Patents Examined by David E Smith
  • Patent number: 10842011
    Abstract: An extreme ultraviolet light generation system includes: a first area including an optical path adjustment unit; a second area including a chamber having inside a plasma generating region; a first interlock switch disposed in the first area; a second interlock switch disposed in the second area; and a control unit capable of performing switching among a first setting state in which monitoring of a sensing signal output from the first interlock switch and a sensing signal output from the second interlock switch is activated, a second setting state in which monitoring of a sensing signal output from the first interlock switch and a sensing signal output from the second interlock switch is deactivated, and a third setting state in which monitoring of a sensing signal output from the first interlock switch is activated and monitoring of a sensing signal output from the second interlock switch is deactivated.
    Type: Grant
    Filed: October 10, 2019
    Date of Patent: November 17, 2020
    Assignee: Gigaphoton Inc.
    Inventor: Kengo Hayashi
  • Patent number: 10840055
    Abstract: A high-brightness electron beam source is disclosed. The electron beam source may include a broadband illumination source configured to generate broadband illumination. A tunable spectral filter may be configured to filter the broadband illumination to provide filtered illumination having an excitation spectrum. The electron beam source may further include a photocathode configured to emit one or more electron beams in response to the filtered illumination, wherein emission from the photocathode is adjustable based on the excitation spectrum of the filtered illumination from the tunable spectral filter.
    Type: Grant
    Filed: January 16, 2019
    Date of Patent: November 17, 2020
    Assignee: KLA Corporation
    Inventors: Gildardo Delgado, Katerina Ioakeimidi, Frances A. Hill, Rudy F. Garcia, Mike Romero, Zefram Marks, Gary V. Lopez Lopez
  • Patent number: 10840058
    Abstract: An aberration measurement method for an objective lens in an electron microscope including an objective lens which focuses an electron beam that illuminates a specimen, and a detector which detects an electron beam having passed through the specimen, includes: introducing a coma aberration to the objective lens; measuring an aberration of the objective lens before introducing the coma aberration to the objective lens; measuring an aberration of the objective lens after introducing the coma aberration to the objective lens; and obtaining a position of an optical axis of the objective lens on a detector plane of the detector based on measurement results of the aberration of the objective lens before and after introducing the coma aberration.
    Type: Grant
    Filed: August 23, 2018
    Date of Patent: November 17, 2020
    Assignee: JEOL Ltd.
    Inventors: Yuji Kohno, Akiho Nakamura
  • Patent number: 10827815
    Abstract: Embodiments disclosed herein relate to a miniature, multiple-angle accessible nail gel curing lamp that minimizes the size of a light exposure area, while at the same time providing access to the light exposure area for a customer's hand, and both of technician's hands. This lamp is particularly useful for performing the “gel-press on” technique of applying artificial nails with a UV-curable nail gel.
    Type: Grant
    Filed: June 5, 2020
    Date of Patent: November 10, 2020
    Assignee: Glam and Glits Nail Design, Inc.
    Inventors: Ana Katrina Tan, Khoa Duong
  • Patent number: 10832900
    Abstract: A mass filter is disclosed having at least one electrode (42-48) comprising an aperture (43) or recess. Voltages are applied to the electrodes (42-48) of the mass filter such that ions having mass to charge ratios in a desired range are confined by the electrodes and are transmitted along and through the mass filter, whereas ions (47,49) having mass to charge ratios outside of said desired range are unstable and pass into the aperture (43) or recess such that they are filtered out by the mass filter. The aperture (43) or recess reduces or eliminates the number of ions that would otherwise impact the electrode surface facing the ion transmission axis and hence reduces degradation of the ion transmission properties of the mass filter.
    Type: Grant
    Filed: September 6, 2019
    Date of Patent: November 10, 2020
    Assignee: Micromass UK Limited
    Inventors: Martin Green, Jason Wildgoose, Keith Richardson, Kevin Giles, Daniel Kenny, David Langridge, Richard Moulds
  • Patent number: 10830418
    Abstract: A housing assembly for an illumination source such as a UV light where there is an enclosure formed by first and second releasably mateable housing shells and a bracket having a web, and first and second laterally extending flanges, the bracket being releasably connectable to said enclosure via the flanges, the enclosure having limited rotation relative to said bracket.
    Type: Grant
    Filed: January 31, 2019
    Date of Patent: November 10, 2020
    Inventors: Jeremy Goza, Jonathan Goza, Michael Murphy
  • Patent number: 10832890
    Abstract: To automatically repeat an operation of isolating a sample piece, which is formed by processing a sample with an ion beam, and transferring the sample piece to a sample piece holder, a charged particle beam device includes a computer configured to perform control so that, without rotating a needle with which the sample piece is fixed to the sample piece holder, a deposition film deposited on the needle is irradiated with a charged particle beam from a charged particle beam irradiation optical system.
    Type: Grant
    Filed: March 26, 2019
    Date of Patent: November 10, 2020
    Assignee: HITACHI HIGH-TECH SCIENCE CORPORATION
    Inventors: Masato Suzuki, Satoshi Tomimatsu, Makoto Sato, Tatsuya Asahata
  • Patent number: 10825671
    Abstract: A method of mass spectrometry is disclosed comprising digitising a signal output from a detector to provide a first digitised signal. A finite impulse response (“FIR”) filter, a digital filter or an echo cancellation filter is applied to the first digitised signal in order to reduce the effect of baseline perturbations, echoes or ringing effects. Alternatively, an analogue signal output from a detector is passed to one or more first power splitters or dividers, wherein one or more first transmission lines are attached to one or more ports of one more said first power splitters or dividers in order to reduce the effect of baseline perturbations, echoes or ringing effects.
    Type: Grant
    Filed: May 24, 2019
    Date of Patent: November 3, 2020
    Assignee: Micromass UK Limited
    Inventors: Martin Raymond Green, Frank Buckley, Garry Michael Scott, Anthony Gilbert
  • Patent number: 10822230
    Abstract: Systems, methods and tools for the synthesis of products via mechanosynthesis are disclosed, including a set of atomically-precise tips and associated reactions, methods for determining build sequences for workpieces, exemplary build sequences, and methods for creating new reactions, build sequences, and tips.
    Type: Grant
    Filed: April 16, 2019
    Date of Patent: November 3, 2020
    Assignee: CBN Nano Technologies Inc.
    Inventors: Robert A. Freitas, Jr., Ralph C. Merkle
  • Patent number: 10825646
    Abstract: A positioning system can include a guide, a carrier element configured to engage and convey a workpiece, a motor having a mover element, a restraint coupled to the carrier element, and an actuator disposed between the restraint and the carrier element. The guide can be movable relative to a horizontal reference plane such that the carrier element coupled to the guide is inclined with respect to the horizontal reference plane. At least the mover element of the motor can be coupled to the carrier element and can be configured to move the carrier element along the guide. The restraint can be configured to selectively engage the guide to restrain movement of the carrier element in at least one direction along the guide when the guide is inclined out of the horizontal reference plane. The actuator can be configured to displace the carrier element relative to the restraint along the guide when the restraint is engaged with the guide.
    Type: Grant
    Filed: March 28, 2019
    Date of Patent: November 3, 2020
    Assignee: FEI Company
    Inventor: Graham LeGrove
  • Patent number: 10825647
    Abstract: A method of using a Transmission Charged Particle Microscope, comprising: Providing a specimen on a specimen holder; Using an illumination system to direct a beam of charged particles from a source onto said specimen; Using an imaging system to direct charged particles that are transmitted through the specimen onto a detector, further comprising the following actions: In an acquisition step, lasting a time interval T, using said detector in particle counting mode to register spatiotemporal data relating to individual particle detection incidences, and to output said spatiotemporal data in raw form, without assembly into an image frame; In a subsequent rendering step, assembling a final image from said spatiotemporal data, while performing a mathematical correction operation.
    Type: Grant
    Filed: January 23, 2019
    Date of Patent: November 3, 2020
    Assignee: FEI Company
    Inventors: Bart Jozef Janssen, Lingbo Yu, Erik Michiel Franken
  • Patent number: 10825667
    Abstract: Systems and methods are used to analyze a sample using variable mass selection window widths. A tandem mass spectrometer is instructed to perform at least two fragmentation scans of a sample with different mass selection window widths using a processor. The tandem mass spectrometer includes a mass analyzer that allows variable mass selection window widths. The selection of the different mass selection window widths can be based on one or more properties of sample compounds. The properties may include a sample compound molecular weight distribution that is calculated from a molecular weight distribution of expected compounds or is determined from a list of molecular weights for one or more known compounds. The tandem mass spectrometer can also be instructed to perform an analysis of the sample before instructing the tandem mass spectrometer to perform the at least two fragmentation scans of the sample.
    Type: Grant
    Filed: August 13, 2018
    Date of Patent: November 3, 2020
    Assignee: DH Technologies Development Pte. Ltd.
    Inventors: Ronald F. Bonner, Stephen A. Tate
  • Patent number: 10818470
    Abstract: A charged particle beam device includes a deflection unit that deflects a charged particle beam released from a charged particle source to irradiate a sample, a reflection plate that reflects secondary electrons generated from the sample, and a control unit that controls the deflection unit based on an image generated by detecting the secondary electrons reflected from the reflection plate. The deflection unit includes an electromagnetic deflection unit that electromagnetically scans with the charged particle beam by a magnetic field and an electrostatic deflection unit that electrostatically scans with the charged particle beam by an electric field. The control unit controls the electromagnetic deflection unit and the electrostatic deflection unit, superimposes an electromagnetic deflection vector generated by the electromagnetic scanning and an electrostatic deflection vector generated by the electrostatic scanning, and controls at least a trajectory of the charged particle beam.
    Type: Grant
    Filed: March 6, 2017
    Date of Patent: October 27, 2020
    Assignee: HITACHI HIGH-TECH CORPORATION
    Inventors: Kazuki Ikeda, Wen Li, Takuma Nishimoto, Hiroyuki Takahashi, Wataru Mori, Makoto Suzuki, Hajime Kawano
  • Patent number: 10811243
    Abstract: Disclosed herein is an ion supply system, having an ion source emitting ions into a fore vacuum chamber, an ion transport device having stacked electrodes arranged in the fore vacuum chamber, a control system supplying an oscillatory voltage to the electrodes of the ion transport device and a vacuum chamber, arranged downstream from the ion transport device. A vacuum gauge is arranged in the vacuum chamber. The pressure signal of the vacuum gauge is supplied to the control system supplying the oscillatory voltage to electrodes of the ion transport device. The control system adjusts the amplitude of the oscillatory voltage in accordance with the pressure signal.
    Type: Grant
    Filed: December 19, 2018
    Date of Patent: October 20, 2020
    Assignee: Thermo Fisher Scientific (Bremen) GMBH
    Inventors: Amelia Corinne Peterson, Denis Chernyshev, Jan-Peter Hauschild, Erik Couzijn
  • Patent number: 10811221
    Abstract: Systems and devices for improving the efficiency of secondary electron detection in charged particle beam systems include a charged particle detector, a first elongate member coupled with the charged particle detector, and a second elongate member coupled with the charged particle detector. The first elongate member and the second elongate member each extend away from the charged particle detector. The system also includes at least one drawing member that is coupled with the first elongate member. Additionally, at least one electrical connection point is arranged to supply at least one bias voltage to the first elongate member, the second elongate member, and the drawing member. The drawing member is configured to generate an electromagnetic field that applies a drawing force that draws charged particles away from the charged particle source, and/or reduces the amount of charged particles from the charged particle source that strike the charged particle tool.
    Type: Grant
    Filed: March 29, 2019
    Date of Patent: October 20, 2020
    Assignee: FEI Company
    Inventors: Qinsong Steve Wang, Jim McGinn, Peter Tvaro{hacek over (z)}ek, Amir Weiss
  • Patent number: 10813206
    Abstract: An extreme ultraviolet light generation apparatus includes: A. a chamber in which extreme ultraviolet light is generated by a target substance being irradiated with a laser beam to generate plasma from the target substance; B. a vessel as a tubular member forming the chamber; C. a reference member supporting the vessel; D. a collector mirror configured to condense the extreme ultraviolet light in the chamber, the collector mirror being attached to the reference member in a replaceable manner and covered by the vessel to be housed in the chamber; and E. a vessel movement mechanism provided to the reference member and configured to move the vessel between a first position at which the vessel covers the collector mirror and a second position at which the vessel is retracted from the first position to expose the collector mirror.
    Type: Grant
    Filed: November 4, 2019
    Date of Patent: October 20, 2020
    Assignee: Gigaphoton Inc.
    Inventor: Osamu Fukuda
  • Patent number: 10804073
    Abstract: An apparatus and method for a large-scale high-throughput quantitative characterization and three-dimensional reconstruction of a material structure. The apparatus having a glow discharge sputtering unit, a sample transfer device, a scanning electron microscope unit and a GPU computer workstation. The glow discharge sputtering unit can achieve large size (cm order), nearly flat and fast sample preparation, and controllable achieve layer-by-layer ablation preparation along the depth direction of the sample surface; rapid scanning electron microscopy (SEM) can achieve large-scale and high-throughput acquisition of sample characteristic maps. The sample transfer device is responsible for transferring the sample between the glow discharge sputtering source and the scanning electron microscope in an accurately positioning manner.
    Type: Grant
    Filed: October 30, 2019
    Date of Patent: October 13, 2020
    Assignee: THE NCS TESTING TECHNOLOGY CO., LTD.
    Inventors: Haizhou Wang, Xing Yu, Xuejing Shen, Yunhai Jia, Xiaojia Li, Yuhua Lu, Weihao Wan, Jianqiu Luo, Dongling Li, Lei Zhao
  • Patent number: 10793236
    Abstract: The invention provides an object (10) that during use is at least partly submerged in water, the object (10) further comprising an anti-biofouling system (200) comprising an UV emitting element (210), wherein the UV emitting element (210) is configured to irradiate with UV radiation (221) during an irradiation stage one or more of (i) a part (111) of an external surface (11) of said object (10) and (ii) water adjacent to said part (111) of said external surface (11), wherein the light source (220) is at least controllable between a first UV radiation level and a second UV radiation level, wherein the first UV radiation level is larger than the second UV radiation level, wherein the object (10) is selected from the group consisting of a vessel (1) and an infrastructural object (15), wherein the object (10) further comprises a control system (300) configured to control said UV radiation (221) as function of input information comprising information of one or more of (i) a location of the object (10), (ii) moveme
    Type: Grant
    Filed: January 16, 2019
    Date of Patent: October 6, 2020
    Assignee: Koninklijke Philips N.V.
    Inventors: Bart Andre Salters, Roelant Boudewijn Hietbrink
  • Patent number: 10794585
    Abstract: A light source unit disclosed in an embodiment includes a first cover which has an open region; a second cover which is coupled to the first cover; a light source module which is disposed between the first cover and the second cover, and has a light-emitting device disposed on the open region and a circuit board on which the light-emitting device is disposed; a fixing frame which is disposed between the second cover and the circuit board; and a resin member which is filled in an region between the first cover and the second cover and supports the light source module and the fixing frame. The light source module includes a moisture-proof film which covers an upper surface and side surfaces of the light-emitting device and extends to an upper surface of the circuit board.
    Type: Grant
    Filed: February 28, 2019
    Date of Patent: October 6, 2020
    Assignee: LG INNOTEK CO., LTD.
    Inventors: Do Hwan Kim, Jae Jin Kim
  • Patent number: 10796893
    Abstract: RF ion guides are configured as an array of elongate electrodes arranged symmetrically about a central axis, to which RF voltages are applied. The RF electrodes include at least a portion of their length that is semi-transparent to electric fields. Auxiliary electrodes are then provided proximal to the RF electrodes distal to the ion guide axis, such that application of DC voltages to the auxiliary electrodes causes an auxiliary electric field to form between the auxiliary electrodes and the ion guide RF electrodes. A portion of this auxiliary electric field penetrates through the semi-transparent portions of the RF electrodes, such that the potentials within the ion guide are modified. The auxiliary electrode structures and voltages can be configured so that a potential gradient develops along the ion guide axis due to this field penetration, which provides an axial motive force for collision damped ions.
    Type: Grant
    Filed: October 3, 2019
    Date of Patent: October 6, 2020
    Assignee: PerkinElmer Health Sciences, Inc.
    Inventor: David G. Welkie