Abstract: An electrical termination unit or feedthrough which may be used for routing electrical conductors through a chamber wall, or otherwise across a barrier between isolated atmospheric conditions. The electrical termination unit may have aluminum as the interface material to the chamber interface and may utilize a ceramic insulator. The electrical termination unit may have the aluminum used as the interface brazed directly to a ceramic surface of the insulator. The aluminum that forms the chamber interface may be formed within a hollow ceramic tube in the same process step that brazes the aluminum to the ceramic tube with a hermetic joint. Machining subsequent to the brazing of the aluminum to the ceramic insulator may allow for achievement of the final form desired. A method for manufacturing such an electrical termination unit.

Abstract: A heater includes a sintered assembly and a functional element disposed on one of opposing surfaces of the sintered assembly. The heater is manufactured by a method that includes hot pressing a ceramic powder and a plurality of first slugs and forming the sintered assembly including a ceramic substrate and the plurality of first slugs embedded therein, forming the functional element on the one opposing surface of the sintered assembly such that the functional element is connected to the plurality of first slugs, and forming a monolithic substrate in which the functional element and the plurality of first slugs are embedded.

Abstract: A heater includes a first conducting pin, a second conducting pin, and a plurality of resistance coils. Each resistance coil includes a first end connected to the first conducting pin and a second end connected to the second conducting pin. At least one resistance coil among the plurality of resistance coils has a continuously variable pitch. In one form, the plurality of resistance coils are connected in a parallel circuit with the first and second conducting pin. A first resistance coil among the plurality of resistance coils may have a diameter that is different than a second resistance coil among the plurality of resistance coils.

Abstract: A power converter system includes an input rectifier configured to rectify a line power having a line energy and a full-bridge isolating converter comprising a transformer, where the full-bridge isolating converter is configured to generate an isolated output voltage based on the rectified line power, and where the isolated output voltage is electrically isolated from the line energy. The power converter system includes a power controller configured to operate the full-bridge isolating converter to generate the isolated output voltage, determine whether the transformer is operating in a flux walk state based on an electric current of the transformer, and perform a corrective action in response to the transformer operating in the flux walk state.

Abstract: A method of dynamically calibrating a heater having a plurality of zones defined by one or more resistive heating elements includes controlling power to a heater having a plurality of zones based on a dynamic resistance-temperature (R-T) model to control a temperature of the heater to a temperature setpoint. For each of the plurality of zones, the method further includes measuring a temperature of a respective zone based on a resistance of the resistive heating elements of the respective zone and the dynamic R-T model, measuring a reference temperature for the respective zone, and incrementally adjusting a resistance value associated with the temperature setpoint provided in the dynamic R-T model for the respective zone to a calibrated resistance value. The method further includes providing the dynamic R-T model that correlates the calibrated resistance values of the plurality of zones with the temperature setpoint as a calibrated R-T model.

Abstract: A resistance element includes a resistance coil having a first end and a second end opposite the first end. The resistance coil defines a plurality of first portions defining a first constant diameter and a plurality of second portions defining a second constant diameter smaller than the first diameter. At least one of the first portions and the second portions has a continuously variable pitch. The resistance coil may also further define two third portions, each third portion being disposed adjacent to a corresponding first or second end. The resistance element may be disposed between first and second conducting pins in a heater.

Abstract: The present disclosure is directed toward a heater that includes a resistive heating element, a first power pin, and a second power pin. The first power pin forms a first junction with a first end of the resistive heating element, and the second power pin forms a second junction with the second end of the resistive heating element. The second power pin includes a first lead wire and a second lead wire. The first lead wire forms the second junction with the second end of the resistive heating element and defines a first conductive material. The second lead wire forms a primary sensing junction with the first lead wire at a first reference area, and defines a second conductive material different from the first conductive material to measure a temperature at the first reference area based on a voltage change created by the primary sensing junction.

Abstract: A method for the joining of ceramic pieces with a hermetically sealed joint comprising brazing a layer of joining material between the two pieces. The wetting and flow of the joining material is controlled by the selection of the joining material, the joining temperature, the joining atmosphere, and other factors. The ceramic pieces may be on a non-diffusable type, such as aluminum nitride, alumina, beryllium oxide, and zirconia, and the pieces may be brazed with an aluminum alloy under controlled atmosphere. The joint material is adapted to later withstand both the environments within a process chamber during substrate processing, and the oxygenated atmosphere which may be seen within the shaft of a heater or electrostatic chuck.

Abstract: A method of constructing a heater includes the steps of forming a sintered assembly including a ceramic substrate and a plurality of first slugs embedded therein, forming a functional element on one of opposing surfaces of the sintered assembly such that the functional element is connected to the plurality of first slugs, and forming a monolithic substrate in which the functional element and the plurality of first slugs are embedded.

Abstract: A heater bundle includes a plurality of heater assemblies, at least one of the heater assemblies including a plurality of heater units, at least one of the heater units defining at least one independently controlled heating zone. A thermal provision is configured to modify a thermal conductance along a length of the at least one heater assembly to compensate for non-uniform temperatures within at least one heater unit. The heater bundle includes a power supply device including a controller configured to modulate power to the independently controlled heating zone through the power conductors based on the determined temperature to provide a desired power output along a length of at least one heater assembly.

Abstract: The present disclosure provides a method of treating a diesel exhaust system that includes heating a reagent to a temperature such that at least a portion of the reagent is heated to a gaseous phase, injecting the reagent into a diesel exhaust stream upstream of a catalyst, and reacting the diesel exhaust with the heated reagent over the catalyst to convert NOx into N2 and H2O. The heating modulates a mass flow rate of the reagent by converting a state of matter of the reagent at least partially to the gaseous phase prior to or after being injected, and the heated reagent in the gaseous form reduces deposit formations within the diesel exhaust system.

Abstract: A heater system includes a heater bundle with heater assemblies, at least one of the heater assemblies having a plurality of heater units, at least one heater unit having an independently controlled heating zone, and the at least one heater assembly having a physical construction configured to deliver a variable power output per unit length along a length of the at least one heater assembly. A plurality of power conductors are electrically connected to the plurality of heater units and the heater system further includes a means for determining temperature. A power supply device includes a controller configured to modulate power to the independently controlled heating zone through the power conductors based on the determined temperature to provide a desired power output along a length of the at least one heater assembly.

Abstract: A heater system includes a heater bundle. The heater bundle includes at least one heater assembly, where the heater assembly includes a plurality of heater units, and more than one of the heater units defines at least one independently controlled heating zone. The heater bundle includes a plurality of power conductors electrically connected to the independently controlled heating zone. The heater system includes means for determining temperature and at least one power switch, the power switch disposed proximate the heater bundle. The heater system includes at least one controller configured to modulate power to the independently controlled heating zones through the power conductors based on the determined temperature to provide a desired power output along a length of the heater assembly. The controller is configured to provide power to the power switch.

Abstract: A system includes a heater bundle having at least one heater assembly with a plurality of heater units. At least one of the heater units defines at least one independently controlled heating zone, and a plurality of power conductors are electrically connected to the heater units. A power supply device includes a controller configured to modulate power to the at least one independently controlled heating zone through the power conductors, and the controller is configured to calculate temperature within the at least one heater unit based on a predefined model and at least one input, and the controller modulates power to the at least one heater unit based on the calculated temperature.

Abstract: An assembly, for example an electrostatic chuck, is provided including a substrate, an electrostatic chuck, a heating plate, and a bond layer comprising a phosphorescent material. In one form, an optical sensor is disposed proximate the bond layer to detect a temperature of the bond layer in the field of view of the optical sensor. The phosphorescent material is illuminated and the subsequent decay is observed by the optical sensor. From this information, the temperature of the electrostatic chuck and substrate is determined and heating elements may be adjusted by a controller.

Abstract: A power converter system provides adjustable power to a heater and includes an input rectifier and a full-bridge isolating converter. The input rectifier is configured to rectify a line power having a line energy. The full-bridge isolating converter configured to generate an isolated output voltage based on the rectified line power. The isolated output voltage is electrically isolated from the line energy.

Abstract: A sensor assembly includes a housing having a body having a distal end portion defining an internal cavity and a proximal end portion defining a plurality of internal passageways. A micro-sensor is disposed within the internal cavity and exposed to the outside environment and an internal wall separates the internal cavity from the plurality of internal passageways. The micro-sensor abuts the internal wall.

Abstract: An electrical termination unit or feedthrough which may be used for routing electrical conductors through a chamber wall, or otherwise across a barrier between isolated atmospheric conditions. The electrical termination unit may have aluminum as the interface material to the chamber interface and may utilize a ceramic insulator. The electrical termination unit may have the aluminum used as the interface brazed directly to a ceramic surface of the insulator. The aluminum that forms the chamber interface may be formed within a hollow ceramic tube in the same process step that brazes the aluminum to the ceramic tube with a hermetic joint. Machining subsequent to the brazing of the aluminum to the ceramic insulator may allow for achievement of the final form desired. A method for manufacturing such an electrical termination unit.

Abstract: A heater system for an exhaust system is provided. The heater system includes a heater disposed in an exhaust conduit. The heater includes a plurality of heating elements disposed in the exhaust conduit. A heating control module controls the plurality of heating elements differently according to operating conditions specific to each heating element. In other forms, the heater system for an exhaust system has a plurality of heating zones, instead of a plurality of heating elements. The heating control module controls the plurality of heating zones differently according to operating conditions specific to each heating zone.

Abstract: A method of manufacturing a pedestal includes having a support plate including a substrate, an electric element embedded in the substrate, and a conductive member connected to the electric element, preparing a tubular shaft that defines a chamber, securing the tubular shaft to the support plate, the conductive member being exposed in the chamber of the tubular shaft, and applying a protective layer on the conductive member by an atomic layer deposition (ALD) process. A system for manufacturing the pedestal and a pedestal are also provided in the present disclosure.