Patents Assigned to Silicon Storage Technology, Inc.
  • Patent number: 11769558
    Abstract: A method of programing a memory device having a plurality of memory cell groups where each of the memory cell group includes N non-volatile memory cells, where N is an integer greater than or equal to 2. For each memory cell group, the method includes programming each of the non-volatile memory cells in the memory cell group to a particular program state, performing multiple read operations on each of the non-volatile memory cells in the memory cell group, identifying one of the non-volatile memory cells in the memory cell group that exhibits a lowest read variance during the multiple read operations, deeply programming all of the non-volatile memory cells in the memory cell group except the identified non-volatile memory cell, and programming the identified non-volatile memory cell in the memory cell group with user data.
    Type: Grant
    Filed: September 22, 2021
    Date of Patent: September 26, 2023
    Assignee: Silicon Storage Technology, Inc.
    Inventors: Viktor Markov, Alexander Kotov
  • Patent number: 11737266
    Abstract: A method of forming a semiconductor device by recessing the upper surface of a semiconductor substrate in first and second areas but not a third area, forming a first conductive layer in the three areas, forming a second conductive layer in all three areas, removing the first and second conductive layers from the second area and portions thereof from the first area resulting in pairs of stack structures each with a control gate over a floating gate, forming a third conductive layer in all three areas, forming a protective layer in the first and second areas and then removing the third conductive layer from the third area, then forming blocks of dummy conductive material in the third area, then etching in the first and second areas to form select and HV gates, and then replacing the blocks of dummy conductive material with blocks of metal material.
    Type: Grant
    Filed: June 4, 2021
    Date of Patent: August 22, 2023
    Assignee: Silicon Storage Technology, Inc.
    Inventors: Guo Xiang Song, Chunming Wang, Leo Xing, Xian Liu, Nhan Do
  • Patent number: 11652162
    Abstract: A simplified method for forming a non-volatile memory cell using two polysilicon depositions. A first polysilicon layer is formed on and insulated from the semiconductor substrate in a first polysilicon deposition process. An insulation block is formed on the first polysilicon layer. Spacers are formed adjacent first and second sides of the insulation block, and with the spacer adjacent the first side is reduced. Exposed portions of the first poly silicon layer are removed while maintaining a polysilicon block of the first polysilicon layer disposed under the insulation block. A second polysilicon layer is formed over the substrate and the insulation block in a second polysilicon deposition process. Portions of the second polysilicon layer are removed while maintaining a first polysilicon block (disposed adjacent the first side of the insulation block), and a second polysilicon block (disposed adjacent the second side of the insulation block).
    Type: Grant
    Filed: September 15, 2020
    Date of Patent: May 16, 2023
    Assignee: Silicon Storage Technology, Inc.
    Inventors: Feng Zhou, Xian Liu, Chien-Sheng Su, Nhan Do, Chunming Wang
  • Patent number: 11646075
    Abstract: A neural network device with synapses having memory cells each having a floating gate and a first gate over first and second portions of a channel region disposed between source and drain regions, and a second gate over the floating gate or the source region. First lines each electrically connect the first gates in one of the memory cell rows, second lines each electrically connect the second gates in one of the memory cell rows, third lines each electrically connect the source regions in one of the memory cell columns, and fourth lines each electrically connect the drain regions in one of the memory cell columns. The synapses receive a first plurality of inputs as electrical voltages on the first or second lines, and provide a first plurality of outputs as electrical currents on the third or fourth lines.
    Type: Grant
    Filed: September 9, 2021
    Date of Patent: May 9, 2023
    Assignee: Silicon Storage Technology, Inc.
    Inventors: Hieu Van Tran, Steven Lemke, Vipin Tiwari, Nhan Do, Mark Reiten
  • Patent number: 11621335
    Abstract: A memory device, and method of making the same, that includes a substrate of semiconductor material of a first conductivity type, first and second regions spaced apart in the substrate and having a second conductivity type different than the first conductivity type, with a first channel region in the substrate extending between the first and second regions, a first floating gate disposed over and insulated from a first portion of the first channel region adjacent to the second region, a first coupling gate disposed over and insulated from the first floating gate, a first word line gate disposed over and insulated from a second portion of the first channel region adjacent the first region, and a first erase gate disposed over and insulated from the first word line gate.
    Type: Grant
    Filed: March 23, 2022
    Date of Patent: April 4, 2023
    Assignee: Silicon Storage Technology, Inc.
    Inventors: Chunming Wang, Xian Liu, Guo Xiang Song, Leo Xing, Nhan Do
  • Patent number: 11594453
    Abstract: A method of forming a device on a substrate with recessed first/third areas relative to a second area by forming a fin in the second area, forming first source/drain regions (with first channel region therebetween) by first/second implantations, forming second source/drain regions in the third area (defining second channel region therebetween) by the second implantation, forming third source/drain regions in the fin (defining third channel region therebetween) by third implantation, forming a floating gate over a first portion of the first channel region by first polysilicon deposition, forming a control gate over the floating gate by second polysilicon deposition, forming an erase gate over the first source region and a device gate over the second channel region by third polysilicon deposition, and forming a word line gate over a second portion of the first channel region and a logic gate over the third channel region by metal deposition.
    Type: Grant
    Filed: April 8, 2022
    Date of Patent: February 28, 2023
    Assignee: Silicon Storage Technology, Inc.
    Inventors: Serguei Jourba, Catherine Decobert, Feng Zhou, Jinho Kim, Xian Liu, Nhan Do
  • Patent number: 11488970
    Abstract: A method of forming a memory cell includes forming a first polysilicon block over an upper surface of a semiconductor substrate and having top surface and a side surface meeting at a sharp edge, forming an oxide layer with a first portion over the upper surface, a second portion directly on the side surface, and a third portion directly on the sharp edge, performing an etch that thins the oxide layer in a non-uniform manner such that the third portion is thinner than the first and second portions, performing an oxide deposition that thickens the first, second and third portions of the oxide layer, wherein after the oxide deposition, the third portion is thinner than the first and second portions, and forming a second polysilicon block having one portion directly on the first portion of the oxide layer and another portion directly on the third portion of the oxide layer.
    Type: Grant
    Filed: February 18, 2021
    Date of Patent: November 1, 2022
    Assignee: Silicon Storage Technology, Inc.
    Inventors: Jeng-Wei Yang, Man-Tang Wu, Boolean Fan, Nhan Do
  • Patent number: 11444091
    Abstract: A method of forming a semiconductor device by recessing the upper surface of a semiconductor substrate in first and second areas but not a third area, forming a first conductive layer in the first and second areas, forming a second conductive layer in all three areas, removing the first and second conductive layers from the second area and portions thereof from the first area resulting in pairs of stack structures each with a control gate over a floating gate, forming a third conductive layer in the first and second areas, forming a protective layer in the first and second areas and then removing the second conductive layer from the third area, then forming blocks of conductive material in the third area, then etching in the first and second areas to form select and HV gates, and replacing the blocks of conductive material with blocks of metal material.
    Type: Grant
    Filed: December 21, 2020
    Date of Patent: September 13, 2022
    Assignee: Silicon Storage Technology, Inc.
    Inventors: Jack Sun, Chunming Wang, Xian Liu, Andy Yang, Guo Xiang Song, Leo Xing, Nhan Do
  • Patent number: 11404545
    Abstract: A method of forming a memory device that includes forming a first polysilicon layer using a first polysilicon deposition over a semiconductor substrate, forming an insulation spacer on the first polysilicon layer, and removing some of the first polysilicon layer to leave a first polysilicon block under the insulation spacer. A source region is formed in the substrate adjacent a first side surface of the first polysilicon block. A second polysilicon layer is formed using a second polysilicon deposition. The second polysilicon layer is partially removed to leave a second polysilicon block over the substrate and adjacent to a second side surface of the first polysilicon block. A third polysilicon layer is formed using a third polysilicon deposition. The third polysilicon layer is partially removed to leave a third polysilicon block over the source region. A drain region is formed in the substrate adjacent to the second polysilicon block.
    Type: Grant
    Filed: February 20, 2020
    Date of Patent: August 2, 2022
    Assignee: Silicon Storage Technology, Inc.
    Inventors: Chunming Wang, Xian Liu, Nhan Do, Leo Xing, Guo Yong Liu, Melvin Diao
  • Patent number: 11380698
    Abstract: A memory device with memory cell pairs each having a single continuous channel region, first and second floating gates over first and second portions of the channel region, an erase gate over a third portion of the channel region between the first and second channel region portions, and first and second control gates over the first and second floating gates. For each of the pairs of memory cells, the first region is electrically connected to the second region of an adjacent pair of memory cells in the same active region, and the second region is electrically connected to the first region of an adjacent pair of the memory cells in the same active region.
    Type: Grant
    Filed: February 18, 2021
    Date of Patent: July 5, 2022
    Assignee: Silicon Storage Technology, Inc.
    Inventors: Hieu Van Tran, Hung Quoc Nguyen, Nhan Do
  • Patent number: 11362218
    Abstract: A memory device includes a semiconductor substrate with memory cell and logic regions. A floating gate is disposed over the memory cell region and has an upper surface terminating in opposing front and back edges and opposing first and second side edges. An oxide layer has a first portion extending along the logic region and a first thickness, a second portion extending along the memory cell region and has the first thickness, and a third portion extending along the front edge with the first thickness and extending along a tunnel region portion of the first side edge with a second thickness less than the first thickness. A control gate has a first portion disposed on the oxide layer second portion and a second portion vertically over the front edge and the tunnel region portion of the first side edge. A logic gate is disposed on the oxide layer first portion.
    Type: Grant
    Filed: June 23, 2020
    Date of Patent: June 14, 2022
    Assignee: Silicon Storage Technology, Inc.
    Inventors: Jinho Kim, Elizabeth Cuevas, Yuri Tkachev, Parviz Ghazavi, Bernard Bertello, Gilles Festes, Bruno Villard, Catherine Decobert, Nhan Do, Jean Francois Thiery
  • Patent number: 11362100
    Abstract: Memory cells formed on upwardly extending fins of a semiconductor substrate, each including source and drain regions with a channel region therebetween, a floating gate extending along the channel region and wrapping around the fin, a word line gate extending along the channel region and wrapping around the fin, a control gate over the floating gate, and an erase gate over the source region. The control gates are a continuous conductive strip of material. First and second fins are spaced apart by a first distance. Third and fourth fins are spaced apart by a second distance. The second and third fins are spaced apart by a third distance greater than the first and second distances. The continuous strip includes a portion disposed between the second and third fins, but no portion of the continuous strip is disposed between the first and second fins nor between the third and fourth fins.
    Type: Grant
    Filed: October 13, 2020
    Date of Patent: June 14, 2022
    Assignee: Silicon Storage Technology, Inc.
    Inventors: Feng Zhou, Xian Liu, Steven Lemke, Hieu Van Tran, Nhan Do
  • Patent number: 11328752
    Abstract: A self-timed sensing architecture for reading a selected cell in an array of non-volatile cells is disclosed. The sensing circuitry generates a signal when a stable sensing value has been obtained from the selected cell, where the stable sensing value indicates the value stored in the selected cell. The signal indicates the end of the sensing operation, causing the stable sensing value to be output as the result of the read operation.
    Type: Grant
    Filed: November 11, 2020
    Date of Patent: May 10, 2022
    Assignee: Silicon Storage Technology, Inc.
    Inventor: Massimiliano Frulio
  • Patent number: 11322507
    Abstract: A method of forming a semiconductor device includes recessing the upper surface of first and second areas of a semiconductor substrate relative to the third area of the substrate, forming a pair of stack structures in the first area each having a control gate over a floating gate, forming a first source region in the substrate between the pair of stack structures, forming an erase gate over the first source region, forming a block of dummy material in the third area, forming select gates adjacent the stack structures, forming high voltage gates in the second area, forming a first blocking layer over at least a portion of one of the high voltage gates, forming silicide on a top surface of the high voltage gates which are not underneath the first blocking layer, and replacing the block of dummy material with a block of metal material.
    Type: Grant
    Filed: February 25, 2021
    Date of Patent: May 3, 2022
    Assignee: Silicon Storage Technology, Inc.
    Inventors: Chunming Wang, Jack Sun, Xian Liu, Leo Xing, Nhan Do, Andy Yang, Guo Xiang Song
  • Patent number: 11315636
    Abstract: A memory cell array with memory cells arranged in rows and columns, first sub source lines each connecting together the source regions in one of the rows and in a first plurality of the columns, second sub source lines each connecting together the source regions in one of the rows and in a second plurality of the columns, a first and second erase gate lines each connecting together all of the erase gates in the first and second plurality of the columns respectively, first select transistors each connected between one of first sub source lines and one of a plurality of source lines, second select transistors each connected between one of second sub source lines and one of the source lines, first select transistor line connected to gates of the first select transistors, and a second select transistor line connected to gates of the second select transistors.
    Type: Grant
    Filed: February 6, 2020
    Date of Patent: April 26, 2022
    Assignee: Silicon Storage Technology, Inc.
    Inventors: Hsuan Liang, Man Tang Wu, Jeng-Wei Yang, Hieu Van Tran, Lihsin Chang, Nhan Do
  • Patent number: 11316024
    Abstract: A memory device, and method of making the same, that includes a substrate of semiconductor material of a first conductivity type, first and second regions spaced apart in the substrate and having a second conductivity type different than the first conductivity type, with a first channel region in the substrate extending between the first and second regions, a first floating gate disposed over and insulated from a first portion of the first channel region adjacent to the second region, a first coupling gate disposed over and insulated from the first floating gate, a first word line gate disposed over and insulated from a second portion of the first channel region adjacent the first region, and a first erase gate disposed over and insulated from the first word line gate.
    Type: Grant
    Filed: February 2, 2021
    Date of Patent: April 26, 2022
    Assignee: Silicon Storage Technology, Inc.
    Inventors: Chunming Wang, Xian Liu, Guo Xiang Song, Leo Xing, Nhan Do
  • Patent number: 11315635
    Abstract: A memory device includes a semiconductor substrate, first and second regions in the substrate having a conductivity type different than that of the substrate, with a channel region in the substrate extending between the first and second regions. The channel region is continuous between the first and second regions. A first floating gate is disposed over and insulated from a first portion of the channel region. A second floating gate is disposed over and insulated from a second portion of the channel region. A first coupling gate is disposed over and insulated from the first floating gate. A second coupling gate is disposed over and insulated from the second floating gate. A word line gate is disposed over and insulated from a third portion of the channel region between the first and second channel region portions. An erase gate is disposed over and insulated from the word line gate.
    Type: Grant
    Filed: January 19, 2021
    Date of Patent: April 26, 2022
    Assignee: Silicon Storage Technology, Inc.
    Inventors: Chunming Wang, Xian Liu, Guo Xiang Song, Leo Xing, Nhan Do
  • Patent number: 11315940
    Abstract: A method of forming memory cells, HV devices and logic devices on a substrate, including recessing the upper surface of the memory cell and HV device areas of the substrate, forming a polysilicon layer in the memory cell and HV device areas, forming first trenches through the first polysilicon layer and into the silicon substrate in the memory cell and HV device areas, filling the first trenches with insulation material, forming second trenches into the substrate in the logic device area to form upwardly extending fins, removing portions of the polysilicon layer in the memory cell area to form floating gates, forming erase and word line gates in the memory cell area, HV gates in the HV device area, and dummy gates in the logic device area from a second polysilicon layer, and replacing the dummy gates with metal gates that wrap around the fins.
    Type: Grant
    Filed: January 19, 2021
    Date of Patent: April 26, 2022
    Assignee: Silicon Storage Technology, Inc.
    Inventors: Chunming Wang, Guo Xiang Song, Leo Xing, Jack Sun, Xian Liu, Nhan Do
  • Patent number: 11309042
    Abstract: A method and device for programming a non-volatile memory cell, where the non-volatile memory cell includes a first gate. The non-volatile memory cell is programmed to an initial program state that corresponds to meeting or exceeding a target threshold voltage for the first gate of the non-volatile memory cell. The target threshold voltage corresponds to a target read current. The non-volatile memory cell is read in a first read operation using a read voltage applied to the first gate of the non-volatile memory cell that is less than the target threshold voltage to generate a first read current. The non-volatile memory cell is subjected to additional programming in response to determining that the first read current is greater than the target read current.
    Type: Grant
    Filed: June 29, 2020
    Date of Patent: April 19, 2022
    Assignee: Silicon Storage Technology, Inc.
    Inventors: Viktor Markov, Alexander Kotov
  • Patent number: 11308383
    Abstract: An artificial neural network device that utilizes one or more non-volatile memory arrays as the synapses. The synapses are configured to receive inputs and to generate therefrom outputs. Neurons are configured to receive the outputs. The synapses include a plurality of memory cells, wherein each of the memory cells includes spaced apart source and drain regions formed in a semiconductor substrate with a channel region extending there between, a floating gate disposed over and insulated from a first portion of the channel region and a non-floating gate disposed over and insulated from a second portion of the channel region. Each of the plurality of memory cells is configured to store a weight value corresponding to a number of electrons on the floating gate. The plurality of memory cells are configured to multiply the inputs by the stored weight values to generate the outputs.
    Type: Grant
    Filed: May 12, 2017
    Date of Patent: April 19, 2022
    Assignee: Silicon Storage Technology, Inc.
    Inventors: Farnood Merrikh Bayat, Xinjie Guo, Dmitri Strukov, Nhan Do, Hieu Van Tran, Vipin Tiwari, Mark Reiten