Abstract: A multi-motion programmable micromirror control method is provided with the multiple supports in a stepper plate to upholding the micromirror structure. The control system has advantages such that multiple motion can be applied to a micromirror and that the micromirror can be controlled in a low driving voltage and that simple motion control is applied by digital controlling and that the degrees of freedom in motion of the micromirror can be chosen by the number of the stepper plate and that only single voltage is needed for driving the micromirror motion. With many advantages, the multi-motion programmable micromirror control system provides a solution to overcome the difficulties in controlling micromirror motion.

Abstract: A MEMS (micro electro mechanical system) actuator with discretely controlled multiple motions comprises bottom layer, stepper plate, support, and motion plate. The multiple motion of the motion plate is generated by the electrostatically actuated stepper plates and geometrically predetermined supports. By introducing the MEMS actuator with discretely controlled multiple motions, simple motion control can be achieved by digital controlling and only single voltage is needed for motion control of the motion plate.

Abstract: The optical tracking device of this invention comprises a lens unit, a control circuitry communicatively coupled to the lens unit, and an imaging unit optically coupled to the lens unit. The lens unit comprises at least one Micromirror Array Lens, wherein the Micromirror Array Lens comprises a plurality of micromirrors and is configured to have a plurality of optical surface profiles by controlling rotations or translations of the micromirrors. The optical tracking device of the invention further comprises an image processing unit, communicatively coupled to the imaging unit, configured to process the image information from the imaging unit and generates a control signal for the control circuit to control the lens unit. The optical tracking device of the present invention provides capability of tracking a target moving in a high speed, providing three-dimensional image information of the object, and compensating the aberration of the optical tracking device.

Abstract: The optical tracking device of this invention comprises a lens unit, a control circuitry communicatively coupled to the lens unit, and an imaging unit optically coupled to the lens unit. The lens unit comprises at least one Micromirror Array Lens, wherein the Micromirror Array Lens comprises a plurality of micromirrors and is configured to have a plurality of optical surface profiles by controlling rotations or translations of the micromirrors. The optical tracking device of the invention further comprises an image processing unit, communicatively coupled to the imaging unit, configured to process the image information from the imaging unit and generates a control signal for the control circuit to control the lens unit. The optical tracking device of the present invention provides capability of tracking a target moving in a high speed, providing three-dimensional image information of the object, and compensating the aberration of the optical tracking device.

Abstract: This invention provides a Hybrid Micromirror Array Lens with reduced chromatic aberration over a broadband wavelength range of light. Conventional micromirror array lens uses phase matching condition. Therefore, the optical surface profile of Micromirror Array Lens using the same phase condition has a discontinuous surface profile. As the required optical power of Micromirror Array Lens is increased, the number of profile discontinuity of Micromirror Array Lens is increased. Therefore, the chromatic aberration is increased. To minimize the chromatic aberration, the number of profile discontinuity should be minimized. The number of discontinuity is reduced when the optical surface profile has a simulating base curve, called a translation contour with optical power. Hybrid Micromirror Array Lens is invented to reduce a large translational amount and chromatic aberration for large optical power lens.

Abstract: The present invention discloses an array of micromirrors with non-fixed underlying structures which can be oriented to have principal rotational axis with no structural and mechanical interference and with no electrical conflict. The micromirror array in the present invention can reproduce various surfaces including spherical, aspherical (e.g. parabolic, hyperbolic, elliptical, etc.), anamorphic, other than rotational symmetric profiles. With the newly introduced non-fixed underlying structure, the present invention makes possible for a micromirror array to generate a desired optical surface profile by simple motion controls and to improve structural stability, simplicity, flexibility, and efficiency in motion and motion control.

Abstract: A discretely controlled micromirror device provides multiple motions of a micromirror using stepper plate and micromirror bottom support. The discretely controlled micromirror device can be controlled in a low driving voltage. Also, simple motion control is applied by digital controlling and only single voltage is needed for driving the micromirror motion.

Abstract: A discretely controlled micromirror array lens (DCMAL) consists of many discretely controlled micromirrors (DCMs) and actuating components. The actuating components control the positions of DCMs electrostatically. The optical efficiency of the DCMAL is increased by locating a mechanical structure upholding DCMs and the actuating components under DCMs to increase an effective reflective area. The known microelectronics technologies can remove the loss in effective reflective area due to electrode pads and wires. The lens can correct aberrations by controlling DCMs independently. Independent control of each DCM is possible by known microelectronics technologies. The DCM array can also form a lens with arbitrary shape and/or size, or a lens array comprising the lenses with arbitrary shape and/or size.

Abstract: The present invention provides a three-dimensional imaging system for robot vision, which is capable of three-dimensional positioning of objects, object identification, searching and tracking of an object of interest, and compensating the aberration of the system. The three-dimensional imaging system for robot vision comprises one or more camera systems, each of which has at least one variable focal length micromirror array lens, an imaging unit, and an image processing unit. The variable focal length micromirror array lens used in the three-dimensional imaging system for robot vision has unique features including a variable focal length, a variable focal axis, and a variable field of view with a fast response time.

Abstract: This invention provides the two types of Discretely Controlled Micromirror (DCM), which can overcome disadvantages of the conventional electrostatic micromirrors. The first type micromirror is a Variable Supporter Discretely Controlled Micromirror (VSDCM), which has a larger displacement range than the conventional electrostatic micromirror. The displacement accuracy of the VSDCM is better than that of the conventional electrostatic micromirror and the low driving voltage is compatible with IC components. The second type of DCM, the Segmented Electrode Discretely Controlled Micromirror (SEDCM) has same disadvantages with the conventional electrostatic micromirror. But the SEDCM is compatible with known microelectronics technologies.

Abstract: This invention provides a discretely controlled micromirror array device comprising a plurality of micromirrors. The discretely controlled micromirror array device forms multiple surface profiles, wherein the rotational and translational motion of each micromirror is discretely controlled by selectively activating different groups of segmented electrodes using a control circuitry. The discretely controlled micromirror array device is compatible with known semiconductor electronics technologies and provides structural stability and efficiency in motion.

Abstract: This invention provides the two types of Discretely Controlled Micromirror (DCM), which can overcome disadvantages of the conventional electrostatic micromirrors. The first type micromirror is a Variable Supports Discretely Controlled Micromirror (VSDCM), which has a larger displacement range than the conventional electrostatic micromirror. The displacement accuracy of the VSDCM is better than that of the conventional electrostatic micromirror and the low driving voltage is compatible with IC components. The second type of DCM, the Segmented Electrode Discretely Controlled Micromirror (SEDCM) has same disadvantages with the conventional electrostatic micromirror. But the SEDCM is compatible with known microelectronics technologies.

Abstract: The present invention discloses a micromirror device with multi-axis rotational and translational motion. Newly introduced structure of the top electrode plate improves structural stability, flexibility, and more motion efficiency of the micromirror device. The invention also improves controllability of micromirror motion by designing the appropriate flexible structure to generate desired motion. With side-by-side arrangement of the micromirror devices, the micromirror devices are built as an array to form a micromirror array lens.

Abstract: A beam focusing and scanning system using a micromirror array lens (optical system) includes a light source configured to emit light and a micromirror array lens, including at least one micromirror, optically coupled to the light source, configured to reflect the light onto a projection medium (projection plane). The optical system also includes at least one actuating component coupled to the at least one micromirror, configured to move the at least one micromirror to enable the at least one micromirror to focus the light on the projection medium. The advantages of the present invention include high speed variable focusing and scanning, large focal length variation, phase compensation, high reliability and optical efficiency, low power consumption and low cost.

Abstract: A three-dimensional display device includes a two-dimensional display displaying a depthwise image, and a variable focal length micromirror array lens receiving light from the two-dimensional display and forming a corresponding image in the required location in space. Each depthwise image represents a portion of an object or scene having the same image depth, and the two-dimensional display displays one depthwise image at a time. The focal length of the variable focal length micromirror array lens changes according to the depth of the depthwise image being displayed. The variable focal length micromirror array lens has enough speed and focusing depth range for the realistic three-dimensional display.

Abstract: The present invention provides a micromirror array device specially Micromirror Array Lens device structure and method for making the same. By introducing a sub coating layer and an over coating layer with a high reflective metal layer, the reflective layer of the micromirrors is protected from environmental circumstances, oxidation, degradation, acid, base, and galvanic corrosion of the micro-mechanical structures. Also the new coating structure enhances the performance of the Micromirror Array Lens by reducing degradation of the reflectivity of the metal layer, by providing anti-reflection in the optically non-effective area, and by protecting the micro-mechanical structures.

Abstract: The present invention provides an optical micromirror device and their array device and method for making the same. By introducing a sub coating layer and an over coating layer with a high reflective metal layer, the reflective layer of the micromirrors is protected from environmental circumstances, oxidation, degradation, acid, base, and galvanic corrosion of the micro-mechanical structures. Also the new coating structure enhances the performance of the micromirror array device by reducing degradation of the reflectivity of the metal layer, by providing anti-reflection in the optically non-effective area, and by protecting the micro-mechanical structures.

Abstract: The present invention provides a small and fast zoom system using micromirror array lens (MMAL). Thanks to the fast response and compactness of the MMAL as well as absence of the macroscopic mechanical movements of lenses, the zoom system of the present invention fastens the speed of the zooming and reduces the space and weight for the zoom system. Also the present invention provides magnifying the area not on the optical axis and can compensate the aberration of the zoom system.

Abstract: A Micromirror Array Lens comprises a plurality of micromirrors arranged on a flat or a curved surface to reflect incident light. Each micromirror in the Micromirror Array Lens is configured to have at least one motion. The Micromirror Array Lens forms at least one optical surface profile reproducing free surfaces by using the motions of the micromirrors. The free surface can be any two or three-dimensional continuous or discrete reflective surface. The Micromirror Array Lens having the corresponding optical surface profile provides optical focusing properties substantially identical to those of the free surface. The Micromirror Array Lens can forms various optical elements such as a variable focal length lens, a fixed focal length lens, an array of optical switches, a beam steerer, a zone plate, a shutter, an iris, a multiple focal length lens, other multi-function optical elements, and so on.

Abstract: A two-dimensional image projection device using array of micromirror array lenses and a random scanning technique is invented. Using the random scanning technique, the light efficiency is nearly doubled than that of the prior art. The invention makes a brighter and less power consuming display device possible. Because each micromirror array lens of array of micromirror array lenses can scan whole image plane, a fast self diagnosis and correction technique can be introduced in displaying device. The Self diagnosis and correction technique makes display device to maintain image quality even a few tens percent of micromirrors do not work properly. Owing to the scanning characteristics of micromirror array lens, the image projection device can express the same number of pixels image with less number of micromirrors than the prior art. This also enables small sized two-dimensional image projector, which can be incorporated in portable electronic equipments.