Patents Examined by Alan A. Mathews
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Patent number: 7382440Abstract: A transporter is provided for moving a substrate and a patterning device relative to one another in a lithographic apparatus. The transporter includes a beam, a driver, and a slide. The slide is supported by the beam, and the driver is disposed to move the slide relative to the beam in a transport direction. The beam has a concave interior surface transverse to the transport direction, and the slide is supported against the concave interior surface in at least two directions transverse to the transport direction.Type: GrantFiled: November 4, 2004Date of Patent: June 3, 2008Assignee: ASML Netherlands B.V.Inventor: Henricus Gerardus Tegenbosch
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Patent number: 7352444Abstract: A method for arranging a semiconductor wafer within a photolithography tool and methods for processing a semiconductor wafer employing such an arrangement process are provided. The arrangement process includes positioning a semiconductor wafer on a stage in a pre-alignment unit of a photolithography tool such that a crystal orientation marker of the wafer is located at a first radial position. Thereafter, the wafer is moved to an exposure unit of the photolithography tool. During one or both of such steps, the semiconductor wafer is rotated such that the crystal orientation marker is relocated to a second, distinct radial position prior to arranging the wafer upon a stage of the exposure unit. In particular, the semiconductor wafer is rotated greater than approximately 10° and less than approximately 170° relative to the first radial position. The arrangement process is performed for lithography processes conducted during fabrication of a semiconductor device.Type: GrantFiled: June 22, 2005Date of Patent: April 1, 2008Assignee: Cypress Semiconductor Corp.Inventors: Christopher A. Seams, Yonghong Yang, Clifford P. Sandstrom, Prakash R. Krishanan
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Patent number: 7317512Abstract: A lithographic apparatus comprises an illumination system having optical elements capable of conditioning a radiation beam to comprise in cross-section a first portion of linearly polarized radiation and a second portion of unpolarized or circularly polarized radiation. The apparatus further comprises a support constructed to support a patterning device is provided, the patterning device being capable of imparting the illuminating radiation beam with a pattern in its cross-section to form a patterned radiation beam. A substrate table is provided to hold a substrate, whilst a projection system is provided and configured to project the patterned radiation beam onto a target portion of the substrate.Type: GrantFiled: July 11, 2005Date of Patent: January 8, 2008Assignee: ASML Netherlands B.V.Inventors: Wilhelmus Petrus De Boeij, Christian Wagner
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Patent number: 7259836Abstract: A stage device for positioning an object. The stage device includes a slider for holding the object, a driving section for driving the slider with respect to a base, wherein the slider is supported in a suspended state on the base by a static-pressure bearing and a pressurizing magnet, and a countering section for holding the driving section and canceling a reaction force that acts upon the driving section. The countering section is supported in a suspended state on the base by a static-pressure bearing and a pressurizing magnet. Also, the relation Fm=Fa+Fg is satisfied, wherein Fm represents the attraction force of the magnet, Fg the weight of the stage, and Fa the pressure produced by the static-pressure bearing.Type: GrantFiled: May 16, 2006Date of Patent: August 21, 2007Assignee: Canon Kabushiki KaishaInventor: Shinji Ohishi
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Patent number: 6981772Abstract: An apparatus is provided which maintains alignment of panels in a projector. The apparatus includes a synthesizing system holding device positioned at an upper portion of a synthesizing system of the projector which securely supports the synthesizing system and maintains a relative position of various components of the synthesizing system, even in the event of an external force or vibration applied to the projector. This apparatus can prevent deviation or misalignment between at least two or more prisms and panels in the synthesizing system of the projector, thereby improving reliability and durability of the projector and enhancing image quality.Type: GrantFiled: October 30, 2001Date of Patent: January 3, 2006Assignee: LG Electronics Inc.Inventor: Byung-Hee Kim
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Patent number: 6978089Abstract: A retractable lens system includes a plurality of optical elements. All of the plurality of optical elements are positioned on a common optical axis when the retractable lens is in use. A removable element of the plurality of optical elements is moved to a removed position outside of the common optical axis, and the removable element and at least one element of the remaining elements of the plurality of optical elements are moved rearward, respectively, when the retractable lens system is in a retracted position.Type: GrantFiled: February 20, 2003Date of Patent: December 20, 2005Assignee: PENTAX CorporationInventors: Hiroshi Nomura, Takamitsu Sasaki
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Patent number: 6971751Abstract: An adjustable color-temperature projecting device includes a light source for providing light beams, and a filtering means. The filtering means includes red, green and blue filtering sections. The blue filtering section has coatings with different transmissivitys. The intensity of blue primary color light is varied due to the different transmissivitys of the blue filtering section, so that the ratio of blue primary color light in the hybrid light is modified to cause change in color temperature with reduced loss of brightness. Then, the filtering means is moved so that the light beam is projected onto a predetermined location to obtain the desired color temperature.Type: GrantFiled: March 14, 2004Date of Patent: December 6, 2005Assignee: Coretronic CorporationInventor: Sze-Ke Wang
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Patent number: 6968127Abstract: A fundus camera being capable of moving a fixation target surely and precisely to a position intended for photographing with an adequate degree of freedom for moving the fixation target. The fundus camera is provided with an observation optical system having an objective lens and a photographing element for photographing a fundus illuminated with illumination light, a monitor on which an image of the photographed fundus is displayed, a fixation-target presenting optical system for presenting a fixation target via the objective lens, a fixation-target moving unit by which a position to present the fixation target is shifted to a desired position, a first display-control unit by which the position of the fixation target is superposed on the fundus image to be displayed on the monitor, and a second display-control unit by which a guide target for moving the fixation target is displayed in a predetermined position on the monitor.Type: GrantFiled: August 29, 2001Date of Patent: November 22, 2005Assignee: Nidek Co., Ltd.Inventor: Tsuguo Nanjyo
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Patent number: 6964481Abstract: A system and method for identifying seats within a mobile platform such as an aircraft, bus, ship, train, etc. A sensor subsystem detects when a door of the mobile platform is opened and transmits a wireless signal to each one of a plurality of projector subsystems. Each of the projector subsystems are disposed adjacent an associated seat of the mobile platform. Each projector subsystem projects an enlarged, optical signal with seat identifying information onto the seatback of its associated seat.Type: GrantFiled: November 24, 2003Date of Patent: November 15, 2005Assignee: The Boeing CompanyInventors: Hau T. Pho, Melanie L. Kimsey, Kevin Scott Callahan
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Patent number: 6962418Abstract: A projector 10 projects an image onto a set of screens 14 for image formation. The set of screens 14 includes a first screen 50 and second screens 54 and 56. The projector includes a housing 20, a first screen fixture 74 and a second screen fixture 76. The housing 20 has an opening 30 for fitting the first screen 50 therein. The first screen fixture 74 positions the first screen 50 in the housing opening 30 and fixes an inner surface of the first screen 50 adhesively to the housing 20. The second screen fixture 76 is positioned between the first screen 50 and the first screen fixture 74, and fixes the second screens 54 and 56 between itself and the inside of the first screen 50.Type: GrantFiled: March 21, 2005Date of Patent: November 8, 2005Assignee: Sony CorporationInventors: Kenichiro Utsumi, Dai Yoneya
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Patent number: 6939013Abstract: A projection type display device includes a light source, a picture information display element, and a light deflection device that deflects light from the light source and irradiates the deflected light on one region of the picture information display element. The light deflection device scans the deflected light over an entire area of the picture information display element and an area outside of an effective display area of the picture information display element.Type: GrantFiled: October 20, 2003Date of Patent: September 6, 2005Assignee: Canon Kabushiki KaishaInventor: Yasufumi Asao
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Patent number: 6923545Abstract: A measurement light (X) is introduced on either one of reflection surfaces (501, 502, 511, 512) to detect a returned light (Y) reflected by the reflection surfaces (501, 502, 511, 512), reflected by a reflecting device and again reflected by the reflection surfaces (501, 502, 511, 512) by an autocollimator (620) to conduct image-processing and calculation by a processor (628), where a position adjuster (690) adjusts an attitude of a cross dichroic prism (45) relative to a fixing plate (447) to eliminate deviation between a position of the measurement light (X) and the returned light (Y) based on the result of the processing, thereby producing a highly accurate prism unit (50).Type: GrantFiled: March 11, 2003Date of Patent: August 2, 2005Assignee: Seiko Epson CorporationInventor: Masashi Kitabayashi
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Patent number: 6915073Abstract: A stereo camera with an automatic convergence adjusting device is provided. A stereo-image is captured by a CCD through a stereo adapter. A fiducial light beam in a plane of symmetry which includes a perpendicular bisector line of a segment between the viewpoints of the right and left parallax images, is projected onto a subject from light-emitting equipment. A fiducial spot produced by the fiducial light beam is imaged on both the right and left parallax images and the image loci of the fiducial spot are detected. The convergence of the stereo adapter is adjusted with reference to the image loci of the fiducial mark.Type: GrantFiled: October 11, 2002Date of Patent: July 5, 2005Assignee: PENTAX CorporationInventor: Shuzo Seo
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Patent number: 6910778Abstract: A presentation system includes a screen device, a projecting device that projects a visible image onto the screen device, and a laser pointer operated by a user, that projects a laser beam onto the screen device. The laser pointer includes an infrared light emitting section and a laser beam emitting section. A projected image of the infrared light projected onto the screen is sensed by an infrared light sensing section. Movement direction and movement distance of the projected image and button click signal are converted into mouse data usable by computer. An image based on the mouse data from the computer is projected from a projector to the screen. A human body sensor which senses heat of human body existing in a projected direction of the laser beam is settled to supply a safe presentation system by controlling the projection of the laser beam in case this sensor is operated.Type: GrantFiled: February 28, 2003Date of Patent: June 28, 2005Assignee: Fujinon CorporationInventors: Akinori Hamana, Junichi Yokoyama
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Patent number: 6832839Abstract: A system for enhancing the quality of an image on a screen is provided. The system typically includes an illumination source configured to produce light and direct such light along an optical path, and a time-varying focus device disposed in the optical path and configured to periodically alter incident light to enhance the quality of the image on the screen.Type: GrantFiled: October 31, 2003Date of Patent: December 21, 2004Assignee: Hewlett-Packard Development Company, L.P.Inventors: Winthrop D. Childers, William J. Allen
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Patent number: 6829036Abstract: A method and apparatus for creating a digital image on photographic paper and subsequent correction of color. The method and apparatus provides a digital image printer that is capable of rapidly producing digital images on photographic paper having good clarity and sharpness and correct color content. Further, the method and apparatus provides a digital image printer having a controllable lamp house that is easily removable and may be coupled with conventional photographic printers.Type: GrantFiled: May 5, 2000Date of Patent: December 7, 2004Inventor: Louis H. Asbury, III
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Patent number: 6808269Abstract: A digital projection apparatus (10) for projection of a multicolor image includes a magnifying relay lens assembly (28) as part of the light modulation assembly (38) for each component color. The relay lens assembly (28) increases the effective f/# of incident light to the dichroic combiner (26) used to combine modulated light of each color from each light modulation assembly (38) in order to form the multicolor image. The magnifying relay lens assembly (28) also provides a reduced working distance for the projection lens (32), allowing a lower-cost design and facilitating substitution of the projection lens (32) best suited for a display surface (40).Type: GrantFiled: January 16, 2002Date of Patent: October 26, 2004Assignee: Eastman Kodak CompanyInventor: Joshua M. Cobb
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Patent number: 6805445Abstract: A display apparatus (10) including a light source (15) for forming a beam of light (130). A pre-polarizer (45) polarizes the beam of light (130) to provide a polarized beam of light. A wire grid polarization beamsplitter (50) receives the polarized beam of light and transmits the polarized beam of light which has a first polarization, and reflects the polarized beam of light which has a second polarization. A reflective spatial light modulator (55) selectively modulates the polarized beam of light that has a first polarization to encode image data thereon in order to form a modulated beam (360) and reflects the modulated beam back to the wire grid polarization beamsplitter (50). A compensator (260) is located between the wire grid polarization beamsplitter (50) and the reflective spatial light modulator (55) for conditioning oblique and skew rays of the modulated beam (360).Type: GrantFiled: June 5, 2002Date of Patent: October 19, 2004Assignee: Eastman Kodak CompanyInventors: Barry D. Silverstein, Gary E. Nothhard, Andrew F. Kurtz, Xiang-Dong Mi
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Patent number: 6804053Abstract: A light transmitting type screen that enables the viewer to see through to its back side, when the screen is stuck on transparent object such as a show window or a transparent window glass or when it is used as a transparent object, and that is capable of forming clear images projected from a projected thereon is provided. The screen includes a light scattering layer having a front-scattering property, which is composed of spherical microparticles having a mean particle diameter in a certain range dispersed in a binder having a refraction index in a certain range. The light scattering layer is sandwiched between transparent objects such as high-molecular weight resin sheets or show window glass via an adhesive layer or the like.Type: GrantFiled: December 21, 2000Date of Patent: October 12, 2004Assignee: Kimoto Co., Ltd.Inventors: Hideki Etori, Yasunori Sugiyama
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Patent number: 6802613Abstract: An improved imaging apparatus having an expanded color gamut defined by more than three vertex colors for forming a color image on a display surface, that includes: a light source including at least one dichroic combiner for transmitting a first vertex color and reflecting a second vertex color toward a color combining element that directs, along an illumination axis, a colored illumination beam having, at any one time, any one of at least four different vertex colors; a linear array of electromechanical grating devices for receiving the colored illumination beam along the illumination axis; an obstructing element for blocking a zeroth order light beam reflected from the linear array of electromechanical grating devices from reaching the display surface; a projection lens cooperating with a scanning element, and a logic control processor.Type: GrantFiled: October 16, 2002Date of Patent: October 12, 2004Assignee: Eastman Kodak CompanyInventors: John A. Agostinelli, Marek W. Kowarz, Louis S. Horvath