Abstract: A single-crystal X-ray structure analysis apparatus capable of surely and easily performing a single-crystal X-ray structure analysis using a crystalline sponge, an analysis method and a sample holder thereof, are provided. There are provided a sample holder 250 that holds a sample; a goniometer that rotationally moves, the goniometer to which the sample holder 250 is attached; an X-ray irradiation section that irradiates the X-rays from the X-ray source to the sample held by the sample holder 250 attached to the goniometer, wherein the sample holder 250 comprises a porous complex crystal capable of soaking the sample in a plurality of fine pores formed therein, and the porous complex crystal is fixed at a position of the sample holder, the position where the X-rays are irradiated from the X-ray irradiation section, in a state where the sample holder 250 is attached to the goniometer.

Abstract: A user-friendly single-crystal X-ray structure analysis apparatus for quickly performing a single-crystal X-ray structure analysis using a crystalline sponge and easily making it possible by including managing related information and a method therefor, are provided. There are provided a sample holder comprising a porous complex crystal capable of soaking a sample in a plurality of fine pores formed therein; a goniometer that rotationally moves, the sample holder being attached to the goniometer; an information acquisition section 600 that acquires invariable information about the porous complex crystal or variable information provided after the sample is soaked therein; and an information storage section 111 that stores the invariable information or the variable information acquired by the information acquisition section 600.

Abstract: A soaking machine of a single-crystal X-ray structure analysis sample, that makes it possible to surely perform soaking by supplying a sample into a porous complex crystal; and a soaking method therefor, are provided. There is provided is a soaking machine 300 for soaking a sample, comprising a supply section that supplies the sample into an applicator 311 in which a sample holder 310 that holds a porous complex crystal is inserted, a temperature adjustment section 320 that controls a temperature of the applicator 311, a discharge section that carries out the sample from the inside of the applicator 311 in which the sample holder 310 is inserted, and a control section 340 that controls the supply section, the temperature adjustment section 320 and the discharge section.

Abstract: A sample holder capable of quickly and precisely performing single-crystal X-ray structure analysis by quickly and easily soaking a sample in a crystalline sponge, and also a sample holder unit and a soaking method therefor are provided. There are provided a sample holder used in a single-crystal X-ray structure analysis apparatus is provided, the sample holder comprising a base part attached to a goniometer in the single-crystal X-ray structure analysis apparatus; a sample holding part formed in the base part to hold the porous complex crystal capable of soaking the sample in a plurality of fine pores formed therein; and a sample introduction structure formed in the base part and introducing the sample to be soaked in the porous complex.

Abstract: It is made possible to surely supply a porous complex crystal in which a sample is soaked, into a single-crystal X-ray structure analysis apparatus. There is provided a soaking machine for soaking a sample, comprising a supply section that supplies the sample to the porous complex crystal held by a sample holder 310, a temperature control section that controls a temperature of the porous complex crystal, a drive section that drives the supply section, and a control section that controls the supply section, the temperature control section and the drive section. The supply section supplies the sample to the porous complex crystal held by the sample holder 310 inside the applicator 311; and the temperature control section controls the temperature of the porous complex crystal held by the sample holder 310, inside the applicator 311 into which the sample is supplied.

Abstract: There are provided a storage section 220 that stores an output value read out by counting a pulse signal of incident X-rays, by a photon-counting type semiconductor detector; and a calculation section 230 that calculates a count value based on the output value that has been read out, wherein the calculation section 230 uses a model in which an apparent time constant of the pulse signal monotonously decreases against increase in pulse detection ratio with respect to exposure. According to such a model, the corresponding apparent time constant is able to be obtained even in any higher count rate. As a result of this, reduced can be the influence of count loss even on the count rate that has not been able to be covered by the conventional method.

Abstract: Provided is an X-ray analysis apparatus including: a goniometer including an incident-side arm extending in a first direction, a fixing portion, and a receiving-side arm; an X-ray source portion, which is arranged on the incident-side arm and generates an X-ray source extending in a second direction, which crosses the first direction; a support base, which is arranged on the fixing portion, and is configured to support a sample; a parallel slit, which is arranged on the fixing portion, and is configured to limit a line width along the second direction of the X-ray source generated by the X-ray source portion; and a detector, which is arranged on the receiving-side arm, and is configured to detect a scattered X-ray generated by the sample.

Abstract: A sample holder unit for a single-crystal X-ray structure analysis apparatus that quickly, surely and easily performs structure analysis with a crystalline sponge, the structure analysis inclusive of an operation of attaching a sample soaked in the crystalline sponge thereto, even if having no specialized knowledge, is provided. There are provided a sample holder, and an applicator comprising an opening 302 and a storing space in which the sample holder is stored, and a pull-out prevention part that selectively prevents and releases the sample holder stored in the storing space from being pulled out from the opening 302, wherein the pull-out prevention part comprises an operation part that releases pull-out prevention thereof in a state where the sample holder stored in the applicator is attached to the goniometer.

Abstract: Only an outer spacer (33) is cooled by an outer spacer cooling structure, thereby causing a temperature difference between an inner spacer (32) and the outer spacer (33). According to this temperature difference, an inner ring (37) of a bearing (31) is displaced relatively to an outer ring (38) in a direction in which a preload inside the bearing (31) decreases.

Abstract: A X-ray fluorescence spectrometer of the present invention simultaneously generates an analytical pulse-height width profile and a narrow pulse-height width profile that are distributions of intensities of secondary X-rays (7) against scan angles (2?) set by an interlocking unit (10) on the basis of a differential curve which is output by a multichannel pulse-height analyzer (13), as well as a predetermined analytical pulse-height width for an analytical line that is a primary reflection line and a predetermined narrow pulse-height width that is narrower than the analytical pulse-height width. Identification of the analytical lines is performed for the analytical pulse-height width profile and the narrow pulse-height width profile, and any analytical line identified only in the narrow pulse-height width profile is added to the analytical lines identified in the analytical pulse-height width profile to obtain an identification result of the analytical lines.

Abstract: Provided is an analysis method for a fine structure, that is capable of determining shapes of scattering bodies that are long in a thickness direction of a plate-shaped sample; and provided are an apparatus and a program thereof. There is provided an analysis method for a fine structure of a plate-shaped sample formed to have scattering bodies that are long in a thickness direction and periodically arranged, comprising the steps of preparing data of a scattering intensity from the plate-shaped sample measured via transmission of X-rays at a plurality of ? rotation angles; calculating a scattering intensity of the X-rays scattered by the plate-shaped sample under a specific condition; fitting the calculated scattering intensity to the prepared scattering intensity; and determining shapes of the scattering bodies for the plate-shaped sample, based on a result of the fitting.

Abstract: A measurement system obtains its own measurement result through use of a different system's measurement result obtained by a different measurement system. The measurement system includes: an output data acquisition unit, a designated position acquisition unit configured to acquire a designated position, which is a position indicating an address at which the different system's measurement result is represented in the output data, by a user's designation, a different system's measurement result acquisition unit, a measurement result acquisition unit, and a position data storage unit configured to store position data indicating the designated position.

Abstract: A X-ray fluorescence spectrometer of the present invention simultaneously generates an analytical pulse-height width profile and a narrow pulse-height width profile that are distributions of intensities of secondary X-rays (7) against scan angles (2?) set by an interlocking unit (10) on the basis of a differential curve which is output by a multichannel pulse-height analyzer (13), as well as a predetermined analytical pulse-height width for an analytical line that is a primary reflection line and a predetermined narrow pulse-height width that is narrower than the analytical pulse-height width. Identification of the analytical lines is performed for the analytical pulse-height width profile and the narrow pulse-height width profile, and any analytical line identified only in the narrow pulse-height width profile is added to the analytical lines identified in the analytical pulse-height width profile to obtain an identification result of the analytical lines.

Abstract: A protection device (100) and a method for protecting an area detector (200) against collision with an object (10). The protection device (100) is designed to be mountable on the area detector (200) and includes a mounting frame (120) configured to be mounted on the area detector (200) to be protected, wherein the mounting frame (120) is designed to at least partially cover a perimeter rim surface of the area detector (200) to be protected; a first sensor unit arranged on the mounting frame (120) and a light curtain (147, 148) configured to detect and signal a potential collision of the object (10) is provided at an inner area of the area detector (200) surrounded by the mounting frame. A second sensor unit is arranged on the mounting frame (120) and included at least one sensor configured to detect and signal a potential collision of the object (10) at a perimeter rim area of the area detector (200). Further provided is an X-ray detector system and X-ray analysis system including the protection device (100).

Abstract: An X-ray inspection device of the present invention includes a sample placement unit 11 for placing a sample as an inspection target therein, a sample placement unit positioning mechanism 30 for moving the sample placement unit 11, a goniometer 20 including first and second rotation members 22, 23 that rotate independently of each other, an X-ray irradiation unit 40 installed on the first rotation member 22, and a two-dimensional X-ray detector 50 installed on the second rotation member 23. The sample placement unit positioning mechanism 30 includes a ? rotation mechanism 35 for rotating the sample placement unit 11 and a ?-axis about a ?-axis that is orthogonal to a ?s-axis and a ?d-axis at a measurement point P and extends horizontally.

Abstract: A detector capable of securing space for arranging pixels in the vicinity of edges of adjacent readout chips according to design of counting circuits. A 2-dimensional hybrid pixel array detector configured to detect radiation rays, including a detection unit configured to detect the radiation rays incident in a region of each pixel 115, and a plurality of the readout chips including counting circuits 121 respectively connected to each of the pixels 115, the counting circuits 121 having a smaller set pitch than the pixels 115 along a certain direction in a detection surface. The regions occupied by the pixels and counting circuits corresponding to the pixels overlapping at least partially, and the connection being made in the overlapping regions.

Abstract: There is provided a control apparatus 40 that controls a tilt of a sample, the control apparatus comprising an input section 41 that receives an input of inclination information representing inclination of the sample with respect to a ? axis; an adjustment amount determination section 43 that determines adjustment amounts of a ? value and a ? value for correcting a deviation amount between a scattering vector and a normal line to a sample surface or a lattice plane with respect to a ? value that varies, using the inclination information; and a drive instruction section 47 that drives a goniometer according to ? axis rotation of the sample, based on the determined adjustment amounts of the ? value and the ? value, during an X-ray diffraction measurement.

Abstract: An airtight apparatus in which an airtight box (30) for measurement is combined with a glove box (20) is provided. The airtight box (30) for measurement includes a hollow housing (31), and a sample stage (34) having a sample loading portion. The sample stage (34) is transported by a transport stage (35) installed in the housing (31). The housing (31) is provided with a measurement window (40) for measuring a sample loaded on the sample stage (34) from the outside by a measurement apparatus (10).

Abstract: Provided is a substrate contamination analysis system capable of individually analyzing impurities present in a film and impurities present on a surface of the film. The substrate contamination analysis system includes: a vapor phase decomposition device configured to expose a film formed on a surface of a first substrate to a gas that reacts with the film, to thereby dissolve the film; a recovery device configured to perform a first recovery operation of moving an object to be measured to a first measurement position before the film is dissolved and a second recovery operation of moving the object to be measured to a second measurement position after the film is dissolved; and an analyzer configured to analyze the object to be measured every time the recovery device performs the first recovery operation and the second recovery operation.

Abstract: Provided is an X-ray signal processor and an X-ray spectrometer that are configured to measure X-rays and, at the same time, accurately detect, with a simple method, the degree of performance degradation of a semiconductor detector. The X-ray signal processor includes: a semiconductor detector configured to generate a charge corresponding to energy of detected X-rays; a preamplifier configured to output a ramp voltage signal corresponding to the generated charge; a counter configured to count the X-rays for each voltage change amount due to the charge based on the ramp voltage signal; and a judgment part configured to determine whether the semiconductor detector has been degraded based on a first voltage change evaluation value corresponding to a total sum of products of the voltage change amount and an occurrence frequency thereof, and a second voltage change evaluation value corresponding to an increase amount of the ramp voltage signal.