Abstract: A projector includes a light source, an optical modulation device to form an optical image, a projection optical device, and a projection position adjusting device to adjust the projection position. The projection position adjusting device includes a fixed member, a moving member a dial knob, a drive mechanism that transmit rotation of the dial knob, and a reference position detecting mechanism. The reference position detecting mechanism includes a spiral rail guiding section having a groove shape provided to a side face of the dial knob adjacent to the fixed member, along the rotational direction of the dial knob, a sliding section that slides in the guiding section with the rotation of the dial knob, and an engaging section provided to the guiding section, and engages with the sliding section upon the projection position of the projection optical device reaching the projection reference position.

Abstract: A wavelength-selective polarization conversion element is disclosed which has a polarization conversion function that has been obtained by a polarization conversion element and a wavelength-selective phase plate in the past. The element includes a polarization beam splitting film and a phase plate. The film splits light and has a characteristic in which the transmittance for light with a first polarization direction and the transmittance for light with a second polarization direction are changed between a value higher than 50% and a value lower than 50% depending on wavelength region. The phase plate changes the polarization direction of light transmitted or reflected by the film between the first and second polarization directions. The element converts light in two of the first to third wavelength regions into polarized light with one polarization direction and converts light in the other wavelength region into polarized light with another polarization direction.

Abstract: A reflective screen that uses an aluminum-foil reflecting layer, wherein speckling can easily be suppressed in the reflective screen. The reflective screen is composed of a surface diffusion layer, a transparent adhesive layer, and an aluminum-foil reflecting layer layered together. A diffusing material is added to the transparent adhesive layer, and a transparent layer having a prescribed thickness is provided between the transparent adhesive layer and the aluminum-foil reflecting layer.

Abstract: To avoid the yield of wafers that undergo immersion lithography influencing by delay of post exposure baking (PEB), an operation system adjusts a speed of inputting the wafers to undergo immersion lithography according to a status of wafers that have finished exposure and are waiting for baking. Therefore, the wafers that have finished exposure are transmitted to be baked efficiently and on time.

Abstract: A projector includes an image projection device, an exterior chassis accommodating the substantially L-shaped image projection device, and a ventilation device configured to block leakage light and to insulate sound of the projector and to discharge air inside the exterior chassis to the outside through an air outlet formed on an end face located in a direction of projection. The image projection device includes a light source device, an optical modulation device, and a projection optical device. The ventilation device includes an axial fan with a suction port and a discharge port. An air outlet duct bends air discharged from the discharge port at an angle of substantially ninety degrees by a vertical wall substantially perpendicular to the discharging direction of air from the discharge port of the axial fan towards a side receding from the projection optical device to lead to the air outlet of the exterior chassis.

Abstract: A projection system includes a display apparatus comprising a plurality of tunable Fabry-Perot filters, each of the filters being configured for shifting between a state in which the filter transmits radiation in a bandwidth in the visible range of the electromagnetic spectrum and a state in which the filter transmits radiation in a bandwidth outside the visible range of the electromagnetic spectrum. An illuminator provides light to the plurality of Fabry-Perot filters. A control system receives image data and controls the display apparatus to project an image onto an associated display surface. The control system includes a modulator which provides wavelength modulation signals to the plurality of Fabry-Perot filters to modulate a color of pixels in the image and causes selected ones of the Fabry-Perot filters to shift into the bandwidth outside the visible range to modulate the brightness of pixels in the image.

Abstract: A projection display capable of preventing a reflector from damage and cooling a lamp at high efficiency. The projection display includes a light source which has a lamp and metallic reflector. The metallic reflector has an opening disposed above the light-emitting point of the lamp in the gravity direction. A duct has an end coupled to the opening and directs the air induced by a fan through the opening into the metallic reflector. The air then circulates within the metallic reflector to cool the light-emitting point of the lamp, and subsequently is released out of the metallic reflector through through-holes formed with a front glass and a flange of the metallic reflector.

Abstract: A control system to control a position parameter of a stage in a lithographic apparatus includes a stage controller to control a position parameter of the stage in at least a first direction. The control system includes a disturbance torque estimator to estimate a disturbance torque on the stage, the disturbance torque about an axis extending in a second direction, the second direction being substantially perpendicular to the first direction. The control system includes a correction signal calculator, the correction signal calculator provided with the estimated disturbance torque and a signal representative of a position of the stage in a third direction, the third direction being substantially perpendicular to the first and second directions. The correction signal calculator determines a feedforward correction signal to correct a position error of the stage in the first direction due to the disturbance torque, the feedforward correction signal to be fed to the stage.

Abstract: A device manufacturing method is disclosed. The method includes patterning a beam of radiation, projecting the patterned beam of radiation onto a plurality of outer target portions of a substrate in a sequence in which each subsequent outer target portion is spaced-apart from a preceding outer target portion, and subsequent to projecting the patterned beam of radiation on the plurality of outer target portions, projecting the patterned beam of radiation onto an inner target portion of the substrate.

Abstract: An image display device includes a plurality of projection units, each of which having a light source section emitting one of basic-color lights, a spatial light modulation section modulating the basic-color light emitted from the light source section according to an image signal, and a projection system projecting an image based on the basic-color light modulated by the spatial light modulation section onto a screen. The projection units are arranged in an array, and the images, each of which is projected by each of the projection units, are combined on the screen to form a composite image.

Abstract: A video display method and apparatus including a display panel; a lamp which generates light to display a video image on the display panel; a lamp driving unit which drives the lamp; an information storage unit which stores information about a predetermined start-up time of the lamp; and a controller which controls the lamp driving unit to turn on the lamp when the controller determines that the predetermined start-up time corresponding to the information stored in the information storage unit has come.

Abstract: A projector module adopts a structure having an optical image forming block and an optical block integrated via a locking member. The optical image forming block adopts a structure achieved by disposing an aluminum substrate at which an LED is mounted and a liquid crystal panel in a casing constituted with a plastic material having low thermal conductivity. The locking member is formed by bending a metal sheet through a sheet metal bending process and the locking member is set in surface contact with the substrate. The optical block adopts a structure achieved by disposing a PBS and a reflecting member at the casing constituted with a plastic material having low thermal conductivity with a quarter-wave plate disposed at the boundary of the two members.

Abstract: A liquid crystal projector device of the present invention includes a casing having disposed therein a lamp unit, an optical system for receiving light from the lamp unit to generate image light, and a power unit. An exhaust system for cooling an inside of the casing is attached to a side surface of the casing. The exhaust system includes a first exhaust fan and a second exhaust fan, which stand along the side surface of the casing. The first exhaust fan is placed toward the lamp unit, while the second exhaust fan is placed toward the power unit. Exhaust directions of both exhaust fans intersect each other.

Abstract: An apparatus includes an electromagnetic radiation source, a reflector about the source having an aperture and a curved band pass filter at least partially across the aperture.

Abstract: Embodiments include a light engine to generate pixels and a number of lenses positioned to receive pixels from the light engine and to project the pixels on to a field with a higher angular pixel density at an edge of the field than at a center of the field. A method according to embodiments includes generating pixels in a light engine, receiving the pixels from the light engine in a plurality of lenses, and projecting the pixels through the plurality of lenses on to a field with a higher angular pixel density at an edge of the field than at a center of the field.

Abstract: An optical device can produce a virtual image visible from a vantage point. The device has one or more lenses, a source for producing light, and an internally illuminable, non-transparent display object. The source can produce light in the display object in order to internally illuminate the display object and cause it to predominantly radiate internal light. The lens(es) can project a virtual image of the display object. In some instances two or more devices with matching display objects may be used to project one virtual image of the display objects. Each device is angled in order to increase the field of view of the virtual image.

Abstract: A projection apparatus includes a projector including a cooling fan which cools the inside of a main unit through an air hole provided in the main unit and ceiling hanging hardware including a bracket having an external cooling fan which faces the air hole and whose air-flow direction coincides with that of the air hole. The projector is mounted on the ceiling hanging hardware while hanging from the ceiling hanging hardware.

Abstract: The present invention provides methods and systems for fast purging of pellicle volumes. A purge device has a base which is enclosed in a controlled environment filled with purge gas. The base has a cavity formed on a surface therein. The cavity receives a reticle-pellicle assembly including a pellicle surface and an enclosed pellicle volume. A first region within the cavity can be formed to hold purging gas at a high pressure. A gap region is formed below the pellicle within the cavity. A displacement force on the pellicle due to a pressure difference between purging gas in the enclosed volume and purging gas in the gap region is kept within a tolerance range of the pellicle. According to further embodiments, a purge device is provided that includes a flow barrier (e.g., non-contacting and/or contacting barriers). A pressure balancing plate and/or flow resistant plates are provided in a purge device.

Abstract: A display system (100, 200, 300, 350, 400, 450) for displaying an image is described. The display system (100, 200, 300, 350, 400, 450) typically comprises one or a plurality of individual light sources (102) and a light collecting stage (110, 210, 310, 410) which comprises a separate light collecting sub-system associated with each light source (102), or group of light sources (102). The display system (100, 200, 300, 350, 400, 450) typically comprises at least one light modulator (120) which is operable to modulate light received from the light collecting stage (110, 210, 310, 410) according to an image which is to be displayed. Finally a projection stage (130) is provided for projecting the image, typically on a projection screen. The present invention also relates to a corresponding method. The present invention is especially useful with light sources having a packaging around the light emitting surface such that the light sources cannot be physically placed adjacent to each other.

Abstract: A projector apparatus has an electrically conductive housing that includes a lower housing part and an upper housing part coupled to the lower housing part for covering the lower housing part, an internal projector module mounted in the housing, a first grounding component provided between the internal projector module and the upper housing part so as to establish a first grounding path between the internal projector module and the housing, and a second grounding component provided between the internal projector module and the lower housing part so as to establish a second grounding path between the internal projector module and the housing.