Abstract: There is provided a thermal spray coating which has excellent plasma erosion resistance, which protects members of a plasma etching device from plasma erosion over a long period of term, and which can contribute to the stable production of devices and a longer life of members. The thermal spray material which is one aspect of this invention contains a composite compound containing a rare earth fluoride in the proportion of 40 mol % or more and 80 mol % or less, a magnesium fluoride in the proportion of 10 mol % or more and 40 mol % or less, and a calcium fluoride in the proportion of 0 mol % or more and 40 mol % or less.

Abstract: To provide a new tungsten-based thermal spray coating suitable as e.g. a component for plasma etching device using halogen gas, and a material for thermal spraying for obtaining the thermal spray coating. A thermal spray coating characterized by containing tungsten as a matrix phase and oxides containing silicon and boron as a dispersed phase, and a component for plasma etching device having such a thermal spray coating. A material for thermal spraying characterized by containing from 1 to 7 wt % of silicon, from 0.5 to 3 wt % of boron and the reminder being tungsten and unavoidable impurities, and a method for producing a thermal spray coating by thermally spraying the material for thermal spraying.

Abstract: To provide a Y2O3-containing deposition material having high plasma resistance, suitable as a plasma etching device member, and a method for producing it. A deposition material comprising a solid solution containing a metal oxide selected from ZrO2, HfO2 and Nb2O5, and Y2O3, wherein when the metal oxide is ZrO2, the ZrO2 content is from 2 to 12 mol %, when the metal oxide is HfO2, the HfO2 content is from 4 to 24 mol %, and when the metal oxide is Nb2O5, the Nb2O5 content is from 1 to 8 mol %, and the solid solution has a Y2O3 regular hexahedral crystal structure.

Abstract: An atomized powder has a heat-resistant alloy phase and a Cr7C3 phase dispersed in the heat-resistant alloy phase, and contains 20 to 46% of Ni, 22 to 43% of Cr, 4 to 13% of Al, 0.1 to 1.0% of Y, and 0.3 to 4.2% of C on a mass basis, and a remainder thereof includes Co and unavoidable impurities.

Abstract: The method for forming a coating of the present invention includes: a first step of applying a first solution containing a polysilazane to a surface of a metal substrate and heating the first solution to form a first coating on the surface of the metal substrate, and a second step of applying a second solution containing a polysilazane to a surface of the first coating and heating the second solution at a temperature lower than a heating temperature in the first step to form a second coating on the surface of the first coating, wherein a density of the first coating is less than 2.00 g/cm3, and a density of the second coating is 2.00 g/cm3 or more.

Abstract: A surface treatment method is for processing a surface of a substrate. The method includes irradiating a surface having unevenness with a laser beam satisfying all of the three following requirements: a power density in a range with a radius of 25 ?m from a center of a laser beam spot is 1.0×103 to 1.0×105 kW/cm2; a power density of an entire laser beam spot is 0.08 to 0.12 times the power density in the range with the radius of 25 ?m from the center of the laser beam spot; and an action time in the range with the radius of 25 ?m from the center of the laser beam spot is 1.7×10-6 to 1.0×10-5 seconds. The method leaves a certain roughness on the surface of the substrate while removing fine and sharp protrusions on the surface.

Abstract: A method for forming a coating, which includes: a first step of applying a first solution containing a polysilazane to a surface of a metal substrate, heating the first solution to make the first solution undergo conversion into silica and form a first coating having open defects, on the surface of the metal substrate, and a second step of applying a second solution containing a polysilazane to a surface of the first coating 1 to fill the open defects, and heating the second solution at a temperature lower than a heating temperature in the first step to make the second solution undergo conversion into silica and form a second coating on a surface of the first coating.

Abstract: A temperature control unit has a temperature control unit body, a temperature control part provided inside the temperature control unit body, which raises and lowers a surface temperature of the temperature control unit body on a side where a temperature control object is located, and a thin coating temperature measuring resistance part composed of a thermal sprayed coating. The thin coating temperature measuring resistance part is formed over a certain range in a surface on the side where the temperature control object is located, and which is provided inside the temperature control unit body on a side closer to the temperature control object than the temperature control part. The thin coating temperature measuring resistance part can accurately measure an average temperature of a temperature control surface.

Abstract: To provide a surface treatment method for smoothing the surface of a ceramic thermal spray coating, and a ceramic thermal spray coating subjected to the surface smoothing treatment. A surface treatment method for a ceramic thermal spray coating, which comprises jetting a slurry containing a liquid having a viscosity at a temperature of 20° C. of 10 mPa/s or lower and a powder medium having a polyhedral structure and having a median diameter (D50) of from 1 to 50 ?m with a content of the powder medium of from 1 to 50 vol %, against a surface of a ceramic thermal spray coating, using a compressed gas under a pressure of from 0.01 to 1.0 MPa, to smooth the surface of the ceramic thermal spray coating.

Abstract: An atomized powder has a heat-resistant alloy phase and a Cr7C3 phase dispersed in the heat-resistant alloy phase, and contains 20 to 46% of Ni, 22 to 43% of Cr, 4 to 13% of Al, 0.1 to 1.0% of Y, and 0.3 to 4.2% of C on a mass basis, and a remainder thereof includes Co and unavoidable impurities.

Abstract: A coating material and a surface coating method for an in-furnace structure, and an in-furnace structure that are excellent in resistance to corrosion by the sulfur group. The coating material for an in-furnace structure used in a high-temperature corrosive environment including a sulfur group element includes as component composition, by mass, Co: 45% to 72%, both inclusive, Mo: 20% to 35%, both inclusive, Cr: 8% to 25%, both inclusive, and Si: 0.1% to 5%, both inclusive, and substantially without Ni. In the surface coating method used in a high-temperature corrosive environment including a sulfur group element, a coating is formed on a surface of the in-furnace structure by overlay welding or thermal spraying of the above-described coating material. In the in-furnace structure used in a high-temperature corrosive environment including a sulfur group element, a coating using the above-described coating material is formed on a surface of the in-furnace structure.

Abstract: A heater component has a substrate part and a thin coating heater which is equipped outside this substrate part and generates heat by power supply. The thin coating heater is formed of a thermal sprayed coating. The thin coating heater has a heater body and a heater extension part. The heater body is arranged on a first end face of the substrate part. The heater extension part is extended from the heater body to a second end face of the substrate part through a side surface of the substrate part. A tip part of the heater extension part is a heater power supplying part for supplying electric power to the heater body.

Abstract: A Johnsen-Rahbek force type electrostatic chuck including: a metal substrate; an electrode for electrostatic attraction provided on the metal substrate with an insulating layer interposed between the metal substrate and the electrode for electrostatic attraction; and a dielectric layer constituting an electrostatic attraction surface in contact with a workpiece. The dielectric layer includes a ceramic spray coating and a sealing component with which pores of the ceramic spray coating are filled, and the sealing component contains a metal organic salt containing a rare earth element.

Abstract: There is provided a thermal spray coating which has excellent plasma erosion resistance, which protects members of a plasma etching device from plasma erosion over a long period of term, and which can contribute to the stable production of devices and a longer life of members. The thermal spray material which is one aspect of this invention contains a composite compound containing a rare earth fluoride in the proportion of 40 mol % or more and 80 mol % or less, a magnesium fluoride in the proportion of 10 mol % or more and 40 mol % or less, and a calcium fluoride in the proportion of 0 mol % or more and 40 mol % or less.

Abstract: To provide a new tungsten-based thermal spray coating suitable as e.g. a component for plasma etching device using halogen gas, and a material for thermal spraying for obtaining the thermal spray coating. A thermal spray coating characterized by containing tungsten as a matrix phase and oxides containing silicon and boron as a dispersed phase, and a component for plasma etching device having such a thermal spray coating. A material for thermal spraying characterized by containing from 1 to 7 wt % of silicon, from 0.5 to 3 wt % of boron and the reminder being tungsten and unavoidable impurities, and a method for producing a thermal spray coating by thermally spraying the material for thermal spraying.

Abstract: A Johnsen-Rahbek force type electrostatic chuck including: a metal substrate; an electrode for electrostatic attraction provided on the metal substrate with an insulating layer interposed between the metal substrate and the electrode for electrostatic attraction; and a dielectric layer constituting an electrostatic attraction surface in contact with a workpiece. The dielectric layer includes a ceramic spray coating and a sealing component with which pores of the ceramic spray coating are filled, and the sealing component contains a metal organic salt containing a rare earth element.

Abstract: The heater component (1) has a substrate part (2), and a thin coating heater (4) which is equipped outside this substrate part (2) and generates heat by power supply. The thin coating heater (4) is formed of a thermal sprayed coating. The thin coating heater (4) has a heater body (10) and a heater extension part (11). The heater body (10) is arranged on a first end face (2a) of the substrate part (2). The heater extension part (11) is extended from the heater body (10) to a second end face (2b) of the substrate part (2) through a side surface (2c) of the substrate part (2). A tip part (11s) of the heater extension part (11) is a heater power supplying part (12) for supplying electric power to the heater body (10).

Abstract: Provided is a heat generating component of which volume resistivity hardly varies even if used repeatedly at a high temperature for a long period of time. Since a thin coating heater part (13) formed on a substrate part (12) is composed of a thermal sprayed coating containing TixOy (wherein, 0<y/x<2.0 is satisfied), obtained is a heat generating component (11) having volume resistivity which is suitable for a heater and hardly varies even if prescribed temperature change and temperature keeping are repeated.

Abstract: A component for a hot-dip metal plating bath includes a base material and a thermal spray coating disposed to cover a surface of the base material. The base material includes ferritic stainless steel that contains: C: 0.10% to 0.50% by mass; Si: 0.01% to 4.00% by mass; Mn: 0.10% by mass to 3.00% by mass; Cr: 15.0% to 30.0% by mass; a total of Nb, V, Ti, and Ta: 0.9% by mass to 5.0% by mass; and a balance of Fe and unavoidable impurities. The ferritic stainless steel includes a microstructure that includes a ferrite phase as a main phase and a crystallized carbide, an area fraction of a Nb carbide, a Ti carbide, a V carbide, a Ta carbide, and a composite carbide thereof to the crystallized carbide of 30% or more. The hot-dip metal plating bath contains 50% by mass or more of Al.

Abstract: A sliding member capable of improving friction characteristics under an environment of a lubricant containing Mo, and a production method therefor, is provided. The sliding member contains a sliding portion formed of a metallic material having a Ti-containing thermally sprayed coating on a surface layer part of the sliding portion. The sliding member slides under the environment of the lubricant containing Mo as an additive, in which active Ti exposed on a surface by sliding accelerates decomposition reaction of the additive contained in the lubricant to form a molybdenum disulfide-containing low-friction coating having low friction on the surface of the sliding portion.