Patents Assigned to Shipley Company
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Patent number: 7147983Abstract: The present invention provides new photoresist compositions that comprise a resin binder, a photoactive component, particularly an acid generator, and a dye material that contains one or more chromophores that can reduce undesired reflections of exposure radiation. Preferred dye compounds are polymeric materials that include one or more chromophores such as anthracene and other polycyclic moieties that effectively absorb deep UV exposure radiation.Type: GrantFiled: October 7, 1996Date of Patent: December 12, 2006Assignee: Shipley Company, L.L.C.Inventors: James Michael Mori, James W. Thackeray, Roger F. Sinta, Rosemary Bell, Robin L. Miller-Fahey, Timothy G. Adams, Thomas M. Zydowsky, Edward K. Pavelchek, Manuel doCanto
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Publication number: 20060272149Abstract: An apparatus for passively aligning first and second substrates having micro-components disposed thereon when the substrates do not include patterned surfaces which face each other. The apparatus includes a first depression which cooperates with an alignment sphere to mechanically engage a corresponding depression disposed on the front surface of the first substrate and a second depression which cooperates with a second alignment sphere to mechanically engage a corresponding depression disposed on the front surface of the second substrate. The first and second depression of the alignment apparatus and the alignment spheres cooperate to passively align micro-components disposed on each of the substrates.Type: ApplicationFiled: August 7, 2006Publication date: December 7, 2006Applicant: Shipley Company, L.L.C.Inventors: Dan Steinberg, Mindaugas Dautartas, Jasean Rasnake
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Patent number: 7144488Abstract: A counter electrode for use in an electrochemical cell suitable for analysis of an electroplating composition, the counter electrode comprising a conductor; a sheath disposed about the conductor; an electrolyte disposed within the sheath; and an optionally porous element on the sheath, the porous element providing signal communication between the electrolyte and an analyte.Type: GrantFiled: June 5, 2003Date of Patent: December 5, 2006Assignee: Shipley Company, L.L.C.Inventors: Robert A. Binstead, Osnat Younes-Metzler, David A. Valeri, Robert D. Mikkola
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Patent number: 7132214Abstract: This invention relates to resins and photoresist compositions that comprise such resins. This invention includes new resins that comprise photoacid-labile deblocking groups, wherein the acid-labile moiety is substituted with one or more electron-withdrawing groups. Polymers of the invention are particularly useful as a resin binder component of chemically-amplified positive-acting resists that can be effectively imaged at short wavelengths such as sub-300 nm and sub-200 nm and preferably about 157 nm. In such short-wavelength imaging applications resins of the invention exhibit decreased absorbance of short wavelength exposure radiation, such as sub-170 nm radiation e.g. 157 nm.Type: GrantFiled: September 8, 2001Date of Patent: November 7, 2006Assignee: Shipley Company, L.L.C.Inventors: Gary N. Taylor, Robert L. Brainard, Shintaro Yamada
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Patent number: 7128822Abstract: Compounds that function to provide level or uniform metal deposits are provided. These compounds are particularly useful in providing level copper deposits. Copper plating baths and methods of copper plating using these compounds are also provided. These baths and methods are useful for providing a planarized layer of copper on a substrate having small apertures. The compositions and methods provide complete fill of small apertures with reduced void formation.Type: GrantFiled: June 4, 2003Date of Patent: October 31, 2006Assignee: Shipley Company, L.L.C.Inventors: Deyan Wang, Chunyi Wu, Robert D. Mikkola
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Patent number: 7122108Abstract: A tin-silver electrolyte and methods of depositing tin-silver alloys on a substrate.Type: GrantFiled: April 11, 2003Date of Patent: October 17, 2006Assignee: Shipley Company, L.L.C.Inventors: Jochen Heber, André Egli
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Publication number: 20060228647Abstract: Photoresist compositions having a resin binder with an acid labile blocking group with an activation energy in excess of 20 Kcal/mol. for deblocking, a photoacid generator capable of generating a halogenated sulfonic acid upon photolysis and optionally, a base.Type: ApplicationFiled: March 23, 2006Publication date: October 12, 2006Applicant: Shipley Company, L.L.C.Inventors: James Thackeray, James Cameron, Roger Sinta
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Patent number: 7118847Abstract: Disclosed are spirocyclic olefin polymers, methods of preparing spirocyclic olefin polymers, photresist compositions including spirocyclic olefin resin binders and methods of forming relief images using such photoresist compositions.Type: GrantFiled: October 22, 2004Date of Patent: October 10, 2006Assignee: Shipley Company LLCInventors: Charles R. Szmanda, George G. Barclay, Peter Trefonas, III, Wang Yueh
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Publication number: 20060204742Abstract: Methods for depositing uniform, pinhole-defect free organic polysilica coatings are provided. These methods allow for the use of these materials as spin-on cap layers in the manufacture of integrated circuits.Type: ApplicationFiled: March 23, 2006Publication date: September 14, 2006Applicant: Shipley Company, L.L.C.Inventors: Dana Gronbeck, Michael Gallagher, Jeffrey Calvert, Gregory Prokopowicz, Timothy Adams
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Patent number: 7105266Abstract: The invention includes polymers that contain a heterocyclic ring, preferably an oxygen- or sulfur-containing ring. The heterocyclic ring is preferably fused to the polymer backbone. The invention also provides photoresists that contain such polymers, particularly for imaging at short wavelengths such as sub-200 nm.Type: GrantFiled: December 31, 2001Date of Patent: September 12, 2006Assignee: Shipley Company, L.L.C.Inventors: George G. Barclay, Wang Yueh
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Patent number: 7090968Abstract: The present invention includes polymers and photoresist compositions that comprise the polymers as a resin binder component. Photoresists of the invention include chemically-amplified positive-acting resists that can be effectively imaged at short wavelengths such as sub-200 nm, particularly 193 nm. Polymers of the invention contain in specified molar ratios both nitrile and photoacid labile groups that have an alicyclic moiety, particularly a bridged bicyclic or tricyclic group or other caged group. Polymers and resists of the invention can exhibit substantial resistance to plasma etchants.Type: GrantFiled: October 10, 2003Date of Patent: August 15, 2006Assignee: Shipley Company, L.L.C.Inventors: George G. Barclay, Zhibiao Mao, Robert J. Kavanagh
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Patent number: 7086134Abstract: An apparatus for passively aligning first and second substrates having micro-components disposed thereon when the substrates do not include patterned surfaces which face each other. The apparatus includes a first depression which cooperates with an alignment sphere to mechanically engage a corresponding depression disposed on the front surface of the first substrate and a second depression which cooperates with a second alignment sphere to mechanically engage a corresponding depression disposed on the front surface of the second substrate. The first and second depression of the alignment apparatus and the alignment spheres cooperate to passively align micro-components disposed on each of the substrates.Type: GrantFiled: August 7, 2001Date of Patent: August 8, 2006Assignee: Shipley Company, L.L.C.Inventors: Mindaugas F. Dautartas, Dan A. Steinberg, Jasean Rasnake
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Patent number: 7079725Abstract: An optical switch and method for assembling are described. Optical arrays are mounted on a flex plate with an interface between them. The direction of certain forces on the flex plate allows coupling/decoupling of the optical arrays. The flex plate includes an area which exhibits a different flex profile than the remainder of the flex plate and that is located beneath the optical arrays interface. Flexing of the flex plate optically couples the optical arrays. A tool with grooves is used to align the optical arrays relative to each other. The tool uses grooves and spheres to mate with the optical arrays in such a way as to provide an appropriate interface between the optical arrays.Type: GrantFiled: September 30, 2004Date of Patent: July 18, 2006Assignee: Shipley Company, L.L.C.Inventors: David W. Sherrer, John Fisher
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Patent number: 7079910Abstract: A method and system is provided for improving the efficiency of a process for manufacturing a product and begins with the step of receiving from a manufacturer a desire to manufacture a number of said products. Next, the amount of materials that is required to produce the number of products is determined. Next, the optimum process for manufacturing the number of products is determined. Next, a cost to manufacture the number of products based on the amount of materials and the optimum process is calculated. The manufacturer is then provided with the optimum process and the cost to manufacture the number of products. Finally, a payment is received from the manufacturer that is proportional to the cost to manufacture the number of products.Type: GrantFiled: November 27, 2000Date of Patent: July 18, 2006Assignee: Shipley Company, L.L.C.Inventors: Brian P. McDavitt, Charles R. Szmanda, James R. Shelnut
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Patent number: 7078671Abstract: An optical microbench configured to facilitate wafer-level testing of optoelectronic devices is provided. The optical microbench includes an optoelectronic device mounted to a wafer in which the optical microbench is provided. The optical microbench also includes a beam deflector provided in the wafer and disposed along the optical path of the optoelectronic device. The beam deflector is configured to deflect a portion of the optical path to lie along a direction oriented out of the plane of the wafer. The optical microbench further includes an optical feed-through disposed along the optical path between the optoelectronic device and the beam deflector. The optical feed-through is configured to conduct an optical signal between the beam deflector and the optoelectronic device. A method for testing optoelectronic devices at the wafer level is also provided.Type: GrantFiled: August 6, 2002Date of Patent: July 18, 2006Assignee: Shipley Company, L.L.C.Inventor: David W. Sherrer
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Patent number: 7068870Abstract: A variable width waveguide useful for mode matching between dissimilar optical waveguides and optical fibers and a method for making the same is described. In one embodiment, a tapered waveguide is etched in a substrate, a cladding material is laid over the upper surface of the substrate and within the waveguide, and the waveguide is then filled with a core material. The core material may be deposited in a single step, or in successive deposition steps.Type: GrantFiled: October 26, 2001Date of Patent: June 27, 2006Assignee: Shipley Company, L.L.C.Inventors: Dan A. Steinberg, Neal Ricks, Mindaugas F. Dautartas, Hui Luo
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Patent number: 7065283Abstract: A first waveguide holding member has a first transverse surface region and a first optical waveguide having an end terminating at the first transverse surface region. A second waveguide holding member has a second transverse surface region which confronts the first transverse surface region of the first waveguide holding member and a second optical waveguide having an end terminating at the second transverse surface region. A guide member is operatively coupled to the first and second waveguide holding members and guides the first waveguide holding member in a transverse direction relative to the second waveguide holding member so as to selectively optically couple and decouple the ends of the first and second optical waveguides.Type: GrantFiled: May 11, 2004Date of Patent: June 20, 2006Assignee: Shipley Company, L.L.C.Inventors: Dan A. Steinberg, David W. Sherrer, Mindaugas F. Dautartas, Donald E. Leber
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Patent number: 7060413Abstract: The present invention provides radiation sensitive compositions and methods that comprise novel means for providing relief images of enhanced resolution. In one aspect the invention provides a method for controlling diffusion of photogenerated acid comprising adding a polar compound to a radiation sensitive composition and applying a layer of the composition to a substrate; exposing the composition layer to activating radiation whereby a latent image is generated comprising a distribution of acid moieties complexed with the polar compound; and treating the exposed composition layer to provide an activating amount of acid.Type: GrantFiled: February 20, 2004Date of Patent: June 13, 2006Assignee: Shipley Company, LLCInventors: James W. Thackeray, Angelo A. Lamola
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Patent number: 7056824Abstract: A method of manufacturing electronic devices containing one or more layers of materials that are sensitive to the strong chemicals used to remove cross-linked polymeric layers such as photoresists and antireflective coatings is provided. The cross-linked polymeric layers can be easily removed following etching through the use of certain removable layers disposed between the substrate and the cross-linked polymeric layers.Type: GrantFiled: December 19, 2003Date of Patent: June 6, 2006Assignee: Shipley Company, L.L.C.Inventor: George P. Mirth
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Publication number: 20060090819Abstract: Tin deposits having greatly reduced whisker formation are provided. Methods of depositing tin layers or films having a reduced tendency to form whiskers are also provided.Type: ApplicationFiled: December 19, 2005Publication date: May 4, 2006Applicant: Shipley Company, L.L.C.Inventor: Andre Egli