Abstract: To provide a lamp seal that avoids cracking of the functionally gradient material in the manufacturing process, that assures adequate mechanical strength of the finished product, and that has improved productivity because of the ease of welding when the light-emitting tube of the lamp is sealed, the lamp seal (20) comprising a functionally gradient material (21) and a lead bar (11), in which the functionally gradient material (21) has layers of mixtures of electrically non-conductive material and conductive material such that one end is non-conductive and the other end is conductive, with layers such that the proportion of conductive material increases in stages or continually moving from one end to the other, in which the lead bar (11) passes through a hole formed in the direction of layering of the functionally gradient material and is attached in the conductive region of the functionally gradient material (21), has the proportion of conductive material at the point of attachment (26) of the lead bar (11) t

Abstract: An ultra-high pressure discharge lamp in which the disadvantage of the reduction of the illuminance maintenance factor due to formation of blackening and milky opacification in the discharge vessel and the disadvantage of formation of cracks in the discharge vessel is eliminated by the discharge vessel being made of a silica glass that contains 0.1 ppm by weight to 290 ppm by weight hydrogen. Further advantages are obtained by the silica glass having a content of OH radicals that is at most 1 ppm by weight and a content of aluminum in a range of 2 ppm by weight to 30 ppm by weight.

Abstract: An ultra-high pressure mercury lamp is provided in which the disadvantage caused by projections formed on the electrode tips during operation can be eliminated. This is achieved by an arrangement in which a silica glass arc tube, filled with at least 0.15 mg/mm3 of mercury, rare gas and halogen in the range from 10−6 &mgr;mole/mm3 to 10−2 &mgr;mole/mm3, includes a pair of opposed electrodes spaced a distance of at most 2 mm. Additionally, at least one of the electrodes includes a part with a greater diameter which is formed on the electrode shaft using a melting process, a projection which is formed by the tip of the electrode shaft, and a part with a decreasing diameter which extends from the part with the greater diameter in the direction toward the projection.

Abstract: A UV light source in which Xenon (Xe) gas is mixed with a substance which, in the temperature range in which 10-valent Xe ions (Xe10+) occur, emits a number of free electrons from a molecule or an atom that at least half the number of electrons which are released from a Xe atom, and which at room temperature is molecular or atomic (for example Ar, Kr, Ne, N2 and NH3). A high voltage is applied in a pulse-like manner to the electrode on the ground side and the electrode on the high voltage side to produce a plasma with a high temperature and from which extreme UV light with a wavelength of 13.5 nm is formed and emitted. The invention can also be used an extreme UV light source of the capillary, plasma focus, and Z pinch types for example.

Abstract: An arrangement with relatively high pressure tightness in a super-high pressure mercury lamp which is operated with an extremely high mercury vapor pressure is achieved the following: an emission part contains a pair of opposed electrodes, each of which has a side section and an end face, and which is filled with at least 0.15 mg/mm3 mercury; side tube parts made of quartz glass extend from opposite sides of the emission part and the side section and end face of a respective electrode is partially hermetically enclosed is each side part; the electrodes are arranged in side tube parts with a small intermediate space formed between the side sections and the end faces of the electrodes and the quartz glass of which the side tube parts is made; and the side parts of the electrodes have at least partially concave-convex areas in the side tube parts.

Abstract: A lamp unit with a light control function for the light emitted from this lamp unit, for which a high pressure mercury lamp is used which is filled with at least 0.15 mg/mm3 mercury and which has a hermetically enclosing arrangement, an essentially hermetically enclosing arrangement or an arrangement in which there is a flow path for actively flowing cooling air within. The lamp unit for a projector has a high pressure mercury lamp of the short arc type with a wall load of at least 1 W/mm2 which is filled with at least 0.

Abstract: A light source device with a mercury lamp, in the case of formation of a bridging short circuit of the gap between the electrodes of the discharge lamp caused by mercury, to prevent the light source device from no longer being usable because the difference between a defective device and one with such a bridging short circuit cannot be ascertained, has a means for determining that a bridging short circuit has formed in the gap between the electrodes. Furthermore, various manners for eliminating the bridging short circuit are provided including those that make use of vibration, heat, dielectric discharge or Lorenz forces.

Abstract: A discharge lamp of the short arc type having an arc tube, a hermetically sealed tube at each of opposite ends of the, a pair of electrodes which are located in the arc tube, electrode rods which support the electrodes, support parts which are each formed by part of one of the hermetically sealed tubes, optionally cylindrical retaining bodies which are each located within and welded to a respective one of the support parts and in which a respective one of the electrode rods time is held securely, and a trigger component which is located on an outer side surface of the support parts, the support parts of the respective hermetically sealed tube and/or the cylindrical retaining bodies are formed of a material that contains a metal or a metallic compound for increasing the dielectric constant. In this way, even with a great distance between the electrodes of the lamp and a high gas filling pressure, the operating properties of the lamp can be improved and it can be reliably operated at a low breakdown voltage.

Abstract: To provide an ArF excimer laser device capable of a pulsewidth FWHM of 20 ns or more, a pulse duration time of 50 ns or more, and a spectrum line width FWHM of 0.35 pm or less, and to provide a KrF excimer laser device and a fluorine laser device with stretched pulse widths. The ArF excimer laser device connects to the output terminal of a magnetic pulse compression circuit and has a pair of laser discharge electrodes located within the laser chamber and a peaking capacitor connected in parallel with the pair of laser discharge electrodes. The output waveform of the laser pulse has a bifurcated form with a front half peak and a later half peak and, if the peak value of the front half peak is P1 and the peak value of the later half peak is P2 and the (proportion of the pulse later half peak)=P2/(P1+P2)×100(%), then the (proportion of the pulse later half peak) is 50% or more.

Abstract: Transport of strip-shaped workpieces, including those that have through openings, is control based on the output of upper and lower sensors provided between the delivery reel and processing part for detecting sagging of the workpiece at two points. The strip-shaped workpiece is subjected to processing and transport with a preset frequency, and upon occurrence of a state in which the upper sensor has determined the absence of sagging of the workpiece on the delivery side of the processing part and the lower sensor of this side has determined the presence of the workpiece, a fault is recognized, and processing and transport are interrupted if this detected state does not change during an interval that is a multiple of the preset frequency.

Abstract: A discharge lamp of the short arc type with high arc stability in which the arc is prevented from fluctuating during operation is achieved by providing a short arc discharge lamp in which the hermetically sealed tubes which extend from the arc tube, and the lead pins located within the arc tube which support the electrodes, are sealed relative to one another by graded glass, and wherein cylindrical retaining bodies are attached concentrically within the hermetically sealed tubes and are penetrated by the lead pins, a metal foil that has several cambers which extend in the axial direction of the lamp being located between the cylindrical retaining bodies and the lead pins.

Abstract: To form side tubes with adequate resistance to pressure, and to provide a short-arc, ultra-high-pressure discharge lamp having such side tubes, and to provide a method of manufacturing such a lamp, a short-arc, ultra-high-pressure discharge lamp (1) has a luminescent tube (10) within which a pair of electrodes (2,2) face each other, and side tubes (11) that extend from opposite sides of the luminescent tube and in which a portion of the electrodes is sealed and in which a small space (B) is formed to enable the electrodes (2) to expand and contract freely without compression along their axes due to a difference in the indices of expansion of the materials that make up the electrodes (2) and the side tubes (11).

Abstract: An exposure device in which a device for insertion or removal of the microscope for mask marks is not necessary, and in which the arrangement of the device is simplified is achieved by the provision of a microscope for mask marks in a workpiece carrier which can move in unison with the workpiece carrier. Furthermore, a reference mark is provided in the light incidence part of the microscope for determining the mask marks. The relation between the positions of the microscope for workpiece marks, the microscope for mask marks and the workpiece carrier is confirmed beforehand using this reference mark. In the positioning of the mask relative to the workpiece, the workpiece carrier is moved and the microscope for workpiece marks determines the position of the workpiece mark. Then, the workpiece carrier is moved and the microscope for mask marks determines the projection position of the mask mark. The workpiece carrier is driven such that the two agree with one another.

Abstract: A short arc discharge lamp in which the arc tube contains opposed cathode and anode electrodes with upholding parts that are inserted into a respective glass tube holding cylinder, and in which the glass tubes of the holding cylinders are secured in the side tubes at opposite sides of the arc tube by contracted areas, provides the peripheral surface of the holding cylinders with at least one section of reduced diameter to prevent the holding cylinders from moving, to prevent force from acting in a concentrated manner on the sealed areas and to prevent the lamp from being damaged when the lamp is shaken during transport or the like.

Abstract: A light source device in which the operating characteristic of the auxiliary light source can be improved, in which the starting property within the main discharge vessel is extremely advantageous and which has high reliability with respect to vibration resistance and impact strength without the disadvantage of a cost increase due to the complicated arrangement of the light source device, without reducing the proportion of good articles in the manufacture of the products, and without reducing the quality of the discharge lamp is achieved using a main discharge lamp mounted in a reflector with an auxiliary light source tightly held by the reflector or components which are adjacent to the reflector and without contact with the main discharge vessel.

Abstract: An ultra-high pressure high pressure discharge lamp device in which the lamp voltage and the distance between the lamp electrodes can be kept stable is achieved by an operating device supplying an alternating current with rectangular waves to the discharge lamp and control is exercised such that a lower boundary value is set and the operating voltage is increased by reducing the operating frequency of the discharge lamp by a given amount, when the operating voltage of the discharge lamp is below the set lower boundary value. Furthermore, control can also be exercised in such a way that an upper boundary value is set and the operating voltage is reduced by increasing the operating frequency of the discharge lamp by a given amount when the operating voltage of the discharge lamp exceeds the set upper boundary value.

Abstract: A discharge lamp which maintains a high lumen maintenance factor even when operated for a long time is obtained in a discharge lamp which has a silica glass discharge vessel and a pair of opposed electrodes in the discharge vessel and in which the discharge vessel is filled with at least 0.

Abstract: An irradiation treatment device is provided in which uniform irradiation treatment with high speed can be achieved without damaging a substrate, even in the case in which the substrate to be treated is enlarged and exceeds the length of the rod-shaped dielectric barrier discharge lamp. The object is achieved in a substrate treatment device using dielectric barrier discharge lamps in which the dielectric barrier discharge lamps and the substrate are transported relative to one another and in which the surface of this substrate is irradiated with UV light from the dielectric barrier discharge lamps, in that the length for the above described dielectric barrier discharge lamps in the lengthwise direction is less than the length in the direction perpendicular to the transport direction of the substrate.

Abstract: A discharge lamp which eliminates the large line noise that forms in discharge lamps during startup while preventing heat loss in the transformer by providing a pair of opposed electrodes for the main discharge and an auxiliary electrode arranged such that it does not come into contact with the discharge space for the main discharge, a feed circuit for supplying the discharge current to the electrodes for the main discharge, and a starter circuit which produces a high voltage between one of the electrodes for the main discharge and the auxiliary electrode. The high voltage generating part of the starter circuit which includes at least a high voltage transformer that is separated from the feed circuit while the discharge lamp and the high voltage generating part are formed as an integral unit.

Abstract: Alternating current with rectangular waves is supplied from an operating device to an ultra-high pressure discharge lamp in which located within a silica glass discharge vessel is a pair of opposed electrodes separated by a distance of less than or equal to 1.5 mm. A discharge vessel is filled with greater than or equal to 0.15 mg/mm3 mercury and bromine in the range of 10−6 &mgr;mol/mm3 to 10−2 &mgr;mol/mm3. In the operating device, a multiplication device computes the discharge wattage supplied to the discharge lamp and controlled so that in the case of a reduction of the operating voltage of the discharge lamp the discharge wattage is reduced, and that in the case of an increase of the operating voltage of the discharge lamp the discharge wattage is increased.