Abstract: A uniformity controller is arranged to control a profile of a radiation intensity along the length of a target portion of a substrate so as to substantially compensate for irradiation-induced variation of the profile with respect to time. The uniformity controller includes a variable filter interposed between the illumination system and the target portion and arranged to control the relative values of the intensity applied at a series of positions within the target portion of the substrate so as to substantially compensate for variation of the profile with respect to time. In this manner the radiation intensity is controlled at a series of positions within the target portion so as to compensate for variation of the intensity profile with time.

Abstract: The present invention relates to a lithographic apparatus including an illumination system configured to condition a radiation beam; a support constructed to support a first and a second patterning device, each patterning device being capable of imparting the radiation beam with a pattern in its cross-section to form a patterned radiation beam; a substrate table constructed to hold a substrate; and a projection system configured to project the patterned radiation beam onto a target portion of the substrate, wherein the illumination system includes a radiation beam path adaptation device, wherein the adaptation device is configured to adapt a radiation beam path to allow subsequent projections of a pattern of the first patterning device and a pattern of the second patterning device during a single scanning movement of the patterning device support.

Abstract: The present invention provides a standardized mechanical interface (SMIF) reticle pod that is configured to provide a controlled environment for supporting a reticle wherein the controlled environment is maintained substantially free of crystal growth causing contaminants. Accordingly, there is provided a layered filter with filter elements capable of filtering particulates and adsorbing gaseous contaminants. The filter has an inwardly facing face generally planar shaped with a surface area that is substantially half or more of the area of the reticle face. The inwardly facing face is placed in close proximity to the reticle patterned surface and has an area that is a significant fraction of the reticle patterned surface area. The SMIF pod is also provided with a purge system configured to inject a very dry gas within the controlled environment to flush the controlled environment of contaminants as well as to regenerate the filter.

Abstract: A system for regulating the time and temperature of a development process is provided. The system includes one or more light sources, each light source directing light to one or more gratings being developed on a wafer. Light reflected from the gratings is collected by a measuring system, which processes the collected light. Light passing through the gratings may similarly be collected by the measuring system, which processes the collected light. The collected light is indicative of the progress of development of the respective portions of the wafer. The measuring system provides progress of development related data to a processor that determines the progress of development of the respective portions of the wafer. The system also includes a plurality of heating devices, each heating device corresponds to a respective portion of the developer and provides for the heating thereof. The processor selectively controls the heating devices so as to regulate temperature of the respective portions of the wafer.

Abstract: A system for handling effluent from a film processor. A transportable holding tank is attached to the film processor using quick-disconnect fittings, and accepts effluent discharged from the film processor by gravity. The holding tank is uncoupled from the film processor and coupled to a receiving station with quick-disconnect fittings similar to those on the film processor. The effluent is pumped into the receiving station. The system is designed to minimize exposure to film processing chemicals, and handles parallel segregated streams of silver-bearing and non silver-bearing effluent.

Abstract: A photographic processor and a method of operation is disclosed. The processor is in the form of a circular drum processor into which photographic film is inserted and processed. The processor includes a washing assembly which is adapted to wash the non-emulsion surface of the film and other components of the processor as the processed film is removed from the processor.

Abstract: A solution delivery system for a processor holds and delivers the processing solutions at working temperature. The solutions are held in an airtight chamber in which they are heated to the correct temperature. The solution is then transferred to a holding chamber until released into the processor.

Abstract: A photographic processing system has a first processing stage to process photographic material. A second processing stage is also provided to further process the photographic material. A storage device is provided between the first processing stage and the second processing stage to receive and store photographic material output from the first processing stage prior to output to the second processing stage. This enables the photographic material to be output from the first processing stage at a different rate than that at which it is input to the second processing stage. Accordingly, the first processing stage can be vacated for use by subsequent photographic material before processing in the second processing stage is complete.

Abstract: Recovering the dye image on film in electronic film development following a latent holding stage obviates the problem common in prior art electronic film development of film image destruction. Recovery of the image is accomplished using a developing agent containing couplers to form a dye image. These dyes do not affect the infrared scans of the image. Upon complete development of the dye image, further dye formation is halted by the application of a coupler blocking agent, while silver development and electronic scanning may continue or halt. After halting dye formation, the film is stable for an arbitrary time in a latent stage and may be dried and stored. Following this latent stage, silver is removed from the film with a bleach-fix leaving a conventionally usable film image.

Abstract: A method of processing light sensitive material by the surface application of fresh processing solution to the surface of a moving belt by means of an applicator. The material to be processed is brought into moving contact with the moving belt, the resulting relative motion providing a high level of agitation and mixing of the processing solution.

Abstract: In this invention, resist patterns formed by development are dried using a supercritical fluid such that no moisture enters the patterns.

Abstract: A removal liquid is supplied to a substrate on which a thin film formed is patterned by dry etching using a resist film as a mask, and cleaning is made with de-ionized water, thereby removing a reaction product generated on the surface of the substrate. After that, the processed substrate is heated, thereby completely drying the substrate from which the reaction product has been eliminated.

Abstract: The optical device of the present invention is able to capture a three-dimensional image via one or more imaging devices while permitting the viewer to view the object(s) during image acquisition. The user is thereby able to adjust the orientation of the optical device to obtain the desired image.

Abstract: A DP bag having a bag main body which accommodates a developed film and an image display member onto which all of the images of the developed film are recorded together with image specifying marks. Because the images recorded onto the film can be easily viewed at a glance by simply looking at the image display member of the DP bag, it is easier to request prints from the film. Further, because the number of structural members of the DP bag is less than a case in which prints, onto which the contents of the photographs are printed, and the DP bag are provided separately, the DP bag is more resource saving.

Abstract: There is disclosed a method of making autostereographic images of an object, comprising the steps of inputting to a computer a predetermined number of planar images of the object, each of the planar images being a view of the object, from one of the predetermined number of different viewpoints; interleaving the predetermined number of planar images in the computer; and printing the interleaved images with a high-resolution output imaging device on a spacer, a selected edge of each interleaved image being aligned with a predetermined direction on the spacer.

Abstract: When preliminary scanning is started, a reference signal is generated from a reference position sensor and a moving amount of the scanner is measured by counting. Change in intensity of the reflected light from a platen is detected by a first sensor according to movement of the scanner. When the detected intensity attains reference intensity, the moving amount of the scanner is stored. When the detected intensity attains again the reference intensity after it has been lower than the reference intensity, the stored moving amount of the scanner is updated. The time in which the detected intensity attains the reference intensity is measured and when it attains a predetermined time, absence of the original is determined and the scanner stops and returns. The size of the original is determined based on the moving amount of the scanner stored at that time.

Abstract: A card (10) with scales (20, 24, 28) printed thereon for the comparison of dissimilar items. Means (36) are provided for linearly intersecting representative points on two scales (20, 24) and for obtaining desired information from the third scale (28).

Abstract: Apparatus which can be embodied in an electronic wristwatch monitors the integrity of a wrist strap ground. An input terminal to which a known ground is coupled is provided. An oscillator produces a fixed frequency which is mixed with a signal from the input terminal to provide a composite signal. The composite signal is coupled to one input of an exclusive OR-gate. The other input of the exclusive OR-gate is coupled directly to the output of the oscillator. The output of the OR-gate is processed to produce an output signal indicative of the phase relationship between the oscillator output and the composite signal. When the input terminal is grounded, the phase relationship between the oscillator output and the composite signal changes, resulting in a change in the output signal which can be used to trigger an indicator (e.g., visual display and/or aural alarm) to indicate to a user whether he or she is properly grounded.

Abstract: A device for automatic loading of film material on a suction plate by transport roller pairs arranged at two oppositely disposed ends of the suction plate. One pair receives the film material and the other pair further transports the film material. At the two other lateral sides or ends of the suction plate, a roller is respectively provided extending over an entire side of the plate. A cloth can be wound on this roller such that the roller and cloth are so arranged that they respectively form a blind covering the suction plate up to and overlapping lateral edges of the film material.

Abstract: A stand alone customer operated photofinishing apparatus. The apparatus includes a film receiving section for receiving and holding a film cartridge containing an undeveloped filmstrip therein from a customer, the filmstrip having at least one image. A customer order data entry station is provided for entering an order selection. The apparatus further includes a developing section for developing the filmstrip comprising at least one processing tank containing a processing solution for processing of the filmstrip, a scanner for scanning the developed filmstrip so as to obtain a digital record of the at least one image developed on the filmstrip, a printing section for dry printing the at least one image on the developed filmstrip using the digital record so as to produce at least one print, and a delivery section for returning the at least one print and the developed filmstrip to the customer.