Abstract: Atomic layer deposition (ALD) processes for forming thin films comprising InN are provided. The thin films may find use, for example, in light-emitting diodes.

Abstract: In some examples, a device includes a semiconductor element, a layer element, and a single connector element electrically connecting the semiconductor element and the layer element. In some examples, the single connector element includes two or more discrete connector elements, and each discrete connector element of the two or more discrete connector elements electrically connects the semiconductor element and the layer element. In some examples, the single connector element also includes conductive material attached to the two or more discrete connector elements.

Abstract: A multi-layer cooling structure comprising a first substrate layer comprising an array of cooling channels, a second substrate layer comprising a nozzle structure that includes one or more nozzles, an outlet, and an outlet manifold, a third substrate layer comprising an inlet manifold and an inlet, and one or more TSVs disposed through the first substrate layer, second substrate layer, and third substrate layer. At least one of the one or more TSVs is metallized. The first substrate layer and the second substrate layer are directly bonded, and the second substrate layer and the third substrate layer are directly bonded.

Abstract: A field-effect transistor includes a source electrode, a drain electrode, a semiconductor structure including a channel provided between the source electrode and the drain electrode in a first direction. Gate main portions have a first gate main portion length in the first direction and a second gate main portion length in a second direction. Connection portions are alternatively connected to the gate main portions respectively in the second direction. Each of the connection portions has a first connection portion length in the first direction and a second connection portion length in the second direction. The first connection portion length is longer than the first gate main portion length. The second connection portion length is shorter than the second gate main portion length. An external connection section is to apply electric power to the gate electrode. A bypass electrode connects the external connection section to each of the connection portions.

Abstract: A semiconductor device includes first conductive lines extending in a first direction, second conductive lines extending in a second direction, memory cells disposed between the first conductive lines and the second conductive lines, each memory cell disposed at an intersection of a first conductive line and a second conductive line, and a passive material between the memory cells and at least one of the first conductive lines and the second conductive lines. Related semiconductor devices and electronic devices are disclosed.

Abstract: A method includes forming a transistor over a substrate, wherein the transistor includes a source, a drain over the source, a semiconductor channel between the source and the drain, and a gate surrounding the semiconductor channel. A silicide layer is formed over the drain of the transistor. A capping layer is formed over the silicide layer. Portions of the capping layer and the silicide layer are removed to define a drain pad over the drain of the transistor.

Abstract: It is an object of the present invention to provide a switch element and a load driving apparatus capable of suppressing a characteristic change of an on-resistance without lowering an off-breakdown voltage. The switching element includes a control electrode, an active element region, and an inactive element region, and the active element region and the inactive element region are formed adjacent to each other on the control electrode. Alternatively, in the load driving apparatus including a current driving switch element and a current detecting switch element that is connected in parallel to the load driving switch element and that detects an energization current of the load driving switch element, the current detecting switch element includes at least a control electrode, an active element region, and an inactive element region, and the active element region and the inactive element region are formed adjacent to each other on the control electrode.

Abstract: An organic EL (electroluminescent) device includes a translucent substrate, a transparent electrode, a luminescent layer, and a cathode placed over one surface of the translucent substrate, and a light extraction film having unevenness placed on the other surface. The surface of the cathode facing the luminescent layer has a plurality of recesses or protrusions. The Fourier transform image of the surface of the cathode facing the luminescent layer has a surface plasmon absorption suppression area including a spatial frequency v obtained from Eq. (I) and a light scattering area not including spatial frequencies equal to or greater than the spatial frequency v.

Abstract: An object of the present invention is to provide an organic EL display device having high luminance while maintaining an excellent effect of suppressing external light reflection.

Abstract: Techniques for integrating a self-aligned heterojunction for TFETs in a vertical GAA architecture are provided. In one aspect, a method of forming a vertical TFET device includes: forming a doped SiGe layer on a Si substrate; forming fins that extend through the doped SiGe layer and partway into the Si substrate such that each of the fins includes a doped SiGe portion disposed on a Si portion with a heterojunction therebetween, wherein the SiGe portion is a source and the Si portion is a channel; selectively forming oxide spacers, aligned with the heterojunction, along opposite sidewalls of only the doped SiGe portion; and forming a gate stack around the Si portion and doped SiGe that is self-aligned with the heterojunction. A vertical TFET device formed by the method is also provided.

Abstract: A semiconductor structure is provided which includes a nanosheet stack structure on a base. The nanosheet stack structure includes a multilayered nanosheet between adjacent nanosheet layers. The multilayered nanosheet includes one or more first layers of a first material and one or more second layers of a second material, wherein the first material has an etch selectivity different than the second material. The one or more first layers of the multilayered nanosheet are recessed. A first inner spacer includes a third material is formed by depositing the third material into an outer portion of the one or more recessed first layers of the multilayered nanosheet. The one or more second layers of the multilayered nanosheet are recessed. A second inner spacer includes a fourth material which is formed by depositing the fourth material into an outer portion of the one or more recessed second layers of the first multilayered nanosheet.

Abstract: In forming an ohmic electrode on a back surface of an n-type SiC substrate, an n+-type semiconductor region is formed in a surface layer of the back surface of an n-type epitaxial substrate by ion implantation. In this ion implantation, the impurity concentration of the n+-type semiconductor region is a predetermined range and preferably a predetermined value or less, and an n-type impurity is implanted by acceleration energy of a predetermined range such that the n+-type semiconductor region has a predetermined thickness or less. Thereafter, a nickel layer and a titanium layer are sequentially formed on the surface of the n+-type semiconductor region, the nickel layer is heat treated to form a silicide, and the ohmic electrode formed from nickel silicide is formed. In this manner, a back surface electrode that has favorable properties can be formed while peeling of the back surface electrode can be suppressed.

Abstract: A device and method for fabricating a photovoltaic device includes forming a double layer transparent conductive oxide on a transparent substrate. The double layer transparent conductive oxide includes forming a doped electrode layer on the substrate, and forming a buffer layer on the doped electrode layer. The buffer layer includes an undoped or p-type doped intrinsic form of a same material as the doped electrode layer. A light-absorbing semiconductor structure includes a p-type semiconductor layer on the buffer layer, an intrinsic layer and an n-type semiconductor layer.

Abstract: A first interconnect on an interconnect level connects a first subset of PMOS drains together of a CMOS device. A second interconnect on the interconnect level connects a second subset of the PMOS drains together. The second subset of the PMOS drains is different than the first subset of the PMOS drains. The first interconnect and the second interconnect are disconnected on the interconnect level. A third interconnect on the interconnect level connects a first subset of NMOS drains together of the CMOS device. A fourth interconnect on the interconnect level connects a second subset of the NMOS drains together. The second subset of the NMOS drains is different than the first subset of the NMOS drains. The third interconnect and the fourth interconnect are disconnected on the interconnect level. The first, second, third, and fourth interconnects are coupled together through at least one other interconnect level.

Abstract: A display device is disclosed, which includes: a first substrate having a first hole and a second hole; and a circuit layer disposed at one side of the first substrate, wherein the first hole has a first width, the second hole has a second width, and a ratio of the second width to the first width is within a range between 20 and 4000.

Abstract: A method of forming a vertical fin field effect device is provided. The method includes, forming a vertical fin on a substrate, forming a masking block on the vertical fin, wherein the masking block extends a distance outward from the vertical fin sidewalls and endwalls, and a portion of the substrate surrounding the masking block is exposed. The method further includes removing at least a portion of the exposed portion of the substrate to form a recess and a fin mesa below the vertical fin, removing a portion of the fin mesa to form an undercut recess below an overhanging portion of the masking block, forming a spacer layer on the masking block and in the undercut recess, and removing a portion of the spacer layer to form an undercut spacer in the undercut recess.

Abstract: A semiconductor device includes a first word line and a first bit line. The semiconductor device further includes a mold film disposed between the first word line and the first bit line, and a first memory cell disposed in the mold film. The first memory cell includes a first lower electrode in contact with the first word line. Side surfaces of the first lower electrode are in direct contact with the mold film. The first memory cell includes a first phase-change memory in contact with the first lower electrode, a first intermediate electrode in contact with the first phase-change memory, a first ovonic threshold switch (OTS) in contact with the first intermediate electrode, and a first upper electrode disposed between the first OTS and the first bit line, the first upper electrode in contact with the first OTS and the first bit line.

Abstract: A neuromorphic device is provided. The neuromorphic device may include a pre-synaptic neuron; a row line extending in a row direction from the pre-synaptic neuron; a post-synaptic neuron; a column line extending in a column direction from the post-synaptic neuron; and a synapse disposed at an intersection between the row line and the column line. The synapse may include a first synapse layer including a plurality of first carbon nano-tubes; a second synapse layer including a plurality of second carbon nano-tubes having different structures from the plurality of first carbon nano-tubes; and a third synapse layer including a plurality of third carbon nano-tubes having different structures from the plurality of first carbon nano-tubes and the plurality of second carbon nano-tubes.

Abstract: A substrate in which an insulating layer, a semiconductor layer and an insulating film are stacked on a semiconductor substrate and an element isolation region is embedded in a trench is prepared. After the insulating film in a bulk region is removed by dry etching and the semiconductor layer in the bulk region is removed by dry etching, the insulating layer in the bulk region is thinned by dry etching. A first semiconductor region is formed in the semiconductor substrate in a SOI region by ion implantation, and a second semiconductor region is formed in the semiconductor substrate in the bulk region by ion implantation. Then, the insulating film in the SOI region and the insulating layer in the bulk region are removed by wet etching. Thereafter, a first transistor is formed on the semiconductor layer in the SOI region and a second transistor is formed on the semiconductor substrate in the bulk region.

Abstract: In one aspect, methods of silicidation and germanidation are provided. In some embodiments, methods for forming metal silicide can include forming a non-oxide interface, such as germanium or solid antimony, over exposed silicon regions of a substrate. Metal oxide is formed over the interface layer. Annealing and reducing causes metal from the metal oxide to react with the underlying silicon and form metal silicide. Additionally, metal germanide can be formed by reduction of metal oxide over germanium, whether or not any underlying silicon is also silicided. In other embodiments, nickel is deposited directly and an interface layer is not used. In another aspect, methods of depositing nickel thin films by vapor phase deposition processes are provided. In some embodiments, nickel thin films are deposited by ALD. Nickel thin films can be used directly in silicidation and germanidation processes.