Abstract: A high pressure discharge lamp, in which an anode and a cathode are disposed opposite each other in a bulb, achieves a long service life due to thorium (Th) being stably supplied to the cathode tip for a long time after lamp operation has been commence since the formation of the flicker phenomenon is suppressed over a long time due to the cathode being made of tungsten which contains thorium oxide on a surface space from the cathode tip, a carbide layer of tungsten carbide is formed and the cathode being bordered by an emitter containing body of tungsten which contains thorium dioxide, and a carbide layer of tungsten carbide being formed at least in a region bordering the cathode.

Abstract: An operating circuit for a discharge lamp having an external auxiliary electrode and main discharge electrodes in a discharge space, in which the disadvantage of lamp damage due to detachment of glass material, such as silica glass or the like, of a hermetically sealed portion of the discharge vessel from the electrode material in alternating current operation of a discharge lamp is prevented by a feed circuit having an inverter, and a trigger circuit for supply of a pulsed current to the primary winding of a high voltage transformer with an autotransformer arrangement for applying a high voltage to the auxiliary electrode in which the electrical potential of the trigger terminals is maintained essentially at the same electrical potential as the output line on the low voltage side of the feed circuit when the trigger circuit is inoperative.

Abstract: A discharge lamp of the short arc type having an arc tube, a hermetically sealed tube at each of opposite ends of the, a pair of electrodes which are located in the arc tube, electrode rods which support the electrodes, support parts which are each formed by part of one of the hermetically sealed tubes, optionally cylindrical retaining bodies which are each located within and welded to a respective one of the support parts and in which a respective one of the electrode rods time is held securely, and a trigger component which is located on an outer side surface of the support parts, the support parts of the respective hermetically sealed tube and/or the cylindrical retaining bodies are formed of a material that contains a metal or a metallic compound for increasing the dielectric constant. In this way, even with a great distance between the electrodes of the lamp and a high gas filling pressure, the operating properties of the lamp can be improved and it can be reliably operated at a low breakdown voltage.

Abstract: A device for heating a substrate with light from a flash lamp having a semiconductor switch connected in series to the flash lamp. After triggering of a trigger electrode of the flash lamp, a first drive signal and a second drive signal are output from a gate circuit. The time period when the semiconductor switch is on due to the second drive signal is longer than the time period that the semiconductor switch is on by the first drive signal. Then, the semiconductor switch is switched on and off by the first drive signal and the substrate temperature is increased to a temperature, which is lower than the desired temperature to be achieved, and is maintained a that temperature for a short time, after which the surface temperature of the substrate is increased to the desired target temperature.

Abstract: There is provided a method of manufacturing hydrophilic carbon nanotubes, which is capable of imparting hydrophilicity without damaging the surface of the carbon nanotubes. By irradiating carbon nanotubes 4 with ultraviolet ray 3, hydrophilic functional group(s) are introduced into the surface of carbon nanotubes 4. Hydrophilicity is imparted to the carbon nanotubes to such an extent that a contact angle of water is in the range of less than 130°. Ultraviolet ray 3 is a far ultraviolet ray having a wavelength ranging from 1 to 190 nm. The irradiation with ultraviolet ray 3 is conducted in the presence of oxygen and hydrogen or in the presence of ozone and hydrogen. The end part(s) of carbon nanotubes 4 is opened by the irradiation with ultraviolet ray 3.

Abstract: A discharge lamp of the short arc type has a bulb with an arc tube and sealing tubes extending at opposite sides of the arc tube and which contains a discharge gas and a pair of opposed electrodes supported on lead pins which protrude from the outer end of the sealing tubes, the lead pins being affixed to graded glass in the sealing tube. A cooling fin surrounds the outer surface of one of the sealing tubes; and is formed of a pair of plate-shaped bodies each of which has a curved portion that contacts an outer surface of the sealing tube a strip-shaped portion extending radially from each of opposite edges of the curved portion. The strip-shaped portions of the plate-shaped bodies positionally overlap, and cooling openings are formed in the strip-shaped portions of only one of the plate-shaped bodies. Preferably, a gap is formed between the plate-shaped bodies.

Abstract: To devise a small light source device in which breaking of the bulb of the light source lamp can be suppressed and in which breaking of the bulb will not damage the window component, a light source lamp supported in a housing by only one of two hermetically sealed tubes at opposite ends of an arc tube, a cooling rib is mounted on a lead pin in the one of the sealed tubes that faces toward the window component and has a larger dimension in the radial direction than the maximum diameter of the opening edge of the light exit opening in the housing. The cooling rib serves to block bulb fragments and should it contact the peripheral edge area of the light exit opening with its edge that faces the window component, due to its size, neither the lead pin nor the cooling rib will contact the window component.

Abstract: To effectively eliminate radiation outside the band with a wavelength of 13.5 nm which has adverse effects on exposure without reducing the intensity of the EUV radiation with a wavelength of 13.5 nm, in an extreme UV radiation exposure tool which has an extreme UV radiation source device with an EUV focusing mirror which focuses extreme UV radiation and radiation outside the band which is emitted by the high density and high temperature region of a plasma, an illumination optical system for projecting this radiation onto a mask, and a projection optical system which projects the radiation from the mask onto a workpiece, a radiation shield is provided of a size which enables the radiation emerging from the EUV focusing mirror to be completely incident on it, and which has an opening of a size which results in essentially only extreme UV radiation being transmitted through it.

Abstract: A filament lamp and light irradiation type heat treatment device capable of uniformly thermally processing the entirety of an article to be treated has a filament lamp (100) in which coil-shaped filaments are disposed along the tube axis within a light emitting tube (102), wherein the filaments are electrically connected to a low-emission coil (F2?) having a relatively smaller effective surface area and to high-emission coils (F1?, F1?) having relatively large effective surface areas, with the low-emission coil disposed in between in the axis of the tube direction, and a light irradiation type heat treatment device utilizing the filament lamp (100).

Abstract: Light irradiation type heat treatment device composed of a plurality of lamps, including multi-filament lamps, the filaments of which can be independently supplied with power. The filaments are divided into a plurality of filament groups composed of filaments of one lamp put together with filaments of other lamps. Power control units are provided for each group, and drive units are provided corresponding to the power control units. The drive units adjust the electric power supplied from the power supply according to a command from the power control units to supply power to each filament belonging to the group. In a preferred arrangement, the plurality of lamps are arranged in parallel with at least one filament within each lamp having a length so as to form a concentric circle with filaments of other lamps arranged in parallel and the filaments forming the concentric circle are divided into a plurality of filament groups.

Abstract: Filament lamps whose individual filament coils can be set to specific temperatures in filament lamps that are supplied with electric power independently and to provide a heat treatment device of the light irradiation type that uses said lamps. Inside of a light emitting tube of each lamp, which has the hermetically sealed portions at each end, are multiple filament modules which have been made by linking pairs of leads which supply electrical power to both ends of coiled filaments and individual filaments that are placed so that they extend along the axis of the light emitting tube. In the electrically connected filament lamps, whose individual leads are connected to the respective electrically conductive material placed in the hermetically sealed portions, at least one of the individual filaments is made up of a single wire and at least two are made up of bundled wires with the single wire being located between the bundled wires.

Abstract: To avoid a decline in the reflectivity of an ultraviolet reflection film caused by lighting for an extended period of time and providing a uniform illuminance an excimer lamp has a silica glass discharge vessel with electrodes on opposite sides of the discharge vessel, wherein excimer discharge is generated in the discharge space of the discharge vessel, wherein an ultraviolet reflection film made of silica particles and alumina particles is formed on a surface exposed to the discharge space and wherein the mean particle diameter of silica particles is at least 0.67 times as large as the mean particle diameter of the alumina particles. The alumina particles in the ultraviolet reflection film preferably constitute at least 5 wt % and more preferably at least 10 wt % of the sum of silica particles and alumina particles.

Abstract: An excimer lamp, including a discharge vessel made of silica glass and having a discharge space; a pair of electrodes disposed on the discharge vessel, wherein the discharge space is filled with xenon gas; and an ultraviolet reflection film made from ultraviolet scattering particles, including silica particles and alumina particles, formed on a surface of the discharge vessel exposed to the discharge space. A thickness Y of the ultraviolet reflection film satisfies the expression Y>4X+5, given that a mean particle diameter of the ultraviolet scattering particles making up the ultraviolet reflection film is X (?m).

Abstract: An excimer lamp which can emit UV radiation with a high degree of efficiency and high degree of uniformity, has a UV-reflecting film that does not peel. The excimer lamp is fitted with a silica glass discharge vessel that encloses a discharge gas which forms excimer molecules by dielectric barrier discharge in an internal space enclosed by a top wall panel, a bottom wall panel, side wall panels and end panels and with an electrode on both the outer surface of the top wall panel and another electrode on the outer surface of the bottom wall panel. On the inner surface of the discharge vessel, a UV-reflecting film comprised of silica and alumina particles is formed, at least, on the inner surface area of the side wall panels with the silica particles composing at least 30 weight % of the UV-reflecting film.

Abstract: A discharge lamp of the short arc type which has an arc tube in which there is a pair of opposed electrodes, a pair of hermetically sealing parts which extend outward from opposite ends of the arc tube, and a trigger wire, each end of which is wound around one of the hermetically sealing parts, with a middle area of the trigger wire running along the outside surface of the arc tube. In the area of at least one of the ends of the trigger wire, a bend is formed which comes to rest on one of the hermetically sealing parts, and following this bend, a fold is formed at the outer end area of the end of the trigger wire.

Abstract: To provide a photo-irradiation type heat treatment apparatus that eliminates the adverse influence of a light transmitting window on the temperature distribution of an article to be treated without losing the original function of a reflecting mirror a photo-irradiation type heat treatment apparatus in which heat treating of an article is performed by irradiating the article with light emitted from multiple filament lamps through a light transmitting window, by providing the apparatus with a reflecting mirror having an opening at its central area so that cooling air can pass therethrough and by providing an air permeable reflector so as to cover the opening in the reflecting mirror.

Abstract: A process for optical alignment in which an alignment layer is irradiated with polarized light from a light source and optical alignment is carried out, and in which polarized light is emitted within the light irradiation area of the light source with differently aligned polarization axes. In doing so, the alignment layer and the light irradiation area are moved relative to one another so that the divergence of the polarization axes of the polarized light is essentially cancelled relative to one another and the direction of optical alignment in the alignment layer is made uniform.

Abstract: To prevent clogging of a nozzle of a printing head, a light irradiator for an ink jet printer is composed of a short arc type discharge lamp (10) and optical elements used for linearly condensing light from the lamp (10), e.g., an elliptic light condensing mirror (20) and a rod lens (30) in order to linearly condense light emitted from the lamp onto a substrate (5). A slit-type light outlet (40) is provided on a bottom plate (60) of a housing (8) so that the direct light from the lamp cannot reach places on the substrate (5) in the vicinity of the nozzle (4) of a printing head (4), and antireflection material (70) is provided on the surface of the bottom plate (60) facing the substrate (5) so that the light emitted from the light irradiator and reflected by the substrate (5) can be absorbed by the antireflection material (70).

Abstract: Light source device, including an alternating current high-pressure mercury lamp having a pair of opposed electrodes within a spherical light-emitting part containing at least 0.15 mg/mm3 of mercury and 10?6 ?mol/mm3 to 10?2 ?mol/mm3 of halogen, and cylindrical hermetically sealed portions extending from both ends of the light-emitting part. External leads protrude from the ends of the light-emitting part. A reflecting mirror has a concave reflecting part surrounding the light-emitting part and a cylindrical neck part. An adhesive fills a periphery one of the hermetically sealed portions in the area of the external leads in a manner fulfilling the relationship L1/R?0.5 where L1 (mm) is the length along the hermetically sealed portion filled with an adhesive and R (mm) is the diameter of the hermetically sealed portions. Feed wires connect to the external leads and openings for the feed wires can be formed in the reflecting part with flexible tubes between them.

Abstract: A light source device, including an alternating current high-pressure mercury lamp having a pair of electrodes opposite each other with a spherical light-emitting part having at least 0.15 mg/mm3 of mercury and halogen at 10?6 ?mol/mm3 to 10?2?mol/mm3, and cylindrical hermetically sealed parts extending from both ends of the light-emitting part. External leads protrude from the ends of the light-emitting part for receiving alternating current. A reflecting mirror having a concave reflecting part surrounds the light-emitting part and a cylindrical neck part. An adhesive for securing the mercury lamp and the reflecting mirror fills a periphery of the hermetically sealed parts of the mercury lamp. The distance L2 (mm) from a center in between the electrodes to the adhesive is set at a value of one of 16 mm or less and 20 mm or greater.