Abstract: Provided is a wire setting apparatus of a tabbing apparatus. A wire setting apparatus of a tabbing apparatus according to the present invention includes: a conveyer; a wire placement platform installed adjacent to the conveyer such that a portion of a wire placed on the conveyor lies on the wire placement platform; and a placement gripper device configured to grip the wire and to place the wire on the wire placement platform.

Abstract: Provided is a wire transfer apparatus of a tabbing apparatus. A wire transfer apparatus of a tabbing apparatus according to the present invention includes: a first transfer gripper unit configured to grip a wire; a second transfer gripper unit disposed in parallel to the first transfer gripper unit and configured to grip the wire at a location spaced apart from the first transfer gripper unit together with the first transfer gripper unit; and a gripper transfer unit configured to transfer the wire while moving the first transfer gripper unit and the second transfer gripper unit.

Abstract: The present invention relates to a substrate processing heater device that heats a substrate to process the substrate and a substrate solution processing device including the same. The substrate processing heater device includes a heater part having an opposite surface with a size greater than that of a processing surface of the substrate to heat the substrate and a lamp part comprising a plurality of lamp units disposed adjacent to each other on the heater part. Thus, since the opposite surface of the heater part has the size greater than that of the processing surface of the substrate, and the plurality of lamp units are disposed adjacent to each other, a heating temperature may be uniformly maintained on the processing surface of the substrate to prevent the substrate processing surface from being non-uniformly processed, thereby improving substrate processing efficiency.

Abstract: A supporter pin and a heat treatment apparatus are provided in which a substrate subject to heat treatment may be supported while preventing itself from damaging the substrate. The supporter pin includes a housing in which a groove is formed; a ball accommodated in the groove and supporting the substrate; and a retainer accommodated in the housing and preventing separation of the ball.