Patents Assigned to Von Ardenne Anlagentechnik GmbH
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Publication number: 20090050057Abstract: Apparatus for continuous coating has a chamber wall which forms a processing chamber, thermal insulation which forms a processing area within the chamber, a transportation device for substrates located in the processing area with a substrate transportation direction of the substrates lying in the lengthwise extension of the apparatus for continuous coating, and heating equipment which heats the substrates, is designed to minimize unwanted coating, in particular of parts of the apparatus, in order to minimize the expense of maintaining and servicing the apparatus A condensation element is positioned in the processing chamber, which extends into the processing area and binds the arising vapor through condensation.Type: ApplicationFiled: August 25, 2008Publication date: February 26, 2009Applicant: VON ARDENNE Anlagentechnik GmbHInventors: Hubertus VON DER WAYDBRINK, Siegfried SCHEIBE, Jens MEYER, Andrej WOLF, Uwe TRAEBER, Michael HENTSCHEL
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Patent number: 7490714Abstract: A transport device is particularly suitable for use in a vacuum chamber for the transportation of a flat substrate through the vacuum chamber and comprises a belt conveyor with at least one flexible infinite belt guided around at least two deflection rollers, whereby at least one deflection roller can be driven, and further including a filling element positioned for filling at least the space contained by the infinite belt or belts. The air volume enclosed by the transport device is significantly reduced in comparison to conventional solutions by incorporating the filling element in the transport element. As a result, the volume to be evacuated from the vacuum chamber is reduced. The vacuum chamber can be evacuated and ventilated more rapidly. Nevertheless, the transport device is constructed so as to be maintenance-friendly. Maintenance work can be carried out easily, because the infinite belts and the deflection rollers are easily accessible.Type: GrantFiled: April 26, 2006Date of Patent: February 17, 2009Assignee: Von Ardenne Anlagentechnik GmbHInventors: Jochen Krause, Michael Hofmann
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Publication number: 20090014285Abstract: In a transport device, which comprises at least one endless conveyor guided around at least two guide rollers, a monitoring appliance for monitoring motion of a guide roller is positioned on at least one of the guide rollers. The monitoring appliance comprises a first contact element disposed on and electrically connected with the guide roller, and a second contact element disposed near the guide roller. The first and second contact elements are arranged relative to one another in such a way that an electrical contact between them occurs with every revolution of the guide roller, such that the electric potential of the guide roller is transmitted to the second contact element. Additionally, a substrate treatment apparatus comprising such transport device is disclosed.Type: ApplicationFiled: July 9, 2008Publication date: January 15, 2009Applicant: VON ARDENNE Anlagentechnik GmbHInventors: Reinhardt BAUER, Johannes Struempfel, Andreas Heisig, Matthias Smolke, Thomas Posseckardt, Frank Hupka
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Publication number: 20080308410Abstract: A method is provided for coating a substrate with the aid of a magnetron cathode and two electrodes which are alternately impinged upon by a positive potential and a negative potential. Also disclosed is an assembly for coating a substrate, comprising a vacuum chamber, a magnetron cathode, two electrodes, and a voltage source. A negative potential is generated at a level that is no greater than the level of the cathode potential, thus preventing the electrode that is to be cleaned from being stripped to a greater extent than the same was coated in the previous half-wave. The magnetron cathode and the electrodes are connected to the voltage source via switching elements without being galvanically such that a negative and a positive voltage generated from the voltage source can be alternatively applied to the electrodes, the level of said voltage being no greater than the cathode voltage.Type: ApplicationFiled: November 6, 2006Publication date: December 18, 2008Applicant: Von Ardenne Anlagentechnik GmbHInventors: Goetz Teschner, Falk Milde, Enno Mirring, Frank Meissner, Goetz Grosser
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Patent number: 7443518Abstract: A measuring instrument, in particular for transmission measurement with transparent substrates, comprises a measuring head with a light emitting element for emitting a light beam and a light receiver element for recording an incident light beam, and a retro-reflector for reflection of the emitted light beam. The measuring instrument allows transmission measurements to be carried out on transparent substrates with only one reflection measuring head. The measuring instrument also allows reflection measurements to be carried out, for example on non-transparent substrates or by tilting the measuring head and covering the retro-reflector. The measuring instrument only requires one measuring head and can therefore be produced more cost-effectively. It does not require calibration, as the retro-reflector also reflects the light in the original direction in the case of oblique incidence and in the event of positional changes caused by process or operational factors (vibrations etc.).Type: GrantFiled: April 10, 2006Date of Patent: October 28, 2008Assignee: Von Ardenne Anlagentechnik GmbHInventors: Jochen Krause, Holger Proehl
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Publication number: 20080193636Abstract: A device for vaporizing coating material is disposed in a vacuum chamber as part of a deposition apparatus; the coating material being arranged in a crucible for vaporization purposes. The vaporizing device has an evaporation chamber that is connected, via a vacuum valve, to a loading chamber which can be evacuated while an evaporator is connected to the evaporation chamber at a vapor discharge end, i.e., the end facing the vacuum chamber, via a first vapor stop valve.Type: ApplicationFiled: April 16, 2005Publication date: August 14, 2008Applicant: VON ARDENNE ANLAGENTECHNIK GMBHInventors: Lutz Gottsman, Ulf Seyfert, Bernd-Dieter Wenzel, Reinhard Jaeger
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Publication number: 20080128276Abstract: A supply end block to supply a sputter cathode with a coolant and electrical voltage, includes a housing with a coolant connection and a current connection as well as a support shaft mounted to rotate, on which a target tube is fastened. The coolant connection and current connection are brought together directly at a feed site so that the coolant is brought to the potential of the applied electric voltage on entering the housing of the end block. Optimal cooling of the current feed is achieved, and optimal potential equalization of the coolant simultaneously occurs.Type: ApplicationFiled: October 17, 2007Publication date: June 5, 2008Applicant: VON ARDENNE Anlagentechnik GmbHInventors: Hans-Juergen Heinrich, Goetz Teschner, Thorsten Sander, Cornell Weidelt, Joern Brueckner
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Publication number: 20080083370Abstract: A transport device for transporting elongated substrates through a vacuum coating system comprises an essentially rectangular frame and two groups of holding elements, which are rotatably mounted on opposite sides of the frame in such a manner that any pair of opposite holding elements can be connected to both ends of a substrate. Furthermore, at least one retainer bar is provided that is operatively connected to a group of holding elements in such a manner that the holding elements of this group are moveable in order to increase or decrease by choice their distance from the holding elements of the other group. Also provided are a loading and unloading device for loading and unloading the transport device, and a method for loading and unloading the transport device.Type: ApplicationFiled: October 10, 2007Publication date: April 10, 2008Applicants: VON ARDENNE ANLAGENTECHNIK GMBH, XENON AUTOMATISIERUNGSTECHNIK GMBHInventors: Johannes STRUEMPFEL, Reinhardt BAUER, Andreas HEISIG, Hans-Christian HECHT, Hartmut FREITAG, Heiko RICHTER, Andre ULBRICHT, Falk SCHWERDTFEGER
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Publication number: 20080057319Abstract: A layer system that can be annealed comprises a transparent substrate, preferably a glass substrate, and a first layer sequence which is applied directly to the substrate or to one or more bottom layers that are deposited onto the substrate. The layer sequence includes a substrate-proximal blocking layer, a selective layer and a substrate-distal blocking layer. Also provided is a method for producing a layer system that can be annealed and has a sufficient quality even under critical climatic conditions and/or undefined conditions of the substrate. During the heat treatment (annealing, bending), the color location of the layer system is maintained substantially stable and the color location can be widely varied at a low emissivity of the layer system. For this purpose, a first dielectric intermediate layer is interposed between the substrate-proximal blocking layer and the selective layer and is configured as a substoichiometric gradient layer.Type: ApplicationFiled: September 21, 2005Publication date: March 6, 2008Applicant: VON ARDENNE ANLAGENTECHNIK GMBHInventors: Joerg Fiukowski, Matthias List, Hans-Christian Hecht, Falk Milde
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Publication number: 20080032157Abstract: An infrared radiation reflecting transparent layer system on a transparent substrate and a method for producing same is provided. The infrared radiation reflecting layer system comprises an infrared radiation reflecting layer sequence which includes a selective function usually consisting of a noble metal, mostly silver, or an alloy thereof and having a good selective reflectivity in the infrared range. The layer sequence is supplemented by at least one transparent dielectric layer of an oxynitride of a metal, a semiconductor or a semiconductor alloy having a low to moderate refractive index arranged directly on the substrate or above the infrared radiation reflecting layer sequence.Type: ApplicationFiled: May 17, 2007Publication date: February 7, 2008Applicant: VON ARDENNE ANLAGENTECHNIK GMBHInventors: Christoph Koekert, Holger Proehl, Falk Milde
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Publication number: 20070273991Abstract: A layer system that filters sun and heat can be applied to glass by a vacuum coating process. The system comprises at least one series of metal layers in addition to a respective series of lower dielectric layers and a respective series of upper dielectric layers. At least one series of metal layers and one series of upper and lower dielectric layers are configured as a sandwich system, wherein one metal layer is encapsulated by an upper and a lower intermediate layer consisting of hypostoichiometrically nitrided or oxidized metal of the metal layer and sandwich systems of the series of layers contain individual sandwich layers of a stoichiometric and hypostoichiometric oxide or nitride of a metal or semiconductor. An oxygen or nitrogen deficit of the sandwich layers increases towards a neighboring sandwich system and the oxide and nitride layers are produced in a vacuum coating process.Type: ApplicationFiled: November 25, 2004Publication date: November 29, 2007Applicant: VON ARDENNE ANLAGENTECHNIK GMBHInventors: Matthias List, Falk Milde, Christoph Koeckert, Joerg Fiukowski
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Publication number: 20070240636Abstract: A thermal vacuum deposition device and method in which a band-shaped substrate is continuously conveyed in a vaporization channel that is charged with a vaporous coating material is characterized in that the vaporization channel is sealed by inserting at least one positionally adjustable hollow element into an outer space of the vaporization channel and an inner space of the vaporization channel when a minimum conveying speed is not attained or when the substrate is at a standstill such that the substrate is located in the inner space.Type: ApplicationFiled: April 16, 2005Publication date: October 18, 2007Applicant: VON ARDENNE ANLAGENTECHNIK GMBHInventors: Lutz Gottsman, Ulf Seyfert, Bernd-Dieter Wenzel, Reinhard Jaeger
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Publication number: 20070235328Abstract: A high power supply device for a vacuum coating system with at least one magnetron disposed in a coating chamber comprises a line adapter for a DC power supply for converting a line voltage into a DC voltage, a line connection for supplying the line voltage, and a medium-frequency generator supplied by the DC power supply for providing a medium-frequency voltage with at least one load connection for supplying the magnetron with the medium-frequency voltage. The line adapter for the DC power supply in the medium-frequency generator are disposed in a common housing. Dimensions in the housing are adapted to dimensions of the coating chamber and the high frequency supply device is adapted to be mechanically and electrically connected to a magnetron by a connection which is direct and can be undone.Type: ApplicationFiled: March 22, 2007Publication date: October 11, 2007Applicant: VON ARDENNE ANLAGENTECHNIK GMBHInventors: Goetz TESCHNER, Goetz GROSSER, Wolfgang FRIEDEMANN, Dietmar SCHULZE
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Publication number: 20070218201Abstract: A coating method is provided for thermally vacuum-depositing a continuously conveyed substrate that moves within a deposition channel by vaporizing solid or liquid coating materials and vapor-depositing the vaporized coating material onto the substrate in a deposition device. In order to create a coating conveyed substrate, in which accessibility to the vaporization device is improved while the processes taking place in the deposition chamber and the vaporization device can be controlled independently of each other, at least one evaporation device is located outside the deposition chamber and delivery of steam between the evaporator and the deposition channel is regulated.Type: ApplicationFiled: April 16, 2005Publication date: September 20, 2007Applicant: VON ARDENNE ANLAGENTECHNIK GMBHInventors: Lutz Gottsman, Ulf Seyfert, Bernd-Dieter Wenzel
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Publication number: 20070209710Abstract: A valve is used for vapor-tightly disconnecting two interconnected process units. The valve comprises a continuous duct which connects two vacuum evaporators that are individually provided with an outer vapor-proof jacket, and a blocking mechanism mounted in the duct. In order to allow the two interconnected vacuum evacuators to be disconnected in a vapor-proof manner such that the functional reliability is improved, a vapor-impinged surface of the valve duct is provided with a vapor condensation-repellent zone which is connected in a thermally conducting manner to a heating apparatus that envelopes the valve.Type: ApplicationFiled: April 16, 2005Publication date: September 13, 2007Applicant: VON ARDENNE Anlagentechnik GmbHInventors: Lutz GOTTSMANN, Ulf SEYFERT, Bernd-Dieter WENZEL, Reinhard JAEGER
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Publication number: 20070209973Abstract: A sluice system for a vacuum coating facility for coating substrates that can be moved through the vacuum coating in a direction of conveyance comprises a prevacuum slice chamber and a transfer chamber adjoining a coating chamber, wherein a fine vacuum can be regulated before the transfer chamber on the input side in the direction of conveyance and after the transfer device on the output side in the direction of conveyance. The prevacuum sluice chamber is directly adjacent to the transfer chamber and the fine vacuum can be regulated in the prevacuum sluice chamber. A high-vacuum pump system can also alternatively and selectively be connected to the prevacuum sluice chamber.Type: ApplicationFiled: October 12, 2004Publication date: September 13, 2007Applicant: VON ARDENNE Anlagentechnik GmbHInventors: Olaf Gawer, Jens Melcher, Dietmar Schulze, Hans-Christian Hecht
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Publication number: 20070205385Abstract: A slide valve, especially useful in a coating system for coating substrates in a vacuum, includes a housing formed from housing walls. An opening and a sealing surface surrounding the opening is provided in each of two opposing housing walls, with the openings forming a passage through the housing. At least one closing element with two sealing surfaces, is guided back and forth in a mobile manner crosswise to the passage in the housing between a rest position that releases the openings and a working position that completely overlaps the openings. An actuating force that acts on the closing element when the closing element moves into the working position applies a pressure to the sealing surfaces surrounding the openings of the housing walls, which pressure depends on the level of the actuating force. The coating system contains the slide valve.Type: ApplicationFiled: February 20, 2007Publication date: September 6, 2007Applicant: VON ARDENNE ANLAGENTECHNIK GMBHInventors: Jochen KRAUSE, Michael HOFMANN
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Publication number: 20070193719Abstract: A coolable carrier plate for targets in vacuum atomization systems has a connection surface and at least one fastening support for connecting the carrier plate to a component provided for this purpose, at least one sealant for sealing the connection surface, at least one cavity for conveying a coolant with a coolant inlet and a coolant outlet, and a supporting surface for supporting a target. The cavity is formed by a coolant channel or network of coolant channels that runs inside the carrier plate.Type: ApplicationFiled: February 20, 2007Publication date: August 23, 2007Applicant: VON ARDENNE Anlagentechnik GmbHInventors: Michael Huhn, Carsten Deus, Goetz Teschner, Erwin Zschieschang
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Publication number: 20070181749Abstract: A system for launching a payload has a rotating flywheel that accelerates a traditionally designed rocket to a significant speed. Rotational energy from the flywheel is transferred in the form of kinetic energy through a spiral surface and a cable to the rocket. The system comprises a smaller rocket carrying less fuel, provided with a smaller first stage engine. All other components of the system are re-used. This leads to a simpler and more efficient design of the rocket and to a considerable reduction in launch costs.Type: ApplicationFiled: October 31, 2004Publication date: August 9, 2007Applicant: VON ARDENNE ANLAGENTECHNIK GMBHInventor: Frederic Demole
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Publication number: 20070175889Abstract: The invention relates to a heater panel of a radiant heater comprising a heating spiral provided on a panel element and mechanically connected to the panel element with a portion of a spiral turn. With the object of providing a heater panel with a stable arrangement of the heating spiral on the panel element by which a high power density is achievable, each spiral turn is detachably connected to the panel element by three spaced-apart contact spots. Two of said contact spots are located on the outer circumference of the spiral turn in such a distance to each other that the radii originating at them define an angle of less than 180°, and the third contact spot is located on the inner circumference of the spiral turn within the portion of the spiral turn facing the panel element and confined by the two outer contacts.Type: ApplicationFiled: January 8, 2007Publication date: August 2, 2007Applicant: VON ARDENNE ANLAGENTECHNIK GMBHInventors: Hans-Juergen HEINRICH, Hubertus VON DER WAYDBRINK