Abstract: Disclosed is a method for in situ formation of titanium aluminide. The disclosed method is directed to overcoming voiding problems which result in conventional titanium and aluminum metal interconnect stacks. The steps of the method comprise first providing a silicon substrate, which typically comprises an in-process integrated circuit wafer. Next, an insulating passivation layer is provided on the silicon substrate. The next step is the sputtering of a titanium layer of a given thickness over the passivation. Subsequently, an aluminum film of three times the thickness of the titanium layer is sputtered over the titanium layer. The next step comprises annealing the titanium layer and the aluminum film in situ in a metal anneal chamber to form titanium aluminide. Following the in situ anneal, the remainder of the needed aluminum is sputtered over the titanium aluminide and a further passivation layer of titanium nitride is then sputtered over the aluminum.

Abstract: A thermal barrier coating system and a method for forming the coating system on an article. The coating system employs a bond coat of a nickel aluminide alloy over which a thermal-insulating ceramic layer is deposited. The nickel aluminide bond coat contains zirconium, but is otherwise predominantly of the beta (&bgr;) NiAl phase. The bond coat is preferably deposited by a physical vapor deposition process to have a fine-grain microstructure and a limited diffusion zone in the article surface.

Abstract: A solder bumping method and structure for producing fine-pitch solder bump and which eliminate conventional process compatibility requirements for under bump metallurgy (UBM) and solder bump formation. The method generally entails forming an input/output pad on the surface of a semiconductor device, and then forming a metal layer on the input/output pad that will serve as the UBM of the solder bump. A plating seed layer is then formed on the UBM and on the surrounding surface of the device, after which a mask is formed on the plating seed layer and a via is formed in the mask to expose a portion of the plating seed layer overlying the UBM, and preferably portions of the plating seed layer not overlying the UBM. A solder material is then deposited on the portion of the plating seed layer exposed within the via.

Abstract: In a wear protection layer comprising, disposed on a substrate, a plurality of individual layers including a first individual layer of a metallic hard material disposed directly on the substrate, periodically repeated composite arrangements of three individual layers comprising two individual layers of different metallic hard materials and one individual layer consisting of a covalent hard material are disposed on the first individual layer of a metallic hard material whereby the mechanical, physical and chemical properties of the metallic hard materials are combined with the properties of the covalent hard materials.

Abstract: The increase of temperature in heat sensitive devices during heat generating conditions is prevented through the absorption of heat, by providing a hydrated salt such as Lithium Chloride, Magnesium Chloride, Magnesium Sulfate, Sodium Sulfate, Aluminum Oxide, Aluminum Sulfate, Aluminum Fluoride, Aluminum Nitrate, Lithium Nitrate, Sodium Borate, Beryllium Sulfate, Sodium Phosphate, Calcium Chloride, Zinc Sulfate, Aluminum Chloride, Zinc Chloride and the mixtures thereof, in an amount sufficient to effect the required heat absorption. Where the heat generating conditions are generated by a heat generator, separate and distinct from the heat sensitive device, the hydrated salt is supported in a position between the heat sensitive device and the heat generator. Where the heat sensitive device is itself the heat generator, the hydrated salt is contacted to the heat sensitive device either directly or indirectly.

Abstract: The invention relates to a high-temperature-resistant component comprising a nickel-based or cobalt-based superalloy, in particular having a protective alloy selected from the class consisting of MCrAlY alloys. The component has an antioxidation coating comprising gallium. The invention also relates to a corresponding method of providing protection against oxidation.

Abstract: The increase of temperature in heat sensitive devices during heat generating conditions is prevented through the absorption of heat, by providing an aldehyde such as formaldehyde (methanol), acetaldehyde (ethanal), propionaldehyde (propanal), n-butyraldehyde (butanal), benzaldehyde, p-Nitrobenzaldehyde, p-tolualdehyde, salicylaldehyde (ortho-hydroxybenzaldehyde), phenylacetalaldehyde (phenylethanal), alpha-methylvaleraldehyde (2-methylpentanal), beta-methyvaleraldehyde (3-methylpentanal), isocaproaldehyde (4-methylpentanal), paraformaldehyde, trioxane, dioxane, paraldehydeand the mixtures thereof, in an amount sufficient to effect the required heat absorption. Where the heat generating conditions are generated by a heat generator, separate and distinct from the heat sensitive device, the aldehyde is supported in a position between the heat sensitive device and the heat generator.

Abstract: The increase of temperature in heat sensitive devices during heat generating conditions is prevented through the absorption of heat, by providing an organic acid such as formic acid, acetic acid, propanoic acid, butyric acid and the mixtures thereof, in an amount sufficient to effect the required heat absorption. Where the heat generating conditions are generated by a heat generator, separate and distinct from the heat sensitive device, the organic acid is supported in a position between the heat sensitive device and the heat generator. Where the heat sensitive device is itself the heat generator, the organic acid is contacted to the heat sensitive device either directly or indirectly.

Abstract: The increase of temperature in heat sensitive devices during heat generating conditions is prevented through the absorption of heat, by providing a bicarbonate salt, such as Lithium Bicarbonate, Sodium Bicarbonate, Potassium Bicarbonate, Magnesium Bicarbonate, Calcium Bicarbonate, Beryllium Bicarbonate, Aluminum Bicarbonate, Ammonium Bicarbonate and the mixtures thereof, in an amount sufficient to effect the required best absorption. Where the heat generating conditions are generated by a heat generator, separate and distinct from the heat sensitive device, the bicarbonate salt is supported in a position between the heat sensitive device and the heat generator. Where the heat sensitive device is itself the heat generator, the bicarbonate salt is contacted to the heat sensitive device either directly or indirectly.

Abstract: A thermal barrier coating for hot gas path components of a combustion turbine based on a zirconia-scandia system. A layer of zirconium scandate having the hexagonal Zr3Sc4O12 structure is formed directly on a superalloy substrate or on a bond coat formed on the substrate.

Abstract: A part or jig of a metal for a gas carburizing furnace has an Al diffusion layer which has an Al content of 10 to 50 wt % in the surface portion of the part or jig, the Al diffusion layer being formed by carrying out the calorizing treatment.

Abstract: A new family of ceramic materials is identified having particular utility as thermal insulating or thermal barrier coatings on metallic substrates. The ceramic materials have a pyrochlore structure and are typified by the composition A2B2O7 where A and B are various ions and 0 is oxygen. A may have a positive charge of 3+ or 2+ and B may have a positive charge of 4+ or 5+. These materials are characterized by having chemical stability, thermal stability and thermal insulating properties superior to those of currently used thermal barrier ceramics. An example pyrochlore material is lanthanum zirconate.

Abstract: An improved coating and method for applying the coating to minimize the consumption of substrate material during high temperature service by formation of an intermediate metal aluminide layer. A layer of Ni or Co or combinations of Ni and Co are added to the substrate material as an overlay by a process such as electroplating or electroless plating. A diffusion aluminide is then formed at the surface by exposing the plated substrate to a source of aluminum at an elevated temperature.

Abstract: The present invention relates to an underlayer for use in a high density magnetic recording media. More particularly, the invention relates to an underlayer for use in a high density magnetic recording media comprising A1Pd or CoTi intermetallic compound having B2 crystal structure, or Co50Ti50-xMxmetal alloy in which Ti in CoTi intermetallic compound is partly substituted by other substitutional elements while maintaining its B2 crystal structure, or CoTi/Cr of a double thin film structure in which a Cr seed layer is introduced. The underlayer provided by the present invention has a crystal structure and microstructure suitable for a high density magnetic recording media, which makes a good texture structure with a Co-based magnetic layer deposited thereon and shows fine grain size distribution, high coercity and high coercity squareness.

Abstract: High reflectance, low intrinsic roughness and low stress multilayer systems for extreme ultraviolet (EUV) lithography comprise amorphous layers MoRu and crystalline Be layers. Reflectance greater than 70% has been demonstrated for MoRu/Be multilayers with 50 bilayer pairs. Optical throughput of MoRu/Be multilayers can be 30-40% higher than that of Mo/Be multilayer coatings. The throughput can be improved using a diffusion barrier to make sharper interfaces. A capping layer on the top surface of the multilayer improves the long-term reflectance and EUV radiation stability of the multilayer by forming a very thin native oxide that is water resistant.

Abstract: The increase of temperature in heat sensitive devices during heat generating conditions is prevented through the absorption of heat, by providing a carbonate salt, such as Lithium Carbonate and its hydrates, Sodium Carbonate and its hydrates, Potassium Carbonate and its hydrates, Magnesium Carbonate and its hydrates, Calcium Carbonate and its hydrates, Beryllium Carbonate and its hydrates, Aluminum Carbonate and its hydrates, and the mixtures thereof, in an amount sufficient to effect the required heat absorption. Where the heat generating conditions are generated by a heat generator, separate and distinct from the heat sensitive device, the carbonate salt is supported in a position between the heat sensitive device and the heat generator. Where the heat sensitive device is itself the heat generator, the carbonate salt is contacted to the heat sensitive device either directly or indirectly.

Abstract: In the present invention, a metal-ceramic composite substitute is produced by joining a metal plate to a ceramic substrate by using a brazing material in a paste form prepared by adding 10-14 parts by weight of a vehicle to 100 parts by weight of a powder of which the solid centent comprises 90.0˜99.5% of an Ag powder, 0˜9.5% of a Cu powder and 0.5˜4.0% of an active metal powder, and 0.0˜0.9% of a titanium oxide powder if necessary.

Abstract: A metallic article (30) comprises a bond coating (34) on the metallic article (30) and a ceramic thermal barrier coating (38) on the bond coating (34). The ceramic thermal barrier coating (38) comprises a plurality of columnar grains (40) extending substantially perpendicular to the surface of the metallic article (30). The ceramic thermal barrier coating (38) has an inner portion (44), a transition portion (46) and an outer portion (48). Each columnar grain (40) has a substantially constant cross-sectional area throughout its length in the outer portion (48), has smooth surfaces and there are distinct uniform gaps (42) between columnar grains to minimize the stress/strain in the columnar grains (40) and/or to minimize the stress/strain between adjacent columnar grains (40) and thereby increases the resistance to spallation of the ceramic thermal barrier coating. The columnar grains (40) are produced by controlling the evaporation rate of the ceramic, the temperature and speed of rotation of the article (30).

Abstract: A method is provided for making mirrors having enhanced reflective layer resistance to corrosion. The reflective layer of the mirror, typically silver, is contacted, preferably simultaneously, with a first solution containing a specific cation and a second solution containing a specific anion, or alkaline material which forms hydroxyl ions, the specific cation and specific anion or hydroxyl ion reacting to form a water insoluble precipitate on the silver surface. The mirror may then be painted to provide additional corrosion resistance to the mirror. The method eliminates the need for a copper layer on the silver surface and the method may be incorporated into existing mirror production lines as a replacement for the copper layering step. Also provided are an apparatus for making the mirrors and the mirrors made using the method and apparatus of the invention. A preferred cation containing solution contains tin (e.g., SnCl2) and a preferred anion containing solution contains hydroxyl ions (e.g., NaOH).

Abstract: A multi-layer thermal barrier coating for a superalloy article includes a metallic matrix coating containing particles, a MCrAlY alloy bond coating on the metallic matrix coating, a thin oxide layer on the MCrAlY alloy bond coating and a columnar grain ceramic thermal barrier coating. The metallic matrix coating includes a 80 wt % nickel-20 wt % chromium alloy. The particles include metallic compounds such as carbides, oxides, borides and nitrides, which react with harmful transition metal elements such as titanium, tantalum and hafnium, in the superalloy substrate. One suitable compound is chromium carbide because the harmful transition metal elements will take part in an exchange reaction with the chromium in the chromium carbide to form a stable carbide of the harmful transition metal element. This reduces the amount of harmful elements in the superalloy reaching the oxide layer and increases the service life of the thermal barrier coating.