Abstract: A method for manufacturing a magnetic random access memory array at a density greater than would be possible using photolithography. A hard mask material is deposited over a magnetic memory element material, and a chemical template layer such as brush or mat material is deposited over the hard mask. A mask structure is formed over the soluble polymer. The mask structure is configured with openings having a center to center spacing that is an integer multiple of a block copolymer material. The openings in the mask structure can be shrunk by depositing a spacer material. The chemical template layer is chemically patterned, such as by a quick plasma exposure and the mask is removed. A block copolymer material is then deposited over the chemical template and annealed to form block copolymer cylinders that are located over the patterned portions of the chemical template and between the patterned portions.
Type:
Grant
Filed:
January 9, 2018
Date of Patent:
June 4, 2019
Assignee:
SPIN MEMORY, INC.
Inventors:
Elizabeth A. Dobisz, Prachi Shrivastava
Abstract: A method for manufacturing a magnetic random access memory array at a density greater than would be possible using photolithography. The method involves patterning a chemical template material with patterned portions separated by a center to center distance that is substantially equal to a natural period of a block copolymer. A block copolymer material is then deposited and annealed to form self assembled cylinders that are located over the patterned regions of the chemical template and also over areas between the patterned regions. The chemical template layer can be patterned by depositing a first, preliminary block copolymer, over a mask structure and annealing the mask structure to form cylinders in the openings in the mask structure. The cylinders can be removed leaving openings, and a UV exposure can be performed to expose and treat portions of the chemical template layer that are exposed through the opening.
Type:
Grant
Filed:
January 9, 2018
Date of Patent:
May 28, 2019
Assignee:
SPIN MEMORY, INC.
Inventors:
Elizabeth A. Dobisz, Prachi Shrivastava
Abstract: Methods and structures useful for magnetoresistive random-access memory (MRAM) are disclosed. The MRAM device has a magnetic tunnel junction stack having a significantly improved performance of the free layer in the magnetic tunnel junction structure. The MRAM device utilizes a STNO, an in-plane polarization magnetic layer, and a perpendicular MTJ.
Type:
Grant
Filed:
December 29, 2017
Date of Patent:
April 23, 2019
Assignee:
Spin Memory, Inc.
Inventors:
Marcin Jan Gajek, Michail Tzoufras, Kadriye Deniz Bozdag, Eric Michael Ryan
Abstract: A magnetoresistive random-access memory (MRAM) device is disclosed. The device described herein has a spin current injection capping layer between the free layer of a magnetic tunnel junction and the orthogonal polarizer layer. The spin current injection capping layer maximizes the spin torque through very efficient spin current injection from the polarizer. The spin current injection capping layer can be comprised of a layer of MgO and a layer of a ferromagnetic material.
Type:
Application
Filed:
November 21, 2018
Publication date:
April 11, 2019
Applicant:
Spin Memory, Inc.
Inventors:
Bartlomiej Adam KARDASZ, Mustafa Michael PINARBASI
Abstract: Methods and structures useful for magnetoresistive random-access memory (MRAM) are disclosed. The MRAM device has a magnetic tunnel junction stack having a significantly improved performance of the free layer in the magnetic tunnel junction structure. The MRAM device also utilizes an external magnetic field generator, thereby allowing efficient writing of the bit without a concomitant increase in read disturb.
Type:
Grant
Filed:
December 30, 2017
Date of Patent:
April 9, 2019
Assignee:
Spin Memory, Inc.
Inventors:
Mourad El Baraji, Kadriye Deniz Bozdag, Marcin Jan Gajek, Michail Tzoufras
Abstract: According to one embodiment, a method includes forming a bottom electrode layer above a substrate in a film thickness direction, forming a source layer above the bottom electrode layer in the film thickness direction, forming an impact ionization channel (i-channel) layer above the source layer in the film thickness direction, forming a drain layer above the i-channel layer in the film thickness direction, forming an upper electrode layer above the drain layer in the film thickness direction to form a stack that includes the bottom electrode layer, the source layer, the i-channel layer, the drain layer, and the upper electrode layer, and forming a gate layer positioned on sides of the i-channel layer along a plane perpendicular to the film thickness direction in an element width direction. The gate layer is formed in a position closer to the drain layer than the source layer.
Type:
Grant
Filed:
December 27, 2017
Date of Patent:
March 26, 2019
Assignee:
Spin Memory, Inc.
Inventors:
Kuk-Hwan Kim, Dafna Beery, Amitay Levi, Andrew J. Walker
Abstract: A processor-implemented method, according to one embodiment, includes: activating a subset of a plurality of p-MTJ cells oriented in one or more columns of a MRAM array. Activating the subset of p-MTJ cells includes: applying a first voltage to a gate terminal of the transistor in each of the p-MTJ cells in parallel, applying a second voltage to a first end of the MTJ sensor in each of the p-MTJ cells in parallel, and applying a third voltage to a drain terminal of the transistor in each of the p-MTJ cells in parallel. The processor-implemented method also includes: monitoring the activated subset of p-MTJ cells, determining whether any of the activated p-MTJ cells have failed, and in response to determining that an activated p-MTJ cell has failed, physically locating the failed p-MTJ cell. Other systems, methods, and computer program products are described in additional embodiments.
Type:
Grant
Filed:
December 21, 2017
Date of Patent:
March 19, 2019
Assignee:
SPIN MEMORY, INC.
Inventors:
Kuk-Hwan Kim, Peter Cuevas, Benjamin Louie, Amitay Levi
Abstract: A magnetoresistive random-access memory (MRAM) is disclosed. The MRAM device includes a perpendicular magnetic tunnel junction device having a reference layer, a free layer, and a precessional spin current magnetic layer. The precessional spin current magnetic layer has a diameter that is different from a diameter of the free layer. The device is designed to provide control over the injection of stray fields and the electronic coupling between the precessional spin current magnetic layer and the free layer. Switching speed, switching current, and thermal barrier height for the device can be adjusted.
Type:
Grant
Filed:
December 30, 2017
Date of Patent:
March 19, 2019
Assignee:
Spin Memory, Inc.
Inventors:
Manfred Ernst Schabes, Mustafa Michael Pinarbasi, Bartlomiej Adam Kardasz
Abstract: Methods and structures useful for magnetoresistive random-access memory (MRAM) are disclosed. The MRAM device has a magnetic tunnel junction stack having a significantly improved performance of the free layer in the magnetic tunnel junction structure. The MRAM device utilizes an in-plane polarization magnetic layer and a perpendicular MTJ in conjugation with a programming current pulse that comprises an alternating perturbation frequency.
Type:
Grant
Filed:
December 29, 2017
Date of Patent:
March 19, 2019
Assignee:
Spin Memory, Inc.
Inventors:
Michail Tzoufras, Marcin Jan Gajek, Kadriye Deniz Bozdag, Mourad El Baraji
Abstract: Methods and structures useful for magnetoresistive random-access memory (MRAM) are disclosed. The MRAM device has plurality of magnetic tunnel junction (MTJ) stack having significantly improved performance of the free layers in the MTJ structures. The MRAM device utilizes a spin torque nano-oscillator (STNO), a metallic bit line and a plurality of orthogonal spin transfer magnetic tunnel junctions (OST-MTJs), each OST-MTJ comprising an in-plane polarizer, and a perpendicular MTJ.
Type:
Grant
Filed:
December 29, 2017
Date of Patent:
March 19, 2019
Assignee:
Spin Memory, Inc.
Inventors:
Eric Michael Ryan, Marcin Jan Gajek, Kadriye Deniz Bozdag, Michail Tzoufras
Abstract: Methods and structures useful for magnetoresistive random-access memory (MRAM) are disclosed. The MRAM device has a magnetic tunnel junction stack having a significantly improved performance of the free layer in the magnetic tunnel junction structure. The MRAM device also utilizes a plurality of orthogonal spin transfer magnetic tunnel junction (OST-MTJ) stacks connected in series, with each OST-MTJ stack capable of selective activation by application of an external magnetic field, thereby allowing efficient writing of the bit without a concomitant increase in read disturb.
Type:
Grant
Filed:
December 30, 2017
Date of Patent:
March 12, 2019
Assignee:
Spin Memory, Inc.
Inventors:
Mourad El Baraji, Kadriye Deniz Bozdag, Marcin Jan Gajek, Michail Tzoufras