Abstract: A method for monitoring a surface condition of a component includes providing thermal energy to a component, determining a thermal response of the heater in response to providing the thermal energy, and determining a thermal characteristic of the component based on a reference thermal response and the thermal response. The method includes predicting the surface condition of the component based on the thermal characteristic and a predictive analytic model, where the predictive analytic model correlates the thermal characteristic of the component to an estimated surface condition of the component.

Abstract: An exhaust gas heating unit for an engine includes a housing and a heating element. The housing includes a tubular peripheral wall and has an interior hollow space. The heating element has first and second ends and extends longitudinally therebetween to form a spiral shape within the interior hollow space. The heating element includes a thermally conductive sheath, an electrically conductive resistance element that extends longitudinally within the external sheath, and an electrically insulating material disposed about the resistance element between the resistance element and the sheath. A heat transfer member is positioned within the interior hollow space and is formed from one or more strips of thermally conductive material. The strips contact the external sheath at a plurality of locations between the first end and the second end. The heat transfer member has a corrugated shape that follows the spiral shape of the heating element.

Abstract: A method of providing power, via a plurality of power control systems, includes forming, by at least two power control systems from among the plurality of power control systems, a power network and defining, by each power control system of the power network, a power allocation schedule for a power cycle using a dynamic load scheduling model. The power allocation schedule identifies one or more designated power control systems from among the at least two of the power control systems to provide power to a load during the power cycle. For at least portion of the power cycle, the method includes providing power to the load by the one or more designated power control systems of the power network based on the power allocation schedule.

Abstract: A brazing process using Nickel(Ni)-Carbon as graphite(Cg) alloys, Ni-Cg-Molybdenum(Mo) alloys, and Ni-Cobalt(Co)-Cg-Mo alloys for brazing together ceramics, ceramics to metals, metals to metals. Semiconductor processing equipment made with the use of Ni-Cg alloys, such as heaters and chucks. Semiconductor processing equipment components and industrial equipment components using a highly wear resistant surface layer, such as sapphire, joined to a substrate such as a ceramic, with a Ni-Cg alloy braze.

Abstract: A heater assembly includes a substrate, a plurality of resistive heating elements disposed along a perimeter of the substrate, and a common ground electrical lead connected to at least some of the plurality of resistive heating elements and having a portion extending along the perimeter of the substrate. The plurality of resistive heating elements are independently controllable to provide azimuthal temperature control of the heater assembly.

Abstract: A method for the joining of ceramic pieces with a hermetically sealed joint comprising brazing a layer of joining material between the two pieces. The ceramic pieces may be aluminum nitride or other ceramics, and the pieces may be brazed with Nickel and an alloying element, under controlled atmosphere. The completed joint will be fully or substantially Nickel with another element in solution. The joint material is adapted to later withstand both the environments within a process chamber during substrate processing, and the oxygenated atmosphere which may be seen within the interior of a heater or electrostatic chuck. Semiconductor processing equipment comprising ceramic and joined with a nickel alloy and adapted to withstand processing chemistries, such as fluorine chemistries, as well as high temperatures.

Abstract: A heating assembly includes a support member for supporting a target thereon, a diffuser layer attached to the support member, and a heater attached to the diffuser layer. The diffuser layer includes discrete diffuser segments separated by gaps. The discrete diffuser segments are made of the same material and are configured to allow a desired thermal gradient to be maintained between the discrete diffuser segments during heating of the target.

Abstract: A heater system is provided, which includes a plurality of heaters, a controller for supplying power to the plurality of heaters, a plurality sets of auxiliary wires extending from the plurality of heaters, and a wire harness for connecting the plurality sets of auxiliary wires to the controller. Each set of auxiliary wires includes three wires, two of the three wires being made of different materials and being joined to form a thermocouple junction, such that each of the plurality of heaters is operable to function as both a heater and a temperature sensor.

Abstract: A heater system includes an integrated heater device and a control system. The integrated heater device includes a thermocouple for measuring temperature and one or more multiportion resistive elements that are operable as heaters to create a temperature differential between the fluid and air to detect the fluid, and as sensors to measure a fluid level. The control device operates the integrated heater device as a sensor or heater based on one or more performance characteristics of the heater system and self-calibrates the heater device.

Abstract: An electrical interconnect for use in connecting layers of a multi-layer heater includes a shaped body having a lower end portion and an upper end portion. The lower end portion has a smaller contact area than a contact area of the upper end portion, and the contact area of the lower end portion is proximate a heating layer and the contact area of the upper end portion is proximate a routing layer.

Abstract: A method of controlling temperature of a heater including a resistive heating element includes measuring a voltage count and a current count based on data from an analog-digital converter (ADC) circuit of a sensor circuit, where the sensor circuit is electrically coupled to the heater. The method includes selecting one or more dynamic gain levels of the ADC from among a plurality of dynamic gain levels based on a shift gain correlation, determining a resistance of the resistive heating element based on the voltage count, the current count, and the one or more dynamic gain levels, and controlling power to the heater based on the resistance.

Abstract: A method includes providing thermal energy to a component, determining a thermal response of the component in response to providing the thermal energy, and determining a thermal characteristic of the component based on a reference thermal response and the thermal response. The method includes predicting a surface condition of the component based on the thermal characteristic and a predictive analytic model, where the predictive analytic model correlates the thermal characteristic of the component to an estimated surface condition of the component.

Abstract: A heater system is provided. The system includes a resistive element with a temperature coefficient of resistance (TCR) of at least about 1,000 ppm such that the resistive element functions as a heater and as a temperature sensor and the resistive element is a material having greater than about 95% nickel. The system also includes a heater control module including a two-wire controller with a power control module that is configured to periodically compare a measured resistance value of the resistive element against a reference temperature to adjust for resistance drift over time during operation such that a temperature drift of the resistive element is less than about 1% over a temperature range of about 500° C.-1,000° C.

Abstract: A temperature sensing system includes an outer casing, a thermocouple including a thermocouple junction, and a reference sensor. The thermocouple and the reference sensor are received within the outer casing. The reference sensor is disposed proximate an end of the thermocouple opposing the thermocouple junction and is configured to provide a reference temperature based on which a temperature measured by the thermocouple is determined.

Abstract: A wireless sensor assembly incudes a housing, a wireless power source, a wireless communication component, and firmware. The housing defines a first aperture for receiving an external sensor and a second aperture defining a communication port configured to receive a wire harness. The wireless communications component and the firmware are powered by the wireless power source. The wireless communications component is configured to be in electrical communication with the external sensor and transmit data from the external sensor to an external device. The firmware is configured to manage a rate of data transmittal from the wireless communications component to the external device. The wireless power source, the wireless communications component, and the firmware are mounted within the same housing. The data from the external sensor is transmitted from the external sensor wirelessly through the wireless communications component or through the wire harness to the external device for processing.

Abstract: A heater includes a flow guide and electrical resistance heating elements. The flow guide defines a continuous geometric helicoid disposed about a longitudinal axis and defines perforations that extend in a longitudinal direction through a first longitudinal length of the geometric helicoid. The first longitudinal length is less than a full longitudinal length of the geometric helicoid. The electrical resistance heating elements extend through the perforations. For each electrical resistance heating element, a length of that electrical resistance heating element and a pitch of the geometric helicoid at a distal end of that electrical resistance heating element are such that the distal end of that electrical resistance heating element is a distance X from the geometric helicoid at the distal end of that electrical resistance heating element. The distance X is less than or equal to 40% of the pitch at the distal end of that electrical resistance heating element.

Abstract: A heater includes a flow guide and a plurality of electrical resistance heating elements. The flow guide defines a continuous geometric helicoid disposed about a longitudinal axis of the heater assembly. The flow guide defines a predetermined pattern of perforations that extend in a longitudinal direction through a first longitudinal length of the geometric helicoid, the longitudinal direction being parallel to the longitudinal axis. The plurality of electrical resistance heating elements extend through the perforations. At least one electrical resistance heating element of the plurality of electrical resistance heating elements has a first region with a first watt density and a second region with a second watt density. The second region is located farther in the longitudinal direction than the first region. The second watt density is less than the first watt density.

Abstract: A multi-zone heater with a plurality of thermocouples such that different heater zones can be monitored for temperature independently. The independent thermocouples may have their leads routed out from the shaft of the heater in a channel that is closed with a joining process that results in hermetic seal adapted to withstand both the interior atmosphere of the shaft and the process chemicals in the process chamber. The thermocouple and its leads may be enclosed with a joining process in which a channel cover is brazed to the heater plate with aluminum.

Abstract: A heating apparatus for a fluid flow system having a container body includes a heater element and a strip. The heater element is within the container body and includes an electrical resistance element, a sheath, and an insulating material. The sheath extends along a predefined path through the container body and surrounds the electrical resistance element along the predefined path. The insulating material is disposed about the electrical resistance element between the electrical resistance element and the sheath. The insulating material electrically insulates the electrical resistance element from the sheath. The strip is disposed inside the container body and defines a tortuous geometry that follows the predefined path. The strip defines a plurality of openings at discrete locations along the strip. The heater element extends through the plurality of openings and is configured to contact the strip at the discrete locations.

Abstract: A standoff assembly for use in terminating a plurality of resistive heaters disposed within a fluid vessel includes a pressure adapter plate, an electrical enclosure adapter plate, and a plurality of conduits. An end portion of each of the resistive heating elements extends through the pressure adapter plate. The electrical enclosure adapter plate is spaced apart from the pressure adapter plate to define a dry volume therebetween. The conduits are secured to the pressure adapter plate and the electrical enclosure adapter plate. Each conduit is aligned concentrically with each of the resistive heating elements. An electrical termination portion of each resistive heating element is disposed within the conduit.