Abstract: A sealing mechanism comprises a support member forming part of the semiconductor producing apparatus which has a vacuum chamber, a rotation shaft rotatably received in the support member, and at least three seal rings axially spaced apart from each other between the support member and the rotation shaft to form a first fluid chamber close to the atmosphere and a second fluid chamber close to the vacuum chamber. The first fluid chamber is vacuumized to have a first pressure, and the second fluid chamber is also vacuumized to have a second pressure which is lower than the first pressure. The first and second fluid chambers work together to enhance the sealing performance of the sealing mechanism.

Abstract: An optical stereolithographic apparatus performs optical stereolithography by preparing a mask on a light-transmissible member (31) on the basis of data for one layer with respect to optical stereolithography, exposing an unhardened resin layer (96) of photohardenable resin to light through the mask, and repeating an exposure operation. The optical stereolithographic apparatus has an optical system in which the light-transmissible member (31) and the unhardened resin layer (96) are spaced from each other at a predetermined distance, and the unhardened resin layer (96) of the photohardenable resin is subjected to a projection exposure through the mask.

Abstract: A sealing mechanism comprises a support member forming part of the semiconductor producing apparatus which has a vacuum chamber, a rotation shaft rotatably received in the support member, and at least three seal rings axially spaced apart from each other between the support member and the rotation shaft to form a first fluid chamber close to the atmosphere and a second fluid chamber close to the vacuum chamber. The first fluid chamber is vacuumized to have a first pressure, and the second fluid chamber is also vacuumized to have a second pressure which is lower than the first pressure. The first and second fluid chambers work together to enhance the sealing performance of the sealing mechanism.

Abstract: Herein disclosed is a robot arm mechanism comprising a first arm link mechanism and a second arm link mechanism, a robot arm driving mechanism for driving the first arm link mechanism and the second arm link mechanism, and a link retaining mechanism for pivotably retaining the first arm link mechanism and the second arm link mechanism, in which a third arm link and a fourth arm link of the first arm link mechanism are kept forward in a first rotation direction, in which the first arm link mechanism and the second arm link mechanism are extended, thereby enabling to prevent the quadric crank chain constituting the robot arm mechanism from being flattened out while the first arm link mechanism and the second arm link mechanism are extended, and improving resistance to deformation, in comparison with the conventional robot arm mechanism.

Abstract: A stereolithographic method which comprises irradiating the surface of a photohardenable resin composition with light through an image drawing mask capable of changing its mask image with the image drawing mask being moved in parallel to the surface of the photohardenable resin composition and the mask image of the image drawing mask being changed in synchronism with the movement of the image drawing mask according to the sectional shape pattern on the photohardened resin layer to be formed to form a photohardened resin layer having a predetermined sectional shape pattern and a stereolithographic apparatus therefor.

Abstract: Herein disclosed is a shaft sealing apparatus which comprises a vacuum casing formed with a vacuum chamber, a driving shaft having an outer cylindrical surface and movably extending in the vacuum chamber of the vacuum casing, and a sealing ring in the form of an annular ring shape and including a sealing lip held in contact with the outer cylindrical surface of the driving shaft, an annular spring member operative to impart a force to the sealing lip to ensure that the sealing lip is held in tight contact with the outer cylindrical surface of the driving shaft, and a peripheral portion radially outwardly extending from the sealing lip, in which the outer cylindrical surface of the driving shaft is smaller in surface roughness Ra than 0.1 (?m).

Abstract: In stereolithographic apparatus and method, a mask is formed on a light-transmissible member (glass plate) on the basis of stereolithographic data for one layer of photohardenable resin; photohardenable resin of one layer is successively supplied to form an unhardened resin layer of photohardenable resin; if necessary, a film having light transmission is attached onto the unhardened resin layer so as to cover the unhardened resin layer in close contact with the unhardened resin layer; the light-transmissible member having the mask on or above the film; the unhardened resin layer is plane-exposed to light through the mask to harden the photohardenable resin of the unhardened resin layer; and the light-transmissible member and the film are evacuated from the hardened photohardenable resin layer after the exposure by the exposure means, thereby obtaining a desired three-dimensional object through stereolithography. As the photohardenable resin may be used having a melting temperature ranging from 5 to 90° C.

Abstract: The invention is to offer an optical device which is capable of reducing the insertion loss comparing with a conventional one. The optical switch comprises a fiber collimator for input an light beam, a fiber collimator for output the light beam to the outside, an optical path switching element, an optical path switching element as well as a slider arranged in the optical paths between the fiber collimator and the fiber collimator to change the light path and the optical characteristics, a solenoid actuator for moving the slider, a guide mechanism for guiding the slider as the slider moves, a magnet for generating a magnetic field, the magnet being arranged at a position where the slider is pressed against the guide mechanism by means of a magnetic force of a magnetic field generated by the magnet.

Abstract: Herein disclosed is a robot arm mechanism comprising a first arm link mechanism and a second arm link mechanism, a robot arm driving mechanism for driving the first arm link mechanism and the second arm link mechanism, and a link retaining mechanism for pivotably retaining the first arm link mechanism and the second arm link mechanism, in which a third arm link and a fourth arm link of the first arm link mechanism are kept forward in a first rotation direction, in which the first arm link mechanism and the second arm link mechanism are extended, thereby enabling to prevent the quadric crank chain constituting the robot arm mechanism from being flattened out while the first arm link mechanism and the second arm link mechanism are extended, and improving resistance to deformation, in comparison with the conventional robot arm mechanism.

Abstract: Herein disclosed is a shaft sealing apparatus which comprises a vacuum casing formed with a vacuum chamber, a driving shaft having an outer cylindrical surface and movably extending in the vacuum chamber of the vacuum casing, and a sealing ring in the form of an annular ring shape and including a sealing lip held in contact with the outer cylindrical surface of the driving shaft, an annular spring member operative to impart a force to the sealing lip to ensure that the sealing lip is held in tight contact with the outer cylindrical surface of the driving shaft, and a peripheral portion radially outwardly extending from the sealing lip, in which the outer cylindrical surface of the driving shaft is smaller in surface roughness Ra than 0.1 (?m).

Abstract: In a screw type vacuum pump which includes a housing provided with a rotor chamber, a pair of screw rotors in mesh with each other rotably provided in the rotor chamber, a transfer chamber of gas formed between an inner wall of the housing and flutes of the aforesaid pair of screw rotors, and a suction port and an exhaust port communicated to the transfer chamber, the gas being sucked from the suction port into the transfer chamber and exhausted from the exhaust port, by providing the aforesaid exhaust port in a side face of the housing, it is possible to form a larger exhaust port, and a time until the port is blocked with deposits can be prolonged.

Abstract: A sealing mechanism comprises a support member forming part of the semiconductor producing apparatus which has a vacuum chamber, a rotation shaft rotatably received in the support member, and at least three seal rings axially spaced apart from each other between the support member and the rotation shaft to form a first fluid chamber close to the atmosphere and a second fluid chamber close to the vacuum chamber. The first fluid chamber is vacuumized to have a first pressure, and the second fluid chamber is also vacuumized to have a second pressure which is lower than the first pressure. The first and second fluid chambers work together to enhance the sealing performance of the sealing mechanism.

Abstract: Herein disclosed is a robot arm mechanism comprising: a first handling member for supporting and handling a first object; a second handling member for supporting and handling a second object; a first robot arm including a first arm link and a second arm link, the first end portion of the second arm link being pivotably connected to the second end portion of the first arm link, and the second end portion of the second arm link being connected to the first handling member to allow the first handling member to support the first object in a stable condition; a second robot arm including a first arm link and a second arm link, the first end portion of the second arm link being pivotably connected to the second end portion of the first arm link, the second arm link being inclined with respect to the second arm link of the first robot arm at a preset angle defined between the central line of the second arm link of the second robot arm and the central line of the second arm link of the first robot arm, and the second

Abstract: Herein disclosed is a robot arm mechanism comprising a first arm link mechanism and a second arm link mechanism, a robot arm driving mechanism for driving the first arm link mechanism and the second arm link mechanism, and a link retaining mechanism for pivotably retaining the first arm link mechanism and the second arm link mechanism, in which a third arm link and a fourth arm link of the first arm link mechanism are kept forward in a first rotation direction, in which the first arm link mechanism and the second arm link mechanism are extended, thereby enabling to prevent the quadric crank chain constituting the robot arm mechanism from being flattened out while the first arm link mechanism and the second arm link mechanism are extended, and improving resistance to deformation, in comparison with the conventional robot arm mechanism.

Abstract: An elevator apparatus has an actuating device including a sheave around which a rope engaged with an ascending and descending cage is wound and a driving section for rotating the sheave. The sheave is adapted to rotate to move the rope with its rotation. The actuating device is installed in a machine room provided on a top floor of a building in which the ascending and descending cage is disposed. The machine room faces with an elevator passage for the cage.

Abstract: In a fluidic device, a space (35) is formed in a passage block (26) to which a plurality of fluidic modules are connected and which is provided, in its inside, with fluid passages (43, 47, 51) for connecting the plurality of fluidic modules to one another. An internal body (36) is received in the space (35). Channels (37, 38, 39) are formed in an outer surface of the internal body so that the channels (37, 38, 39) constitute part of the fluid passages.

Abstract: A flex spline 1 used for a meshing type gear device includes an attachment portion 1a, a thin-thickness tubular portion 1b continuing to the attachment portion and capable of being elastically deformed, and external teeth 1c formed at the tip end portion of the tubular portion away from the attachment portion. The thin-thickness tubular portion 1b is formed in a conical shape with an opening angle ? which is tapered in a direction from the attachment portion 1a toward the external teeth 1c before inserting a wave generator 3.

Abstract: A polishing device having a table connected to a traction drive type reduction gear. The reduction gear includes an externally contacting shaft formed in a ring-shaped hollow cylinder and arranged at the center; a plurality of intermediate shafts which are equidistantly disposed at the circumference of the externally contacting shaft, at least one of which is an input shaft; and an internally contacting cylinder with which the intermediate shafts internally contact, and under free conditions, the externally contacting shaft formed in a hollow cylinder has a diameter which is a little bit larger than a diameter of an imaginary circle which externally contacts with a plurality of intermediate shafts whereby pressing load is created by means of deformation of the hollow cylinder.

Abstract: Each permanent magnet formed in an open-letter shape is divided into a plurality of parts, the divided magnets are respectively fitted in open letter-shaped inserting portions, and ribs are respectively provided in dividing portions of the permanent magnets. Accordingly, it is possible to prevent the breakage of pole connecting portions at an outermost periphery of the rotor as adjacent inner peripheral-side permanent magnets directly come into contact with and push the outer peripheral-side permanent magnets. Alternatively, an annular nonmagnetic material is provided on an outer peripheral portion of the rotor so as to cover the open letter-shaped permanent magnets and magnetic material portions inside the open-letter portions, whereby the rotor core is made resistant against breakage, and the flux leakage is minimized.

Abstract: If a hydraulic motor (23) (traveling wheel (27)) is rotated (or skidding) at high rate, and a hydraulic motor (24) is hardly rotated, a detection controller (68) compares the rotational speeds of both hydraulic motors (23, 24). Then the rotation detected by the rotation detectors (66, 67) to detect the traveling wheel (27) to be skidding, and moves a piston (71) to allow a negative brake (40) to give a braking force to the hydraulic motor (23), and rotate the hydraulic motor (24). In this way, this invention can release the traveling wheel from skidding without the use of a flow dividing valve.