Abstract: A method of providing power, via a plurality of power control systems, includes forming, by at least two power control systems from among the plurality of power control systems, a power network and defining, by each power control system of the power network, a power allocation schedule for a power cycle using a dynamic load scheduling model. The power allocation schedule identifies one or more designated power control systems from among the at least two of the power control systems to provide power to a load during the power cycle. For at least portion of the power cycle, the method includes providing power to the load by the one or more designated power control systems of the power network based on the power allocation schedule.

Abstract: A support pedestal includes a support member including a resistive layer having a plurality of zones, a routing layer, and a plurality of conductive vias. The plurality of zones are defined by a plurality of independently controllable resistive heating elements. The resistive layer and the routing layer are disposed in different planes of the support member and are connected by the plurality of conductive vias.

Abstract: A heater system includes a heater bundle. The heater bundle includes a plurality of heater assemblies. Each heater assembly includes a plurality of heater units and an insulating material, and each heater unit defines at least one independently controlled heating zone. The heater bundle includes power conductors electrically connected to each of the independently controlled heating zones in each of the heater units. The heater bundle includes a power supply device configured to modulate power to each of the independently controlled heater zones of the heater units through the power conductors. A voltage is selectively supplied to each of the independently controlled heating zones such that a reduced number of independently controlled heating zones receives the voltage at a time or at least a subset of the independently controlled heating zones receive a reduced voltage at all times.

Abstract: A modular unit includes a carrier member defining a receiving space for receiving a fluid conduit, a heating element disposed on a surface of the carrier member, and a thermal insulation jacket surrounding the carrier member. The thermal insulation jacket includes an upper portion and a lower portion. The upper and lower portions of the thermal insulation jacket have mating features for securing the upper and lower portions together.

Abstract: A method of detecting a leak-induced abnormal condition in a semiconductor processing system comprising a subsystem. The method includes determining a performance characteristic of the semiconductor processing system. The method includes determining the leak-induced abnormal condition is present within the subsystem, wherein the determination of the presence of the leak-induced abnormal condition is based on the performance characteristic and a temperature characteristic of the subsystem. The method also includes performing a corrective action based on the determination of the presence of the leak-induced abnormal condition.

Abstract: A heater for use in fluid immersion heating includes a plurality of resistive heating elements, and a plurality sets of power pins electrically connected to the plurality of heating elements. Each set of power pins includes a first power pin made of a first conductive material, and a second power pin made of a second conductive material that is dissimilar from the first conductive material of the first power pin. The first power pin is electrically connected to the second power pin to form a junction. The second power pin is electrically connected to the corresponding resistive heating element. The junctions between the first power pins and the second power pins are disposed at different heights in order to sense a level of the fluid.

Abstract: A multi-zone heater with a plurality of thermocouples such that different heater zones can be monitored for temperature independently. The independent thermocouples may have their leads routed out from the shaft of the heater in a channel that is closed with a joining process that results in hermetic seal adapted to withstand both the interior atmosphere of the shaft and the process chemicals in the process chamber. The thermocouple and its leads may be enclosed with a joining process in which a channel cover is brazed to the heater plate with aluminum.

Abstract: A sensor assembly includes a housing that defines an interior space. The sensor assembly includes a sensor connected to the housing at the aperture. The sensor assembly includes a wireless power source disposed within the interior space. The sensor assembly includes electronics disposed within the interior space and configured to receive power from the wireless power source. The electronics include a communication board and a sensor connector, and the sensor is configured to transmit data to the communication board via the sensor connector.

Abstract: A temperature sensing unit is provided, which includes a temperature sensor for measuring a temperature of an object and a mounting member. The temperature sensor includes a portion bendable to conform to an outer surface of the object. The mounting member has ends attached to opposing ends of the portion of the temperature sensor and securing the temperature sensor on the object.

Abstract: A heater assembly includes a flow guide and a plurality of electrical resistance heating elements. The flow guide defines a continuous geometric helicoid disposed about a longitudinal axis of the heater assembly. The flow guide defines a predetermined pattern of perforations that extend in a longitudinal direction through a first longitudinal length of the geometric helicoid. The longitudinal direction is parallel to the longitudinal axis. The geometric helicoid has a first pitch at a first zone along the longitudinal axis and a second pitch at a second zone along the longitudinal axis. The second pitch is shorter than the first pitch. The electrical resistance heating elements extend through the perforations.

Abstract: An electrostatic chuck includes a ceramic top plate layer made of a beryllium oxide material, a ceramic bottom plate layer made of a beryllium oxide material, a ceramic middle plate layer disposed between the ceramic top plate layer and the ceramic bottom plate layer, an electrode layer disposed between the ceramic top plate layer and the ceramic middle plate layer, and a heater layer disposed between the ceramic middle plate layer and the ceramic bottom plate layer. The electrode layer joins and hermetically seals the ceramic top plate layer to the ceramic middle plate layer, and the heater layer joins and hermetically seals the ceramic middle plate layer to the ceramic bottom plate layer.

Abstract: A heating system includes at least one electric heater disposed within a fluid flow system and a control device that is configured to determine a temperature of the at least one electric heater based on a model, at least one fluid flow system input, and at least one heater input. The at least one heater input includes at least one physical characteristic of the heating system, the at least one physical characteristic includes at least one of a resistance wire diameter, a heater insulation thickness, a heater sheath thickness, a conductivity, a specific heat and density of the material of the heater, an emissivity of the heater and the fluid flow pathway, and combinations thereof. The control device is configured to provide power to the at least one electric heater based on the temperature of the at least one electric heater.

Abstract: A terminal assembly for a heater system includes a plurality of resistive heating elements arranged in multiple power phases includes a plurality of power busbars, a neutral busbar, a phase barrier disposed between each of the plurality of power busbars, and a plurality of interchangeable couplers. Each power busbar corresponds to a power phase of the multiple power phases and is configured to connect a power lead from one of the multiple power phases and a first end of a plurality of resistive heating elements. The resistive heating elements are in electrical communication with the power lead. The neutral busbar is offset longitudinally from the power busbars and configured to receive a second end of the resistive heating elements. The interchangeable couplers are configured to connect at least a subset of the resistive heating elements to at least one power busbar or at least one neutral busbar.

Abstract: A joining method includes the steps of placing a brazing element between an interface area of a first ceramic piece and an interface area of a second ceramic piece to create a joining pre-assembly, placing the components of said joining pre-assembly into a process chamber, removing oxygen from said process chamber, and heating at least said brazing element of said joining pre-assembly, thereby hermetically joining said first ceramic piece to said second ceramic piece. The brazing element consists of Nickel and Carbon.

Abstract: A heater system includes a heater bundle having a plurality of heater assemblies and a plurality of power conductors. More than one of the heater assemblies includes a plurality of heater units, and more than one of the heater units defines at least one independently controlled heating zone. The plurality of power conductors are electrically connected to the independently controlled heating zones. The heater system further includes means for determining temperature, and a power supply device including a controller configured to modulate power to the independently controlled heating zones through the power conductors based on the determined temperature to provide a desired power output along a length of more than one of the heater assemblies.

Abstract: A method for the joining of ceramic pieces includes applying a layer of titanium on a first ceramic piece and applying a layer of titanium on a second ceramic piece; applying a layer of nickel on each of the layers of titanium on the first ceramic piece and the second ceramic piece; applying a layer of nickel phosphorous to each of the layers of nickel on the first ceramic piece and the second ceramic piece; assembling the first ceramic piece and the second ceramic piece with the layers of titanium, nickel, and nickel phosphorous therebetween; pressing the layer of nickel phosphorous of the first ceramic piece against the layer of nickel phosphorous of the second ceramic piece; heating the first ceramic piece and the second ceramic piece to a joining temperature in a vacuum; and cooling the first ceramic piece and the second ceramic piece. A hermetic seal is formed between the first ceramic piece and the second ceramic piece.

Abstract: A heater includes a sintered assembly and a functional element disposed on one of opposing surfaces of the sintered assembly. The heater is manufactured by a method that includes hot pressing a ceramic powder and a plurality of first slugs and forming the sintered assembly including a ceramic substrate and the plurality of first slugs embedded therein, forming the functional element on the one opposing surface of the sintered assembly such that the functional element is connected to the plurality of first slugs, and forming a monolithic substrate in which the functional element and the plurality of first slugs are embedded.

Abstract: A method of detecting a leak-induced abnormal condition in a fluid line system having a plurality of heaters includes determining a plurality of temperature characteristics at a plurality of locations of the fluid line system, where each temperature from among the plurality of temperature characteristics is associated with at least one heater from among the plurality of heaters and monitoring, for each of the plurality of heaters, an electrical characteristic of the heater. The method includes determining the leak-induced abnormal condition is present within the fluid line system in response to the electrical characteristic of a given heater from among the plurality of heaters and the temperature characteristic associated with the given heater satisfying a temperature-and-electrical characteristics (TEC) deviation condition and performing a corrective action in response to determining the leak-induced abnormal condition is present.

Abstract: A method for manufacturing an electrostatic chuck with multiple chucking electrodes made of ceramic pieces using metallic aluminum as the joining. The aluminum may be placed between two pieces and the assembly may be heated in the range of 770 C to 1200 C. The joining atmosphere may be non-oxygenated. After joining the exclusions in the electrode pattern may be machined by also machining through one of the plate layers. The machined exclusion slots may then be filled with epoxy or other material. An electrostatic chuck or other structure manufactured according to such methods.

Abstract: A method of monitoring a condition of a dynamic system includes installing a vibration signal acquisition device at a predetermined location of the dynamic system, acquiring vibration signals by the vibration signal acquisition device, analyzing the vibration signals in a frequency domain, and predicting a change in the condition of the dynamic system based on the vibration signals in the frequency domain. A system is also provided, and a condition of the dynamic system includes clogging.