Patents Examined by David Goodwin
  • Patent number: 9634055
    Abstract: Radiation detectors and methods of fabricating radiation detectors are provided. One method includes mechanically polishing at least a first surface of a semiconductor wafer using a polishing sequence including a plurality of polishing steps. The method also includes growing a passivation oxide layer on a top of the polished first surface and depositing patterned metal contacts on a top of the passivation oxide layer. The method further includes applying a protecting layer on the patterned deposited metal contacts, etching a second surface of the semiconductor and applying a monolithic cathode electrode on the etched second surface of the semiconductor. The method additionally includes removing the protecting layer from the patterned metal contacts on the first surface, wherein the patterned metal contacts are formed from one of (i) reactive metals and (ii) stiff-rigid metals for producing inter-band energy-levels in the passivation oxide layer.
    Type: Grant
    Filed: March 23, 2015
    Date of Patent: April 25, 2017
    Assignee: General Elecrtric Company
    Inventors: Peter Rusian, Arie Shahar
  • Patent number: 9633948
    Abstract: A stack that includes, from bottom to top, a nitrogen-containing dielectric layer, an interconnect level dielectric material layer, and a hard mask layer is formed on a substrate. The hard mask layer and the interconnect level dielectric material layer are patterned by an etch. Employing the patterned hard mask layer as an etch mask, the nitrogen-containing dielectric layer is patterned by a break-through anisotropic etch, which employs a fluorohydrocarbon-containing plasma to break through the nitrogen-containing dielectric layer. Fluorohydrocarbon gases used to generate the fluorohydrocarbon-containing plasma generate a carbon-rich polymer residue, which interact with the nitrogen-containing dielectric layer to form volatile compounds. Plasma energy can be decreased below 100 eV to reduce damage to physically exposed surfaces of the interconnect level dielectric material layer.
    Type: Grant
    Filed: October 20, 2015
    Date of Patent: April 25, 2017
    Assignees: GLOBALFOUNDRIES INC., ZEON CORPORATION
    Inventors: Markus Brink, Robert L. Bruce, Sebastian U. Engelmann, Nicholas C. M. Fuller, Hiroyuki Miyazoe, Masahiro Nakamura
  • Patent number: 9627608
    Abstract: Systems and method include providing a non-volatile random access memory (NVRAM) stack including a plurality of layers. The plurality of layers includes a dielectric layer and a metal layer. The metal layer of the NVRAM stack is patterned. The patterning causes damage to lateral side portions of the dielectric layer. The lateral portions of the dielectric layer are repaired by depositing dielectric material on the lateral side portions of the dielectric layer.
    Type: Grant
    Filed: September 11, 2014
    Date of Patent: April 18, 2017
    Assignee: LAM RESEARCH CORPORATION
    Inventors: Nerissa Draeger, Thorsten Lill, Diane Hymes
  • Patent number: 9620483
    Abstract: A semiconductor device including power TSVs for stably supplying a power source is described. A semiconductor device includes a chip power pad placed in a first region of a chip, power through silicon vias (TSVs) connected to the chip power pad and placed in the second region of each of the chips, and metal lines configured to couple the chip power pad and the power TSVs.
    Type: Grant
    Filed: October 30, 2015
    Date of Patent: April 11, 2017
    Assignee: SK hynix Inc.
    Inventors: Young Hee Yoon, Ga Young Lee
  • Patent number: 9613941
    Abstract: A semiconductor package has a lead frame and a power die. The lead frame has a first die paddle with a cavity formed entirely therethrough. The power die, which has a lower surface, is mounted on the first die paddle such that a first portion of the lower surface is attached to the first die paddle using a solderless die-attach adhesive, and a second portion of the lower surface, is not attached to the first die paddle and abuts the cavity formed in the first die paddle such that the second portion is exposed.
    Type: Grant
    Filed: November 24, 2014
    Date of Patent: April 4, 2017
    Assignee: FREESCALE SEMICONDUCTOR, INC.
    Inventors: Yanbo Xu, Zhijie Wang, Fei Zong
  • Patent number: 9613841
    Abstract: An area array integrated circuit (IC) package for an IC device. The IC package includes a first substrate with conductive traces electrically coupled to the IC device. An interconnect assembly having a first surface is mechanically coupled to the first substrate. The interconnect assembly includes a plurality of contact members electrically coupled to the conductive traces on the first substrate. A second substrate is mechanically coupled to a second surface of the interconnect assembly so that the first substrate, the interconnect assembly, and the second substrate substantially surround the IC device. The second substrate includes conductive traces that are electrically coupled to the contact members in the interconnect assembly.
    Type: Grant
    Filed: March 2, 2012
    Date of Patent: April 4, 2017
    Assignee: HSIO Technologies, LLC
    Inventor: James Rathburn
  • Patent number: 9601418
    Abstract: According to an exemplary embodiment, a stacked half-bridge package includes a control transistor having a control drain for connection to a high voltage input, a control source coupled to an output terminal, and a control gate for being driven by a driver IC. The stacked half-bridge package also includes a sync transistor having a sync drain for connection to the output terminal, a sync source coupled to a low voltage input, and a sync gate for being driven by the driver IC. A current carrying layer is situated on the sync drain; the control transistor and the sync transistor being stacked on one another, where the current carrying layer provides a high current connection between the sync drain and the control source.
    Type: Grant
    Filed: March 13, 2014
    Date of Patent: March 21, 2017
    Assignee: Infineon Technologies Americas Corp.
    Inventors: Eung San Cho, Chuan Cheah, Andrew N. Sawle
  • Patent number: 9601443
    Abstract: A semiconductor structure includes a daisy chain adjacent to an edge of a semiconductor chip. The daisy chain includes a plurality of horizontal metal lines distributed in a plurality of metallization layers, wherein the horizontal metal lines are serially connected; a plurality of connecting pads in a same layer and electrically connecting the horizontal metal lines, wherein the connecting pads are physically separated from each other; and a plurality of vertical metal lines, each connecting one of the connecting pads to one of the horizontal metal lines, wherein one of the plurality of connecting pads is connected to one of the plurality of horizontal metal lines by only one of the plurality of vertical metal lines; and a seal ring adjacent and electrically disconnected from the daisy chain.
    Type: Grant
    Filed: February 13, 2007
    Date of Patent: March 21, 2017
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Hao-Yi Tsai, Shih-Hsun Hsu, Shih-Cheng Chang, Shang-Yun Hou, Hsien-Wei Chen, Chia-Lun Tsai, Benson Liu, Shin-Puu Jeng, Anbiarshy Wu
  • Patent number: 9592569
    Abstract: A method and apparatus for forming a visible symbol or other indicium on a tab portion of a beverage container. The method comprises the steps of advancing a tab stock material through a series of tab-forming stations. The tab portion is at least partially formed from the tab stock at each of the tab-forming stations. The advancement of the tab stock is dwelled or halted while the tab is formed. The tab stock is accelerated from dwell to resume advancement of the tab stock material between the stations. A selected portion of the tab is irradiated with light energy to form the visible indicium. The apparatus comprises a plurality of tab-forming stations, each tab-forming station at least partially forming the tab from a tab stock. A conveyor or track mechanism is configured to advance the tab stock from one tab-forming station to another. An etching apparatus is associated with the conveyor and tab-forming stations to selectively etch the symbol on the tab.
    Type: Grant
    Filed: October 8, 2009
    Date of Patent: March 14, 2017
    Assignee: Metal Container Corporation
    Inventors: Jim Reed, John Urbanowicz, Chris Neiner, Tim DiMenna, Keith Oravetz, Gary Stowers, Louis Lackey
  • Patent number: 9595505
    Abstract: Embodiments of three dimensional (3D) System-in-Package (SiPs) and methods for producing 3D SiPs having improved heat dissipation capabilities are provided. In one embodiment, the 3D SiP includes a heat-dissipating structure having a first principal surface and a second principal surface opposite the first principal surface. The backside of a first microelectronic device is disposed adjacent and thermally coupled to the first principal surface of the heat-dissipating structure, while the backside of a second microelectronic device is disposed adjacent and thermally coupled to the second principal surface of the heat-dissipating structure. During operation of the 3D SiP, heat generated by the microelectronic devices is conductively transferred to and dissipated through the heat-dissipating structure.
    Type: Grant
    Filed: November 25, 2014
    Date of Patent: March 14, 2017
    Assignee: NXP USA, INC.
    Inventors: Shouhui Chen, Guat Kew Teh, Wai Keong Wong
  • Patent number: 9589928
    Abstract: A semiconductor package includes a first lead frame type having a first type of package leads and a pre-molded portion, and a second lead frame type having a second type of package leads that surround a die pad and are supported by the pre-molded portion. An integrated circuit is attached to the die pad and electrically connected to the first and second types of leads with bond wires. A mold compound, which forms a mold cap, covers the first and second lead frame types, the integrated circuit and the bond wires. The first lead frame type may be a QFP type and the second lead frame type may be a QFN type.
    Type: Grant
    Filed: November 25, 2014
    Date of Patent: March 7, 2017
    Assignee: NXP USA, INC.
    Inventors: Zhigang Bai, Jinzhong Yao, Lan Chu Tan
  • Patent number: 9583505
    Abstract: According to an embodiment, a non-volatile memory device includes first electrodes stacked on an underlying layer, a second electrode provided on the first electrodes, a semiconductor layer extending in a first direction from the underlying layer to the second electrode, and a memory film provided between each of the first electrodes and the semiconductor layer. The semiconductor layer includes a first portion adjacent to the first electrodes and a second portion adjacent to the second electrode. The second portion has a thickness thinner than a thickness of the first portion in a second direction perpendicular to the first direction.
    Type: Grant
    Filed: September 11, 2014
    Date of Patent: February 28, 2017
    Assignee: Kabushiki Kaisha Toshiba
    Inventors: Takashi Ishida, Yoshiaki Fukuzumi, Takayuki Okada, Masaki Tsuji
  • Patent number: 9564286
    Abstract: Provided is a method of forming a thin film of a semiconductor device. The method includes forming a precursor layer on a surface of a substrate by supplying a precursor gas into a chamber, discharging the precursor gas remaining in the chamber to an outside of the chamber by supplying a purge gas into the chamber, supplying a reactant gas into the chamber, generating plasma based on the reactant gas, forming a thin film by a chemical reaction between plasma and the precursor layer and radiating extreme ultraviolet (EUV) light into the chamber, and discharging the reactant gas and the plasma remaining in the chamber by supplying a purge gas into the chamber.
    Type: Grant
    Filed: August 14, 2014
    Date of Patent: February 7, 2017
    Assignees: Samsung Electronics Co., Ltd., The Board of Trustees of the Leland Stanford Junior University
    Inventors: Sam Hyung Sam Kim, Andrei Teodor Iancu, Friedrich B. Prinz, Michael C. Langston, Peter Schindler, Ki-Hyun Kim, Stephen P. Walch, Takane Usui
  • Patent number: 9558930
    Abstract: In one aspect, a method of forming a wiring layer on a wafer is provided which includes: depositing a HSQ layer onto the wafer; cross-linking a first portion(s) of the HSQ layer using e-beam lithography; depositing a hardmask material onto the HSQ layer; patterning the hardmask using optical lithography, wherein the patterned hardmask covers a second portion(s) of the HSQ layer; patterning the HSQ layer using the patterned hardmask in a manner such that i) the first portion(s) of the HSQ layer remain and ii) the second portion(s) of the HSQ layer covered by the patterned hardmask remain, wherein by way of the patterning step trenches are formed in the HSQ layer; and filling the trenches with a conductive material to form the wiring layer on the wafer.
    Type: Grant
    Filed: August 13, 2014
    Date of Patent: January 31, 2017
    Assignee: International Business Machines Corporation
    Inventors: Josephine B. Chang, Szu-Lin Cheng, Isaac Lauer, Jeffrey W. Sleight
  • Patent number: 9548213
    Abstract: A method of forming a fin structure that includes forming a plurality of fin structures from a bulk semiconductor substrate and forming a dielectric spacer on a sidewall of each fin structure in the plurality of fin structure. A semiconductor spacer is formed on a sidewall of the dielectric spacer. A dielectric fill is formed in the space between the adjacent fin structures. The semiconductor spacer and a portion of the fin structures that is present below a lower surface of the dielectric spacer are oxidized. Oxidizing a base portion of the fin structures produces a first strain and oxidizing the semiconductor spacer produces a second strain that is opposite the first strain.
    Type: Grant
    Filed: February 25, 2014
    Date of Patent: January 17, 2017
    Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Kangguo Cheng, Bruce B. Doris, Darsen D. Lu, Ali Khakifirooz, Kern Rim
  • Patent number: 9543407
    Abstract: A method for semiconductor fabrication includes providing mask layers on opposite sides of a substrate, the substrate having one or more mandrels. Dummy spacers are formed along a periphery of the mask layers. A dummy gate structure is formed between the dummy spacers. The dummy spacers are removed to provide a recess. Low-k spacers are formed in the recess.
    Type: Grant
    Filed: February 27, 2014
    Date of Patent: January 10, 2017
    Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Hong He, Chiahsun Tseng, Tenko Yamashita, Chun-Chen Yeh, Yunpeng Yin
  • Patent number: 9543433
    Abstract: A recessed access device having a gate electrode formed of two or more gate materials having different work functions may reduce the gate-induced drain leakage current losses from the recessed access device. The gate electrode may include a first gate material having a high work function disposed in a bottom portion of the recessed access device and a second gate material having a lower work function disposed over the first gate material and in an upper portion of the recessed access device.
    Type: Grant
    Filed: March 18, 2014
    Date of Patent: January 10, 2017
    Assignee: Micron Technology, Inc.
    Inventors: Venkatesan Anathan, Sanh D. Tang
  • Patent number: 9536896
    Abstract: A non-volatile memory device having a vertical structure includes a semiconductor layer, a sidewall insulation layer extending in a vertical direction on the semiconductor layer, and having one or more protrusion regions, first control gate electrodes arranged in the vertical direction on the semiconductor layer, and respectively contacting one of portions of the sidewall insulation layer where the one or more protrusion regions are not formed and second control gate electrodes arranged in the vertical direction on the semiconductor layer, and respectively contacting one of the one or more protrusion regions.
    Type: Grant
    Filed: March 31, 2015
    Date of Patent: January 3, 2017
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Sang-Hoon Lee, Jin-Gyun Kim, Hyun Namkoong, Ki-Hyun Hwang, Hun-Hyeong Lim, Dong-Kyum Kim
  • Patent number: 9508665
    Abstract: A method for insertion bonding and a device thus obtained are disclosed. In one aspect, the device includes a first substrate having a front main surface and at least one protrusion at the front main surface. The device includes a second substrate having a front main surface and at least one hole extending from the front main surface into the second substrate. The protrusion of the first substrate is inserted into the hole of the second substrate. The hole is formed in a shape wherein the width is reduced in the depth direction and wherein the width of at least a part of the hole is smaller than the width of the protrusion at the location of the metal portion thereof. The protrusion is deformed during insertion thereof in the hole to provide a bond between the part of the hole and the metal portion.
    Type: Grant
    Filed: July 7, 2010
    Date of Patent: November 29, 2016
    Assignees: IMEC, Katholieke Universiteit Leuven
    Inventors: Eric Beyne, Paresh Limaye
  • Patent number: 9502475
    Abstract: Disclosed is an organic light emitting device. The organic light emitting device includes a first emission unit configured to include a first red emission layer which emits red light, a first green emission layer which emits green light, and a first blue emission layer which emits blue light, a second emission unit configured to include a second red emission layer which emits red light, a second green emission layer which emits green light, and a second blue emission layer which emits blue light, a charge generation layer disposed between the first emission unit and the second emission unit, a first electrode formed as a reflective electrode, and configured to supply an electric charge having a first polarity to the first emission unit and the second emission unit, and a second electrode configured to supply an electric charge having a second polarity to the first and second emission units.
    Type: Grant
    Filed: November 25, 2014
    Date of Patent: November 22, 2016
    Assignee: LG Display Co., Ltd.
    Inventor: Se Hee Lee