Abstract: The present disclosure provides a support pedestal that includes a support member including a resistive layer having at least two zones, a routing layer, and a plurality of conductive vias. The resistive layer and the routing layer are disposed in different planes of the support member and are connected by the plurality of vias. The number of zones of the resistive layer is greater than or equal to a number of wires coupled to the routing layer. The routing layer may include a plurality of arm portions that extend from a central region of the routing layer. The support pedestal may further include a second resistive layer disposed along the same plane as the routing layer.

Abstract: A support pedestal includes a substrate, a plurality of resistive heating elements disposed on the substrate and defining a plurality of heating zones, and electric terminals disposed at a central region of the substrate. At least one of the electric terminals is connected to at least two of the plurality of resistive heating elements.

Abstract: A termination assembly for a heater assembly includes a plurality of resistive heaters arranged in discrete power phases, each resistive heater comprising a resistive heating element surrounded by dielectric material and a sheath. The termination assembly includes a plurality of electrically nonconductive members. Each electrically nonconductive member includes a plurality of apertures configured to receive power pins of the plurality of resistive heaters. The termination assembly includes a plurality of connectors configured to connect the power pins to the electrically nonconductive members. Each electrically nonconductive member includes a number of the plurality of connectors corresponding to a number of power pins being terminated. The termination assembly includes an electrical circuit embedded in or disposed on at least one of the plurality of electrically nonconductive members.

Abstract: A method includes: emitting, by a controller, a stimulus at a heating surface of a heater assembly, the stimulus causing a disturbance to a predetermined temperature of the heating surface, wherein the heater assembly has the heating surface and a plurality of heating elements for heating a heating target; receiving, by a control system from the controller, stimulus information; and controlling, by the control system, the heater assembly to maintain a predetermined temperature profile on the heating surface based on the stimulus information from the controller.

Abstract: Temperature sensing probes for sensing the temperature of a substrate based on fluorescence are disclosed. The temperature sensing probes include a fiber optic cable having at a cold end an optical interface and at a hot end a temperature sensing element for contacting a substrate. A sheath surrounds at least a portion of the hot end of the fiber optic cable. A retaining member securely and removably engages the sheath with a support member. The sheath forms a vacuum seal around the contact between the temperature sensing element and the substrate.

Abstract: A sensor assembly includes a power source configured to store and output electrical power, a wireless communication component, a sensor, and a microprocessor electrically coupled to the power source, the wireless communication component, and the sensor. The microprocessor is configured to receive a startup command. In response to receiving the startup command, the microprocessor is configured to determine whether an amount of electrical power stored by the power source is sufficient to complete the startup command, receive the electrical power output by the power source during a first time period in response to the amount of power being sufficient to complete the startup command, and receive the electrical power output by the power source during a second time period in response to the amount of power being insufficient to complete the startup command, where the second time period is greater than the first time period.

Abstract: A support pedestal is provided that includes a substrate having a top resistive layer defining a first set of zones and a bottom resistive layer defining a second set of zones. Each zone of the first and second set of zones is coupled to at least two electric terminals from among a plurality of electric terminals, and a total number of electric terminals is less than or equal to a total of the first and second set of zones.

Abstract: A method for operating a heater system including a resistive heating element having a material with a non-monotonic resistivity vs. temperature profile is provided. The method includes heating the resistive heating element to within a limited temperature range in which the resistive heating element exhibits a negative dR/dT characteristic, operating the resistive heating element within an operating temperature range that at least partially overlaps the limited temperature range, and determining a temperature of the resistive heating element such that the resistive heating element functions as both a heater and a temperature sensor. The resistive heating element can function as a temperature sensor in a temperature range between about 500° C. and about 800° C., and the non-monotonic resistivity vs. temperature profile for the material of the resistive heating element can have a local maximum and a local minimum.

Abstract: A method for the joining of ceramic pieces with a hermetically sealed joint comprising brazing a layer of joining material between the two pieces. The ceramic pieces may be aluminum nitride or other ceramics, and the pieces may be brazed with a high purity silicon or a silicon alloy under controlled atmosphere. The joint material is adapted to later withstand both the environments within a process chamber during substrate processing, and the oxygenated atmosphere which may be seen within the interior of a heater or electrostatic chuck.

Abstract: A method for joining quartz pieces using metallic aluminum as the joining element. The aluminum may be placed between two quartz pieces and the assembly may be heated in the range of 500 C to 650 C. The joining atmosphere may be non-oxygenated. A method for the joining of quartz pieces which may include barrier layers on the quartz pieces. The barrier layers may be impervious to aluminum diffusion and may be of a metal oxide or metal nitride. The quartz pieces with the barrier layers may then be joined at temperatures higher than 650 C and less than 1200 C. A device such as an RF antenna or electrode in support of semiconductor processing using joined quartz pieces wherein the aluminum joining layer which has joined the pieces and also functions as antenna electrode.

Abstract: A temperature sensing unit is provided, which includes a temperature sensor for measuring a temperature of an object and a mounting member. The temperature sensor includes a portion bendable to conform to an outer surface of the object. The mounting member has ends attached to opposing ends of the portion of the temperature sensor and securing the temperature sensor on the object.

Abstract: A method for manufacturing an electrostatic chuck with multiple chucking electrodes made of ceramic pieces using metallic aluminum as the joining. The aluminum may be placed between two pieces and the assembly may be heated in the range of 770 C to 1200 C. The joining atmosphere may be non-oxygenated. After joining the exclusions in the electrode pattern may be machined by also machining through one of the plate layers. The machined exclusion slots may then be filled with epoxy or other material. An electrostatic chuck or other structure manufactured according to such methods.

Abstract: A heater for use in heating a fluid flow through a passageway is provided that includes a continuous resistive heating element having a predefined shape that is directly exposed to the fluid flow. The predefined shape includes a cross-sectional geometry that provides a required heat distribution, structural strength, and reduced back pressure within the passageway. The predefined shape may include airfoils, while the cross-sectional geometry provides a required heat distribution, structural strength, and reduced back pressure within the passageway.

Abstract: A method of manufacturing a layered heater includes: applying a dielectric material on a substrate to form a dielectric layer; thermal-spraying a resistive material on the dielectric layer to form a resistive layer on the dielectric layer; forming a plurality of conductive overlays at predetermined locations on the substrate; and forming a plurality of cuts into the resistive layer by laser cutting to form a resistive circuit pattern that overlaps the conductive overlays.

Abstract: A layered heater is provided that includes a sensor layer formed by a layered process having a plurality of independently controllable zones, and a resistive heating layer disposed adjacent the sensor layer. In one form, the sensor layer is formed of a material having a relatively high temperature coefficient of resistance (TCR) and the resistive heating layer is formed of a material having a relatively low TCR.

Abstract: A heater assembly includes a pair of heating sections and a coupling assembly. The heating sections each include a conductive portion. The coupling assembly includes a coupling enclosure and a coupling member disposed inside the coupling enclosure. The conductive portions of the pair of heating sections are connected by the coupling member inside the coupling enclosure.

Abstract: A temperature sensing unit is provided, which includes a temperature sensor for measuring a temperature of an object and a mounting member. The mounting member is elastic and is attached to the temperature sensor for securing the temperature sensor around the object, and the temperature sensor in one form defines a first thermocouple ribbon and a second thermocouple ribbon with a very low profile and high temperature capability.

Abstract: A sensor for detecting material deposits in a fluid flow conduit includes a body and an array of pairs of temperature sensors disposed within the body, where each pair of temperature sensors is spaced a distance apart along a primary flow direction of the fluid flow conduit.

Abstract: A method of detecting accumulation of material deposits within a fluid flow conduit includes providing, by a controller, an excitation signal to a heating element of the fluid flow conduit. The method includes obtaining, by the controller, thermodynamic data of the fluid flow conduit in response to providing the excitation signal, where the thermodynamic data includes heat flux data, diffusivity data, time data, temperature differential data, or a combination thereof. The method includes determining, by the controller, an amount of material deposits based on the thermodynamic data.

Abstract: The present disclosure is directed toward a temperature detector probe that includes a housing, a pair of electrical connectors, a support cap, and a sensor. The housing defines a bore longitudinally extending through the housing, and the pair of electrical connectors extend through the bore. The support cap is disposed at a first end portion of the housing. The sensor is provided on the support cap and is electrically coupled to the pair of electrical connectors. The support cap is positioned between the pair of electrical connectors and the support cap.