Abstract: A power generating element according to the present invention includes a pedestal formed in a frame shape in plan view, a vibrating body provided inside the pedestal, at least three first bridge supporting portions, each of the first bridge supporting portions extending along a first extending axis and configured to arrange the vibrating body to be supported on a pedestal, and a charge generating element. The first extending axes of a pair of the first bridge supporting portions adjacent to each other form a predetermined angle in a circumferential direction with the vibrating body defined as a center in plan view. At least one first electrode layer of the charge generating element is arranged on each of the first bridge supporting portions.

Abstract: A base end of a flexible plate-like structure body (111) having a first attribute is fixed to a pedestal (310) and a leading end thereof is connected to a connector between different attributes (112). Base end of a flexible plate-like structure body (113, 114) having a second attribute is connected to the connector between different attributes (112) and leading end thereof is given as free ends. Weight body (211, 212, 213) is connected to the lower surface of the connector between different attributes (112) and the leading-end lower surface of the plate-like structure body (113, 114) having the second attribute. When vibration energy is applied to the pedestal (310), the weight body (211, 212, 213) undergoes vibration, resulting in deformation of each of the plate-like structure bodies (111, 113, 114). The deformation energy is taken out by a charge generating element (400) such as a piezoelectric element to generate electric power.

Abstract: A power generating element according to the present invention includes a pedestal formed in a frame shape in plan view, a vibrating body provided inside the pedestal, at least three first bridge supporting portions, each of the first bridge supporting portions extending along a first extending axis and configured to arrange the vibrating body to be supported on a pedestal, and a charge generating element. The first extending axes of a pair of the first bridge supporting portions adjacent to each other form a predetermined angle in a circumferential direction with the vibrating body defined as a center in plan view. At least one first electrode layer of the charge generating element is arranged on each of the first bridge supporting portions.

Abstract: A plate-like supporting body (200) is arranged below a plate-like force receiving body (100) and a deformation body (300) is connected between them. The deformation body (300) is provided with an elastically deformed portion (310) arranged along a connection channel (R1) which connects a first force receiving point (P1) with a second force receiving point (P2), a first base portion (320) and a second base portion (330) which support the elastically deformed portion (310) from below. The upper end of the first base portion (320) supports the vicinity of a first relay point (m1) on the connection channel (R1) so as to sway freely, and the upper end of the second base portion (330) supports the vicinity of a second relay point (m2) on the connection channel (R1) so as to sway freely.

Abstract: A plate-like supporting body (200) is arranged below a plate-like force receiving body (100) and a deformation body (300) is connected between them. The deformation body (300) is provided with an elastically deformed portion (310) arranged along a connection channel (R1) which connects a first force receiving point (P1) with a second force receiving point (P2), a first base portion (320) and a second base portion (330) which support the elastically deformed portion (310) from below. The upper end of the first base portion (320) supports the vicinity of a first relay point (m1) on the connection channel (R1) so as to sway freely, and the upper end of the second base portion (330) supports the vicinity of a second relay point (m2) on the connection channel (R1) so as to sway freely.

Abstract: A cylindrical annular detector is disposed at the periphery of the columnar body fixed at a central part of the upper surface of a supporting substrate. A space between the columnar body and the annular detector is connected by a thin flexible connection member (diaphragm). A washer-shaped insulation substrate is disposed on the upper surface of the supporting substrate, individual fixed electrodes are formed on the upper surface thereof, and they constitute capacitive elements together with a displacement electrode which is composed of the lower surface of the annular detector. Upon exertion of an external force on the annular detector, the flexible connection member deflects to cause displacement, which is detected as change in capacitance value of the capacitive element.

Abstract: A cylindrical annular detector is disposed at the periphery of the columnar body fixed at a central part of the upper surface of a supporting substrate. A space between the columnar body and the annular detector is connected by a thin flexible connection member (diaphrapm). A washer-shaped insulation substrate is disposed on the upper surface of the supporting substrate, individual fixed electrodes are formed on the upper surface thereof, and they constitute capacitive elements together with a displacement electrode which is composed of the lower surface of the annular detector. Upon exertion of an external force on the annular detector, the flexible connection member deflects to cause displacement, which is detected as change in capacitance value of the capacitive element.

Abstract: Between an upper substrate 10 and a lower substrate 20 parallel to the XY plane, a first columnar member P1 and a second columnar member P2 are disposed. The upper end of each columnar member P1 or P2 is connected to the upper substrate 10 via an upper film portion 11 or 12, and the lower end is connected to the lower substrate 20 via a conductive lower film portion 21 or 22. The columnar members P1 and P2 are inclined mutually opposite with respect to vertical reference axes R1 and R2. When a rightward force +Fx is applied to the upper substrate 10 and the upper substrate 10 slides rightward, the columnar member P1 incline in a laying-down direction and the lower film portion 21 is deformed upward, and the columnar member P2 inclines in a rising direction and the lower film portion 22 is deformed downward.

Abstract: Static and dynamic acceleration as well as static and dynamic angular velocity are detected with a simple structure. An acceleration detecting section includes a weight body, a pedestal around the weight body, flexible plate-like bridge portions, and piezoresistive elements embedded in the upper surface of the bridge portions. An angular velocity detecting section includes a weight body, a pedestal around the weight body, flexible plate-like bridge portions, and piezoelectric elements fixed to the upper surface of the bridge portions. The pedestals are fixed to a device chassis. When the weight body is displaced by acceleration, the plate-like bridge portions are deflected, so that the acceleration is detected based on the change in the electrical resistances of the piezoresistive elements.

Abstract: Forces and moments are detected in a distinguishing manner by a simple structure. A supporting member (20) is positioned below a force receiving member (10), which receives forces to be detected, and between these components, four columnar force transmitting members (11 to 14) are connected. Connecting members, having flexibility, are interposed at the upper and lower ends of each of the columnar force transmitting members (11 to 14) so that the columnar force transmitting members (11 to 14) can become inclined when the force receiving member (10) becomes displaced upon receiving a force. Sensors (21 to 24), each equipped with capacitance elements, are positioned at the connections parts of the respective columnar force transmitting members (11 to 14) and the supporting member (20) to detect forces that are transmitted from the respective columnar force transmitting members (11 to 14) to the supporting member (20).

Abstract: Forces and moments are detected in a distinguishing manner by a simple structure. A supporting member (20) is positioned below a force receiving member (10), which receives forces to be detected, and between these components, at least two columnar force transmitting members (11, 12) are connected. Connecting members having flexibility are interposed at the upper and lower ends of each of columnar force transmitting members (11, 12) so that columnar force transmitting members (11, 12) can become inclined when force receiving member (10) becomes displaced upon receiving a force. Sensors (21, 22) are positioned at the respective connection parts of columnar force transmitting members (11, 12) and supporting member (20) to detect forces that are transmitted from the respective columnar force transmitting members (11, 12) to supporting member (20).

Abstract: The invention provides a force detector in which power consumption is suppressed. Four electrodes E11 through E14 are formed on a substrate, and an elastic deformable body formed of a rubber film is disposed thereon. A conductive coating is applied on the lower surface of the elastic deformable body to provide a displacing conductive layer 26. Four capacitance elements C11 through C14 are comprised by the electrodes E11 through E14 and the displacing conductive layer 26 opposed to the electrodes. The capacitance values thereof are converted into voltage values V11 through V14 by C/V converter circuit 50, and based on operation by signal processing circuit 60, an external force applied to the elastic deformable body is detected.

Abstract: An efficient rotational-operation-quantity input device suitable to be built into a small electrical appliance is provided. An operational force applied by an operator is input in time series as a coordinate value (x, y) in an XY two-dimensional rectangular coordinate system by a two-dimensional force sensor 100, and is converted into a coordinate value (r, ?) by a polar-coordinate converting section 200. When a value r of the coordinate value (r, ?) obtained in time series is larger than a predetermined threshold rt, an operation-quantity recognizing section 300 recognizes the coordinate value (r, ?) as a significant coordinate value, and, when the value ? generates a variation ?? exceeding a predetermined threshold ?t with respect to a value “? before” immediately therebefore during a period during which a significant coordinate value (r, ?) is obtained continuously, it recognizes a value corresponding to the variation ?? as an operation quantity indicating a rotation.

Abstract: Forces and moments are detected in a distinguished manner by a simple structure. An outer box-like structure formed of a metal is set on top of an insulating substrate and an insulating inner box-like structure is contained in the interior. Five electrodes E1 to E5 are positioned on a top plate of the inner box-like structure. Four electrodes E6 to E9 are positioned on the four side surfaces of the inner box-like structure. Capacitance elements C1 to C5 are arranged by electrodes E1 to E5 and a top plate of the outer box-like structure and capacitance elements C6 to C9 are arranged by electrodes E6 to E9 and side plates of the outer box-like structure.

Abstract: A capacitance type sensor includes a substrate, a group of electrodes fixed on an upper face of the substrate, a movable electrode plate having an electrode on its lower side and a gap between the group of fixed electrodes on the substrate and the electrode on the movable electrode plate. The gap is formed with a solder layer, a conductive elastomer layer, a conductive paint layer, or a conductive adhesive material layer provided on the substrate. The electrode on the movable electrode plate is made of conductive rubber plate or conductive elastomer plate.

Abstract: An acceleration sensor in a connecting portion connects a displacing section to a fixed section and a weight is connected to the displacing section from below. A pedestal is disposed adjacent to the weight and is connected to the fixed section by a pedestal joint layer so a displacement of the displacing section can be detected. The weight has a peripheral portion of its upper surface opposite a control surface on a lower surface of the fixed section to come into contact therewith upon a given magnitude of acceleration of the weight. A weight joint layer made of the same material as that of the pedestal joint layer joins the weight and the displacing section.

Abstract: Forces and moments are detected in a distinguishing manner by a simple structure. A supporting member (20) is positioned below a force receiving member (10), which receives forces to be detected, and between these components, at least two columnar force transmitting members (11, 12) are connected. Connecting members having flexibility are interposed at the upper and lower ends of each of columnar force transmitting members (11, 12) so that columnar force transmitting members (11, 12) can become inclined when force receiving member (10) becomes displaced upon receiving a force. Sensors (21, 22) are positioned at the respective connection parts of columnar force transmitting members (11, 12) and supporting member (20) to detect forces that are transmitted from the respective columnar force transmitting members (11, 12) to supporting member (20).

Abstract: The invention provides a force detector in which power consumption is suppressed. Four electrodes E11 through E14 are formed on a substrate, and an elastic deformable body formed of a rubber film is disposed thereon. A conductive coating is applied on the lower surface of the elastic deformable body to provide a displacing conductive layer 26. Four capacitance elements C11 through C14 are comprised by the electrodes E11 through E14 and the displacing conductive layer 26 opposed to the electrodes. The capacitance values thereof are converted into voltage values V11 through V14 by C/V converter circuit 50, and based on operation by signal processing circuit 60, an external force applied to the elastic deformable body is detected.

Abstract: The present invention easily achieves an accurate control structure for limiting displacement of a weight. An SOI substrate with a trilaminar structure including a silicon layer, a silicon oxide layer, and a silicon layer is prepared, and slits are opened by applying induced coupling plasma etching which can selectively remove only silicon from the upper side. Then, the same etching is applied from the lower side to form grooves, whereby the lower silicon layer is separated into a weight and a pedestal. Next, the structure is immersed in an etchant which can selectively remove only silicon oxide, whereby the vicinities of exposed portions of the silicon oxide layer are removed to form joint layers. A glass substrate is joined to the bottom surface of the pedestal. Piezo resistor elements are formed on the upper surface of the silicon layer to detect bending. The degree of freedom of upward displacements of the weight is accurately set based on the thickness of the joint layer.

Abstract: The invention provides a force detector in which power consumption is suppressed. Four electrodes (E11-E14) are formed on a substrate, and an elastic deformable body formed of a ruber film is disposed thereon. A conductive coating is applied on the lower surface of the elastic deformable body to provide a displacing conductive layer (26). Four capacitance elements (C11-C14) are comprised by the electrodes (E11-E14) and the displacing conductive layer (26) opposed to the electrodes. The capacitance values thereof are converted into voltage values (V11-V14) by C/V converter circuit (50), and based on operation by signal processing circuit (60), an external force applied to the elastic deformable body is detected. A pair of contacting electrodes (E15) and (E16) are formed on the substrate, and when an external force with a predetermined strength or more is applied, the elastic deformable body deforms, and the displacing conductive layer (26) comes into contact with both electrodes (E15) and (E16).