Abstract: An electric heater includes a first busbar, a second busbar, a third busbar, a neutral busbar, a plurality of first heating elements, a plurality of second heating elements, and a plurality of third heating element. A first end of each first heating element is coupled to the first busbar for electrical communication therewith. A second end of each first heating element is coupled to the neutral busbar for electrical communication therewith. A first end of each second heating element is coupled to the second busbar for electrical communication therewith. A second end of each second heating element is coupled to the neutral busbar for electrical communication therewith. A first end of each third heating element is coupled to the third busbar for electrical communication therewith. A second end of each third heating element is coupled to the neutral busbar for electrical communication therewith.

Abstract: A heating assembly includes a support member for supporting a target thereon, a diffuser layer attached to the support member, and a heater attached to the diffuser layer. The diffuser layer includes discrete diffuser segments separated by gaps. The discrete diffuser segments are made of the same material and are configured to allow a desired thermal gradient to be maintained between the discrete diffuser segments during heating of the target.

Abstract: A thermal system includes a two-wire heater and a power switch. The power switch is to provide power to the two-wire heater from a power source based on a control signal. The thermal system includes a controller having a sensor circuit configured to measure an electrical characteristic of the two-wire heater. The controller is to calculate a temperature of the thermal system based on a change in the measured electrical characteristic and determine whether the temperature is greater than a temperature setpoint. The controller is to output the control signal based on the determination.

Abstract: Disclosed is a method for controlling a heater assembly by detecting variations in multiple heating zones based on temperature decay rates or resistance characteristics of each zone. A calibration procedure is executed to mitigate the identified variations in the heating zones, ensuring uniform heating performance across the heater assembly.

Abstract: A heater system includes an integrated heater device and a control system. The integrated heater device includes a thermocouple for measuring temperature and one or more multiportion resistive elements that are operable as heaters to create a temperature differential between the fluid and air to detect the fluid, and as sensors to measure a fluid level. The control device operates the integrated heater device as a sensor or heater based on one or more performance characteristics of the heater system and self-calibrates the heater device.

Abstract: A method for the joining of ceramic pieces includes applying a layer of titanium on a first ceramic piece and applying a layer of titanium on a second ceramic piece; applying a layer of nickel on each of the layers of titanium on the first ceramic piece and the second ceramic piece; applying a layer of nickel phosphorous to each of the layers of nickel on the first ceramic piece and the second ceramic piece; assembling the first ceramic piece and the second ceramic piece with the layers of titanium, nickel, and nickel phosphorous therebetween; pressing the layer of nickel phosphorous of the first ceramic piece against the layer of nickel phosphorous of the second ceramic piece; heating the first ceramic piece and the second ceramic piece to a joining temperature in a vacuum; and cooling the first ceramic piece and the second ceramic piece. A hermetic seal is formed between the first ceramic piece and the second ceramic piece.

Abstract: A support pedestal includes a substrate, a plurality of resistive heating elements disposed on the substrate and defining a plurality of heating zones, and electric terminals disposed at a central region of the substrate. At least one of the electric terminals is connected to at least two of the plurality of resistive heating elements.

Abstract: A standoff assembly for use in terminating a plurality of resistive heaters disposed within a fluid vessel includes a pressure adapter plate, an electrical enclosure adapter plate, and a plurality of conduits. An end portion of each of the resistive heating elements extends through the pressure adapter plate. The electrical enclosure adapter plate is spaced apart from the pressure adapter plate to define a dry volume therebetween. The conduits are secured to the pressure adapter plate and the electrical enclosure adapter plate. Each conduit is aligned concentrically with each of the resistive heating elements. An electrical termination portion of each resistive heating element is disposed within the conduit.

Abstract: A method of controlling a thermal system of an industrial process includes monitoring intermediate data, associating the intermediate data with correlation data, wherein the correlation data includes an internal process control input, an external heater control input, the output control, or a combination thereof. The method further includes generating a model that defines a relationship between the intermediate data and the correlation data, identifying a state of the heater system based on the model, and selectively performing a corrective action based on the identified state of the heater system.

Abstract: A control system for use in a fluid flow application includes a heater and a control device. The heater includes at least one resistive heating element having a relationship between resistance and temperature defining a non-monotonic curve. The heater is to heat fluid flow. The control device is to determine a flow characteristic of the fluid flow and a temperature of the at least one resistive heating element along the non-monotonic curve between resistance and temperature based on a change in resistance of the at least one resistive heating element.

Abstract: A terminal assembly for a heater system includes a plurality of resistive heating elements arranged in multiple power phases includes a plurality of power busbars, a neutral busbar, a phase barrier disposed between each of the plurality of power busbars, and a plurality of interchangeable couplers. Each power busbar corresponds to a power phase of the multiple power phases and is configured to connect a power lead from one of the multiple power phases and a first end of a plurality of resistive heating elements. The resistive heating elements are in electrical communication with the power lead. The neutral busbar is offset longitudinally from the power busbars and configured to receive a second end of the resistive heating elements. The interchangeable couplers are configured to connect at least a subset of the resistive heating elements to at least one power busbar or at least one neutral busbar.

Abstract: A method of calibrating temperature of a resistive element includes: generating a standard resistance-temperature (R-T) curve for the resistive element in an isothermal condition, wherein the resistive element comprises a material with a Curie temperature; generating an operational R-T curve for the resistive element during a normal operation of the resistive element; shifting the operational R-T curve toward the standard R-T curve at the Curie temperature to generate an adjusted operational R-T curve; and adjusting a measured temperature of the resistive element based on a resistance of the resistive element and the adjusted operational R-T curve.

Abstract: A heater assembly includes a substrate, a plurality of resistive heating elements disposed along a perimeter of the substrate, and a common ground electrical lead connected to at least some of the plurality of resistive heating elements and having a portion extending along the perimeter of the substrate. The plurality of resistive heating elements are independently controllable to provide azimuthal temperature control of the heater assembly.

Abstract: A joining method includes placing a brazing element between an interface area of a first ceramic piece and an interface area of a second ceramic piece to create a joining pre-assembly and placing the components of said joining pre-assembly into a process chamber. Oxygen is removed from said process chamber and at least said brazing element of said joining pre-assembly is heated, thereby hermetically joining said first ceramic piece to said second ceramic piece. Said brazing element consists of Cobalt and Carbon.

Abstract: Methods and systems for predicting at least one temperature along a fluid flow path of a fluid flow system having a heater disposed in the fluid flow path are provided. In one example, a method includes: obtaining at least one input, wherein the at least one input includes a setpoint, a mass flow rate, an inlet temperature, or a combination thereof; calculating a temperature associated with the heater based on a predefined model and the at least one input; and setting a value of the at least one temperature along the fluid flow path to the temperature of the heater.

Abstract: A method for controlling a heated process of a heater includes: obtaining a target temperature; identifying a first amount of electrical energy based on a prediction that the first amount of electrical energy is sized to cause a temperature of the heated process to reach the target temperature, wherein the first amount of electrical energy is indicative of one or more wattage, the first amount of electrical energy is indicative of a quantity of time that the one or more wattage is applied to the heater, and the prediction is based on an energy profile associated with the heater; and providing the one or more wattage to the heater for a portion of the quantity of time.

Abstract: A method for calibrating a control system configured to control a two-wire heater includes providing power to a load electrically coupled to the control system, generating, an initial measured characteristic and a calibrated measured characteristic of the load by the control system and a controller calibration system, respectively. The method further includes defining a calibrated measurement reference based on a correlation of the initial measured characteristic and the calibrated measured characteristic. With the calibrated measure reference, the control system is further calibrated to define a resistance-temperature calibration reference for determining a working temperature of the two-wire heater based on a measured resistance of the two-wire heater.

Abstract: A method for monitoring a semiconductor processing system including a gas delivery system, a thermal system, and a fluid flow line includes obtaining a plurality of operational data from the gas delivery system, the thermal system, or a combination thereof and determining a performance characteristic of the fluid flow line based on one or more operational data of the plurality of operational data. The method includes identifying one or more locations associated with the one or more operational data in a reference virtual model and generating a dynamic state model of the fluid flow line based on the reference virtual model, the one or more identified locations, and the determined performance characteristic, where the dynamic state model is a digital representation of the fluid flow line.

Abstract: A wireless sensor assembly incudes a housing, a wireless power source, a wireless communication component, and firmware. The housing defines a first aperture for receiving an external sensor and a second aperture defining a communication port configured to receive a wire harness. The wireless communications component and the firmware are powered by the wireless power source. The wireless communications component is configured to be in electrical communication with the external sensor and transmit data from the external sensor to an external device. The firmware is configured to manage a rate of data transmittal from the wireless communications component to the external device. The wireless power source, the wireless communications component, and the firmware are mounted within the same housing. The data from the external sensor is transmitted from the external sensor wirelessly through the wireless communications component or through the wire harness to the external device for processing.

Abstract: A temperature limiting device for a thermal system includes a modular unit that is configured to connect to a two-wire heater of the thermal system. More particularly, the modular unit includes a heater interface configured to connect to a two-wire heater of the thermal system, a power interface configured to connect to a power source to receive power; and a controller including a sensor circuit. The sensor circuit is configured to measure an electrical characteristic of the two-wire heater, which includes voltage, current, or a combination thereof. The controller is configured to calculate a temperature of the thermal system based on the measured electrical characteristic and determine whether the temperature is greater than a temperature setpoint.