Abstract: An LED light source device using light from luminescent elements at a high level of uniformity and efficiency, and to conduct irradiation with a high level of design freedom an LED light source device is equipped with luminescent elements and a translucent light-guiding member. The translucent light-guiding member has a central convex lens with a first cylindrical light-guiding part formed on the outer periphery of the central convex lens and a second cylindrical light-guiding part formed on the outer periphery of the first cylindrical light-guiding part, such that an air layer is formed between the outer peripheral surface of the first cylindrical light-guiding part and the inner peripheral surface of the second cylindrical light-guiding part, the outer peripheral surface of the first cylindrical light-guiding part and the outer peripheral surface of the second cylindrical light-guiding part being rotated quadratic surfaces with the same focal point.

Abstract: A high pressure discharge lamp having a hermetically sealed portion on opposite sides of an arc tube made of quartz glass and in which a pair of opposed electrodes is located is improved so that electrode rod warping is prevented even when the lamp is repeatedly lit and unlit. Electrode rods extending from the electrodes pass through a center hole in a respective quartz glass body which is positioned and fastened onto each the electrode rods with an infrared reflection membrane composed of a heat-resistant metal being provided on the inner surface of the center hole of the quartz glass body separating the electrode rod from the quartz glass body. The quartz glass body is integrated with the quartz glass forming the hermetically sealed portion and is positioned against a step formed at the boundary between large and small diameter portions of the electrode rod.

Abstract: A filament lamp comprising a bulb which has a hermetically sealed portion on at least one end and multiple filament assemblies, each filament assembly comprising a coiled filament and connected leads to supply power to that filament, the filament assemblies being sequentially arranged in the axial direction of the bulb, the leads of each filament assembly being electrically connected to respective multiple conductive parts set in the sealed portions, and power being independently suppliable to each of the filaments. A respective one of the coiled filaments is located in a respective first quadrant formed by intersecting planes that are perpendicular to each other and that are tangent to an outer coil diameter of the respective coiled filament. The leads are positioned in quadrants other than the quadrant in which the coiled filament is located. A light irradiation type heat treatment apparatus uses a plurality of such filament lamps.

Abstract: An excimer lamp, including a discharge vessel made of silica glass and having a discharge space; a pair of electrodes disposed on the discharge vessel, wherein the discharge space is filled with xenon gas; and an ultraviolet reflection film made from ultraviolet scattering particles, including silica particles and alumina particles, formed on a surface of the discharge vessel exposed to the discharge space. A thickness Y of the ultraviolet reflection film satisfies the expression Y>4X+5, given that a mean particle diameter of the ultraviolet scattering particles making up the ultraviolet reflection film is X (?m).

Abstract: A testing device equipped with: a microchip having a receiver for a test fluid, a discharge lamp which emits light into the microchip test fluid receiver, a light source housing in which the discharge lamp is located, and an arithmetic calculation mechanism, which calculates the concentration of the component to be detected, based on the intensity of the light emitted from the test fluid container unit. To reduce the size of the device and to shield the arithmetic calculation mechanism from electromagnetic waves generated around the light source, the light source housing is equipped with shielding connected to the ground on the outside of the light source housing made of insulating material. The light source housing is positioned within an enclosure of the testing device holding the microchip and containing the arithmetic calculation mechanism, analysis output device(s), and other components of the testing device.

Abstract: To provide a filament lamp having a plurality of filaments disposed in sequence in the axial direction of a light-emitting lamp tube which is configured so as not to shield emitted light from a center filament, internal leads for two filaments disposed proximate hermetically sealed parts at both ends are connected to metal foils in the same hermetically sealed part.

Abstract: A discharge lamp in which fluctuation of the arc when the lamp starts and in which devitrification and damage of the arc tube are prevented, so that light intensity can be kept uniform over a long time is achieved by the cathode having a tapering part with a diameter which decreases in the direction to the tip that is formed with an area with different diameters extending around the tapering part in the peripheral direction which has concave-convex parts with groups of convex parts which are located next to one another in the axial direction of the cathode, the concave-convex parts in longitudinal cross section being arranged such that corner points of each convex part are located inside of an edge line of the tapering part, and an envelope curve which connects the corner points is convex with respect to the center line of the cathode.

Abstract: A light source unit which has a concave reflector and a discharge lamp with bilateral hermetically sealing parts of which a first of the hermetically sealing parts is mounted in a base component that is mounted in an opening of a neck of the concave reflector. An outer lead proceeds directly from the first hermetically sealing part to the base component and is connected to it.

Abstract: A high pressure discharge lamp having a hermetically sealed portion on opposite sides of an arc tube made of quartz glass and in which a pair of opposed electrodes is located is improved so that electrode rod warping is prevented even when the lamp is repeatedly lit and unlit. Electrode rods extending from the electrodes pass through a center hole in a respective quartz glass body which is positioned and fastened onto each the electrode rods with an infrared reflection membrane composed of a heat-resistant metal being provided on the inner surface of the center hole of the quartz glass body separating the electrode rod from the quartz glass body. The quartz glass body is integrated with the quartz glass forming the hermetically sealed portion and is positioned against a step formed at the boundary between large and small diameter portions of the electrode rod.

Abstract: A light irradiation heating process in which, even in the case of an asymmetrical physical property of an article to be treated, uniform heating is possible, or in which heating can be performed such that the article acquires a desired physical property after heat treatment. Based on the measured value of the local physical property of the article to be treated, the emissivity distribution is obtained and the distribution pattern of the light intensity on the article to be treated is determined. According to this light intensity pattern, the individual intensity of the light emitted from respective light emitting parts of lamp units of the heating device are determined beforehand. According to this determined result, the intensity of the light emitted from the respective light emitting parts of the lamp units are controlled individually, and thus, the article to be treated is irradiated with light.

Abstract: To devise a light source device with a low price and from which a sufficient amount of light can be obtained, in a light source device having a reflector and a discharge lamp, a hermetically sealed portion of the lamp is directly joined to a part of a neck region of the reflector with a processed portion being formed for setting the positional relationship between the lamp and reflector.

Abstract: An extreme ultraviolet (EUV) light source to detect fluctuations in the angular distribution of its output radiation wherein a solid raw material is irradiated with a laser beam to generate a vapor. The vapor is subjected to an electrical arc generated between a pair of discharge electrodes to generate a high temperature plasma that emits EUV radiation. The EUV radiation is collected along an optical axis toward a focal point by a plurality of concentrically arranged reflectors. A plurality of EUV radiation detectors are arranged around a circular ring centering on the optical axis of the concentrically arranged reflectors. Each EUV radiation detector includes two spaced apart diaphragms with a pinhole. The pinholes are aligned with a virtual line connecting with the focal point. EUV radiation passing through the pinholes strikes a light detecting element in the detectors.

Abstract: An excimer lamp which can emit UV radiation with a high degree of efficiency and high degree of uniformity, has a UV-reflecting film that does not peel. The excimer lamp is fitted with a silica glass discharge vessel that encloses a discharge gas which forms excimer molecules by dielectric barrier discharge in an internal space enclosed by a top wall panel, a bottom wall panel, side wall panels and end panels and with an electrode on both the outer surface of the top wall panel and another electrode on the outer surface of the bottom wall panel. On the inner surface of the discharge vessel, a UV-reflecting film comprised of silica and alumina particles is formed, at least, on the inner surface area of the side wall panels with the silica particles composing at least 30 weight % of the UV-reflecting film.

Abstract: A LED device formed of LED chips bonded to an exoergic member by the LED chips being bonded to an Au—Sn alloy layer formed on an upper surface of the exoergic member with columnar crystals being formed within the Au—Sn alloy layer extending in a direction perpendicular to the upper surface of the exoergic member. The method of producing the LED device forms an Sn film directly on the upper surface of the exoergic member, an Au film on a lower surface of the LED chips, mounts the LED chips with the Au film thereon onto the Sn film formed on the upper surface of the exoergic member, and the exoergic member with LED chips mounted thereon is heated in an atmosphere in which a forming gas flows, so that the LED chips are bonded to the exoergic member.

Abstract: To devise a heating device of the light irradiation type in which costs can reduced by reducing the number of filament lamps and current source parts without adversely affecting the illuminance distribution with respect to a wafer, in a heating device of the light irradiation type that has a light source part, in which several filament lamps are located parallel to one another, in which at least one of the filament lamps has several filaments which are located along the bulb axis are supplied with power individually to produce light which is irradiated from the light source parts onto an article to be treated, the distance between at least some of the adjacent filament lamps to one another is nonuniform.

Abstract: An exposure device for producing semiconductors and liquid crystals has an optical system capable of effectively using light generated without making a hole in a lamp discharge vessel when high energy laser light is supplied to it for emitting light, such as ultraviolet light. The exposure device has a light source for emitting ultraviolet light, a laser device for emitting laser light, an elliptical reflector for reflecting ultraviolet light emitted from the light source, and an optical system for directing light reflected by the elliptical reflector to an article to be treated via optical elements including a collimator lens and an integrator lens, and a beam splitter having a wavelength selecting ability provided in the optical path for light reflected by the elliptical reflector to allow laser light to be incident on the light source from and opening side of the elliptical reflector.

Abstract: A conveying arm for conveying a substrate while holding it with suction pads has, on the side of the conveying arm from which the suction pads extend, elastic members, such as flat springs, which are shorter than the suction pads. The flat springs are located above the tip ends of the suction pads when they hold the substrate and when the substrate is lowered to the work stage, the flat springs press any bent portions of the substrate down toward the work stage, which leads to flattening of surface of the substrate against the work stage so as to eliminate leakage of vacuum, used for suctioning the substrate against the work stage, from peripheral portions of the substrate. As a result, the substrate can be securely held on the work stage.

Abstract: To provide the structure of a filament lamp having a plurality of independent power supply pathways, the structure being capable of preventing the power supply pathways from electrically shorting to each other, a filament lamp formed of a straight-tube shaped luminous part having multiple filaments (F1, F2, F3) divided in the axial direction, and sealing parts (20) on each of opposite ends of the luminous part (10) in which are embedded metal foils (31, 32, 33) corresponding to the number of filaments in an aligned manner, and leads for supplying electricity independently to each filament, the luminous part (10) having a first housing space (11) for housing the filaments and a second housing space (12) for housing the leads (51, 52, 53), the housing spaces be connected and extending in the axial direction.

Abstract: An absorptiometry microchip testing device with which, after one-time startup, test results of blood analyses are automatically obtained without a special tester. The microchip testing device has a rotary drive source which can be stopped at a prescribed angle; a centrifugal rotor connected to the rotary drive source via the main shaft; a direction switching mechanism for controlling the main shaft gear; a planetary gear which engages the main shaft gear which is located on the centrifugal rotor; a chip holder which turns together with the planetary gear; a microchip which is held in the chip holder and has a part for measuring absorbance; a light source from which light is incident in the absorbance measuring part of the microchip; a detector which receives light transmitted by the absorbance measuring part; and a controller which controls movements of the rotary drive source and the direction switching mechanism.

Abstract: A filament lamp having a filament and an internal lead in which the filament is insulated from contact with the internal lead and prevent from moving during operation to maintain a uniform distribution of light. To this end, the filament lamp includes a luminous tube having an inner wall, and opposing ends on which sealing parts are formed. Multiple filaments are sequentially disposed inside the tube in an axial direction, and internal leads are connected to each filament. An insulating wall is provided along the inner wall of the luminous tube in the axial direction and is disposed around at least one of the multiple filaments. Internal leads running partly parallel to the filaments are positioned between the luminous tube and insulating wall and do not engage the ring supporters of the multiple filaments, which could cause the filaments to move and distribute light in a nonuniform pattern.