Abstract: A short arc discharge lamp has improved starting properties in which there is no danger of damaging the arc tube that surrounds a discharge space and in which the radiant light from the arc tube is not adversely shielded. This is achieved by providing the short arc discharge lamp with a first electrode having an electrical potential and to which a high voltage is applied, and a second electrode opposite the first at a in spaced relationship. Additionally, in the discharge space, there is positioned at least one conductive component with a tip projecting into the discharge space. The conductive component has an electrical potential which is identical to the electrical potential of the first electrode and has a tip spaced a distance from the second electrode which is greater than the distance between the first and the second electrode.

Abstract: To reduce the size of a polarizing device used for a polarized light illuminator, to cut the costs of the polarizing device and to reduce the size of the entire polarized light illuminator, light from a lamp which is incident on a polarizing device, is subjected to polarization separation, and is then incident on an integrator lens. The polarized light emerging from the integrator lens is converted into parallel light via an aperture and a second planar mirror by means of a collimator and is emitted onto a workpiece. As the polarizing element, a polarizing element formed by a combination of several polarized light beam splitters is used, and it is arranged such that the shadow is projected by the boundary surfaces of the polarized light beam splitters onto the boundary lines of the lenses which form the integrator lens. In this way, the reduction in illuminance and the deterioration of the distribution of the illuminance on the irradiation surface can be prevented.

Abstract: A device for exposing a peripheral area of a wafer, in which the area which is located within the wafer (and which need not be exposed) is prevented from being exposed regardless of the orientation the wafer which bears a notch in its periphery. The device includes an exposure light irradiation part, a wafer edge determination part, and a notch determination part are arranged integrally with each other. The wafer edge determination part moves such that it follows the edge of the wafer. The peripheral area of the edge of the wafer is exposed by exposure light emitted by the exposure light irradiation part. When the exposure sequence begins irradiation with exposure light is not immediately done, even if the means for wafer edge determination has determined the wafer edge. Instead, the wafer is rotated by a given amount and then exposure is begun. When the area irradiated with exposure light reaches the notch starting position, wafer edge determination is stopped until the end position of the notch is reached.

Abstract: A exposure device including a lamp and integrator lens for exposure of a substrate having a plurality of rectangular exposure zones and including a substrate carrier capable of supporting a substrate. The substrate moves in the X-Y directions and the respective exposure zones on the substrate are progressively exposed. The exposure device also includes a holding part for the integrator lens, which is composed of a parallel arrangement of several lenses yielding a rectangular cross sectional shape, that enables the integrator lens to turn 90° around the optical axis of the incident light. This arrangement permits precise illumination of the exposure zones on the substrate as the exposure zones on the substrate change orientation.

Abstract: A short arc mercury discharge lamp including an arc tube filled with at least mercury and a rare gas, a cathode and an anode positioned opposite to each other within the arc tube, the cathode having an tapered area which tapers in a direction towards the anode and a projection which protrudes from the tapered area in a direction towards the anode. The amount of mercury to be added in the arc tube is in a range of 0.2≦n≦52, where n is the weight (mg/cm3) of the mercury per unit of volume, and a pressure of the rare gas to be added in the arc tube is in a range of 0.1≦p≦800, where p is the pressure (kPa) of the rare gas at an ambient temperature of 25° C.

Abstract: A heating device of the light irradiation type in which uniform illuminance can be obtained without placing a single end lamp in the middle of the light source part is achieved providing a light source part in which circular lamps are arranged concentrically to one another with a mirror in the center of the circular lamps. The mirror is convex toward the workpiece and reflects the light emitted from the innermost circular lamp located closest to the center area so that, without placing a single end lamp in the middle area, the reduction of illuminance in the middle area of the irradiated surface is reduced. Furthermore, the reflector can be made conical, and in this way, the light from the lamps can be emitted with high efficiency onto the workpiece surface.

Abstract: A polarized light irradiation apparatus, having at least two plane mirrors, is constructed to prevent reduction of the extinction ratio of the polarized light that irradiates a substrate when there is a change of the direction of polarization of the polarized light that is incident on a reflecting mirror. This is accomplished by forming a protection layer on the surface of the second plane mirror, and selecting the material and optical thickness of the layer in accordance with the angle of incidence and wavelength of the polarized light so that the difference &Dgr; of the phase shifts of the polarization P component and the polarization S component emerging from the second plane mirror satisfies the condition that &Dgr;≦±20°. By doing this, there will be no reduction of the extinction ratio of the polarized light that irradiates the substrate W if there is a change in the polarization direction of the polarized light that is incident on the second plane mirror.

Abstract: A super-high pressure discharge lamp of the short arc type which has an arc tube portion in which there is a pair of opposed electrodes and which is filled with at least 0.15 mg/mm3 mercury, and side tube portions which extend from opposite sides of the arc tube portion and in which there are metal foils. The electrodes are each electrically connected to a respective one of the metal foils by a metallic component with cross-sectional area that is smaller than the cross sectional area of the electrodes in the area in which the electrodes are located in the side tube portions.

Abstract: A device for exposing a peripheral area of a wafer having a photoresist applied thereon is provided in which an irradiation area is prevented from moving in a V-shape in a notch area of the wafer and unnecessary exposure of the wafer is prevented. The device includes an edge determination device, a device for moving the edge determination device, a irradiation moving device and a controller to control the edge determination moving device such that the amount of light received by the light receiving part becomes constant. The controller stops operation of the irradiation moving device when receiving a signal from the edge determination device showing the start of the notch and restarts operation after a given time has passed, or upon receiving a signal indicating the end of the notch.

Abstract: To provide a long-lived short-arc type discharge lamp and light-source device in which high temperature oxidation of external lead rods is inhibited, a short-arc type discharge lamp of the type in which external lead rods (24) are electrically connected to electrodes (21, 22) that extend from sealing tubes (12) that are located at each of opposite ends of an emission envelope (11), and in external lead rods are electrically connected via lead lines (25) to bases (30) that are attached to a respective sealing tube, by a first ventilation aperture (31) being formed in a peripheral wall of each base and second ventilation aperture (32) being formed in the tail end of at least one base. Ventilation-concentration hoods (28) that conduct cooling air can be mounted at the first aperture. The lamp is held by fixing the periphery of each base in a lamp support plate (51).

Abstract: To expose the peripheral area of a film with high precision while the film is being transported, even if the peripheral area of the film has an arch or a fold, the edge of a copper foil on a TAB strip is determined by way of an optical detector which includes a light projection section and a light receiving section. The sliding base and the projection lens unit are moved such that the amount of light received by the light receiving part is constant. Ultraviolet light is concentrated on the peripheral area of the copper foil of the TAB strip, by which the peripheral area is exposed. The projection lens unit is provided with a nozzle from which air is blown onto the area of the TAB strip which is undergoing peripheral area exposure. This area is pressed by the pressure of the air against the surface of the carrier so that the peripheral area of the TAB strip can be made planar even if the strip has an arch or a fold.

Abstract: A foil seal lamp in which even when a high temperature of the seal area is reached oxidation of the molybdenum metal foils and the molybdenum outer leads which have been placed in the seal area can be reliably prevented, and in which a long service life can be obtained. is achieved by providing the surfaces of the metal foil and the outer lead which are placed in the seal areas with protective coatings of crystalline molybdate. An increase in the amount of protective coating that can be carried is produced by surface roughening the outer leads.

Abstract: To provide an optical device in which fragments of a concave reflection mirror surrounding a discharge lamp and fragments of an optically permeable glass plate covering the aperture at the front of the concave reflection mirror do not fall and scatter, even if a short-arc high pressure discharge lamp that lights at extremely high mercury vapor pressure should rupture, the outer surface of the glass concave reflection mirror (20) surrounding the high pressure mercury discharge lamp (10) in which 0.16 mg/mm3 or more of mercury is sealed in a discharge envelope is covered by a scatter prevention film (40) made of a polymer material, for example, a fluorine-based resin. Furthermore, a scatter prevention film is applied to the outer surface of the concave reflection mirror in a region of incidence of light over a range within ±40° of the direction orthogonal to the axis of the high pressure mercury discharge lamp.

Abstract: To devise an incandescent bulb for a motor vehicle with a new arrangement which can withstand vibration during driving of a motor vehicle to a sufficient degree, an envelope is provided with a unilateral sealed portion which is preferably made of a glass that has quartz as the main component; at least two feed lines extend as inner leads into the envelope; and at least one filament coil of which the main component is tungsten and which forms an emission part, has one end connected to one of the lines and the other end connected to the other of the feed lines, and the filament coil has a spring constant of at least 25 g/mm and a weight of at most 100 mg. Furthermore, advantageously, the inner leads are made of a material of which the main component is molybdenum, and the diameter of the inner leads is at least 0.48 mm.

Abstract: The object of the invention is to improve the thermal radiation characteristic of the electrodes in a high pressure discharge lamp of the short arc type in which the input power has been increased in order to increase the amount of radiant light, and to reduce the electrode temperature with high efficiency. The object is achieved as claimed in the invention in a high pressure discharge lamp of the short arc type in the emission tube of which there is a pair of electrodes, in that at least part of the sides of the above described electrodes is provided with a groove area, that the depth D of this groove area is within 12% of the electrode diameter and that the relation D/P is between the depth D of the groove area and the pitch P between the grooves is greater than or equal to 2.

Abstract: To prevent lamp extinction during dead time of an inverter circuit of a full bridge system, to reduce delays of the rising time and the falling time of rectangular waves which have been output by the inverter circuit and to prevent formation of a phenomenon of momentary darkening of the radiant light, the discharge lamp is operated with an alternating current with rectangular waves which is produced by an inverter circuit of a full bridge system. When the inverter circuit of the full bridge system is driven a dead time is taken in which all switching devices are turned off. In the rear stage of the inverter circuit of the full bridge system, there is an inductance. The value of the inductance is fixed such that LL≧VL/IL·Td (VL being the luminous voltage of the discharge lamp, IL being the current and Td the dead time). Current can flow in the discharge lamp during the dead time by the energy stored in this inductance.

Abstract: A device which improves the starting of a high pressure discharge lamp containing a large amount of mercury, in which the amount of mercury adhering to the lamp electrodes is not the same, by shortening the formation time of the glow discharge in order to reduce the sputtering of the electrodes to a minimum. When the discharge lamp starts, an AC voltage with rectangular waves produced by the full bridge circuit is applied to the discharge lamp. Next, a high voltage pulse is superimposed and applied by an igniter device; the pulse is synchronized to the polarity of the above described AC voltage with rectangular waves. As a result, an alternating current discharge is started in the discharge lamp. Then, the ON/OFF state of the switching devices in the full bridge circuit is fixed and a direct current voltage is applied to the lamp. After a pre-selected time has expired after the transition into direct current operation, the full bridge circuit is operated such that rectangular alternating current waves form.

Abstract: A discharge lamp of the short arc type in which a lead pin, located within a hermetically sealed tube, is prevented from being irradiated with light. Such a construction prevents the lead pin from undergoing a temperature rise thereby preventing the destruction of the hermetically sealed tube. The discharge lamp of the short arc type includes an arc tube adjoined laterally by hermetically sealed tubes through which a lead pin, which supports an electrode, is routed. The hermetically sealed tubes are sealed by graded glass on the lead pins, and the lead pin is prevented from being irradiated with light by providing the outside surface of the hermetically sealed tube, at least in part, with a high emissivity material and then providing a reflectivity material on the exterior surface of the emissivity material.

Abstract: An exposure device in which a device for insertion or removal of the microscope for mask marks is not necessary, and in which the arrangement of the device is simplified is achieved by the provision of a microscope for mask marks in a workpiece carrier which can move in unison with the workpiece carrier. Furthermore, a reference mark is provided in the light incidence part of the microscope for determining the mask marks. The relation between the positions of the microscope for workpiece marks, the microscope for mask marks and the workpiece carrier is confirmed beforehand using this reference mark. In the positioning of the mask relative to the workpiece, the workpiece carrier is moved and the microscope for workpiece marks determines the position of the workpiece mark. Then, the workpiece carrier is moved and the microscope for mask marks determines the projection position of the mask mark. The workpiece carrier is driven such that the two agree with one another.

Abstract: The restart properties of a light source even under the condition of a hot restart is improved, and suppression of the danger of an insulation breakdown in an unintended area is achieved by a light source comprising a discharge lamp in which a pair of main discharge electrodes are located opposite a discharge space; an auxiliary electrode arranged such that it does not come into contact with the discharge space; a feed circuit that supplies a discharge current to the main discharge electrodes; and a starter that produces a high voltage between one of the main discharge electrodes and the auxiliary electrode, wherein, during a time interval during which the starter produces said high voltage, a high voltage is also applied to the main discharge electrodes at least during a portion of the time interval.