Patents Examined by Christopher Culbert
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Patent number: 10964687Abstract: A fin field effect transistor (FinFET) ESD device is disclosed. The device may include: a substrate; a silicon-controlled rectifier (SCR) over the substrate, the SCR including: a p-well region over the substrate; an n-well region laterally abutting the p-well region over the substrate; a first P+ doped region over the p-well region; a first N+ doped region over the p-well region; and a second N+ doped region over the p-well region; and a Schottky diode electrically coupled to the n-well region, wherein the Schottky diode spans the n-well region and the p-well region, and wherein the Schottky diode controls electrostatic discharge (ESD) between the second N+ doped region and the n-well region.Type: GrantFiled: February 8, 2017Date of Patent: March 30, 2021Assignee: GLOBALFOUNDRIES U.S. INC.Inventors: Chien-Hsin Lee, Mahadeva Iyer Natarajan, Manjunatha Prahbu
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Patent number: 10964796Abstract: According to a semiconductor device herein, the device includes a substrate. An active device is formed in the substrate. The active device includes a collector region, a base region formed on the collector region, and an emitter region formed on the base region. An isolation structure is formed in the substrate around the active device. A trench filled with a compressive material is formed in the substrate and positioned laterally adjacent to the emitter region and base region. The trench extends at least partially into the base region.Type: GrantFiled: February 8, 2017Date of Patent: March 30, 2021Assignee: GLOBALFOUNDRIES U.S. Inc.Inventors: Anthony K. Stamper, Vibhor Jain, Renata A. Camillo-Castillo
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Patent number: 10957754Abstract: A display device includes a display panel including a flexible region and a low flexibility region, wherein the flexible region may include a first transistor including a first semiconductor layer and a first gate electrode, a first conductor connected to the first semiconductor layer, and a first interlayer insulating layer between the first transistor and the first conductor. The low flexibility region may include a second transistor including a second semiconductor layer and a second gate electrode, a second conductor connected to the second semiconductor layer, and a second interlayer insulating layer between the second transistor and the second conductor. The first interlayer insulating layer may include an organic insulating material, the second interlayer insulating layer includes an inorganic insulating material, and a ratio of channel width to channel length of the first transistor may be different from that of the second transistor.Type: GrantFiled: February 24, 2017Date of Patent: March 23, 2021Assignee: Samsung Display Co., Ltd.Inventors: June Woo Lee, Shin Moon Kang, Byoung Ki Kim, Hee Kyung Kim, Hyun Chui Son, Yun-Mo Chung, Jae Beom Choi
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Patent number: 10926288Abstract: A coating sequence includes supplying a resist liquid onto a wafer under a condition that a liquid puddle of the resist liquid is formed at a central portion thereof; supplying, while rotating the wafer at a first rotation speed where the liquid puddle stays at an inner side than an edge of the wafer, a diluting liquid and moving a supply position of the diluting liquid from an outside of the liquid puddle to an edge portion thereof; moving, after the moving of the supply position from the outside to the edge portion, the supply position from the edge portion to the outside while continuously rotating the wafer at the first rotation speed; and rotating, after the moving of the supply position from the edge portion to the outside, the wafer at a rotation speed higher than the first rotation speed to diffuse the resist liquid toward the edge.Type: GrantFiled: June 25, 2018Date of Patent: February 23, 2021Assignee: TOKYO ELECTRON LIMITEDInventor: Teppei Takahashi
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Patent number: 10923399Abstract: A method for making a tri-gate FinFET and a dual-gate FinFET includes providing a semiconductor on insulator (SOI) wafer having a semiconductor layer over an insulator layer. The method further includes forming a hard mask on the semiconductor layer and patterning the hard mask to form first and second cap portions. The method also includes etching the semiconductor layer to form first and second fins using the first and second cap portions as an etch mask. The method also includes removing the second cap portion to expose the top surface of the second fin and forming a gate dielectric layer on the first and second fins. The method further includes forming a conductive layer over the gate dielectric layer, selectively etching the conductive layer to form first and second gate structures, forming an interlayer dielectric layer over the gate structures, and planarizing the interlayer dielectric layer using the first cap portion as a polish stop.Type: GrantFiled: January 31, 2018Date of Patent: February 16, 2021Assignee: Semiconductor Manufacturing International (Shanghai) CorporationInventors: Deyuan Xiao, Guo Qing Chen, Roger Lee
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Patent number: 10916724Abstract: The present specification relates to an organic light emitting device.Type: GrantFiled: March 17, 2017Date of Patent: February 9, 2021Inventors: Hyungjin Lee, Dongheon Kim, Nansra Heo, Dong Hoon Lee, Wonjoon Heo, Min Woo Jung
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Patent number: 10879082Abstract: An array of nanowires with a period smaller than 150 nm can be used for optoelectronics and semiconductor electronics applications. A hard nanomask is registered to a lithographically defined feature and can be used to manufacture such structures. This nanomask includes a substantially periodic array of substantially parallel elongated elements having a wavelike cross-section. The fabrication method of the nanomask may be contactless and uses ion beams.Type: GrantFiled: October 30, 2019Date of Patent: December 29, 2020Assignee: Wostec, Inc.Inventors: Valery K. Smirnov, Dmitry S. Kibalov
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Patent number: 10825883Abstract: An organic EL display device according to an embodiment of the present invention includes: an ITO layer divided and disposed in a region where a pixel opening is formed; a capacitance insulating film disposed on the ITO layer; a lower electrode disposed on the capacitance insulating film; an organic layer disposed on the lower electrode; an upper electrode disposed on the organic layer; and a planarizing member disposed so as to soften a step of a step part of the lower electrode.Type: GrantFiled: July 3, 2017Date of Patent: November 3, 2020Assignee: Japan Display Inc.Inventor: Naoki Tokuda
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Patent number: 10777649Abstract: A quantum nano-tip (QNT) thin film, such as a silicon nano-tip (SiNT) thin film, for flash memory cells is provided to increase erase speed. The QNT thin film includes a first dielectric layer and a second dielectric layer arranged over the first dielectric layer. Further, the QNT thin film includes QNTs arranged over the first dielectric layer and extending into the second dielectric layer. A ratio of height to width of the QNTs is greater than 50 percent. A QNT based flash memory cell and a method for manufacture a SiNT based flash memory cell are also provided.Type: GrantFiled: March 20, 2017Date of Patent: September 15, 2020Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Tsu-Hui Su, Chih-Ming Chen, Chia-Shiung Tsai, Chung-Yi Yu, Szu-Yu Wang
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Patent number: 10755945Abstract: A method includes forming a metal gate structure, wherein the metal gate structure includes a gate dielectric layer and a gate electrode; performing a surface treatment to a top surface of the metal gate structure, wherein the surface treatment converts a top portion of the gate electrode to an oxidation layer; forming a conductive layer above the gate electrode, wherein the forming of the conductive layer includes substituting oxygen in the oxidation layer with a metallic element; and forming a contact feature above the metal gate structure, wherein the contact feature is in direct contact with the conductive layer.Type: GrantFiled: July 16, 2018Date of Patent: August 25, 2020Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Pang-Sheng Chang, Yu-Feng Yin, Chao-Hsun Wang, Kuo-Yi Chao, Fu-Kai Yang, Mei-Yun Wang, Feng-Yu Chang, Chen-Yuan Kao, Chia-Yang Hung, Chia-Sheng Chang, Shu-Huei Suen, Jyu-Horng Shieh, Sheng-Liang Pan, Jack Kuo-Ping Kuo, Shao-Jyun Wu
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Patent number: 10741446Abstract: A method of wafer dicing includes singulating dies from a semiconductor wafer. The method further includes depositing a metal layer on back sides of the singulated dies, wherein a portion of the metal layer continues beyond the backs sides of the singulated dies to deposit at least partially on lateral sides of the singulated dies. A packaged die includes a semiconductor die and a metal outer layer deposited on the back side of the semiconductor die and on a portion of the lateral side of the semiconductor die nearest the back side. The packaged die further includes a substrate mounted to the back side of the semiconductor die a die attach material that bonds the substrate to the metal outer layer deposited on the semiconductor die, wherein the metal outer layer and the die attach material surround the back edge of the semiconductor die.Type: GrantFiled: July 5, 2017Date of Patent: August 11, 2020Assignee: NXP USA, Inc.Inventors: Jaynal A Molla, Lakshminarayan Viswanathan, David Abdo, Colby Greg Rampley, Fernando A. Santos
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Patent number: 10692866Abstract: Embodiments of the invention are directed to a method of fabricating a semiconductor device. A non-limiting example of the method including performing first fabrication operations to form nanosheet field effect transistor (FET) devices in a first region of a substrate. The first fabrication operations include forming a first channel nanosheet, forming a second channel nanosheet over the first channel nanosheet, forming a first gate structure around the first channel nanosheet, and forming a second gate structure around the second channel nanosheet, wherein an air gap is between the first gate structure and the second gate structure. A dopant is applied to the first gate structure and the second gate structure, wherein the dopant is configured to enter the air gap and penetrate into the first gate structure and the second gate structure from within the air gap.Type: GrantFiled: July 16, 2018Date of Patent: June 23, 2020Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATIONInventors: Takashi Ando, Jingyun Zhang, Choonghyun Lee, Pouya Hashemi, Alexander Reznicek
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Patent number: 10679904Abstract: A semiconductor structure containing a plurality of stacked vertical field effect transistor (FETs) is provided. After forming a first vertical FET of a first conductivity type at a lower portion of a semiconductor fin, a second vertical FET of a second conductivity type is formed on top of the first vertical FET. The second conductivity type can be opposite to, or the same as, the first conductivity type. A source/drain region of the first vertical FET is electrically connected to a source/drain region of the second vertical FET by a conductive strip structure.Type: GrantFiled: November 22, 2017Date of Patent: June 9, 2020Assignee: International Business Machines CorporationInventor: Effendi Leobandung
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Patent number: 10658027Abstract: A method of forming a memory device that includes forming on a substrate, a first insulation layer, a first conductive layer, a second insulation layer, a second conductive layer, a third insulation layer. First trenches are formed through third insulation layer, the second conductive layer, the second insulation layer and the first conductive layer, leaving side portions of the first conductive layer exposed. A fourth insulation layer is formed at the bottom of the first trenches that extends along the exposed portions of the first conductive layer. The first trenches are filled with conductive material. Second trenches are formed through the third insulation layer, the second conductive layer, the second insulation layer and the first conductive layer. Drain regions are formed in the substrate under the second trenches. A pair of memory cells results, with a single continuous channel region extending between drain regions for the pair of memory cells.Type: GrantFiled: January 20, 2016Date of Patent: May 19, 2020Assignee: Silicon Storage Technology, Inc.Inventors: Nhan Do, Xian Liu, Vipin Tiwari, Hieu Van Tran
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Patent number: 10622516Abstract: An epitaxial structure and a method for making the same are provided. The epitaxial structure includes a substrate, an epitaxial layer and a carbon nanotube layer. The epitaxial layer is located on the substrate. The carbon nanotube layer is located in the epitaxial layer. The method includes following. A substrate having an epitaxial growth surface is provided. A carbon nanotube layer is suspended above the epitaxial growth surface. An epitaxial layer is epitaxially grown from the epitaxial growth surface to enclose the carbon nanotube layer therein. The epitaxial layer is a substantially homogenous material from the substrate.Type: GrantFiled: November 1, 2018Date of Patent: April 14, 2020Assignees: Tsinghua University, HON HAI PRECISION INDUSTRY CO., LTD.Inventors: Yang Wei, Shou-Shan Fan
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Patent number: 10566462Abstract: A bipolar semiconductor device and method are provided. One embodiment provides a bipolar semiconductor device including a first semiconductor region of a first conductivity type having a first doping concentration, a second semiconductor region of a second conductivity type forming a pn-junction with the first semiconductor region, and a plurality of third semiconductor regions of the first conductivity type at least partially arranged in the first semiconductor region and having a doping concentration which is higher than the first doping concentration. Each of the third semiconductor regions is provided with at least one respective junction termination structure.Type: GrantFiled: July 30, 2009Date of Patent: February 18, 2020Assignee: Infineon Technologies Austria AGInventors: Hans-Joachim Schulze, Frank Pfirsch, Franz-Josef Niedernostheide
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Patent number: 10559584Abstract: A semiconductor device including a dielectric layer is provided. The semiconductor device includes a stack structure, and a vertical structure within the stack structure. The vertical structure includes a lower region having a first width and an upper region having a second width, greater than the first width. The vertical structure further includes two dielectric layers of which respective ratios of lower thicknesses in the lower region to upper thicknesses in the upper region are different from each other.Type: GrantFiled: February 7, 2017Date of Patent: February 11, 2020Assignee: Samsung Electronics Co., Ltd.Inventors: Eun Yeoung Choi, Bio Kim, Young Wan Kim, Jung Ho Kim, Young Seon Son, Jae Young Ahn, Byong Hyun Jang
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Patent number: 10546998Abstract: Some embodiments include constructions having electrically conductive bitlines within a stack of alternating electrically conductive wordline levels and electrically insulative levels. Cavities extend into the electrically conductive wordline levels, and phase change material is within the cavities. Some embodiments include methods of forming memory. An opening is formed through a stack of alternating electrically conductive levels and electrically insulative levels. Cavities are extended into the electrically conductive levels along the opening. Phase change material is formed within the cavities, and incorporated into vertically-stacked memory cells. An electrically conductive interconnect is formed within the opening, and is electrically coupled with a plurality of the vertically-stacked memory cells.Type: GrantFiled: February 5, 2013Date of Patent: January 28, 2020Assignee: Micron Technology, Inc.Inventor: John D. Hopkins
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Patent number: 10546999Abstract: A variable resistance memory device and a method of manufacturing the same, the device including first conductive lines disposed in a first direction on a substrate, each of the first conductive lines extending in a second direction crossing the first direction, and the first and second directions being parallel to a top surface of the substrate; second conductive lines disposed in the second direction over the first conductive lines, each of the second conductive lines extending in the first direction; a memory unit between the first and second conductive lines, the memory unit being in each area overlapping the first and second conductive lines in a third direction substantially perpendicular to the top surface of the substrate, and the memory unit including a variable resistance pattern; and an insulation layer structure between the first and second conductive lines, the insulation layer structure covering the memory unit and including an air gap in at least a portion of an area overlapping neither the firType: GrantFiled: November 9, 2016Date of Patent: January 28, 2020Assignee: SAMSUNG ELECTRONICS CO., LTD.Inventors: Masayuki Terai, Dae-Hwan Kang, Gwan-Hyeob Koh
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Patent number: 10522696Abstract: A semiconductor body of a first type of conductivity is formed including a base layer, a first further layer on the base layer and a second further layer on the first further layer. The base layer and the second further layer have an intrinsic doping or a doping concentration that is lower than the doping concentration of the first further layer. A doped region of an opposite second type of conductivity is arranged in the semiconductor body, penetrates the first further layer and extends into the base layer and into the second further layer. Anode and cathode terminals are electrically connected to the first further layer and the doped region, respectively. The doped region can be produced by filling a trench with doped polysilicon.Type: GrantFiled: October 11, 2018Date of Patent: December 31, 2019Assignee: ams AGInventors: Jordi Teva, Frederic Roger