Abstract: A vapor phase growth substrate is conveyed into a heated atomosphere, and vapor phase growth gas is supplied from a nozzle connected to a gas supply means to the substrate in the middle portion of conveyance. Process program information relating to the conveying speed of the substrate, the heating temperature, the gas flow rate and the types of the gases being used is stored, in advance, in a memory of a controller, the information is read from the memory, to adoptively control the conveying speed of the substrate, the heating temperature, and the gas supply.

Abstract: This invention provides an acceleration control apparatus suitable for use as various kinds of feed control. A comparator circuit compares a command value supplied from an acceleration commanding unit and an actual value of acceleration detected by a signal generator connected to a motor to be controlled. A voltage command computing circuit provided at a rear stage of the comparator circuit effect predetermined processing of an acceleration deviation signal on the basis of the result of this comparison to output the resultant command voltage to a driving control circuit. This command voltage is output to the motor and thus acceleration of the motor is controlled.

Abstract: A method of rapidly discharging a molten metal from its supply system of a pressurized holding furnace having an open feeding chamber provided at one side of a pressure chamber with a suction pipe of a delivery pump, said pressure chamber having an inlet valve and an outlet valve for a pressure gas, in which the pressure chamber is pressurized to keep a constant level of the molten metal in the feeding chamber for maintaining a constant suction head of the delivery pump is disclosed, wherein the suction pipe is situated at a higher position than such a level of the molten metal in the feeding chamber that is lowered when a pressure in the pressure chamber is released while the supply system including the delivery pump is positioned upwardly above the suction pipe, and in that the outlet valve of the pressure chamber is opened when the molten metal is discharged from the supply system for allowing the molten metal to return into the pressure chamber, thereby rapidly lowering the metal level of the feeding cham

Abstract: In a method of drawing a desired pattern on a target through exposure thereof with an electron beam, a pattern area on the target surface is defined by first units of exposed areas arranged in rows and columns and is exposed by a first electron beam. A background area other than the pattern area on the target surface is also defined by secondary units of exposed areas which are arranged in rows and columns, and is exposed by a secondary electron beam to compensate for the proximity effect. The secondary units have a size larger than that of the first units and the second electron beam forms on the target surface a second beam spot which is larger than the first beam spot formed on the target surface by the first electron beam so that the background area is exposed in a reduced period of time.

Abstract: A method and apparatus for correcting backlash are disclosed. The backlash width which may occur in the driving device is predetermined and one of the movable directions is selected as a reference moving direction. Further, the state where a movement is made in the reference direction, i.e. the state where the driving device and the driven member come into contact with each other and the positional relationship is unambiguously determined, is made to be a reference state. In this state, a position setting is made that a position detected by a position detector of an absolute position detector secured to the side of the driving means and a position of the driven member coincide with each other. When the operation is performed, a moving direction of an action carried out in response to a movement command immediately after power up is compared with the preset reference moving direction and if both directions do not coincide with each other an excessive movement by the value of the backlash width is made.

Abstract: A laser picture drawing apparatus comprises a movable stage for supporting a screen having a surface on which a figure is to be drawn, a laser oscillator for emitting a laser beam, a galvanomirror for deflecting the laser beam, a F-.theta. for focussing the deflected beam a focal point on the surface to be drawn upon, and a mirror disposed movably along an optical axis between the F-.theta. lens and the surface to be drawn upon, for reflecting the beam from the F-.theta. lens in a figure-drawing direction. The reflector is moved along the optical axis at a distance equal to the thickness of the screen.

Abstract: A casting method and an apparatus therefor are disclosed, in which a molten material in a retaining furnace is poured through a supplying conduit directly into a cavity of a mold at a low pressure. A portion of the conduit is provided with an electromagnetic induction pump while the furnace is provided movably therein with a level-detecting sensor for detecting a level of the molten material in the furnace and generating a signal which provides instructions of computing, commanding and controlling an excitation voltage of the electromagnetic induction pump, thereby to optimize the injection pressure and the amount of the molten material in the conduit when the molten material is poured into the cavity of the mold through the conduit.

Abstract: A water film surface is irradiated with light from a detecting unit's light source. Light reflected from the water film surface is converted into an electrical signal by a sensor (photoelectric converting means) in the unit. The converted electrical signal is supplied to a processing unit through a cable. The processing unit calculates the water film thickness based on the electrical signal. The calculated thickness is displayed on a display in the detecting unit.

Abstract: A polishing machine has an upper polishing plate and a lower polishing plate provided below the upper polishing plate. The upper polishing plate has slurry passages. Plugs for supplying slurry are detachably quick coupled to the slurry passages. A piece of polishing pad is bonded to the lower surface of the upper polishing plate. After a spent polishing pad has been removed and a fresh polishing pad has been attached to the lower surface of the upper polishing plate, a hole-cutter is downwardly inserted in each slurry passage until it pierces the fresh polishing pad, thus cutting a hole in the polishing pad.

Abstract: A barrel-type epitaxial vapor phase growing apparatus in which a susceptor for mounting wafers to be treated on a plurality of plates is rotatably hung by a rod inside a bell jar. Purge gases are supplied to the casing housing the drive mechanism and a baffle directs the gases along the rod and into the susceptor. The purge gases carry dust which is thus kept away from the wafers on the outside of the susceptor as it passes through the susceptor to an exhaust at the lower end of the reaction chamber. The flowing purge gases also cool the susceptor more quickly after treatment.

Abstract: A polishing machine for polishing the surfaces of the workpieces to be processed has upper and lower surface plates which are rotated relative to each other. A plurality of carriers are placed between the upper and lower surface plates and each of the carriers has a plurality of bores into which the workpieces are fitted. These carriers are engaged with both the sun gear and the internal ring gear within the same plane. In account of the sun gear and the internal ring gear, the carriers are rotated round the sun gear, turning round their own axes. The internal ring gear can be lifted up and down by a lift mechanism. The sun gear is slidably attached to a hollow driving shaft and has a feed screw which is engaged with a feed nut. This feed nut is rotatably fitted onto the hollow driving shaft in such a way that the nut is limited of its movement in the axial direction.

Abstract: In an apparatus which measures an area factor of an image portion of an image-bearing member, such as a printing plate used in an offset press, having image and non-image portions with different reflectivities, a single light source and a single photoelectric conversion element are used for measuring reflected light from the image-bearing member by optically scanning the image-bearing member. An arithmetic operation unit is provided so that the reflected light data are measured on the basis of electrical signals from the photoelectric conversion element each time a light beam moves for a unit distance in the X axis direction of the image-bearing member, and the corresponding reflected light data are added in the Y axis direction to obtain area data for each unit region in the X axis direction.

Abstract: A cassette retaining device comprises a pair of retaining mechanisms disposed respectively on both sides of the top surface of a sample table and pressing respectively on both sides of the top surface of a cassette to hold the cassette in said predetermined position between said retaining mechanisms and the sample table. Each retaining mechanism includes a presser capable of moving between a first position where the presser presses on a side portion of the top surface of the cassette to hold the cassette and a second position where the presser is separated from the top surface of the sample table to allow the cassette to be inserted or removed from between the presser and the sample table, a rocking arm rockable around a first pin relatively to the sample table and bearing the presser so that the presser may rock around a second pin parallel to the first pin, and a spring urging the rocking arm to rock in one direction, thereby locating the presser in the first position.