Patents Examined by Andy Huynh
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Patent number: 11043382Abstract: Disclosed herein is a new and improved system and method for fabricating diamond semiconductors. The method may include the steps of selecting a diamond semiconductor material having a surface, exposing the surface to a source gas in an etching chamber, forming a carbide interface contact layer on the surface; and forming a metal layer on the interface layer.Type: GrantFiled: August 1, 2018Date of Patent: June 22, 2021Assignee: AKHAN SEMICONDUCTOR, INC.Inventor: Adam Khan
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Patent number: 11037897Abstract: Disclosed is a semiconductor device suppressed in decrease of reliability. The semiconductor device comprises an electrode pad portion (2) formed on the upper surface of a semiconductor substrate (1), a passivation layer (3) so formed on the upper surface of the semiconductor substrate (1) as to overlap a part of the electrode pad portion (2) and having a first opening portion (3a) where the upper surface of the electrode pad portion (2) is exposed, a barrier metal layer (5) formed on the electrode pad portion (2), and a solder bump (6) formed on the barrier metal layer (5). The barrier metal layer (5) is formed such that an outer peripheral end (5b) lies within the first opening portion (3a) of the passivation layer (3) when viewed in plan.Type: GrantFiled: November 14, 2019Date of Patent: June 15, 2021Assignee: Rohm Co., Ltd.Inventors: Tadahiro Morifuji, Shigeyuki Ueda
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Patent number: 11024634Abstract: A method of making a semiconductor device includes forming a first memory device, connecting a first word line to the first memory device, forming at least a first via, forming a second memory device, connecting a second word line to the second memory device, connecting a bit line to the first memory device and connecting the bit line to the second memory device by the first via. The first and second memory devices are separated by an inter-layer dielectric, and the first via connects the first memory device and the second memory device.Type: GrantFiled: November 30, 2018Date of Patent: June 1, 2021Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Tsung-Hsien Huang, Hong-Chen Cheng, Cheng Hung Lee, Hung-Jen Liao
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Patent number: 10998377Abstract: The present disclosure provides a semiconductor structure, including a memory region, a first metal line in the memory region, a magnetic tunneling junction (MTJ) cell over the first metal line, a carbon-based layer between the first metal line and the MTJ cell, a second metal line over the MTJ cell, a logic region adjacent to the memory region, wherein the logic region is free from a coverage of the carbon-based layer.Type: GrantFiled: May 27, 2020Date of Patent: May 4, 2021Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.Inventors: Harry-Hak-Lay Chuang, Sheng-Huang Huang, Keng-Ming Kuo, Hung Cho Wang
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Patent number: 10991677Abstract: A semiconductor package includes: a first semiconductor chip in which a through-electrode is provided; a second semiconductor chip connected to a top surface of the first semiconductor chip; a first connection bump attached to a bottom surface of the first semiconductor chip and including a first pillar structure and a first solder layer, and a second connection hump located between the first semiconductor chip and the second semiconductor chip, configured to electrically connect the first semiconductor chip and the second semiconductor chip, and including a second pillar structure and a second solder layer.Type: GrantFiled: April 14, 2020Date of Patent: April 27, 2021Assignee: Samsung Electronics Co., Ltd.Inventors: Sun-kyoung Seo, Cha-jea Jo, Soo-hyun Ha
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Patent number: 10978471Abstract: A semiconductor memory device includes first structure bodies and second structure bodies arranged alternately along a first direction. The first structure body includes electrode films arranged along a second direction. The second structure body includes columnar members, first insulating members, and second insulating members. The columnar member includes a semiconductor member extending in the second direction and a charge storage member provided between the semiconductor member and the electrode film. The second insulating members are arranged along a third direction. Lengths in the first direction of the second insulating members are longer than lengths in the first direction of the first insulating members. Positions of the second insulating members in the third direction are different from each other between the second structure bodies adjacent to each other in the first direction. The columnar members and the first insulating members are arranged alternately between the second insulating members.Type: GrantFiled: March 12, 2019Date of Patent: April 13, 2021Assignee: TOSHIBA MEMORY CORPORATIONInventor: Keisuke Nakatsuka
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Patent number: 10978618Abstract: A semiconductor light emitting device includes a light emitting structure having a first conductivity-type semiconductor layer, an active layer and a second conductivity-type semiconductor layer, a transparent electrode layer on the second conductivity-type semiconductor layer and spaced apart from an edge of the second conductivity-type semiconductor layer, a first insulating layer on the light emitting structure to cover the transparent electrode layer and including a plurality of holes connected to the transparent electrode layer, and a reflective electrode layer on the first insulating layer and connected to the transparent electrode layer through the plurality of holes.Type: GrantFiled: August 28, 2020Date of Patent: April 13, 2021Assignee: SAMSUNG ELECTRONICS CO., LTD.Inventors: JuHeon Yoon, Jung Hwan Kil, Tae Hun Kim, Hwa Ryong Song, Jae In Sim
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Patent number: 10978422Abstract: A method includes forming a fin structure over a semiconductor substrate; forming a liner covering the fin structure; etching back the liner to expose an upper portion of the fin structure; forming a spacer covering the upper portion of the fin structure; etching the liner to expose a middle portion of the fin structure, wherein the remaining liner covers a lower portion of the fin structure; etching the middle portion of the fin structure; and forming a first source/drain structure surrounding the middle portion of the fin structure.Type: GrantFiled: May 22, 2020Date of Patent: April 13, 2021Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Wei-Sheng Yun, Shao-Ming Yu, Chih-Chieh Yeh
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Patent number: 10971659Abstract: There is provided a white light emitting device comprising: first and second LEDs operable to generate excitation light having a dominant wavelength in a range from 440 nm to 480 nm and mounted on a substrate; a first photoluminescence material which generates light having a peak emission wavelength in a range from 500 nm to 590 nm; and a second photoluminescence material which generates light having a peak emission wavelength in a range from 600 nm to 650 nm, wherein the first LED is covered by the first photoluminescence material, and the second LED is covered by the first and second photoluminescence materials.Type: GrantFiled: June 3, 2019Date of Patent: April 6, 2021Assignee: Bridgelux, Inc.Inventor: Tao Xu
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Patent number: 10971489Abstract: An integrated circuit includes a power supply terminal, a reference terminal, and a signal terminal. A first protection device is coupled between the signal terminal and the power supply terminal, the first protection device including a first MOS transistor. A second protection device is coupled between the signal terminal and the reference terminal, the second protection device including a second MOS transistor. Gates of the MOS transistors are directly or indirectly coupled to the reference terminal. Substrates of the MOS transistors are coupled to the reference terminal via a common resistor.Type: GrantFiled: May 8, 2019Date of Patent: April 6, 2021Assignee: STMicroelectronics SAInventor: Johan Bourgeat
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Patent number: 10957853Abstract: Embodiments of the invention are directed to a method to modify material properties of a functional material of a nanoscale device post-fabrication. The method includes performing one or more conditioning steps. The conditioning steps include applying electrical conditioning signals of predefined form to the nanoscale device, thereby performing an in-situ heating of the functional material and inducing thermally a displacement of atoms, molecules or ions of the functional material of the nanoscale device. Embodiments of the invention further concerns a related electronic device.Type: GrantFiled: September 18, 2018Date of Patent: March 23, 2021Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATIONInventors: Iason Giannopoulos, Abu Sebastian, Vara S. P. Jonnalagadda
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Patent number: 10950735Abstract: According to one embodiment, a semiconductor device includes a semiconductor layer and a first layer. The semiconductor layer includes a first portion including a first element and oxygen. The first element includes at least one selected from the group consisting of In, Ga, Zn, Al, Sn, Ti, Si, Ge, Cu, As, and W. The first layer includes a second element including at least one selected from the group consisting of W, Ti, Ta, Mo, Cu, Al, Ag, Hf, Au, Pt, Pd, Ru, Y, V, Cr, Ni, Nb, In, Ga, Zn, and Sn. The first portion includes a first region and a second region. The second region is provided between the first region and the first layer. The first region includes a bond of the first element and oxygen. The second region includes a bond of the first element and a metallic element.Type: GrantFiled: March 12, 2019Date of Patent: March 16, 2021Assignee: TOSHIBA MEMORY CORPORATIONInventors: Junji Kataoka, Tomomasa Ueda, Tomoaki Sawabe, Keiji Ikeda, Nobuyoshi Saito
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Patent number: 10950656Abstract: A method for fabricating a semiconductor memory device is provided. The method includes: etching a first region of the semiconductor memory device to expose a first capping layer; forming a second capping layer on the first capping layer; etching a portion of the first capping layer and a portion of the second capping layer to form a first trench reaching a first metal line; and forming a second metal line in the first trench to contact the first metal line.Type: GrantFiled: December 16, 2019Date of Patent: March 16, 2021Assignee: Taiwan Semiconductor Manufacturing Company Ltd.Inventors: Harry-Hak-Lay Chuang, Sheng-Huang Huang, Shih-Chang Liu, Chern-Yow Hsu
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Patent number: 10943875Abstract: A method comprising bonding a first substrate to a second substrate. The first substrate includes a layer of one or more pairs of reactive material. The method comprising triggering a reaction between the one or more pairs of reactive material and fragmenting the second substrate.Type: GrantFiled: March 15, 2019Date of Patent: March 9, 2021Assignee: International Business Machines CorporationInventors: Cyril Cabral, Jr., Kenneth P. Rodbell
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Patent number: 10937802Abstract: Various embodiments include methods and apparatus having a number of charge trap structures, where each charge trap structure includes a dielectric barrier between a gate and a blocking dielectric region, the blocking dielectric region located on a charge trap region of the charge trap structure. At least a portion of the gate can be separated by a void from a region which the charge trap structure is directly disposed. Additional apparatus, systems, and methods are disclosed.Type: GrantFiled: June 25, 2019Date of Patent: March 2, 2021Assignee: Micron Technology, Inc.Inventor: Chris M. Carlson
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Patent number: 10930576Abstract: A micro-electromechanical system (MEMS) device includes a support structure comprising a polycrystalline ceramic core, a first adhesion layer coupled to the polycrystalline ceramic core, a conductive layer coupled to the first adhesion layer, a second adhesion layer coupled to the conductive layer, and a barrier layer coupled to the second adhesion layer. The support structure defines a cavity. The MEMS device also includes a III-V membrane coupled to a portion of the support structure. A portion of the III-V membrane is suspended over the cavity defined by the support structure and defines a MEMS structure.Type: GrantFiled: June 26, 2020Date of Patent: February 23, 2021Assignee: QROMIS, INC.Inventors: Vladimir Odnoblyudov, Cem Basceri, Shari Farrens, Ozgur Aktas
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Patent number: 10930627Abstract: A semiconductor device package includes a first semiconductor device having a first surface, an interconnection element having a surface substantially coplanar with the first surface of the first semiconductor device, a first encapsulant encapsulating the first semiconductor device and the interconnection element, and a second semiconductor device disposed on and across the first semiconductor device and the interconnection element.Type: GrantFiled: December 28, 2018Date of Patent: February 23, 2021Assignee: ADVANCED SEMICONDUCTOR ENGINEERING, INC.Inventors: Chang-Yu Lin, Chi-Han Chen, Chieh-Chen Fu
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Patent number: 10930785Abstract: A semiconductor device is provided. The semiconductor device includes a base substrate; a first dielectric layer on the base substrate; a target gate structure in the first dielectric layer and on the base substrate. The target gate structure includes a target structure body and a target spacer wall on sidewalls of the target gate structure body. The semiconductor device further includes a protective layer on a top surface of the target gate structure, in the first dielectric layer. The semiconductor device further includes conductive plugs in the first dielectric layer on sides of the target gate structure and the protective layer.Type: GrantFiled: March 31, 2020Date of Patent: February 23, 2021Assignees: Semiconductor Manufacturing International (Shanghai) Corporation, Semiconductor Manufacturing International (Beijing) CorporationInventor: Yong Li
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Patent number: 10930652Abstract: Methods of forming semiconductor device structures include forming trenches in an array region and in a buried digit line end region, forming a metal material in the trenches, filling the trenches with a mask material, removing the mask material in the trenches to expose a portion of the metal material, and removing the exposed portion of the metal material. A plurality of conductive contacts is formed in direct contact with the metal material in the buried digit line end region. Methods of forming a buried digit line contact include forming conductive contacts physically contacting metal material in trenches in a buried digit line end region. Vertical memory devices and apparatuses include metallic connections disposed between a buried digit line and a conductive contact in a buried digit line end region.Type: GrantFiled: May 16, 2019Date of Patent: February 23, 2021Assignee: Micron Technology, Inc.Inventors: Shyam Surthi, Suraj Mathew
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Patent number: 10923451Abstract: Semiconductor dies including ultra-thin wafer backmetal systems, microelectronic devices containing such semiconductor dies, and associated fabrication methods are disclosed. In one embodiment, a method for processing a device wafer includes obtaining a device wafer having a wafer frontside and a wafer backside opposite the wafer frontside. A wafer-level gold-based ohmic bond layer, which has a first average grain size and which is predominately composed of gold, by weight, is sputter deposited onto the wafer backside. An electroplating process is utilized to deposit a wafer-level silicon ingress-resistant plated layer over the wafer-level Au-based ohmic bond layer, while imparting the plated layer with a second average grain size exceeding the first average grain size. The device wafer is singulated to separate the device wafer into a plurality of semiconductor die each having a die frontside, an Au-based ohmic bond layer, and a silicon ingress-resistant plated layer.Type: GrantFiled: July 16, 2019Date of Patent: February 16, 2021Assignee: NXP USA, Inc.Inventors: Tianwei Sun, Jaynal A. Molla