Patents Examined by Allison Bernstein
  • Patent number: 11289501
    Abstract: Some embodiments include a memory array which has a vertical stack of alternating insulative levels and wordline levels. A channel material extends vertically along the stack. The channel material includes a semiconductor composition and has first segments alternating with second segments. The first segments are adjacent the wordline levels and the second segments are adjacent the insulative levels. The first segments have a first dopant distribution and the second segments have a second dopant distribution which is different from the first dopant distribution. Some embodiments include methods of forming integrated assemblies.
    Type: Grant
    Filed: May 20, 2019
    Date of Patent: March 29, 2022
    Assignee: Micron Technology, Inc.
    Inventors: Shyam Surthi, Byeung Chul Kim, Richard J. Hill, Francois H. Fabreguette, Gurtej S. Sandhu
  • Patent number: 11289163
    Abstract: Some embodiments include apparatuses and methods of forming such apparatuses. One of the apparatus includes first memory cells located in different levels in a first portion of the apparatus, second memory cells located in different levels in a second portion of the apparatus, a switch located in a third portion of the apparatus between the first and second portions, first and second control gates to access the first and second memory cells, an additional control gate located between the first and second control gates to control the switch, a first conductive structure having a thickness and extending perpendicular to the levels in the first portion of the apparatus, a first dielectric structure between the first conductive structure and charge-storage portions of the first memory cells, a second dielectric structure having a second thickness between the second conductive structure and a sidewall of the additional control gate, the second thickness being greater than the first thickness.
    Type: Grant
    Filed: November 2, 2020
    Date of Patent: March 29, 2022
    Assignee: Micron Technology, Inc.
    Inventors: Benben Li, Akira Goda, Ramey M. Abdelrahaman, Ian C. Laboriante, Krishna K. Parat
  • Patent number: 11289542
    Abstract: A memory cell including a two-terminal re-writeable non-volatile memory element having at least two layers of conductive metal oxide (CMO), which, in turn, can include a first layer of CMO including mobile oxygen ions, and a second layer of CMO formed in contact with the first layer of CMO to cooperate with the first layer of CMO to form an ion obstruction barrier. The ion obstruction barrier is configured to inhibit transport or diffusion of a subset of mobile ion to enhance, among other things, memory effects and cycling endurance of memory cells. At least one layer of an insulating metal oxide that is an electrolyte to the mobile oxygen ions and configured as a tunnel barrier is formed in contact with the second layer of CMO.
    Type: Grant
    Filed: December 10, 2020
    Date of Patent: March 29, 2022
    Assignee: Hefei Reliance Memory Limited
    Inventors: Jian Wu, Rene Meyer
  • Patent number: 11289540
    Abstract: An ovonic threshold switch includes a first electrode, a second electrode, and an In-doped chalcogenide-based selector layer disposed between the first electrode and the second electrode, in which the In-doped chalcogenide-based selector layer has an In compound content of about 2 at. % to about 10 at. %. A memory cell including the In-doped chalcogenide-based selector layer is also provided.
    Type: Grant
    Filed: March 18, 2021
    Date of Patent: March 29, 2022
    Assignee: MACRONIX INTERNATIONAL CO., LTD.
    Inventors: Huai-Yu Cheng, I-Ting Kuo, Hsiang-Lan Lung
  • Patent number: 11283015
    Abstract: A method of forming a phase change memory device is provided. The method includes forming a spacer layer on a substrate, and forming a heater terminal contact in the spacer layer. The method further includes forming a liner layer on the heater terminal contact and the spacer layer, and forming a heater terminal in electrical contact with the heater terminal contact in the liner layer. The method further includes forming a conductive projection segment on the heater terminal. The method further includes forming a phase change material layer on the conductive projection segment, and forming a phase change material terminal on the phase change material layer, wherein an electrical current can pass between the heater terminal and the phase change material terminal through the phase change material layer.
    Type: Grant
    Filed: March 24, 2020
    Date of Patent: March 22, 2022
    Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Timothy Mathew Philip, Nicole Saulnier, Lawrence A. Clevenger
  • Patent number: 11282857
    Abstract: A three-dimensional memory device includes an alternating stack of insulating layers and electrically conductive layers, and a memory stack structure vertically extending through the alternating stack. The memory stack structure includes a vertical semiconductor channel and a memory film. The vertical semiconductor channel can include a III-V compound semiconductor channel material. A III-V compound substrate semiconductor layer or a III-V compound semiconductor source region can be used to provide low-resistance electrical connection to a bottom end of the vertical semiconductor channel, and a drain region including a graded III-V compound semiconductor material can be used to provide low-resistance electrical connection to a top end of the vertical semiconductor channel.
    Type: Grant
    Filed: May 29, 2020
    Date of Patent: March 22, 2022
    Assignee: SANDISK TECHNOLOGIES LLC
    Inventors: Ashish Baraskar, Peter Rabkin, Raghuveer S. Makala
  • Patent number: 11283016
    Abstract: A memory cell can include a chalcogenide material configured in an annular shape or a chalcogenide material substantially circumscribing an interior conductive channel. Such memory cells can be included in memory structures having an interior conductive channel and a plurality of alternating dielectric layers and memory layers oriented along the interior conductive channel. Individual memory layers can include a chalcogenide material substantially circumscribing the interior conductive channel.
    Type: Grant
    Filed: August 28, 2020
    Date of Patent: March 22, 2022
    Assignee: Intel Corporation
    Inventor: Mario Allegra
  • Patent number: 11282848
    Abstract: A memory opening or a line trench is formed through an alternating stack of insulating layers and sacrificial material layers. A memory opening fill structure or a memory stack assembly is formed, which includes a vertical stack of discrete intermediate metallic electrodes formed on sidewalls of the sacrificial material layers, a gate dielectric layer, and a vertical semiconductor channel. Backside recesses are formed by removing the sacrificial material layers selective to the insulating layers, and a combination of a ferroelectric dielectric layer and an electrically conductive layer within each of the backside recesses. The electrically conductive layer is laterally spaced from a respective one of the discrete intermediate metallic electrodes by the ferroelectric dielectric layer. Ferroelectric-metal-insulator memory elements are formed around the vertical semiconductor channel.
    Type: Grant
    Filed: May 18, 2020
    Date of Patent: March 22, 2022
    Assignee: SANDISK TECHNOLOGIES LLC
    Inventors: Raghuveer S. Makala, Yanli Zhang, Fei Zhou, Rahul Sharangpani, Adarsh Rajashekhar, Seung-Yeul Yang
  • Patent number: 11271039
    Abstract: This technology provides an electronic device and a method for fabricating the same. An electronic device in accordance with an implementation of this document may include a substrate including a first portion in a first region and a second portion in a second region; a plurality of memory cells disposed over the first portion of the substrate; a first insulating layer extending over the second portion of the substrate and at least partially filling a space between adjacent ones of the plurality of memory cells; and a second insulating layer disposed over the first insulating layer. The first insulating layer has a dielectric constant smaller than that of the second insulating layer, a thermal conductivity smaller than that of the second insulating layer, or both.
    Type: Grant
    Filed: December 11, 2019
    Date of Patent: March 8, 2022
    Assignee: SK hynix Inc.
    Inventors: Chi-Ho Kim, Min-Seon Kang, Hyun-Seok Kang, Hyo-June Kim, Jae-Geun Oh, Su-Jin Chae
  • Patent number: 11271003
    Abstract: A semiconductor device includes a lower structure and a stack structure that extends into a connection region on the lower structure, where the stack structure includes gate pads and mold pads. The mold pads include intermediate mold pads that include first intermediate mold pads and a second intermediate mold pad between a pair of the first intermediate mold pads, each of the first intermediate mold pads has a first length in a first direction, the second intermediate mold pad has a second length in the first direction, greater than the first length, one of the intermediate mold pads includes a mold pad portion and an insulating protrusion portion on the mold pad portion, one of the first intermediate mold pads includes the mold pad portion and the insulating protrusion portion, and a central region of the second intermediate mold pad does not include the insulating protrusion portion.
    Type: Grant
    Filed: April 23, 2020
    Date of Patent: March 8, 2022
    Inventors: Geunwon Lim, Seokcheon Baek
  • Patent number: 11270770
    Abstract: Local word line driver device, memory device, and fabrication method are provided. A local word line driver device includes a substrate and an array of transistor structures formed on the substrate. The transistor structures are configured in rows and columns. The substrate includes a plurality of first field regions each between adjacent rows of the transistor structures, and a plurality of second field regions each between adjacent columns of the transistor structures. A deep trench isolation structure is formed in at least one field region of: the plurality of first field regions or the plurality of second field regions, of the substrate.
    Type: Grant
    Filed: June 1, 2020
    Date of Patent: March 8, 2022
    Assignee: Yangtze Memory Technologies Co., Ltd.
    Inventors: Cheng Gan, Wei Liu, Shi Qi Huang, Shunfu Chen
  • Patent number: 11257837
    Abstract: A non-volatile memory includes a substrate, a plurality of gate stacked strips and a plurality of contact plugs. The substrate includes a plurality of diffusion strips. The plurality of gate stacked strips are disposed over the diffusion strips, wherein each of the gate stacked strips includes a charge storage layer and a gate conductor layer stacked from bottom to top. The plurality of contact plugs are disposed on the diffusion strips between the gate stacked strips, wherein a sidewall of each of the gate conductor layer beside the contact plugs and above the diffusion strips has a step profile.
    Type: Grant
    Filed: January 20, 2020
    Date of Patent: February 22, 2022
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventor: Tsung-Lin Wu
  • Patent number: 11232828
    Abstract: Some embodiments include an integrated memory assembly having a first memory array deck over a second memory array deck. A first series of conductive lines extends across the first memory array deck, and a second series of conductive lines extends across the second memory array deck. A first conductive line of the first series and a first conductive line of the second series are coupled with a first component through a first conductive path. A second conductive line of the first series and a second conductive line of the second series are coupled with a second component through a second conductive path. The first and second conductive lines of the first series extend through first isolation circuitry to the first and second conductive paths, respectively; and the first and second conductive lines of the second series extend through second isolation circuitry to the first and second conductive paths, respectively.
    Type: Grant
    Filed: February 9, 2021
    Date of Patent: January 25, 2022
    Assignee: Micron Technology, Inc.
    Inventors: Scott J. Derner, Charles L. Ingalls
  • Patent number: 11233069
    Abstract: A 3D device, the device including: a first level including logic circuits; and a second level including a plurality of memory cells, where the first level is bonded to the second level, where the bonded includes oxide to oxide bonds, and where the logic circuits include a programmable logic circuit.
    Type: Grant
    Filed: August 8, 2021
    Date of Patent: January 25, 2022
    Assignee: Monolithic 3D Inc.
    Inventors: Zvi Or-Bach, Jin-Woo Han
  • Patent number: 11217595
    Abstract: An antifuse One-Time-Programmable memory cell includes a substrate, a select transistor formed on the substrate, and an antifuse capacitor formed on the substrate. The select transistor includes a first gate dielectric layer formed on the substrate, a first gate formed on the gate dielectric layer, a first low-voltage junction formed in the substrate, and a second low-voltage junction formed in the substrate. A source and a drain for the select transistor are formed by the first low-voltage junction and the second low-voltage junction. The antifuse capacitor includes a second gate dielectric layer formed on the substrate, a second gate formed on the gate dielectric layer, a third low-voltage junction formed in the substrate, and a fourth low-voltage junction formed in the substrate. A source and a drain for the antifuse capacitor are respectively formed by the third low-voltage junction and the fourth low-voltage junction.
    Type: Grant
    Filed: January 15, 2020
    Date of Patent: January 4, 2022
    Assignee: Zhuhai Chuangfeixin Technology Co., Ltd.
    Inventors: Li Li, Zhigang Wang
  • Patent number: 11217602
    Abstract: Disclosed is a memory device and a method for fabricating the same, and the method may include forming an alternating stack in which dielectric layers and sacrificial layers are alternately stacked over a substrate, each of the sacrificial layers being a combination of porous and non-porous materials, forming a vertical opening penetrating the alternating stack, converting exposed surfaces of the sacrificial layers located on a side wall of the vertical opening into blocking layers through an oxidation process, forming a vertical channel structure contacting the blocking layers in the vertical opening, and replacing non-converting portions of the sacrificial layers with conductive layers, wherein each of the conductive layers comprises a round-like edge contacting each of the blocking layers.
    Type: Grant
    Filed: December 11, 2019
    Date of Patent: January 4, 2022
    Assignee: SK hynix Inc.
    Inventors: Jin-Ho Bin, Il-Young Kwon, Tae-Hong Gwon, Hye-Hyeon Byeon
  • Patent number: 11201165
    Abstract: Some embodiments include apparatuses and methods having a conductive line, a memory cell string including memory cells located in different levels the apparatus, and a select circuit including a select transistor and a coupling component coupled between the conductive line and the memory cell string. Other embodiments including additional apparatuses and methods are described.
    Type: Grant
    Filed: September 9, 2019
    Date of Patent: December 14, 2021
    Assignee: Micron Technology, Inc.
    Inventor: Toru Tanzawa
  • Patent number: 11195844
    Abstract: A semiconductor memory device includes a substrate, a plurality of conductive layers, a first semiconductor layer, a memory portion, and a drive circuit which drives the memory cell. The conductive layers are provided in a first region, a second region, and a third region different from the first region and the second region, and a portion positioned in the third region is insulated from a portion positioned in the first region and the second region. The drive circuit is provided in the third region, and includes a second semiconductor layer, and an insulating layer, and one end of the second semiconductor layer is connected to the conductive layers in the second region and the other end of the second semiconductor layer is connected to the substrate.
    Type: Grant
    Filed: February 28, 2020
    Date of Patent: December 7, 2021
    Assignee: Kioxia Corporation
    Inventors: Kensuke Ota, Masumi Saitoh, Kiwamu Sakuma
  • Patent number: 11195998
    Abstract: A memory structure can include a memory cell and a first barrier layer having a maximum hydrogen diffusion coefficient of 1×10?17 cm2/s, said first barrier layer adjacent to the memory cell to minimize contaminant movement to or from the memory cell.
    Type: Grant
    Filed: June 8, 2020
    Date of Patent: December 7, 2021
    Assignee: Intel Corporation
    Inventors: Karthik Sarpatwari, Dale Collins, Anna Maria Conti, Fred Daniel Gealy, III, Andrea Gotti, Swapnil Lengade, Stephen Russell
  • Patent number: 11195842
    Abstract: A method of forming a semiconductor structure includes forming a wordline stack for a non-volatile memory structure over a capping layer, the wordline stack including sets of alternating layers of insulating and gate materials each having a different width. The method also includes forming a first bitline contact layer between first and second portions of the wordline stack each including at least one of the sets. The method further includes forming a floating gate device structure vertically in a channel hole through the wordline stack, the first bitline contact layer and the capping layer. The method further includes forming wordline contacts to the gate layers and a first bitline contact to the first bitline contact layer in holes paced apart from vertical sidewalls of the floating gate device structure, and forming a second bitline contact over at least a portion of a top surface of the floating gate device structure.
    Type: Grant
    Filed: January 6, 2020
    Date of Patent: December 7, 2021
    Assignee: International Business Machines Corporation
    Inventor: Effendi Leobandung