Patents Assigned to Tower Semiconductor Ltd.
  • Patent number: 9865632
    Abstract: A global shutter image sensor formed on an n-type bulk substrate and including pixels having pinned n-type photodiodes and memory nodes formed in designated n-doped epitaxial layer regions that are separated from the bulk substrate by a p-type vertical (potential) barrier implant. Each memory node includes both a buried channel portion and a contiguous pinned diode portion having different doping levels such that an intrinsic lateral electrical field drives electrons from the buried channel portion into the pinned diode portion during global charge transfer from an adjacent photodiode. The p-type vertical (potential) barrier implant is coupled to ground, and the bulk substrate is switched between a low integration voltage level during integration periods, and a high reset voltage level, whereby the photodiodes are globally reset without requiring reset transistors. P-type sinker implant sections and p-type vertical barrier implants form box-like diffusions around each pixel's photodiode and memory node.
    Type: Grant
    Filed: July 24, 2017
    Date of Patent: January 9, 2018
    Assignee: Tower Semiconductor Ltd.
    Inventors: Assaf Lahav, Amos Fenigstein, Yakov Roizin, Avi Strum
  • Publication number: 20180005820
    Abstract: A porous layer is described. The porous layer comprises a solidified sol-gel inorganic material having a distribution of nanometric voids, wherein at least some of nanometric voids are at least partially coated internally by carbon or a hydrophobic substance containing carbon.
    Type: Application
    Filed: August 30, 2017
    Publication date: January 4, 2018
    Applicants: Ramot at Tel-Aviv University Ltd., Tower Semiconductor Ltd.
    Inventors: Simon LITSYN, Gil ROSENMAN, Amir HANDELMAN, Yakov ROIZIN
  • Patent number: 9837411
    Abstract: A semiconductor die that may include a substrate; an epitaxial layer; a metal layer; a first transistor; and a metal via that surrounds the first transistor, extends between the metal layer and the substrate, and penetrates the substrate.
    Type: Grant
    Filed: July 14, 2015
    Date of Patent: December 5, 2017
    Assignee: TOWER SEMICONDUCTORS LTD.
    Inventors: Sharon Levin, Alexey Heiman, Sagy Levy
  • Patent number: 9835589
    Abstract: Gas sensing using MTJ elements to capture/store gas concentration level data for readout at room temperature. In one embodiment, during reset the MTJ elements are heated above blocking temperatures of their storage layers while applying a first magnetic biasing force to set initial magnetic orientations. During gas sensing, reaction heat from a gas sensing element combines with control heat to raise each MTJ element's temperature from a work point temperature above its blocking temperature only when the target gas exceeds an associated concentration level, whereby a second magnetic biasing force causes the magnetic orientation to switch directions. During readout, read currents are measured to determine the MTJ elements' final resistance states, which indicate their switched/non-switched states, and the resistance states are correlated with stored data to determine the measured gas concentration level. The MTJ elements are cooled after reset and gas sensing to facilitate accurate CDS readout data.
    Type: Grant
    Filed: December 3, 2015
    Date of Patent: December 5, 2017
    Assignee: Tower Semiconductor Ltd.
    Inventors: Yakov Roizin, Menachem Vofsy
  • Patent number: 9812566
    Abstract: A laterally diffused metal oxide semiconductor (LDMOS) device that may include an oxide region that comprises a bottom surface; a drain that is positioned between a left drift region and a right drift region and below the bottom surface; wherein the oxide region further comprises a first sloped surface and a second sloped surface; wherein a first angle between the first sloped surface and the bottom surface does not exceed twenty degrees; and wherein a second angle between the second sloped surface and the bottom surface of the oxide region does not exceed twenty degrees.
    Type: Grant
    Filed: July 3, 2016
    Date of Patent: November 7, 2017
    Assignee: TOWER SEMICONDUCTORS LTD.
    Inventors: Sagy Levy, Sharon Levin, David Mistele
  • Patent number: 9806174
    Abstract: A double-RESURF LDMOS transistor has a gate dielectric structure including a shallow field “bump” oxide region and an optional raised dielectric structure that provides a raised support for the LDMOS transistor's polysilicon gate electrode. Fabrication of the shallow field oxide region is performed through a hard “bump” mask and controlled such that the bump oxide extends a minimal depth into the LDMOS transistor's drift (channel) region. The hard “bump” mask is also utilized to produce an N-type drift (N-drift) implant region and a P-type surface effect (P-surf) implant region, whereby these implants are “self-aligned” to the gate dielectric structure. The N-drift implant is maintained at Vdd by connection to the LDMOS transistor's drain diffusion. An additional Boron implant is utilized to form a P-type buried layer that connects the P-surf implant to the P-body region of the LDMOS transistor, whereby the P-surf implant is maintained at 0V.
    Type: Grant
    Filed: September 1, 2016
    Date of Patent: October 31, 2017
    Assignee: Tower Semiconductor Ltd.
    Inventors: Sagy Levy, Sharon Levin, Noel Berkovitch
  • Patent number: 9766136
    Abstract: Some demonstrative embodiments include apparatuses, devices and/or methods of detecting leakage in a chamber. For example, an apparatus may include a leakage detector to detect leakage in a chamber based on at least one set of power values corresponding to at least one respective heating zone of the chamber, the set of power values including a plurality of power values corresponding to a respective plurality of manufacturing processes performed by the chamber, wherein a power value of a manufacturing process is based on a plurality of power control values to control the heating zone during the manufacturing process.
    Type: Grant
    Filed: June 9, 2014
    Date of Patent: September 19, 2017
    Assignee: TOWER SEMICONDUCTOR LTD.
    Inventors: Ariel Deutsher, Doron Kiwi, Guy Backner
  • Patent number: 9741817
    Abstract: A method for manufacturing a metal insulator metal (MIM) trench capacitor, the method may include forming a cavity in an Intermetal Dielectric stack, wherein a bottom of the cavity exposes a lower metal layer; wherein the Intermetal Dielectric stack comprises a top dielectric layer; depositing a first metal layer on a bottom of a cavity and on sidewalls of the cavity; depositing a sacrificial layer over the first metal layer; filling the cavity with a filling material; removing, by a planarization process, a portion of the sacrificial layer positioned above the top dielectric layer and a portion of the first metal layer positioned above the top dielectric layer to expose an upper portion of the sacrificial layer and an upper portion of the first metal layer; forming a recess by removing the upper portion of the sacrificial layer and the upper portion the first metal layer while using the filling material as a mask; removing the filling material by a first removal process that is selective to the sacrificial l
    Type: Grant
    Filed: January 21, 2016
    Date of Patent: August 22, 2017
    Assignee: TOWER SEMICONDUCTOR LTD.
    Inventors: Michael Lisiansky, Amos Fenigstein, Yakov Roizin, Hironori Matsuyoshi, Toshiaki Ohmi
  • Patent number: 9728632
    Abstract: A vertical DMOS device implements one or more deep silicon via (DSV) plugs, thereby significantly reducing the layout area and on-resistance (RDSON) of the device. The DSV plugs extend through a semiconductor substrate to contact a conductively doped buried diffusion region, which forms the drain of the vertical DMOS device. Methods for fabricating the vertical DMOS device are compatible with conventional sub-micron VLSI processes, such that the vertical DMOS device can be readily fabricated on the same integrated circuit as CMOS devices and analog devices, such as lateral double-diffused MOS (LDMOS) devices.
    Type: Grant
    Filed: November 30, 2014
    Date of Patent: August 8, 2017
    Assignee: Tower Semiconductor Ltd.
    Inventors: Sharon Levin, Zachary K. Lee, Shye Shapira
  • Patent number: 9729808
    Abstract: A single-exposure high dynamic range (HDR) image sensor utilizes a charge amplifier having a selectively coupled conversion capacitor to read a single photodiode charge during a multi-phase readout operation. An overflow readout is performed during the photodiode charge integration phase, and utilizes the conversion capacitor to read overflow signals indicating rapidly rising photodiode charges caused by extreme exposure conditions, which also prevents saturation of the photodiode. At the end of the integration phase, the remaining photodiode charge is then measured using two readouts: a high sensitivity readout during which the storage capacitor de-coupled to accurately measure low-light conditions, and a low sensitivity readout during which the remaining photodiode charge is stored on the storage capacitor to provide normal light image data. Final single exposure HDR image data is then calculated by summing the overflow image data with the high-sensitivity and/or the low-sensitivity image data.
    Type: Grant
    Filed: August 10, 2015
    Date of Patent: August 8, 2017
    Assignee: Tower Semiconductor Ltd.
    Inventors: Amos Fenigstein, Raz Reshef, Shay Alfassi, Guy Yehudian
  • Patent number: 9729810
    Abstract: A global shutter (GS) image sensor pixel includes a pinned photodiode connected to a memory node by a first transfer gate transistor, and a floating diffusion connected to the memory node by a second transfer gate transistor. The memory node includes a buried channel portion disposed under the first transfer gate transistor and a contiguous pinned diode portion disposed between the first and second transfer gate transistors, where the two memory node portions have different doping levels such that an intrinsic lateral electrical field drives electrons from the buried channel portion into the pinned diode portion. The floating diffusion node similarly includes a buried channel portion disposed under the second transfer gate transistor and a contiguous pinned diode portion that generate a second intrinsic lateral electrical field that drives electrons into the pinned diode portion of the floating diffusion. A 6T CMOS pixel is disclosed that facilitates low-noise CDS readout.
    Type: Grant
    Filed: March 23, 2015
    Date of Patent: August 8, 2017
    Assignee: Tower Semiconductor Ltd.
    Inventors: Assaf Lahav, Amos Fenigstein, Yakov Roizin, Avi Strum
  • Patent number: 9640607
    Abstract: According to an embodiment of the invention there may be provided a die that may include a first capacitor layer that comprises (a) a first capacitor conductive plate, and (b) a first capacitor layer dielectric material that partially surrounds the first capacitor conductive plate; a first conductor; an intermediate metal layer that comprises (a) an intermediate metal layer conductor that is made of Copper, and (b) an intermediate metal layer dielectric material that partially surrounds the intermediate metal layer conductor; wherein the first conductor is positioned between a substrate of the die and the intermediate metal layer; a redistribution layer that comprises (a) a redistribution layer conductor that is electrically coupled to an interface pad of the die, (b) a second capacitor conductive plate, and (c) a redistribution layer dielectric material that partially surrounds the redistribution layer conductor and the second capacitor conductive plate; wherein a certain portion of the intermediate metal la
    Type: Grant
    Filed: March 4, 2015
    Date of Patent: May 2, 2017
    Assignee: TOWER SEMICONDUCTOR LTD.
    Inventor: Sharon Levin
  • Patent number: 9514818
    Abstract: A two-terminal, single-poly floating gate memristor includes parallel-connected, asymmetrical readout and injection transistors having a shared floating gate structure, and a diode connected to drain terminals of the asymmetrical transistors. The injection transistor is configured with relatively high source/drain-to-gate capacitances to facilitate EEPROM-type (floating gate) program/erase operations (e.g., hot carrier injection and band-to-band tunneling of holes), and the readout transistor is configured (e.g., using a threshold voltage implant) to facilitate low-voltage readout operations. The diode is configured to function both as a limiting resistor that prevents over-erase during high-voltage erase operations, and also to prevent sneak (leakage) currents during low-voltage readout operations. The diode is implemented using either p-n junction or Schottky diode configurations formed on bulk silicon, or a lateral diode configurations disclosed for SOI substrates.
    Type: Grant
    Filed: May 4, 2016
    Date of Patent: December 6, 2016
    Assignee: Tower Semiconductor Ltd.
    Inventors: Yakov Roizin, Evgeny Pikhay
  • Patent number: 9484800
    Abstract: A soft-start circuit for a switching regulator (e.g., a buck converter) in which the soft-start circuit supplies a DC ramp voltage to the switch regulator's pre-driver such that the pulsed gate voltage supplied to power switch during the initial soft-start operating phase includes a series of pulses having amplitudes that respectively gradually change (e.g., sequentially increase from 0V to the system operating voltage), whereby the regulated output voltage passed from the power switch to the load is gradually increased at a rate that prevents voltage overshoot and inrush current. The DC ramp voltage is generated, for example, by a current source that begins charging a capacitor at the beginning of the initial soft-start operating phase. This arrangement allows a constant-frequency ramp signal generated by a single oscillator to be shared by multiple switch regulators that are fabricated on an IC chip.
    Type: Grant
    Filed: March 5, 2014
    Date of Patent: November 1, 2016
    Assignee: Tower Semiconductor Ltd.
    Inventors: Alexander Faingersh, Erez Sarig
  • Patent number: 9484454
    Abstract: A double-RESURF LDMOS transistor has a gate dielectric structure including a shallow field “bump” oxide region and an optional raised dielectric structure that provides a raised support for the LDMOS transistor's polysilicon gate electrode. Fabrication of the shallow field oxide region is performed through a hard “bump” mask and controlled such that the bump oxide extends a minimal depth into the LDMOS transistor's drift (channel) region. The hard “bump” mask is also utilized to produce an N-type drift (N-drift) implant region and a P-type surface effect (P-surf) implant region, whereby these implants are “self-aligned” to the gate dielectric structure. The N-drift implant is maintained at Vdd by connection to the LDMOS transistor's drain diffusion. An additional Boron implant is utilized to form a P-type buried layer that connects the P-surf implant to the P-body region of the LDMOS transistor, whereby the P-surf implant is maintained at 0V.
    Type: Grant
    Filed: November 14, 2013
    Date of Patent: November 1, 2016
    Assignee: Tower Semiconductor Ltd.
    Inventors: Sagy Levy, Sharon Levin, Noel Berkovitch
  • Patent number: 9461039
    Abstract: According to an embodiment of the invention there may be provided a die that may include (a) a first region of a first type; (b) a first conductor that contacts the first region; (c) a substrate having a substrate portion of the first type; wherein the substrate portion contacts the first region; an intermediate region of a second type; wherein the first type and the second type are selected from an n-type semiconductor and a p-type semiconductor; wherein the first type differs from the second type; (d) a second region of the second type; (e) a second conductor that contacts the second region; (f) a third region of the second type; (g) a third conductor that contacts the third region; (h) a fourth region of the first type; wherein the third region contacts the fourth region and does not contact the intermediate region; (i) a fourth conductor that contacts the intermediate region to form a first Schottky diode.
    Type: Grant
    Filed: February 15, 2015
    Date of Patent: October 4, 2016
    Assignee: TOWER SEMICONDUCTOR LTD.
    Inventors: Sharon Levin, David Mistele
  • Patent number: 9431455
    Abstract: A method for fabricating image sensors and other semiconductor ICs that controls the amount of hydrogen generated during back-end processing. The back-end processing includes forming multiple metallization layers after front-end processing is completed (i.e., after forming the pre-metal dielectric), where each metallization layer includes a patterned aluminum structure, an interlevel dielectric (ILD) layer including TEOS-based oxide formed over the patterned aluminum structure. A cap layer including a low-moisture content oxide such as silane oxide (i.e., SiO2 generated by way of a silane CVD process) is formed over at least one ILD layer. The cap layer serves as an etch-stop for the subsequently-formed metal layer of a next metallization layer by isolating the underlying ILD material from the plasma environment during aluminum over-etch, which significantly reduces the production and migration of hydrogen into front-end structures.
    Type: Grant
    Filed: November 9, 2014
    Date of Patent: August 30, 2016
    Assignee: Tower Semiconductor, Ltd.
    Inventors: Amos Fenigstein, Yakov Roizin, Avi Strum
  • Patent number: 9407104
    Abstract: A charger for recharging the batteries of a portable electronic device even when no external power source is available. A battery or cell is installed within the charger, and when no access is available to a fixed power source into which the charger can be plugged, the internal battery or cell can be used to recharge the electronic device. The internal battery can be a primary battery or a secondary battery. In the latter case, the internal battery can be maintained in a charged state by means of circuitry which, when the charger is plugged into the external power source, charges the internal battery as well as the battery of the electronic device. The external power source can be either an AC power wall socket, in which case the charger includes AC/DC voltage conversion circuits, or a car lighter socket, or the DC output of a conventional wall charger.
    Type: Grant
    Filed: August 27, 2012
    Date of Patent: August 2, 2016
    Assignee: Tower Semiconductor Ltd.
    Inventors: Dror Manor, Amnon Saar, Guy Weinstein, Daniel Breiting
  • Patent number: 9379194
    Abstract: A back-end metallization structure for non-volatile memory (NVM) and other semiconductor devices including low-moisture-content oxide cap layers that suppress the creation and migration of mobile hydrogen atoms/ions during back-end processing. The metallization structure includes multiple metallization layers formed over front-end e.g., polysilicon (floating gate) structures and a pre-metal dielectric layer. Each metallization layer includes a patterned metal (e.g., aluminum) structure covered by an interlevel dielectric (ILD) layer (e.g., BPSG, USG or FSG). Each cap layer is formed using a high-density low-moisture content oxide such as silane oxide (i.e.
    Type: Grant
    Filed: November 9, 2014
    Date of Patent: June 28, 2016
    Assignee: Tower Semiconductor Ltd.
    Inventors: Micha Gutman, Yakov Roizin, Allon Parag, Vladislav Dayan
  • Patent number: 9356169
    Abstract: Some demonstrative embodiments include devices and/or methods of Back Side Illumination (BSI) Complementary Metal-Oxide-Semiconductor (CMOS) pixel array. For example, a BSI CMOS pixel array may include a plurality of pixels, a pixel of the plurality of pixels may include one or more Metal-Oxide-Semiconductor (MOS) transistors comprising one or more well regions, a well region of the one or more well regions comprising an N-Well (NW) region or a P-well (PW) region; a photodiode; an epitaxial (epi) layer comprising an absorption area and a collection area, the absorption area to absorb incoming photons and to generate electrons responsive to absorbed photons, and the collection area connecting the absorption area to the photodiode to provide the electrons from the absorption area to the photodiode; and a barrier layer separating the absorption area from the one or more well regions.
    Type: Grant
    Filed: July 6, 2015
    Date of Patent: May 31, 2016
    Assignee: Tower Semiconductor Ltd.
    Inventors: Assaf Lahav, Amos Fenigstein