Patents Examined by Alexander Belousov
  • Patent number: 10923453
    Abstract: A bonding apparatus for bonding a driving circuit to a display panel includes: a bonding stage unit on which the display panel is supported in bonding the driving circuit to the display panel; a head unit located above the bonding stage unit and with which ultrasonic waves are applied to the driving circuit to couple the driving circuit with a bonding area of the display panel supported on the bonding stage unit; and a protrusion disposed at an edge portion of the bonding stage unit, the edge portion corresponding to an end of the display panel at which the bonding area is disposed.
    Type: Grant
    Filed: September 11, 2018
    Date of Patent: February 16, 2021
    Assignee: SAMSUNG DISPLAY CO., LTD.
    Inventors: Byoung Yong Kim, Jeong Ho Hwang
  • Patent number: 10923286
    Abstract: A device that incorporates teachings of the subject disclosure may include, for example, a multilayer initial oxide on a silicon substrate, where the multilayer initial oxide comprises amorphous polysilicates and a group one metal or a group two metal; a first electrode layer on the multilayer initial oxide; a dielectric layer on the first electrode layer; a second electrode layer on the dielectric layer, where an edge alignment spacing between at least one pair of corresponding electrode edges of two electrode layers of the capacitor is two microns or less; and connections for the first and second electrode layers. Other embodiments are disclosed.
    Type: Grant
    Filed: February 21, 2018
    Date of Patent: February 16, 2021
    Assignee: NXP USA, Inc.
    Inventors: Marina Zelner, Andrew Vladimir Claude Cervin, Edward Horne
  • Patent number: 10907253
    Abstract: A method includes forming a film on a substrate by performing a cycle a predetermined number of times, the cycle including non-simultaneously performing: (a) forming a first layer by supplying a precursor to the substrate; and (b) forming a second layer by supplying a reactant to the substrate and modifying the first layer. The (a) includes: (a-1) supplying the precursor to the substrate from a first supply part while supplying an inert gas at a first flow rate, and supplying an inert gas at a second flow rate from a second supply part; and (a-2) supplying the precursor to the substrate while supplying the inert gas at a third flow rate from the first supply part, or supplying the precursor from the first supply pan while stopping the supply of the inert gas, and supplying the inert gas at a fourth flow rate from the second supply part.
    Type: Grant
    Filed: September 20, 2018
    Date of Patent: February 2, 2021
    Assignee: KOKUSAI ELECTRIC CORPORATION
    Inventors: Hiroaki Hiramatsu, Shinya Ebata
  • Patent number: 10903341
    Abstract: A method for manufacturing a MOSFET semiconductor device includes providing a wafer including a semiconductor body having a first side, a first semiconductor region adjacent to the first side, a second semiconductor region adjacent to the first side and forming a first pn-junction with the first semiconductor region, and a third semiconductor region adjacent to the first side and forming a second pn-junction with the second semiconductor region, a first dielectric layer arranged on the first side, a gate electrode embedded in the first dielectric layer, and a second dielectric layer arranged on the first dielectric layer. Next to the gate electrode, a trench is formed through the first dielectric layer and the second dielectric layer. At a side wall of the trench, a dielectric spacer is formed. The trench is extended into the semiconductor body to form a contact trench.
    Type: Grant
    Filed: September 10, 2018
    Date of Patent: January 26, 2021
    Assignee: Infineon Technologies Austria AG
    Inventors: Andreas Riegler, Wolfgang Jantscher, Manfred Pippan, Maik Stegemann
  • Patent number: 10884283
    Abstract: A method for manufacturing a thin film, a thin film manufacturing apparatus, a display substrate and a method for manufacturing a display substrate are provided. The method for manufacturing the thin film includes: providing a substrate with a pixel defining layer; forming an ink in a pixel region defined by the pixel defining layer; and drying the ink to form the thin film. The drying the ink includes generating a control electric field that enables a solute in the ink to move away from a boundary of the pixel region and move towards a center region of the pixel region under control of the control electric field.
    Type: Grant
    Filed: September 19, 2017
    Date of Patent: January 5, 2021
    Assignee: BOE TECHNOLOGY GROUP CO., LTD.
    Inventor: Qing Dai
  • Patent number: 10879137
    Abstract: According to an embodiment, a template includes a flat plate-shaped first member, a flat plate-shaped second member including a pattern arrangement face, and a flat plate-shaped third member provided with an opening at a position corresponding to an arrangement position of the second member. The template is dividable at a position of at least one of a first boundary between the first member and the second member and a second boundary between the first member and the third member.
    Type: Grant
    Filed: February 21, 2018
    Date of Patent: December 29, 2020
    Assignee: Toshiba Memory Corporation
    Inventors: Takahito Nishimura, Suigen Kanda, Takamasa Usui, Masayoshi Tagami, Jun Iljima
  • Patent number: 10868218
    Abstract: There is provided an apparatus including a semiconductor light emitting device formed on a surface of a substrate including a first electrode and a plurality of second electrodes formed adjacent to the first electrode in planar view, a base including an opposite surface facing the surface of the substrate, wherein a third electrode corresponding to the first electrode in positional relationship and a fourth electrode corresponding to the plurality of second electrodes in positional relationship are formed on the opposite surface, first connecting bodies electrically connecting the first electrode with the third electrode, and a second connecting body electrically connecting the plurality of second electrodes with the fourth electrode. The plurality of second electrodes (100) have a belt-like planer shape and centerlines respectively bisecting widths of the plurality of second electrodes are substantially parallel in planar view.
    Type: Grant
    Filed: September 26, 2018
    Date of Patent: December 15, 2020
    Assignee: ASAHI KASEI KABUSHIKI KAISHA
    Inventor: Kosuke Sato
  • Patent number: 10858547
    Abstract: Provided is a film for manufacturing a semiconductor part in which an evaluation step accompanied with a temperature change, a segmenting step, and a pickup step can be commonly performed, a method for manufacturing a semiconductor part, a semiconductor part, and an evaluation method. The film includes a base layer, and an adhesive layer disposed on one surface side of the base layer, wherein the ratio RE (=E?(160)/E?(?40)) of the elastic modulus of the base layer at 160° C. to the elastic modulus of the base layer at ?40° C. is RE?0.01, and the elastic modulus E?(?40) is 10 MPa to less than 1000 MPa. The method includes bonding the adhesive layer to a back surface of a semiconductor wafer, separating the semiconductor wafer into segments to obtain semiconductor parts, and separating the semiconductor parts from the adhesive layer, and includes a step of evaluating.
    Type: Grant
    Filed: June 14, 2016
    Date of Patent: December 8, 2020
    Assignee: MITSUI CHEMICALS TOHCELLO, INC.
    Inventor: Eiji Hayashishita
  • Patent number: 10826194
    Abstract: Techniques regarding a scalable phased array are provided. For example, various embodiments described herein can comprise a plurality of integrated circuits having respective flip chip pads, and an antenna-in-package substrate having a ball grid array terminal and a plurality of transmission lines. The plurality of transmission lines can be embedded within the antenna-in-package substrate and can operatively couple the respective flip chip pads to the ball grid array terminal. In one or more embodiments, a die can comprise the plurality of integrated circuits. Further, in one or more embodiments a combiner can also be embedded in the antenna-in-package substrate. The combiner can join the plurality of transmission lines.
    Type: Grant
    Filed: February 21, 2018
    Date of Patent: November 3, 2020
    Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Xiaoxiong Gu, Wooram Lee, Duixian Liu, Christian Wilhelmus Baks, Alberto Valdes-Garcia
  • Patent number: 10818864
    Abstract: An OLED device, a manufacturing method of an OLED device and a display apparatus are provided. The OLED device includes a plurality of pixels, each of the plurality of pixels including a plurality of sub-pixels with different colors, each of the plurality of sub-pixels including a first electrode, a second electrode, and a light-emitting material layer disposed between the first electrode and the second electrode. A hole injection layer is disposed between the light-emitting material layer and the first electrode of each of the sub-pixels, and the number of layers of the hole injection layer between the light-emitting material layer and the first electrode of a part of the sub-pixels is lower than that of other sub-pixels.
    Type: Grant
    Filed: July 31, 2018
    Date of Patent: October 27, 2020
    Assignees: BOE TECHNOLOGY GROUP CO., LTD., CHENGDU BOE OPTOELECTRONICS TECHNOLOGY CO., LTD.
    Inventors: Xiping Li, Wen Sun
  • Patent number: 10818556
    Abstract: A method for forming a semiconductor structure is provided. Multiple fins extending along a first direction are formed in a semiconductor substrate. The multiple fins includes a group of active fins, a pair of protection fins sandwiching about the group the active fins, and at least one dummy fin around the pair of protection fins. A fin cut process is performed to remove the at least one dummy fin around the pair of protection fins. After performing the fin cut process, trench isolation structures are formed within the trenches between the multiple fins. The trench isolation structures are subjected to an anneal process. After annealing the trench isolation structures, the pair of protection fins is removed.
    Type: Grant
    Filed: December 17, 2018
    Date of Patent: October 27, 2020
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: Hao-Yeh Liu, Jia-Feng Fang, Yu-Hsiang Lin, Ching-Hsiang Chiu, Chia-Wei Liu
  • Patent number: 10811292
    Abstract: Apparatus to store singulated wafers for transport, including multiple wafer assemblies stacked in the interior of a container housing, the individual wafer assemblies including an expanded laser diced wafer singulated into dies, a first frame spaced outward from the wafer on a carrier structure, a second frame spaced outward from the wafer and inward from the first frame on the carrier structure, and a foam structure that supports the second frame and the carrier structure.
    Type: Grant
    Filed: September 12, 2018
    Date of Patent: October 20, 2020
    Assignee: TEXAS INSTRUMENTS INCORPORATED
    Inventors: Connie Alagadan Esteron, Dolores Babaran Milo, Jerry Gomez Cayabyab
  • Patent number: 10797138
    Abstract: Methods of forming contacts for vertical-transport field-effect transistors and structures for a vertical-transport field-effect transistor and contact. An interlayer dielectric layer is deposited over a gate stack, and a first opening is formed in the interlayer dielectric layer and penetrates through the gate stack to cut the gate stack into a first section and a second section. A dielectric pillar is formed in the first opening and is arranged between the first section of the gate stack and the second section of the gate stack. Second and third openings are formed in the interlayer dielectric layer that penetrate to the gate stack and that are divided by the dielectric pillar. A first contact in the second opening is coupled with the first section of the gate stack, and a second contact in the third opening is coupled with the second section of the gate stack.
    Type: Grant
    Filed: April 9, 2018
    Date of Patent: October 6, 2020
    Assignee: GLOBALFOUNDRIES INC.
    Inventors: Emilie Bourjot, Daniel Chanemougame, Steven Bentley
  • Patent number: 10796936
    Abstract: Representative implementations of devices and techniques provide a device and a technique for processing integrated circuit (IC) dies. The device comprises a die tray (such as a pick and place tray, for example) for holding the dies during processing. The die tray may include an array of pockets sized to hold individual dies. The technique can include loading dies on the die tray, cleaning the top and bottom surfaces of the dies, and ashing and activating both surfaces of the dies while on the die tray, eliminating the need to turn the dies over during processing.
    Type: Grant
    Filed: November 8, 2017
    Date of Patent: October 6, 2020
    Assignee: Invensas Bonding Technologies, Inc.
    Inventor: Cyprian Emeka Uzoh
  • Patent number: 10797150
    Abstract: An apparatus including a non-planar body on a substrate, the body including a channel on a blocking material, and a gate stack on the body, the gate stack including a first gate electrode material including a first work function disposed on the channel material and a second gate electrode material including a second work function different from the first work function disposed on the channel material and on the blocking material. A method including forming a non-planar body on a substrate, the non-planar body including a channel on a blocking material, and forming a gate stack on the body, the gate stack including a first gate electrode material including a first work function disposed on the channel and a second gate electrode material including a second work function different from the first work function disposed on the channel and on the blocking material.
    Type: Grant
    Filed: December 17, 2015
    Date of Patent: October 6, 2020
    Assignee: Intel Corporation
    Inventors: Sean T. Ma, Willy Rachmady, Matthew V. Metz, Chandra S. Mohapatra, Gilbert Dewey, Nadia M. Rahhal-Orabi, Jack T. Kavalieros, Anand S. Murthy, Tahir Ghani
  • Patent number: 10790376
    Abstract: The present disclosure generally relates to semiconductor structures and, more particularly, to contact structures and methods of manufacture. The structure includes: a plurality of gate structures comprising source and drain regions and sidewall spacers; contacts connecting to at least one gate structure of the plurality of gate structures; and at least one metallization feature connecting to the source and drain regions and extending over the sidewall spacers.
    Type: Grant
    Filed: August 20, 2018
    Date of Patent: September 29, 2020
    Assignee: GLOBALFOUNDRIES INC.
    Inventors: Ruilong Xie, Chanro Park, Julien Frougier, Kangguo Cheng, Andre P. Labonte
  • Patent number: 10782339
    Abstract: Automatic test equipment with multiple components to generate highly accurate and stable analog test signals and method for operating the test system in semiconductor manufacturing process are disclosed. Output analog signals from existing test systems often fail the stability and accuracy requirement with less than 10 mV variations for testing certain electronic devices, due in part to environmental condition variations such as temperature fluctuations. Traditional compensation mechanisms for temperature variations involve time consuming and disruptive calibration procedures. Disclosed here is a system and method that provides near real-time monitoring and compensation for temperature-induced variations via a digital control mechanism that compensates for environmental variations in a time scale of less than 10 milliseconds and maintains the AC output analog signal with 10 milliVolt accuracy.
    Type: Grant
    Filed: April 29, 2016
    Date of Patent: September 22, 2020
    Assignee: Teradyne, Inc.
    Inventors: Zai-man Chen, Pei-Lai Zhang
  • Patent number: 10770546
    Abstract: A method for manufacturing a semiconductor device includes forming a plurality of pillars on a substrate. Each pillar of the plurality of pillars includes a silicon germanium portion. In the method, a layer of germanium oxide is deposited on the plurality of pillars, and a thermal annealing process is performed to convert outer regions of the silicon germanium portions into a plurality of silicon nanotubes. Each silicon nanotube of the plurality of silicon nanotubes surrounds a silicon germanium core portion. The method also includes exposing top surfaces of each of the silicon germanium core portions, and selectively removing each of the silicon germanium core portions with respect to the plurality of silicon nanotubes to create a plurality of gaps.
    Type: Grant
    Filed: September 26, 2018
    Date of Patent: September 8, 2020
    Assignee: International Business Machines Corporation
    Inventors: ChoongHyun Lee, Kangguo Cheng, Juntao Li, Peng Xu
  • Patent number: 10741398
    Abstract: A method for forming reliefs on a face of a substrate is provided, successively including forming a protective screen for protecting at least a first zone of the face; an implanting to introduce at least one species comprising carbon into the substrate from the face of the substrate, the forming of the protective screen and the implanting being configured to form, in the substrate, at least one carbon modified layer having a concentration of implanted carbon greater than or equal to an etching threshold only from a second zone of the face of the substrate not protected by the protective screen; removing the protective screen; and etching the substrate from the first zone selectively with respect to the second zone.
    Type: Grant
    Filed: February 2, 2018
    Date of Patent: August 11, 2020
    Assignee: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
    Inventors: Lamia Nouri, Stefan Landis, Nicolas Posseme
  • Patent number: 10741510
    Abstract: A semiconductor package includes a semiconductor chip having an active surface having connection pads disposed thereon and an inactive surface opposing the active surface, an encapsulant encapsulating at least a portion of the semiconductor chip, and a connection member disposed on the active surface of the semiconductor chip and including a redistribution layer and a via electrically connected to the connection pads of the semiconductor chip, wherein at least a portion of the redistribution layer and the via is formed of a metal layer having a concave portion depressed from a lower surface thereof and filled with an insulating material.
    Type: Grant
    Filed: August 20, 2018
    Date of Patent: August 11, 2020
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Woon Chun Kim, Ji Hye Shim, Seung Hun Chae