Abstract: In one form, the present disclosure is directed toward a method of controlling temperature of a heater including a resistive heating element. The method includes applying power to the resistive heating element at a variable ramp rate to decrease temperature of the heater to a desired temperature setpoint, where the variable ramp rate is set to a desired ramp rate. The method further includes monitoring the temperature of the heater to detect a runaway condition and adjusting the variable ramp rate from the desired ramp rate to a permitted ramp rate in response to the runaway condition being detected.

Abstract: In one form, the present disclosure is directed toward a method for controlling temperature of a heater including a resistive heating element. The method includes applying power to the resistive heating element of the heater at a variable ramp rate to increase temperature of the heater to a desired temperature setpoint. The variable ramp rate is set to a desired ramp rate. The method further includes monitoring an electric current flowing through the resistive heating element of the heater, and reducing the variable ramp rate from the desired ramp rate to a permitted ramp rate in response to the electric current being greater than a lower limit of an electric current limit band. An upper limit of the electric current limit band is provided as a system current limit.

Abstract: A method of adjusting a watt density distribution of a resistive heater includes designing a baseline heater circuit. A detection circuit is designed having a constant trace watt density and the detection circuit overlaps the baseline heater circuit. The detection circuit is manufactured, and its baseline thermal map is obtained. The baseline heater circuit is manufactured, and a nominal thermal map is obtained. A subsequent detection circuit is manufactured, and an actual thermal map is obtained. A subtraction thermal image is created by subtracting the baseline thermal map from the actual thermal map, and a subsequent baseline heater circuit is modified according to the subtraction thermal image.

Abstract: A method of controlling a thermal system of an industrial process includes monitoring intermediate data, associating the intermediate data with correlation data, wherein the correlation data includes an internal process control input, an external heater control input, the output control, or a combination thereof. The method further includes generating a model that defines a relationship between the intermediate data and the correlation data, identifying a state of the heater system based on the model, and selectively performing a corrective action based on the identified state of the heater system.

Abstract: A temperature sensing system includes a plurality of resistive segments connected in electrical series. Each resistive segment defines a material different from a material of an adjacent resistive segment, and the plurality of resistive segments are joined at sensing junctions to define a plurality of sensing junctions along a length of the resistive segments. A temperature deviation is calculated from the plurality of sensing junctions based on electric potential at each of the sensing junctions.

Abstract: A method for manufacturing an electrostatic chuck with multiple chucking electrodes made of ceramic pieces using metallic aluminum as the joining. The aluminum may be placed between two pieces and the assembly may be heated in the range of 770 C to 1200 C. The joining atmosphere may be non-oxygenated. After joining the exclusions in the electrode pattern may be machined by also machining through one of the plate layers. The machined exclusion slots may then be filled with epoxy or other material. An electrostatic chuck or other structure manufactured according to such methods.

Abstract: An electrostatic chuck with a top surface adapted for Johnsen-Rahbek clamping in the temperature range of 500 C to 750 C. The top surface may be sapphire. The top surface is attached to the lower portion of the electrostatic chuck using a braze layer able to withstand corrosive processing chemistries. A method of manufacturing an electrostatic chuck with a top surface adapted for Johnsen-Rahbek clamping in the temperature range of 500 C to 750 C.

Abstract: A modular heater assembly includes resistive heaters disposed along sections of a fluid conduit system, insulation members around the resistive heaters, and at least one insulation block around a fitting. The fitting is configured to join at least two adjacent sections of the fluid conduit system and defines an exterior geometric profile. The insulation block includes a central recess extending axially in a direction of one of the at least two adjacent sections and defining an internal geometric profile substantially matching the external geometric profile of the fitting, and a peripheral aperture. The peripheral aperture is open to the central recess, defines an internal geometric profile substantially matching an external geometric profile of another of the at least two adjacent sections, extends through a sidewall of the insulation block, and is axially aligned with the another of the at least two adjacent sections.

Abstract: A heating apparatus for heating fluid includes a container body, a plurality of electric heater elements, and a support structure. The container body defines a perimeter of a flow path for a fluid flowing through the container body. The plurality heater elements are exposed to the flow path. Each heater element includes a resistance element, sheath, and insulating material disposed about the resistance element between the resistance element and the sheath. The support structure includes a plurality of support sheets. The heater elements extend transversely through each support sheet and contact each support sheet to restrict movement of the heater elements and support the heater elements in the container body. The support sheets contact the sheaths of the electric heater elements to increase heat transfer to the fluid flowing through the flow path. Opposite ends of each support sheet are connected to the container body.

Abstract: An assembly, for example an electrostatic chuck assembly, includes a first member, a second member disposed proximate the first member, a bond layer disposed between the first member and the second member, and at least one optical sensor disposed proximate the bond layer to detect a temperature of the bond layer in a field of view of the at least one optical sensor. The bond layer includes a phosphorescent material and provides a dual function of bonding the second member to the first member and emitting phosphorescent radiation towards the at least one optical sensor. In one form, the first member is an electrostatic chuck member and the second member is a heating plate. The assembly may further include a cooling plate and an additional bond layer disposed between the heating plate and the cooling plate.

Abstract: A layered heater includes a resistive layer formed from a conductive material and separated into an intermediate area and a resistive circuit pattern by a plurality of cuts that extend all the way through the resistive layer. The resistive circuit pattern includes termination pads electrically connected to the resistive circuit pattern with the intermediate area being electrically inactive. A conductive overlay is disposed over a continuous portion of the resistive circuit pattern. The plurality of cuts extend longitudinally into the conductive overlay such that no portion of the resistive pattern is present outside the conductive overlay.

Abstract: A method of calibrating a heater includes powering the heater to a first temperature setpoint. The heater includes a resistive heating element that has a varying temperature coefficient of resistance. The method further includes concurrently obtaining a plurality of resistance measurements of the resistive heating element and a plurality of reference temperature measurements of a reference member as the heater cools from a first temperature setpoint to a second temperature setpoint that is lower than the first temperature setpoint, and generating a resistance-temperature calibration table that correlates the plurality of resistance measurements with the plurality of reference temperature measurements.

Abstract: A method for joining quartz pieces using metallic aluminum as the joining element. The aluminum may be placed between two quartz pieces and the assembly may be heated in the range of 500 C to 650 C. The joining atmosphere may be non-oxygenated. A method for the joining of quartz pieces which may include barrier layers on the quartz pieces. The barrier layers may be impervious to aluminum diffusion and may be of a metal oxide or metal nitride. The quartz pieces with the barrier layers may then be joined at temperatures higher than 650 C and less than 1200 C. A device such as an RF antenna or electrode in support of semiconductor processing using joined quartz pieces wherein the aluminum joining layer which has joined the pieces and also functions as antenna electrode.

Abstract: A method includes providing thermal energy to a component, determining a thermal response of the component in response to providing the thermal energy, and determining a thermal characteristic of the component based on a reference thermal response and the thermal response. The method includes predicting a surface condition of the component based on the thermal characteristic and a predictive analytic model, where the predictive analytic model correlates the thermal characteristic of the component to an estimated surface condition of the component.

Abstract: A method of calibrating temperature of a resistive element having a material with a Curie temperature includes generating a standard resistance-temperature (R-T) curve for the resistive element in isothermal conditions to identify values of the R-T curve and an inflection point at the Curie temperature, generating operational R-T curves for the resistive element over an operational time period, comparing the standard R-T curve to the operational R-T curves, and adjusting the operational curves to the standard R-T curve at the Curie temperature to calibrate temperature of the resistive element.

Abstract: A heating apparatus for a fluid flow system having a fluid conduit includes at least one heater element and a support member within the conduit. The at least one heater element includes a resistance wire, a sheath, and an electrically insulating material. The sheath has a closed profile shape that extends along a tortuous path through the container body and surrounds the resistance wire along the tortuous path. The insulating material is disposed about the wire between the wire and the sheath. The support member restricts movement of the at least one heater element relative to the fluid conduit. The support member defines a corrugated geometry that follows the tortuous path while contacting the sheath along a majority of a length of the sheath. The support member increases heat transfer from the at least one heater element to a fluid flowing through the fluid conduit.

Abstract: A thermal system includes a base member, a two-phase fluid, a tuning heater, and a chuck. The base member includes at least one fluid passageway. The two-phase fluid is disposed within the fluid passageway. A pressure of the two-phase fluid is controlled such that the two-phase fluid provides at least one of heating and cooling to the base member. The tuning heater is secured to the base member. The chuck is secured to the tuning heater opposite to the base member. The tuning heater includes a plurality of zones to fine tune a heat distribution provided by the base member to the chuck.

Abstract: An electrical termination unit or feedthrough which may be used for routing electrical conductors through a chamber wall, or otherwise across a barrier between isolated atmospheric conditions. The electrical termination unit may have aluminum as the interface material to the chamber interface and may utilize a ceramic insulator. The electrical termination unit may have the aluminum used as the interface brazed directly to a ceramic surface of the insulator. The aluminum that forms the chamber interface may be formed within a hollow ceramic tube in the same process step that brazes the aluminum to the ceramic tube with a hermetic joint. Machining subsequent to the brazing of the aluminum to the ceramic insulator may allow for achievement of the final form desired. A method for manufacturing such an electrical termination unit.

Abstract: A heater includes a sintered assembly and a functional element disposed on one of opposing surfaces of the sintered assembly. The heater is manufactured by a method that includes hot pressing a ceramic powder and a plurality of first slugs and forming the sintered assembly including a ceramic substrate and the plurality of first slugs embedded therein, forming the functional element on the one opposing surface of the sintered assembly such that the functional element is connected to the plurality of first slugs, and forming a monolithic substrate in which the functional element and the plurality of first slugs are embedded.

Abstract: A heater includes a first conducting pin, a second conducting pin, and a plurality of resistance coils. Each resistance coil includes a first end connected to the first conducting pin and a second end connected to the second conducting pin. At least one resistance coil among the plurality of resistance coils has a continuously variable pitch. In one form, the plurality of resistance coils are connected in a parallel circuit with the first and second conducting pin. A first resistance coil among the plurality of resistance coils may have a diameter that is different than a second resistance coil among the plurality of resistance coils.