Abstract: Provided is a spin-polarized scanning electron microscope capable of improving an SNR of a detected signal. The spin-polarized scanning electron microscope includes: a spin-polarized electron source configured to irradiate a sample with a spin-polarized electron beam that is an electron beam whose spin is deflected in a specific direction; a scanning unit configured to scan the sample by deflecting the spin-polarized electron beam; a spin detector configured to detect a spin direction of an emitted electron that is an electron emitted from the sample scanned with the spin-polarized electron beam; and a control unit configured to control the spin direction to be detected by the spin detector based on the spin direction of the spin-polarized electron beam.

Abstract: An inverse-planning method (100), by which a treatment plan specifying a non-photon irradiation of a patient including a target volume is generated, comprises: obtaining (110, 112) first and second plan goals in terms of a respective first and second numerical condition on the treatment plan's photon-equivalent dose as computed using a first and second RBE factor; and generating (114) the treatment plan by an optimization process aiming to satisfy the first, second and any further plan goals, wherein (a) the first and second plan goals apply to volumes which either are included in the TV or are completely or partially separate from the TV and/or (b) the first and second RBE factors are variable. In a further aspect, a data carrier provides a treatment plan with these characteristics together with reporting quantities relating to fulfilment of the first and second plan goals.

Abstract: Disclosed herein is an electron-optical assembly for an electron-optical column for projecting a charged particle beam along a beam path towards a target, the electron-optical assembly comprising: electromagnetic shielding surrounding the charged particle beam path and configured to shield the charged particle beam from an electromagnetic field external to the electromagnetic shielding; wherein the electromagnetic shielding comprises a plurality of sections extending along different positions along the beam path, each section surrounding the charged particle beam, wherein the sections are separable.

Abstract: An imaging device for reducing a processing load of signal processing using two images of different wavelengths, and a method of operating the imaging device. The phases of two incident light beams having different wavelengths are matched, the two incident light beams are polarized into the same polarization direction, a wavelength of one incident light beam of the two types of polarized incident light beams is matched with a wavelength of the other incident light beam, a phase difference is adjusted such that the phase difference between the one incident light beam and the other incident light beam is ?, the two types of incident light beams being matched with the wavelength of the one incident light beam, and an imaging element simultaneously receives the two types of incident light beams adjusted such that the phase difference is ?, thereby, optically acquiring the subtraction results of two types of power.

Abstract: In an overlay measurement method, an overlay mark having programmed overlay values is provided. The overlay mark is scanned with an electron beam to obtain a voltage contrast image. A defect function that changes according to the overlay value is obtained from voltage contrast image data. Self-cross correlation is performed on the defect function to determine an overlay.

Abstract: A process for charge detection mass spectrometry includes acquiring a time-varying signal representative of a current induced on a detector by oscillatory motion of an ion within a trapping region; processing the time-varying signal to derive a frequency of the oscillatory motion; generating, based on the amplitude of the time-varying signal and the derived frequency of the oscillatory motion, Selective Temporal Overview of Resonant Ion (STORI) data representing STORIreal values versus time and STORIimag values versus time; regenerating the STORI data based on a variation of the frequency of the oscillatory motion over time; and determining a charge state of the ion based on the regenerated STORI data.

Abstract: Analytical instruments comprise an RF generator, first and second transformers having respective primary and secondary windings, and first and second ion optical devices. The secondary winding of the first transformer and the first ion optical device form a primary LC circuit with a first resonant frequency corresponding to a first frequency generated by the RF generator. The secondary winding of the second transformer and the second ion optical device form a secondary LC circuit with a second resonant frequency. At least part of the secondary LC circuit has a variable inductance that varies based on an output of a phase difference detector such that the second resonant frequency varies in dependence on a magnitude of an output of the phase difference detector.

Abstract: A method and an apparatus are provided for Electron Beam (EB) curing of coils that are coated with energy cured resins. The apparatus comprises a curing assembly, a microprocessor unit, one or more sensors, and a user interface. The curing assembly comprises of a fixed part and a movable part. The fixed part comprises a rotator and a first moving means. The movable part comprises of an accelerator. The fixed part and the movable part are movably coupled to each other using a coupler. The coupler is configured to move using a second moving means. The curing assembly is communicatively coupled to the microprocessor unit. The coil comes at the input gate at the fixed part of the curing assembly for the curing purposes and exits through the output gate at the fixed part of the apparatus after being cured.

Abstract: An electron beam application apparatus includes: an optical system configured to irradiate a sample with excitation light; an electron optical system configured to project, onto a camera, a photoelectron image formed by photoelectrons emitted from the sample irradiated with the excitation light; and a control unit. The optical system includes a light source configured to generate the excitation light and a pattern forming unit. The excitation light forms an optical pattern on a surface of the sample when the pattern forming unit is turned on, and the excitation light is emitted to the sample without forming the optical pattern on the surface of the sample when the pattern forming unit is turned off. The control unit adjusts the electron optical system based on feature data of a bright and dark pattern formed by the optical pattern in the photoelectron image obtained by turning on the pattern forming unit.

Abstract: A combined ion discharge tube and an ion guide system is disclosed. The ion discharge tube comprises of a cathode tube and an anode surface. The discharge tube acts as the cathode, whereas the anode can be any number of different configurations. In one embodiment the discharge tube is set inside a quadrupole ion guide, with the walls of the ion guide being the anode. In other embodiments, the discharge tube is placed inside the rods of the quadrupole and the inner walls of the rods or a separate plate acting as the anode. In all configurations, the ions are formed by the discharge tube and are introduced into the RF confinement of an ion guide to increase ion transfer efficiency.

Abstract: A system and method for using cold atmospheric plasma to treat an air flow to inactivate viruses and sterilize the air flow. The system comprises a source of a carrier gas, a humidifier connected to said source of a carrier gas, a source of a feed gas, a plasma generator configured to plasmatize said carrier gas into a plasma; and a mixer having an interior chamber, an active electrode inside said interior chamber and connected to an electrical output of said plasma generator, an outer electrode connected to a ground and a dielectric barrier between said inner electrode and said outer electrode, wherein said mixer has a first fluid input port connected to said source of a carrier gas, a second fluid input connected to said source of a feed gas and a fluid output connected to a ventilation system.

Abstract: A fiber optic plate 122 including a plurality of core glasses 122a, a clad glass 122b covering the core glass 122a, and a light-absorbing glass 122c disposed between the plurality of core glasses 122a, wherein a content of TiO2 in the core glass 122a is 7% by mass or less, a content of B2O3 in the core glass 122a is 15% by mass or more, and a content of WO3 in the core glass 122a is more than 0% by mass.

Abstract: A method for characterising an isolation profile of a mass spectrometer includes obtaining data of an, or at least one ion species transmitted by a mass spectrometer forming an isolation profile of the mass spectrometer; normalizing the obtained data; providing the normalized data to a deep neural network trained using a plurality of previous isolation profiles; generating from the deep neural network a set of fit parameters of a curve representing a fit to the normalized data; and providing as an output, data representing the curve. The method may be used as part of a calibration procedure for the mass spectrometer.

Abstract: An electron beam irradiation device (1) irradiates an electron beam from an electrode (12) that is connected to a tip of a conductive part (21) which projects inside a vacuum container (11), to the exterior of the vacuum container (11) via a metal foil (111) that constitutes a portion of a peripheral wall of the vacuum container (11). The electron beam irradiation device (1) includes a tubular insulator (22) that surrounds the periphery of the conductive part (21) in the vacuum container (11), and an amorphous carbon film (23) that covers the outer peripheral surface of the insulator (22).

Abstract: A charged particle guide includes a plurality of electrically conductive segments radially spaced apart from one another about an opening defined axially through the segments, wherein the opening defines a central axis passing centrally and axially therethrough such that charged particles are received at one end of the opening and pass through an opposite end of the opening, at least one voltage source configured to produce and supply separate voltages to each of the segments, and at least one control circuit configured to control supply of selected voltages to the segments to create an electric field within the opening configured to cause charged particles entering the one end of the opening along a first axial path relative to the central axis to exit the opposite end of the opening along a second axial path relative to the central axis, wherein the first and second axial paths are not collinear.

Abstract: A detector substrate (or detector array) for use in a charged particle multi-beam assessment tool to detect charged particles from a sample. The detector substrate defines an array of apertures for beam paths of respective charged particle beams of a multi-beam. The detector substrate includes a sensor unit array. A sensor unit of the sensor unit array is adjacent to a corresponding aperture of the aperture array. The sensor unit is configured to capture charged particles from the sample. The detector array may include an amplification circuit associated with each sensor unit in the sensor unit array and proximate to the corresponding aperture in the aperture array. The amplification circuit may include a Trans Impedance Amplifier and/or an analogue to digital converter.

Abstract: A physical package is provided with: a MOT device; an optical chamber which constitutes an optical lattice formation portion; and a vacuum chamber which surrounds these components and has a substantially cylindrical shape. The MOT device is arranged along the beam axis of an atomic beam and traps an atom cluster. The optical lattice formation portion uses optical lattice light that enters therein to form an optical lattice in a cavity, confines the atom cluster trapped by the MOT device in the optical lattice, and transfers, along the X-axis which is a movement axis perpendicular to the beam axis, the atom cluster to a clock transition space which facilitates clock transition. The central axis of the cylinder of the main body of the vacuum chamber passes through the clock transition space, and is set to be substantially parallel with the beam axis.

Abstract: A fine-adjustable charged particle lens comprises a magnetic circuit assembly including permanent magnets and a yoke body, surrounding a beam passage extending along the longitudinal axis. The permanent magnet is arranged between an inner yoke component and an outer yoke component so as to form a magnetic circuit having at least two gaps, generating a magnetic field reaching inwards into the beam passage, into which a sleeve insert having electrostatic electrodes can be inserted, which may also generate an electric field spatially overlapping said magnetic field. In order to modify the magnetic flux and thus the magnetic field in the gaps, a thermal control element located in the yoke body introduces or extracts heat to or from components of the of the magnetic circuit assembly so as to thermally control or modulate the magnetic behavior of said components.

Abstract: Disclosed herein are systems and methods for sorting ions including a group of multipole electrodes configured to form an ion trap, and an ion guide adjacent to, and operably coupled to the group of multipole electrodes. Using a radio frequency (RF) or Direct Current (CD) power supply device the system can apply an RF voltage to the group of multipole electrodes thereby creating a pseudo-potential barrier. A DC gradient voltage may then be applied creating an axial field in opposition to the pseudo-potential barrier. As the DC voltage is raised and/or the RF voltage is lowered, one or more ions will be eluted through the barrier.

Abstract: A manipulator for manipulating a charged particle beam in a projection system, the manipulator comprising a substrate having opposing major surfaces in each of which is defined an aperture and a through-passage having an interconnecting surface extending between the apertures; wherein the interconnecting surface comprises one or more electrodes; the manipulator further comprising a potential divider comprising two or more resistive elements connected in series, the potential divider comprising an intermediate node between each pair of adjacent resistive elements, wherein at least one resistive element is formed within the substrate so as to extend between the opposing major surfaces; wherein the intermediate node is electrically connected to at least one of the one or more electrodes.