence spectrometer includes: a spectrum acquisition unit configured to acquire a spectrum; a calculation unit configured to execute quantitative analysis for an element included in the sample based on a peak included in the spectrum; and an evaluation unit configured to calculate a plurality of evaluation values obtained using different calculation methods for a series of processes, being the process of acquiring the spectrum by the spectrum acquisition unit, and the process of executing the quantitative analysis by the calculation unit, and to calculate a comprehensive evaluation value obtained by composing the plurality of evaluation values.
    Type: Grant
    Filed: November 30, 2020
    Date of Patent: March 21, 2023
    Assignee: Rigaku Corporation
    Inventor: Shinya Kikuta
  • Patent number: 11598369
    Abstract: Only an outer spacer (33) is cooled by an outer spacer cooling structure, thereby causing a temperature difference between an inner spacer (32) and the outer spacer (33). According to this temperature difference, an inner ring (37) of a bearing (31) is displaced relatively to an outer ring (38) in a direction in which a preload inside the bearing (31) decreases.
    Type: Grant
    Filed: May 6, 2021
    Date of Patent: March 7, 2023
    Assignee: RIGAKU CORPORATION
    Inventors: Yasuyuki Shimazaki, Shinichi Oya
  • Patent number: 11594393
    Abstract: Provided is an X-ray tube, including: an electron-beam emitting unit; a target having a first surface and a second surface; a solid heat diffusion member fixed onto the second surface of the target; and a flow-path forming member, which is arranged on a side of the solid heat diffusion member, the side being opposite to the target, and that is configured to define a film flow path in which a cooling fluid forms a film flow that is parallel to a surface shape of the solid heat diffusion member. A protruding portion protrudes toward the side of the solid heat diffusion member, which is opposite to the target. The film flow path has a shape extending along at least a part of a surface of the protruding portion.
    Type: Grant
    Filed: February 8, 2021
    Date of Patent: February 28, 2023
    Assignee: RIGAKU CORPORATION
    Inventor: Masaaki Yamakata
  • Patent number: 11585769
    Abstract: A quantitative analysis method, which is performed by an X-ray fluorescence spectrometer, includes: a step of acquiring a plurality of spectra at least having a first peak at a first energy position from a sample containing a plurality of elements under different measurement conditions; a step of designating, from among the plurality of spectra, a primary spectrum and a secondary spectrum having a second peak at a second energy position; a first fitting step of performing a fitting on the first peak included in the secondary spectrum to calculate a background intensity at the second energy position due to the first peak; and a second fitting step of performing a fitting on the first peak of the primary spectrum and performing a fitting on the second peak of the secondary spectrum under a condition that the calculated background intensity is included at the second energy position.
    Type: Grant
    Filed: July 10, 2020
    Date of Patent: February 21, 2023
    Assignee: RIGAKU CORPORATION
    Inventor: Shin Tanaka
  • Publication number: 20230044361
    Abstract: An X-ray fluorescence spectrometer of the present invention includes: a determination module (21) configured to determine, with respect to every one of measurement lines that correspond to secondary X-rays having intensities to be measured, whether or not a ratio of a theoretical intensity in thin film calculated on the basis of an assumed thickness and known contents of respective components to a theoretical intensity in bulk calculated on the basis of the known contents of the respective components exceeds a predetermined threshold; and a saturation thickness quantification module (23) configured to, according to a positive determination by the determination module (21), calculate a saturation thickness with respect to each of the measurement lines, at which the theoretical intensity saturates, on the basis of the known contents of the respective components and to adopt a largest saturation thickness as a quantitative value of a thickness.
    Type: Application
    Filed: September 10, 2021
    Publication date: February 9, 2023
    Applicant: RIGAKU CORPORATION
    Inventors: Shinya HARA, Yasujiro YAMADA, Hisashi HOMMA
  • Patent number: 11543367
    Abstract: There is provided an acquiring method of a projection image of a sample whose shape is uneven with respect to a rotation center, the method comprising the steps of setting the sample S0 at a position of the rotation center C0 provided between an X-ray source 116a and a detector 117, and acquiring the projection image of the sample S0 at each different rotation angle for each different magnification ratio over a rotation angle of 180° or more by rotating the sample S0 around the rotation center C0, and by relatively changing a separation distance between the X-ray source and the rotation center, or a separation distance between the rotation center and the detector in an optical axis direction according to the shape of the sample S0 and the rotation angle of the sample S0.
    Type: Grant
    Filed: April 10, 2020
    Date of Patent: January 3, 2023
    Assignee: RIGAKU CORPORATION
    Inventor: Yoshihiro Takeda
  • Publication number: 20220414955
    Abstract: The angle error estimating apparatus 310 comprises a storing section 315 for storing a series of projection data of an X-ray CT and control values of projection angles respectively associated with the projection data, a temporary correction section 330 for correcting the control values of the projection angles to temporary correction values with an error model using an assumed parameter, a temporary reconstruction section 332 for reconstructing a plurality of temporarily corrected images using the temporary correction values of the projection angles for each of different projection data sets composed of a part of the series of projection data, a consistency evaluating section 340 for evaluating consistency of the plurality of temporarily corrected images, and a parameter determining section 345 for determining an optimum parameter used for the error model based on the evaluated consistency.
    Type: Application
    Filed: June 22, 2022
    Publication date: December 29, 2022
    Applicant: Rigaku Corporation
    Inventor: Takumi OTA
  • Patent number: 11525790
    Abstract: A sample holder (10) filled with a sample is held in a base member (20), and an airtight member (30) is mounted on the base member (20) so as to cover the surroundings of the sample holder (10), thereby forming a sample holding structure in a closed space. The airtight member (30) includes a fitting portion (35) which is configured to be fitted and mounted in a mounting portion (21).
    Type: Grant
    Filed: August 13, 2020
    Date of Patent: December 13, 2022
    Assignee: RIGAKU CORPORATION
    Inventor: Koichiro Ito
  • Publication number: 20220390394
    Abstract: A quantitative analysis apparatus, a method, a program, and a manufacturing control system are provided. A WPPF section 320 for determining parameters of theoretical diffraction intensity by performing whole powder pattern fitting with respect to an X-ray diffraction profile to be analyzed, a scale factor acquiring section 325 for acquiring a scale factor of a test component among the determined parameters, a calibration curve storing section 350 for storing a calibration curve indicating a correlation between scale factors of the test component acquired with respect to a standard sample and content ratios of the test component in the standard sample, and a conversion section 370 for converting the scale factor of the test component acquired with respect to an objective sample into the content ratio of the test component in the objective sample using the stored calibration curve, are comprised.
    Type: Application
    Filed: June 2, 2022
    Publication date: December 8, 2022
    Applicant: Rigaku Corporation
    Inventors: Takahiro KUZUMAKI, Tetsuya OZAWA, Miki KASARI, Akihiro HIMEDA, Atsushi OHBUCHI, Takayuki KONYA