Abstract: Forces and moments are detected in a distinguishing manner by a simple structure. A supporting member (20) is positioned below a force receiving member (10), which receives forces to be detected, and between these components, at least two columnar force transmitting members (11, 12) are connected. Connecting members having flexibility are interposed at the upper and lower ends of each of columnar force transmitting members (11, 12) so that columnar force transmitting members (11, 12) can become inclined when force receiving member (10) becomes displaced upon receiving a force. Sensors (21, 22) are positioned at the respective connection parts of columnar force transmitting members (11, 12) and supporting member (20) to detect forces that are transmitted from the respective columnar force transmitting members (11, 12) to supporting member (20).

Abstract: Forces and moments are detected in a distinguished manner by a simple structure. An outer box-like structure formed of a metal is set on top of an insulating substrate and an insulating inner box-like structure is contained in the interior. Five electrodes E1 to E5 are positioned on a top plate of the inner box-like structure. Four electrodes E6 to E9 are positioned on the four side surfaces of the inner box-like structure. Capacitance elements C1 to C5 are arranged by electrodes E1 to E5 and a top plate of the outer box-like structure and capacitance elements C6 to C9 are arranged by electrodes E6 to E9 and side plates of the outer box-like structure.

Abstract: The invention provides a force detector in which power consumption is suppressed. Four electrodes E11 through E14 are formed on a substrate, and an elastic deformable body formed of a rubber film is disposed thereon. A conductive coating is applied on the lower surface of the elastic deformable body to provide a displacing conductive layer 26. Four capacitance elements C11 through C14 are comprised by the electrodes E11 through E14 and the displacing conductive layer 26 opposed to the electrodes. The capacitance values thereof are converted into voltage values V11 through V14 by C/V converter circuit 50, and based on operation by signal processing circuit 60, an external force applied to the elastic deformable body is detected.

Abstract: The present invention easily achieves an accurate control structure for limiting displacement of a weight. An SOI substrate with a trilaminar structure including a silicon layer, a silicon oxide layer, and a silicon layer is prepared, and slits are opened by applying induced coupling plasma etching which can selectively remove only silicon from the upper side. Then, the same etching is applied from the lower side to form grooves, whereby the lower silicon layer is separated into a weight and a pedestal. Next, the structure is immersed in an etchant which can selectively remove only silicon oxide, whereby the vicinities of exposed portions of the silicon oxide layer are removed to form joint layers. A glass substrate is joined to the bottom surface of the pedestal. Piezo resistor elements are formed on the upper surface of the silicon layer to detect bending. The degree of freedom of upward displacements of the weight is accurately set based on the thickness of the joint layer.

Abstract: An efficient rotational-operation-quantity input device suitable to be built into a small electrical appliance is provided. An operational force applied by an operator is input in time series as a coordinate value (x, y) in an XY two-dimensional rectangular coordinate system by a two-dimensional force sensor 100, and is converted into a coordinate value (r, &thgr;) by a polar-coordinate converting section 200.

Abstract: The present invention easily achieves an accurate control structure for limiting displacement of a weight. An SOI substrate with a trilaminar structure including a silicon layer, a silicon oxide layer, and a silicon layer is prepared, and slits are opened by applying induced coupling plasma etching which can selectively remove only silicon from the upper side. Then, the same etching is applied from the lower side to form grooves, whereby the lower silicon layer is separated into a weight and a pedestal. Next, the structure is immersed in an etchant which can selectively remove only silicon oxide, whereby the vicinities of exposed portions of the silicon oxide layer are removed to form joint layers. A glass substrate is joined to the bottom surface of the pedestal. Piezo resistor elements are formed on the upper surface of the silicon layer to detect bending. The degree of freedom of upward displacements of the weight is accurately set based on the thickness of the joint layer.

Abstract: An intermediate displacement board (120) composed of a metal plate is arranged on a printed circuit board (110) having electrode patterns (E1-E7) and then a strain generative body (130) composed of silicon rubber is arranged on top thereof. Then, the arrangement is fixed to the printed circuit board (110) with attachments (140). Depressing a displacement portion (133) causes a connecting portion (132) to be deflected and an electrode (F0) to be brought into contact with the electrodes (E1, E2) to make them conductive, thereby allowing the pushbutton switch to be turned ON. Depressing further the displacement portion (133) causes an elastic deformation portion (134) to be elastically deformed and crushed and the intermediate displacement board (120) to be pushed downward. The capacitance of capacitors (C3-C7), which are constituted by the electrodes (E3-E7) and the intermediate displacement board (120), are varied according to the depression of the intermediate displacement board (120).

Abstract: The invention provides a force detector in which power consumption is suppressed. Four electrodes E11 through E14 are formed on a substrate, and an elastic deformable body formed of a rubber film is disposed thereon. A conductive coating is applied on the lower surface of the elastic deformable body to provide a displacing conductive layer 26. Four capacitance elements C11 through C14 are comprised by the electrodes E11 through E14 and the displacing conductive layer 26 opposed to the electrodes. The capacitance values thereof are converted into voltage values V11 through V14 by C/V converter circuit 50, and based on operation by signal processing circuit 60, an external force applied to the elastic deformable body is detected.

Abstract: A bottom fixed layer 110, displacement layer 125, and top fixed layer 130 are fixed in a layered structure by way of intervening pedestals 145, 155, which serve as spacers between the layers. The bottom and top fixed layers 110, 130 are rigid dielectric substrates. The displacement layer 125 is a flexible conductive substrate. On the top of the bottom fixed layer 110 are formed an electrode E11 on the right, electrode E12 on the left, and a washer-shaped electrode E15 in the middle. On the bottom of the top fixed layer 130 are formed an electrode E21 on the right, electrode E22 on the left, and a washer-shaped electrode E25 in the middle. These electrodes and the displacement layer 125 together form capacitance elements C11 to C25. When acceleration acts on the working body 160, the displacement layer 125 is displaced and a change in capacitance occurs in various capacitance elements.

Abstract: An electrostatic capacitive touch sensor including a substrate having a group of fixed electrodes formed thereon; and a movable electrode plate that is integrally molded by using rubber or resin having an elastic property as a whole and that has at least a face which opposes the group of fixed electrodes and is made of a conductive rubber or a conductive resin. The group of fixed electrodes and the movable electrode plate form a plurality of variable electrostatic capacitive sections, and in response to the magnitude and the direction of a force applied onto the movable electrode plate, the electrostatic capacitances of the respective variable electrostatic capacitive sections are allowed to change.

Abstract: A pivotal shaft (130) is provided along the Z-axis on a semiconductor substrate (100), whose upper surface extends along the XY-plane, to fit a rotor (200) consisting of dielectric material. The rotor is supported by the pivotal shaft so that it can be inclined and can be rotated. The peripheral portion of the rotor constitutes weight bodies (211, 212), and stators (111, 115) consisting of conductive material are disposed at the periphery thereof. When a.c. voltages of predetermined period are delivered to the stators, the rotor is rotated while floating in accordance with the principle of the induction motor. When angular velocity &ohgr;x about the X-axis is applied to the substrate 100, Corioli's force Fcz in the Z-axis positive direction is applied to the weight body (211) passing through the X-axis with velocity component in the Y-axis positive direction so that it becomes away from-the substrate.

Abstract: Upper electrodes (A1 to A5) are disposed on an upper surface of a disk-shaped piezoelectric element (10). On a lower surface of the piezoelectric element (10), an annular groove to surround origin O is formed at position corresponding to the upper electrodes (A1 to A5). At the portion where the annular groove is formed, the piezoelectric element (10) includes a flexible portion formed so as to have thin thickness. When the peripheral portion of the piezoelectric element (10) is fixed to the casing, the central portion positioned within the annular groove functions as a weight caused to hang down from the flexible portion. On the lower surface of the piezoelectric element (10), a lower electrode (B) is formed. When force is applied to the weight by acceleration, the flexible portion is bent. As a result, predetermined charges are produced in the upper electrodes (A1 to A5) with the lower electrode (B) being as a reference potential. Accordingly, applied acceleration can be detected. When a predetermined a.c.

Abstract: An intermediate displacement board (120) composed of a metal plate is arranged on a printed circuit board (110) having electrode patterns (E1-E7) and then a strain generative body (130) composed of silicon rubber is arranged on top thereof. Then, the arrangement is fixed to the printed circuit board (110) with attachments (140). Depressing a displacement portion (133) causes a connecting portion (132) to be deflected and an electrode (F0) to be brought into contact with the electrodes (E1, E2) to make them conductive, thereby allowing the pushbutton switch to be turned ON. Depressing further the displacement portion (133) causes an elastic deformation portion (134) to be elastically deformed and crushed and the intermediate displacement board (120) to be pushed downward. The capacitance of capacitors (C3-C7), which are constituted by the electrodes (E3-E7) and the intermediate displacement board (120), are varied according to the depression of the intermediate displacement board (120).

Abstract: An angular velocity sensor for detecting angular velocity components about three axes with high response is provided. A weight body carries out a circular movement along a circular orbit within the XY-plane with the origin being as a center. The weight body is supported so that it can be moved with a predetermined degree of freedom within a sensor casing. A Coriolis force Fco exerted in the Z-axis direction to the weight body is detected when the weight body passes through the X-axis at the point Px and an angular velocity &ohgr;x about the X-axis is obtained based on the detected force. Further, a Coriolis force Fco exerted in the Z-axis direction to the weight body is detected when the weight body passes through the Y-axis at the point Py and an angular velocity &ohgr;y about the Y-axis is obtained based on the detected force.

Abstract: A first substrate of the three layer structure composed of a lower layer portion consisting of silicon, a middle layer portion consisting of SiO.sub.2 and an upper layer portion consisting of silicon is prepared. Impurity is doped into the lower layer portion so that it has conductivity. The lower surface of the lower layer portion is etched to form a diaphragm portion and a pedestal portion, and then a second substrate consisting of glass is joined to the portion therebelow. By the electrodes on the second substrate and the diaphragm portion, capacitance elements are formed. Grooves are dug by a dicing blade from the upper surface of the upper layer portion thereafter to downwardly dig the bottom portions of the grooves by etching until the upper surface of the lower layer portion is exposed. When the respective unit areas are cut off, there is obtained a structure in which a weight body is positioned at the central portion of the diaphragm portion and a pedestal is formed at the periphery thereof.

Abstract: Upper electrodes (A1 to A5) are disposed on an upper surface of a disk-shaped piezoelectric element (10). On a lower surface of the piezoelectric element (10), an annular groove to surround origin O is formed at position corresponding to the upper electrodes (A1 to A5). At the portion where the annular groove is formed, the piezoelectric element (10) includes a flexible portion formed so as to have thin thickness. When the peripheral portion of the piezoelectric element (10) is fixed to the casing, the central portion positioned within the annular groove functions as a weight caused to hang down from the flexible portion. On the lower surface of the piezoelectric element (10), a lower electrode (B) is formed. When force is applied to the weight by acceleration, the flexible portion is bent. As a result, predetermined charges are produced in the upper electrodes (A1 to A5) with the lower electrode (B) being as a reference potential. Accordingly, applied acceleration can be detected. When a predetermined a.c.

Abstract: A shaft (270) is provided along the Z-axis on a semiconductor substrate (100), whose upper surface extends along the XY-plane, to fit a rotor (200) consisting of dielectric material. The rotor is supported by the shaft so that it can be inclined and can be rotated. The peripheral portion of the rotor constitutes weight bodies (211, 212), and stators (111, 115) consisting of conductive material are disposed at the periphery thereof. When a.c. voltages of predetermined period are delivered to the stators, the rotor is rotated while floating in accordance with the principle of the induction motor. When angular velocity .omega.x about the X-axis is applied to the substrate 100, Coriolis force Fcz in the Z-axis positive direction is applied to the weight body (211) passing through the X-axis with velocity component in the Y-axis positive direction so that it moves away from the substrate.

Abstract: An angular velocity sensor for detecting angular velocity components about three axes with high response is provided. A weight body carries out a circular movement along a circular orbit within the XY-plane with the origin being as a center. The weight body is supported so that it can be moved with a predetermined degree of freedom within a sensor casing. A Coriolis force Fco exerted in the Z-axis direction to the weight body is detected when the weight body passes through the X-axis at the point Px and an angular velocity .omega.x about the X-axis is obtained based on the detected force. Further, a Coriolis force Fco exerted in the Z-axis direction to the weight body is detected when the weight body passes through the Y-axis at the point Py and an angular velocity .omega.y about the Y-axis is obtained based on the detected force. In addition, a force exerted in the X-axis direction to the weight body at the point Px is detected and an angular velocity .omega.

Abstract: A fixed substrate and a displacement substrate are disposed in parallel. The fixed substrate is secured to the inside of a cylindrical casing, and the displacement substrate is elastically supported at the periphery thereof by supporting means. A columnar weight body is secured to the lower surface of the displacement substrate, and a cylindrical inside electrode is formed on the periphery of the weight body. A cylindrical outside electrode is fixed by fixing means at the periphery of the inside electrode. A first capacitance element is constituted by a displacement electrode formed on the upper surface of the displacement substrate and a fixed electrode formed on the lower surface of the fixed substrate. By a change in the capacitance thereof, an acceleration based on longitudinal vibration is detected. In addition, a second capacitance element is constituted by the inside electrode and the outside electrode. By a change in the capacitance thereof, an acceleration based on transverse vibration is detected.

Abstract: A magnitude of an acceleration along a direction included within a predetermined plane is detected as an electric signal. A fixed substrate (10) and a displacement substrate (20) are disposed in parallel. The fixed substrate (10) is secured within a cylindrical casing, and the displacement substrate (20) is elastically supported at the periphery thereof within the cylindrical casing by supporting means (30). An annular displacement electrode (E21) and a central displacement electrode (E22) are provided on the upper surface of the displacement substrate (20), and a weight body (40) is secured on the lower surface of the displacement substrate (20). An annular fixed electrode and is a central fixed electrode opposite to the annular displacement electrode (E21) and the central displacement electrode (E22) are provided on the lower surface of the fixed substrate (10), and an annular capacitance element (C1) and a central capacitance element (C2) are constituted. By vibration of the earthquake, etc.