Abstract: A discharge lamp with a high output power in which an increase of the current to be supplied to the discharge lamp can be enabled without the need to enlarge the discharge lamp and the surrounding system. The discharge lamp includes an arc tube having a pair of opposed electrodes, at least one of the electrodes having an electrode body in which a hermetically sealed interior space is formed, and a heat conductor partially filling the hermetically sealed interior space. This heat conductor consists of metal that has a higher thermal conductivity or a lower melting point than the metal comprising the electrode body.

Abstract: An ultra-high pressure high pressure discharge lamp device in which the lamp voltage and the distance between the lamp electrodes can be kept stable is achieved by an operating device supplying an alternating current with rectangular waves to the discharge lamp and control is exercised such that a lower boundary value is set and the operating voltage is increased by reducing the operating frequency of the discharge lamp by a given amount, when the operating voltage of the discharge lamp is below the set lower boundary value. Furthermore, control can also be exercised in such a way that an upper boundary value is set and the operating voltage is reduced by increasing the operating frequency of the discharge lamp by a given amount when the operating voltage of the discharge lamp exceeds the set upper boundary value.

Abstract: A flash lamp with high radiation intensity which has a discharge vessel having a part in the region between the electrodes which has a smaller diameter than the inside diameter of the discharge vessel in the area in which the cathode is located, and the inner surface of the part of smaller diameter being provided with a heat-resistant material. A xenon gas is filled into the vessel at a room temperature pressure from 1.3×103 Pa to 1.6×105 Pa or a krypton gas is filled at 7×102 Pa to 1.3×105 Pa. A power supply operates the flash lamp with a full width at half maximum of the current from 150 ?s to 2 ms and a current density in the part with a small diameter of at least 2110 A/cm2 when xenon is used and at least 2930 A/cm2 when krypton is used.

Abstract: To form side tubes with adequate resistance to pressure, and to provide a short-arc, ultra-high-pressure discharge lamp having such side tubes, and to provide a method of manufacturing such a lamp, a short-arc, ultra-high-pressure discharge lamp (1) has a luminescent tube (10) within which a pair of electrodes (2,2) face each other, and side tubes (11) that extend from opposite sides of the luminescent tube and in which a portion of the electrodes is sealed and in which a small space (B) is formed to enable the electrodes (2) to expand and contract freely without compression along their axes due to a difference in the indices of expansion of the materials that make up the electrodes (2) and the side tubes (11).

Abstract: The discharge lamp of the invention includes a main discharge vessel which is filled with a discharge medium for the main discharge via a pair of opposed main discharge electrodes, and has a first electrode sealing part and a second electrode sealing part for connecting the pair of main discharge electrodes. The advantage of the invention is in a starting electrode arranged such that it does not come into contact with the main discharge space, and an auxiliary light source which includes an auxiliary discharge vessel located adjacent on the side of one of the electrode sealing parts and which is not made integral with the electrode sealing parts. The auxiliary light source is filled with a discharge medium, and has a first outer electrode on the outside of the auxiliary discharge vessel.

Abstract: To both increase the efficiency of conversion into EUV radiation energy and also increase the amount of emerging EUV radiation in an EUV source a discharge tube is connected to a gas supply space for supply of the discharge gas which in located radially with respect to an optical axis. The discharge gas is supplied to the discharge space through the gas supply space, passes through the center opening of the anode, emerges from the discharge part and is afterwards evacuated from an evacuation opening. The anode and the cathode are connected to a pulse current source. Discharge plasma is produced and EUV radiation is formed by a heavy current pulse from the pulse current source within the discharge space of the discharge tube. The EUV radiation which has formed passes through a through-opening of the anode and is emitted to the outside.

Abstract: A light source device in which the operating characteristic of the auxiliary light source can be improved, in which the starting property within the main discharge vessel is extremely advantageous and which has high reliability with respect to vibration resistance and impact strength without the disadvantage of a cost increase due to the complicated arrangement of the light source device, without reducing the proportion of good articles in the manufacture of the products, and without reducing the quality of the discharge lamp is achieved using a main discharge lamp mounted in a reflector with an auxiliary light source tightly held by the reflector or components which are adjacent to the reflector and without contact with the main discharge vessel.

Abstract: A device for operating a discharge lamp of the alternating current operating type has a high pressure discharge lamp with a silica glass discharge vessel in which a pair of opposed electrodes are located and on which a trigger electrode is located, a feed device which supplies an alternating discharge current to the high pressure discharge lamp, the feed device having a starter circuit, an inverter circuit with at least two switching devices; a coil which is located downstream of the inverter circuit and is series-connected to the discharge lamp; and a control element which produces on/off driving in alternation with a dead time, and in which the inductance of the coil is at most 210 ?H.

Abstract: To reduce and prevent electrode displacement and at the same time to devise an arrangement of the side tube parts with high adhesion, a short-arc, ultra-high pressure discharge lamp a light emmitting part in which there is a pair of opposed electrodes and which is filled with at least 0.15 mg/mm3 of mercury is provided with side tube parts which extend from opposite sides of the light emitting part in which the electrodes are partially hermeticallly sealed and in which the electrodes are each welded in a central valley of a metal foil that has a cross section with an essentially inverted W-shape. The valley and flanking arches or peaks of the W-shape may be sarpentine or sinusoidal, trapezoidal, or rectangular in addition to the traditional W-shape having acutely angled corners between straight legs.

Abstract: An arrangement with a relatively high pressure tightness in a super-high pressure mercury lamp which is operated with an extremely high mercury vapor pressure is achieved in accordance with the invention in a super-high pressure discharge lamp of the short arc type having a light emitting part in which a pair of electrodes are disposed opposite each other and which is filled with at least 0.15 mg/mm3 mercury; and side tube parts which extend from each side of the light emitting part and in each of which a respective one of the electrodes is partially hermetically sealed and is connected to a metal foil, by the area of the respective metal foil which is connected to the respective electrode has a smaller width than the width in the remaining area of the metal foil, the area with the smaller width wrapping at least partially around the outside surface of the electrode.

Abstract: A workpiece stage of a resist curing device is devised in which a workpiece on which a resist has been applied is held on a workpiece stage by vacuum suction, in which the workpiece is irradiated with UV radiation with a simultaneous temperature increase, in which it is cooled after UV radiation and by which the resist is cured, the workpiece stage having heating and cooling arrangements, major warping of the carrier is avoided and reliable holding of the workpiece on the carrier surface by vacuum suction obtained by the carrier being made of an aluminum alloy or a copper alloy which meets the following condition: ?/?y3.1 ? labeling the thermal stress which is determined using the following formula: where E is Young's modulus (N/mm2) at 200° C., ? is the coefficient of linear expansion (1/° C.) at 200° C. and ?T is a temperature difference (° C.) of 120° C., and ?y is the fracture point at 200° C.

Abstract: A HID lamp light source device in which the disadvantage of acoustic resonance is avoided is achieved in a light source device in which a discharge lamp has a pair of opposed electrodes connected to a feed device which is used for starting the discharge lamp and for supplying a discharge current to the electrodes by the feed device using a switching device for controlling the amount of feed for the discharge lamp and in which phase modulation is added to the essentially periodic switching operation of the switching device.

Abstract: A high pressure discharge lamp in which the cathode has a cylindrical body part and a conical part which is doped with thorium dioxide (ThO2), and with a diameter which decreases in a direction from the body part toward the tip area of the conical part by at least one light receiving surface area being formed between the body part and the tip area of the cone in a base part of the conical part. The light receiving area lies at an angle with respect to the center axis of the conical part and the body part, said angle which is measured from the side of the body part being greater than the angle of inclination which is formed between the outer periphery of the conical part in the tip area of the cone and the center axis.

Abstract: A device which improves the starting of a high pressure discharge lamp containing a large amount of mercury, in which the amount of mercury adhering to the lamp electrodes is not the same, by shortening the formation time of the glow discharge in order to reduce the sputtering of the electrodes to a minimum. When the discharge lamp starts, an AC voltage with rectangular waves produced by the full bridge circuit is applied to the discharge lamp. Next, a high voltage pulse is superimposed and applied by an igniter device; the pulse is synchronized to the polarity of the above described AC voltage with rectangular waves. As a result, an alternating current discharge is started in the discharge lamp. Then, the ON/OFF state of the switching devices in the full bridge circuit is fixed and a direct current voltage is applied to the lamp. After a pre-selected time has expired after the transition into direct current operation, the full bridge circuit is operated such that rectangular alternating current waves form.

Abstract: An ultrahigh pressure mercury lamp which is small and has high light radiation intensity and moreover good color reproduction with high efficiency in which, even with a large amount of mercury added, a failure of the mercury to vaporize in the bulb part does not occur, and in which blackening of the bulb part due to wearing of the electrodes even under a large electrode load as a result of shortening of the distance between the electrodes is low is obtained by an ultrahigh pressure mercury lamp in which a bulb part of the discharge vessel made of translucent material has an essentially ovoid shape, is filled with at least 0.2 mg/mm3 of mercury and which is operated at an input wattage of at most 400 W using direct current, has the length D of the tip area of the anode and the length L of the bulb part in the direction of the tube axis of the lamp set in accordance with the relationship D?L/2.

Abstract: An electron beam treatment device is provided for treating a substance located in a processing chamber which includes electron beam tubes arranged such that electron beam windows project into the processing chamber. The electron beam tubes are arranged such that an absorption dose of the entire treatment area of the substance to be treated has a given distribution. The electron beams emitted by the electron beam tubes are advantageously superimposed so that the absorption dose of the entire treatment area of the substance to be treated in shifted into a given distribution condition, and in which thus the entire treatment area of the substance to be treated can be treated as a whole without moving the substance to be treated.

Abstract: Alternating current with rectangular waves is supplied from an operating device to an ultra-high pressure discharge lamp in which located within a silica glass discharge vessel is a pair of opposed electrodes separated by a distance of less than or equal to 1.5 mm. A discharge vessel is filled with greater than or equal to 0.15 mg/mm3 mercury and bromine in the range of 10?6 ?mol/mm3 to 10?2 ?mol/mm3. In the operating device, a multiplication device computes the discharge wattage supplied to the discharge lamp and controlled so that in the case of a reduction of the operating voltage of the discharge lamp the discharge wattage is reduced, and that in the case of an increase of the operating voltage of the discharge lamp the discharge wattage is increased.

Abstract: To eliminate the disadvantage that determination of the alignment marks becomes difficult also in the case in which the peripheral area of the wafer is provided with alignment marks, a wafer, with a surface provided with alignment marks, and with a peripheral area provided with a singularly shaped point and to which a photoresist has been applied, is placed on a rotary stage and the edge position of the wafer and the singularly shaped point, such as a notch or the like, is determined by a device for determination of the singularly shaped point and the edge position. Based on the position information of the alignment marks formed in the wafer and based on the singularly shaped point and the edge position, a control element computes the positions of the alignment marks of the wafer which was seated on the rotary stage.

Abstract: The rare gas discharge lamp is supplied with a current, which is lower than the rated current, the voltage of the rare gas discharge lamp is determined at this instant and the swing width of this voltage is measured. A comparator for comparing measured values of the swing width of the voltage of the rare gas discharge lamp when the current control supplies a reduced current, which is lower than the rated current. A service life converter for converting the difference value output by the comparison means into an indication of the service life of the rare gas discharge lamp.

Abstract: An arrangement with relatively high pressure tightness in a super-high pressure mercury lamp of the short arc type which is operated with an extremely high mercury vapor pressure is achieved by the super-high pressure mercury lamp having the following characteristic: an arc tube portion in which there is a pair of opposed electrodes, and which is filled with greater than or equal to 0.15 mg/mm3 of mercury; and side tube portions which extend from opposite sides of the arc tube portion, in which the electrodes are partially hermetically enclosed, and in which the electrodes and metal foils are welded to one another, and the width of the metal foils in the weld areas is so small that it is less than or equal to the diameter of these electrodes.