Abstract: A method and device are provided for measurement of various transmission and reflection values of transparent measurement objects having transparent layers in an inline coating system, and particularly the turbidity of the measurement object during a relative movement between the measurement object and measuring device. Transmission fractions are measured in two different radiation directions of a lighting source emitting diffuse light by two photodetectors, by which a fraction of diffuse light of the lighting source is suppressed in one direction.

Abstract: In a method for coating substrates with materials to be vaporized in a vacuum coating system, the vaporization material is deposited on the substrate by double vaporization using an intermediate carrier. The intermediate carrier is continuously moved and.

Abstract: An infrared radiation reflecting transparent layer system on a transparent substrate and a method for producing same is provided. The infrared radiation reflecting layer system comprises an infrared radiation reflecting layer sequence which includes a selective function usually consisting of a noble metal, mostly silver, or an alloy thereof and having a good selective reflectivity in the infrared range. The layer sequence is supplemented by at least one transparent dielectric layer of an oxynitride of a metal, a semiconductor or a semiconductor alloy having a low to moderate refractive index arranged directly on the substrate or above the infrared radiation reflecting layer sequence.

Abstract: A magnetron arrangement includes a hollow target and a magnet system arranged in the hollow target with a magnet carrier and a magnet arrangement fitted on the magnet carrier. The magnet carrier includes at least two magnet carrier elements, which each have at least one cavity and each have at least one contact face on an outer side. The at least two magnet carrier elements are in touching contact with their contact faces and are fixedly connected to one another, and the cavities of the magnet carrier elements have no connection between them.

Abstract: A highly efficient getter pump with low maintenance requirements is applied to a vacuum coating installation, allowing a substrate to be coated to remain uncontaminated by a dusting of getter material. The getter pump comprises a pump housing with an exposure opening. The housing has a getter body, of getter material that essentially closes the exposure opening and can move in relation to the exposure opening. An inner sub-section of the surface of the getter body points towards the interior of the pump housing and an outer sub-section points towards the exterior of the pump housing through the exposure opening. The positions of the inner and outer sub-sections are interchangeable by movement of the getter body. The getter pump is equipped with a device for removing getter material from the inner sub-section.

Abstract: In a transfer chamber having a housing with a transfer region and a passing band region, a transport device comprising a first arrangement of transport rollers is arranged in the transfer region of the housing, and a passing band comprising a second arrangement of transport rollers is arranged in the passing band region of the housing. The passing band region of the housing is subdivided by a horizontal wall, which is arranged above the passing band, into a transport space, which is located below the horizontal wall, and a pump space, which is located above the horizontal wall. The pump space has a vacuum port or a vacuum pump connected to it.

Abstract: An end block for a magnetron device having a rotatable target comprises an end block housing having a pivot bearing. The end block housing is adapted on its outer side for attachment on a support unit, and the pivot bearing is adapted on an end that is accessible from outside the end block housing, for connection to the rotatable target. The end block housing is movably attached on the support unit. A vacuum coating apparatus has a vacuum chamber, a magnetron device situated in the vacuum chamber, and a rotatable target rotatably mounted on at least one such end block.

Abstract: In a method for coating a substrate in a vacuum chamber having a rotating magnetron, wherein a substrate is guided past the magnetron in a substrate transport direction and is coated by a material, which has been isolated from a target connected to the magnetron, and, optionally with the material reacting with a reactive gas present in the vacuum chamber, homogeneity of the coating layer on a substrate is improved by stabilizing the working point by way of the target rotation. This is achieved in that a periodic change of a first process parameter caused by the target revolution is compensated for by a periodic change of a second process parameter having a determined level and/or by employing two magnetrons having different rotational speeds.

Abstract: A device for controlling the temperature of substrates in a substrate-treatment system, in which a substrate can be guided in the longitudinal extension of the substrate-treatment system in a substrate transport plane within a vacuum chamber past a treatment device, solves the problem of dynamically shaping a dynamic change of the thermal insulation to control the heat transfer in the substrate and thereby, reduce, in particular, thermal inertias by providing a heat-absorbing cooler side of the substrate transport plane. The heat-absorbing cooler can be shielded, at least partially from the substrate transport plane, using an insulation member.

Abstract: A sluice system for a vacuum coating facility for coating substrates that can be moved through the vacuum coating in a direction of conveyance comprises a prevacuum slice chamber and a transfer chamber adjoining a coating chamber, wherein a fine vacuum can be regulated before the transfer chamber on the input side in the direction of conveyance and after the transfer device on the output side in the direction of conveyance. The prevacuum sluice chamber is directly adjacent to the transfer chamber and the fine vacuum can be regulated in the prevacuum sluice chamber. A high-vacuum pump system can also alternatively and selectively be connected to the prevacuum sluice chamber.

Abstract: Apparatus for continuous coating has a chamber wall which forms a processing chamber, thermal insulation which forms a processing area within the chamber, a transportation device for substrates located in the processing area with a substrate transportation direction of the substrates lying in the lengthwise extension of the apparatus for continuous coating, and heating equipment which heats the substrates, is designed to minimize unwanted coating, in particular of parts of the apparatus, in order to minimize the expense of maintaining and servicing the apparatus A condensation element is positioned in the processing chamber, which extends into the processing area and binds the arising vapor through condensation.

Abstract: A vacuum coating unit having a pair of side by side transport devices for transporting substrates in a transport direction. Each transport device includes at least one first endless conveyor running in the transport direction and having a conveying element guided around at least two guide rollers or pulleys. The conveying element is located at a distance from a guide device extending in the transport direction parallel to the conveying element in such a way that the ends of the substrates can be introduced into the gap between the conveying element and the guide device of the transport devices and can be moved in the transport direction by the displacement of the conveying elements.

Abstract: An infrared radiation reflecting transparent layer system on a transparent substrate and a method for producing same is provided. The infrared radiation reflecting layer system comprises an infrared radiation reflecting layer sequence which includes a selective function usually consisting of a noble metal, mostly silver, or an alloy thereof and having a good selective reflectivity in the infrared range. The layer sequence is supplemented by at least one transparent dielectric layer of an oxynitride of a metal, a semiconductor or a semiconductor alloy having a low to moderate refractive index arranged directly on the substrate or above the infrared radiation reflecting layer sequence.

Abstract: A thin-film solar cell includes a front-side glass substrate, a front contact arranged above the glass substrate, an absorber arranged above the front contact, and a rear contact arranged above the absorber. A TCO layer system composed of an intrinsic TCO layer deposited above the substrate and a doped TCO layer arranged thereabove is provided, as well as a method for producing such a thin-film solar cell. Improved transmission, reflection and absorption properties of the TCO layer is achieved by composing the TCO layer of a first doped TCO sublayer deposited directly on the intrinsic TCO layer, and a second doped TCO sublayer deposited directly on the first doped TCO sublayer.

Abstract: Conveyor devices, in particular for use in substrate treatment devices, and configurations of substrate treatment devices, in particular horizontal coating installations for the mass coating of plate-like substrates during the production of solar cells are provided. The conveyor device comprises a multiplicity of conveyor rollers, each mounted rotatably at both ends thereof. During operation of the conveyor device, at least one conveyor roller is displaceable axially, i.e. parallel to the axis of rotation thereof.

Abstract: A substrate treatment system for treating substrates in a continuous process includes a system chamber delimited by chamber walls, having an entry lock and an exit lock, and also at least one substrate treatment device and a transportation device inside the system chamber. The transportation device has an arrangement of transportation rollers arranged one behind the other in the transportation direction, for vertical or horizontal transportation of substrates. The rotor of the drive device is arranged under the pressure conditions prevailing in the system chamber and the stator of the drive device is arranged outside the pressure conditions prevailing in the system chamber.

Abstract: A substrate treatment system for treating substrates includes a system chamber, delimited by chamber walls, at least one substrate treatment device and a transportation device inside the system chamber. The transportation device has an arrangement of transportation rollers arranged one behind the other in the transportation direction, for vertical or horizontal transportation of substrates. At least a first group of transportation rollers which are arranged immediately one behind the other, each has its own drive device.

Abstract: In a vacuum coating installation to coat planar substrates, comprising a vacuum chamber and a transport device arranged in the vacuum chamber for transporting the substrates along a transportation path through the vacuum chamber, with the transport device comprising a multitude of transport rollers arranged successively along the transportation path, each transport roller is adapted to be mounted at least at two different positions, vertically distanced from each other. A carrier frame has a substrate accepting structure and a guiding rod arranged at the bottom of the carrier frame in the direction of transportation to create a friction connection with the transportation device, connected to the carrier frame at the connection points, with the guiding rod being connected at least at one connection point to the carrier frame such that a relative displacement is possible of the guiding rod relative to the carrier frame in the direction of transportation.

Abstract: A method for measuring the temperature of substrates to be coated is disclosed. The substrates have an opening or a cavity, and the substrates are successively moved past a source of coating material. At least one substrate's temperature is measured during coating by at least one temperature sensor and the measured temperature value is transmitted to a measuring device. The temperature sensor is disposed inside the substrate's opening or cavity so as to prevent coating of the temperature sensor.

Abstract: A measuring device for measuring optical properties of transparent substrates includes a light transmitter and/or light receiver comprising a hollow cylinder having a highly reflective and diffusely dispersive inner surface. The light transmitter comprises a light source arranged in its interior and a light exit opening at a distance from the light source. The light receiver has a light sensor instead of the light source, at a distance from a light entrance opening. The light source and light sensor are arranged at such a distance from the light exit opening and light entrance opening respectively, given a corresponding direction of propagation of the light, that light emitted by the light source or received by the light sensor and multiply reflected in the hollow cylinder emerges as diffuse light from the light exit opening or is incident on the light sensor.