Patents Examined by David E Smith
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Patent number: 12154763Abstract: An ion source has an arc chamber defining an arc chamber volume. A reservoir is coupled to the arc chamber, defining a reservoir volume. The reservoir receives a source species to define a liquid within the reservoir volume. A conduit fluidly couples the reservoir volume to the arc chamber volume. First and second openings of the conduit are open to the respective reservoir and arc chamber volume. A heat source selectively heats the reservoir to melt the source species at a predetermined temperature. A liquid control apparatus controls a first volume of the liquid within the reservoir volume to define a predetermined supply of the liquid to the arc chamber volume. The liquid control apparatus is a pressurized gas source fluidly coupled to the reservoir to supply a gas to the reservoir and provide a predetermined amount of liquid to the arc chamber.Type: GrantFiled: June 16, 2023Date of Patent: November 26, 2024Assignee: Axcelis Technologies, Inc.Inventors: Neil J. Bassom, Joshua Abeshaus, David Sporleder, Neil Colvin, Joseph Valinski, Michael Cristoforo, Vladimir Romanov, Pradeepa Kowrikan Subrahmnya
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Patent number: 12153017Abstract: There is provided a gas analyzer apparatus that analyzes inflowing sample gas. The gas analyzer apparatus includes a filter unit that filters the sample gas, a detector unit that detects the result of filtering, a housing that houses these elements, and a control unit that controls the respective potentials of these elements. The control unit includes a cleaning control unit that sets the respective potentials of the filter unit, the detector unit, and the housing to cleaning potentials that draws in, as plasma for cleaning purposes, process plasma from a source that supplies the sample gas or plasma generated by a plasma generation unit.Type: GrantFiled: March 30, 2022Date of Patent: November 26, 2024Assignee: ATONARP INC.Inventors: Naoki Takahashi, Prakash Sreedhar Murthy
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Patent number: 12154756Abstract: A multi-beam pattern definition device for use in a particle-beam processing or inspection apparatus, which is irradiated with a beam of electrically charged particles through a plurality of apertures to form corresponding beamlets, comprises an aperture array device in which said apertures are realized according to several sets of apertures arranged in respective aperture arrangements, and an absorber array device having openings configured for the passage of at least a subset of beamlets that are formed by the apertures. The absorber array device comprises openings corresponding to one of the aperture arrangement sets, whereas it includes a charged-particle absorbing structure comprising absorbing regions surrounded by elevated regions and configured to absorb charged particles impinging thereupon at locations corresponding to apertures of the other aperture arrangements of the aperture array device, effectively confining the effects of irradiated particles and electric charge therein.Type: GrantFiled: July 22, 2022Date of Patent: November 26, 2024Assignee: IMS Nanofabrication GmbHInventors: Elmar Platzgummer, Stefan Eder-Kapl
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Patent number: 12151039Abstract: A sanitation device includes a housing with a channel extending into the housing and a plurality of openings in the channel. A plurality of light emitting diodes emit light through the openings in the channel. A shield is coupled to the housing and a motion sensor emits and detect light through the shield when activated, such that the shield narrows a field of view of the motion sensor. The sanitation device is positioned near a common touch point with the motion sensor determining when an object is near, and has moved away from, the touch point. The plurality of light emitting diodes are activated to clean the touch point after the object moves away. The sanitation device may further include a status indicator light to provide information regarding the current state of operation of the sanitation device.Type: GrantFiled: June 10, 2022Date of Patent: November 26, 2024Assignee: Handle Halo LLCInventors: Travis Henderson, Colin Jacob Miller, Justin Matthew Knowles, Timothy Mark Christman
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Patent number: 12150233Abstract: A target substance replenishment device may include a first container containing a solid target substance, a first path through which the solid target substance supplied from the first container passes, a first supply switching device switching between a first state where supply of the solid target substance from the first container to the first path is suppressed and a second state where the supply of the solid target substance from the first container to the first path is allowed, a first valve connected to the first path, a second path which is connected to the first valve and through which the solid target substance having passed through the first valve passes, a first detector outputting a first detection signal indicating that the second path is clogged with the solid target substance, and a processor controlling the first supply switching device to the first state based on the first detection signal.Type: GrantFiled: June 2, 2022Date of Patent: November 19, 2024Assignee: Gigaphoton Inc.Inventors: Yutaka Shiraishi, Hideki Shishiba
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Patent number: 12148605Abstract: A method of operating a collision cell (10) in a mass spectrometer is disclosed. The collision cell comprises an entrance aperture (116), an exit aperture (117) and electrodes (113, 114) for producing electric fields. The method comprises feeding ions in a forward axial direction (LD) through the entrance aperture into the collision cell, producing a first electric field to trap ions, and subsequently producing a second electric field to accelerate trapped ions in the forward axial direction. The method further comprises producing a gas flow (G1) which is, at least at the entrance aperture (116) of the collision cell, contrary to the forward axial direction (LD), so as to reduce the kinetic energy of ions in dependence on their collisional cross sections. A collision cell arranged for carrying out the method is also disclosed, as well as a mass spectrometer comprising such a collision cell.Type: GrantFiled: March 26, 2020Date of Patent: November 19, 2024Assignee: Thermo Fisher Scientific (Bremen) GmbHInventors: Mikhail Belov, Lothar Rottman
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Patent number: 12148603Abstract: A tuning system may acquire, from a mass spectrometer during a batch of one or more analytical runs performed with the mass spectrometer, tune data associated with an operating characteristic of the mass spectrometer. The tuning system may determine, based on the tune data, a value of an operating parameter configured to adjust the operating characteristic of the mass spectrometer and set the operating parameter to the determined value.Type: GrantFiled: March 2, 2022Date of Patent: November 19, 2024Assignee: Thermo Finnigan LLCInventors: Scott T. Quarmby, Giacinto Zilioli, Charles H. Vogt, Dustin J. Kreft, Nathaniel L. Sanders, George B. Guckenberger, John G. Voss
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Self-differential confocal tilt sensor for measuring level variation in charged particle beam system
Patent number: 12142456Abstract: A sensor may be used to measure a degree of tilt of a sample. The sensor may include an apparatus having a light source, first, second, and third optical elements, a lens, and an aperture. The first optical element may supply light from the light source toward the sample, and may supply light input into the first optical element from the sample toward the second optical element. The second optical element may supply light toward first and second sensing elements. An aperture may be arranged on a focal plane of the lens. A light beam incident on the first sensing element may be a reference beam.Type: GrantFiled: August 20, 2020Date of Patent: November 12, 2024Assignee: ASML NETHERLANDS B.V.Inventors: Jinmei Yang, Jian Zhang, Zhiwen Kang, Yixiang Wang -
Patent number: 12133938Abstract: An ultraviolet cyclonic fluid dosing system for disinfecting fluid materials is described. The dosing system includes a dosing chamber that includes a cylindrical chamber portion and a conical chamber portion. The cylindrical chamber portion has a fluid outlet and a fluid inlet that causes fluid material to enter the upper chamber and travel a helical path down through the upper chamber and into the conical chamber, from where it travels upward in exits through the fluid outlet. As the fluid material passes through the cylindrical and conical chambers, it is dosed with disinfecting ultraviolet light. The system advantageously increases the exposure time of the fluid material to the disinfecting ultraviolet light is increased as compared to non-cyclonic dosing systems having the same volume.Type: GrantFiled: January 12, 2022Date of Patent: November 5, 2024Assignee: Violett Inc.Inventors: Branden Lee Doyle, Christopher Sean Doyle
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Patent number: 12136542Abstract: An apparatus for obtaining ion energy distribution, IED, measurements in a plasma processing system, in one example, comprising a substrate for placement in the plasma processing system and exposed to the plasma, an ion energy analyser disposed in the substrate for measuring the ion energy distribution at the substrate surface during plasma processing, the analyser comprising a first conductive grid, a second conductive grid, a third conductive grid, a fourth conductive grid and a collection electrode, each grid separated by an insulation layer, a battery power supply and control circuitry, integrated in the substrate, for supplying and controlling voltage to each of the grids and the collector of the ion energy analyser; and a high voltage generating circuit.Type: GrantFiled: January 31, 2022Date of Patent: November 5, 2024Assignee: IMPEDANS LTDInventors: Paul Scullin, James Doyle, J J Lennon, David Gahan, Tigran Poghosyan
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Patent number: 12131895Abstract: A Time of Flight mass analyser is disclosed comprising: at least one ion mirror 34 for reflecting ions; an ion detector 36 arranged for detecting the reflected ions; a first pulsed ion accelerator 30 for accelerating an ion packet in a first dimension (Y-dimension) towards the ion detector 36 so that the ion packet spatially converges in the first dimension as it travels to the detector 36; and a pulsed orthogonal accelerator 32 for orthogonally accelerating the ion packet in a second, orthogonal dimension (X-dimension) into one of said at least one ion mirrors 34.Type: GrantFiled: April 11, 2022Date of Patent: October 29, 2024Assignee: Micromass UK LimitedInventors: John Brian Hoyes, Boris Kozlov
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Patent number: 12128148Abstract: A system for disinfecting an enclosed space includes a housing, ultraviolet (UV) emitters, a sensor to detect occupancy in or entry into an enclosed space, a UV directing mechanism, and a controller. The housing includes an air flow passageway. When the UV directing mechanism is in the closed state, the UV emitters are positioned in the air flow passageway and transmission of UV electromagnetic radiation into the enclosed space is substantially blocked. UV electromagnetic radiation is transmitted into the enclosed space when the UV directing mechanism is in the at least one open state. Disinfection operations can be activated when the UV directing mechanism is in the open state or the closed state. When the UV directing mechanism is in the open state, the disinfection operation is activated when the sensor indicates no occupancy in or no entry into the enclosed space.Type: GrantFiled: September 29, 2021Date of Patent: October 29, 2024Assignee: LUMINII LLCInventors: Jeffery Parker, Meng Yang, Laurentiu Vlad
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Patent number: 12123421Abstract: A mass spectrometer comprising: a vacuum housing comprising a first vacuum chamber having a first gas exhaust port; a gas pump (1700) having a first gas inlet port connected to the first gas exhaust port (H1) by a first gas conduit for evacuating the first vacuum chamber, and a first apertured cover (2010) arranged over the first gas exhaust port (H1) or first gas inlet port, or in the first gas conduit therebetween.Type: GrantFiled: November 21, 2023Date of Patent: October 22, 2024Assignee: Micromass UK LimitedInventors: Cedric Marsh, Peter Carney, Jason Lee Wildgoose, David Wallis, Paul McIver, Soji Chummar, George Andreas Antoniades, Dipesh Mistry
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Patent number: 12125671Abstract: A multi-source illumination apparatus for illuminating a sample with charged particles, wherein beams, from a plurality of sources, are arranged such that a beam from at least one source intersects, at a plane of a condenser lens, with at least part of one other beam from a different one of the plurality of sources. The condenser lens is configured to separately collimate the received beams from each source. A manipulator array arrangement is configured to manipulate the collimated beams to generate one or more beams, in a single column, that include charged particles from the plurality of sources. The manipulator array arrangement includes a multi-beam generator configured to receive the plurality of substantially parallel substantially collimated beams generated by the deflector array, and generate a multibeam in dependence on the received plurality of substantially parallel substantially collimated beams, wherein the multi-beam includes a plurality of substantially collimated sub-beams.Type: GrantFiled: November 19, 2020Date of Patent: October 22, 2024Assignee: ASML NETHERLANDS B.V.Inventors: Stijn Wilem Herman Karel Steenbrink, Marco Jan-Jaco Wieland, Albertus Victor Gerardus Mangnus
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Patent number: 12125666Abstract: A method and an apparatus for generating a particle wave carrying an electric charge is provided. The method comprises: on the basis of waveform information pre-stored in a waveform storage module, generating a corresponding digital waveform signal; the waveform information comprising amplitude and phase; on the basis of a digital-to-analog conversion module connected to the waveform storage module, converting the digital waveform signal having a pre-set phase into an analog waveform signal; on the basis of a power amplification module connected to the digital-to-analog conversion module, performing power amplification on the analog waveform signal; on the basis of a high-voltage generator connected to the power amplification module, performing high-voltage amplification on the power signal of the analog waveform signal; and by means of a quasi-continuous emission electrode connected to the high-voltage generator, emitting a charged particle wave on the basis of the analog waveform voltage signal.Type: GrantFiled: December 14, 2020Date of Patent: October 22, 2024Inventor: Yanbing Liu
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Patent number: 12125668Abstract: An electron microscopy grid, includes: (i) a perforated substrate, (ii) a support film on the perforated substrate, the support film having a thickness of 60 ? or less, and (iii) linkers attached on top of the support film. The linkers has at least one affinity group for immobilizing an analyte; wherein the linkers form a non-random pattern on the support film.Type: GrantFiled: February 25, 2020Date of Patent: October 22, 2024Assignees: UNIVERSITEIT ANTWERPEN, IMEC VZW, UNIVERSITEIT GENTInventors: Wouter Van Putte, Jean-Pierre Timmermans, Jan Vanfleteren
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Patent number: 12125694Abstract: Improved ion mirrors 30 (FIG. 3) are proposed for multi-reflecting TOF MS and electrostatic traps. Minor and controlled variation by means of arranging a localized wedge field structure 35 at the ion retarding region was found to produce major tilt of ion packets time fronts 39. Combining wedge reflecting fields with compensated deflectors is proposed for electrically controlled compensation of local and global misalignments, for improved ion injection and for reversing ion motion in the drift direction. Fine ion optical properties of methods and embodiments are verified in ion optical simulations.Type: GrantFiled: July 26, 2023Date of Patent: October 22, 2024Assignee: Micromass UK LimitedInventors: Anatoly Verenchikov, Mikhail Yavor
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Patent number: 12125693Abstract: The invention generally relates to systems and methods for conducting reactions and screening for reaction products.Type: GrantFiled: October 10, 2023Date of Patent: October 22, 2024Assignee: Purdue Research FoundationInventor: Robert Graham Cooks
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Patent number: 12117412Abstract: Ion mobility spectrometers and methods for determining an ion mobility spectrum of a sample are provided. The ion mobility spectrometers comprise a drift chamber and a cylindrical reaction chamber, wherein the drift chamber is designed to transport ions from a switching grid to an ion detector against an axial drift gas flow. The reaction chamber has a sample gas inlet adjacent to the switching grid for introducing a sample gas, a gas outlet opposite the switching grid for discharging drift gas and sample gas, and a local ionisation source arranged at the gas outlet. The sample gas inlet comprises gas inlets arranged oppositely on an inner circumference of the reaction chamber. The methods operate the ion mobility spectrometers to determine an ion mobility spectrum of a sample.Type: GrantFiled: October 19, 2021Date of Patent: October 15, 2024Assignee: Bruker Optik GmbHInventors: Uwe Renner, Wolfgang Heller, Achim Beyer, Stoyo Dobrianov
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Patent number: 12119213Abstract: Disclosed is a power supply device for a triple quadrupole mass spectrometer, including a power input module, a sequence generator, and an output control module. The power supply input module is connected to a power supply. A positive output terminal of the power supply input module is connected to the sequence generator, so that the sequence generator converts a positive output voltage of the power supply into an auxiliary voltage and a relay control signal. The sequence generator is connected to the power input module to transmit the auxiliary voltage and the relay control signal to the output control module, thereby controlling on and off of the output control module, and sequentially powering on the output control module. The power supply input module is connected to the output control module to transmit an input voltage from the power supply to the output control module.Type: GrantFiled: December 30, 2022Date of Patent: October 15, 2024Assignees: NANJING QLIFE MEDICAL TECHNOLOGY CO., LTD., ZHEJIANG QJADE PRECISION TECHNOLOGY CO., LTD.Inventors: Xiaoliang Cheng, Han Lu, Qiang Xu, Wei Zhang