Abstract: A micro-mirror light modulator and associated projection display system. The projection display system includes a light source, a linear light source illumination system that transforms a light emitted from the light source into a thin linear light, a micro-mirror light modulator that selectively diverts the direction of the incident thin linear light to create reflected light, a light transmitting layer that selectively transmits or filters out the reflected light, a condenser lens that focuses the light transmitted by the light transmitting layer, and a scanner that scans the focused light such that the light forms a projected image. The micro-mirror light modulator includes a reflection electrode that deflects toward an electrode when a voltage is applied. The reflection electrode reflects light depending on its deflection state. The micro-mirror light modulator is driven by low voltage, is easily fabricated such that the cost is reduced, and exhibits enhanced image contrast.

Abstract: A device using a low-cost plastic curved mirror and several combinations of methods for reducing aberrations to improve a real image projection system is provided, so as to reduce ghost and astigmatism phenomenon. The real image projection system includes a curved mirror having two different optical surfaces of revolution, one on a convex surface and the other on a concave surface. The real image projection system may include at least a curved reflector positioned in a tilted configuration, and an optical axis of the reflector does not coincide with a viewing axis. A beampath between a target source and the curved reflector neither passes through a beamsplitter nor is reflected thereby. The real image projection system may further include a circular polarizer for circularly polarizing a light beam in a primary light path between the mirror and the real image, eliminating ghost image caused by outside light sources.

Abstract: An exposure apparatus includes a projection optical system for projecting a pattern of a mask onto a plate to be exposed. A pupil filter has a first area arranged on a light axis of the projection optical system and a second area formed outside of the first area. The mask is one of an alternating phase shift mask and a chromeless phase shift mask, and the pattern of the mask satisfies (p/?)·NA?0.65, where p is a half pitch of the pattern, ? is a wavelength of light illuminating the mask, and NA is an image-side numerical aperture of the projection optical system, and in which, at most, 1st order light of diffracted light, which is diffracted by the pattern satisfying (p/?)·NA?0.

Abstract: A light filter for use in an optical system for displaying image. The light filter comprising, a substantially transparent substrate and an optical coating applied to the substrate. The optical coating is applied to the substrate such that a percentage of light being directed through the filter that is attenuated varies based on a position on the substrate on which the light impinges.

Abstract: A light source device (18) includes a light source (1) constructed by a light emitter (1a) surrounded by a reflector (2); and a supporting member (20) for holding the reflector (2), and passages of cooling air are formed above and below the reflector (2). First and second openings (21b) and (21a) as passages of cooling air are opened in upper and lower portions, respectively, of the reflector (2). Near the opening (21a) on the lower side, a wind direction switching member (23) is disposed on the supporting member (20). The wind direction switching member (23) makes cooling air from the opening (21a) flow upward to a side of the light emitter (1a) in a state where the supporting member (20) is placed on a desk, and makes the cooling air flow directly to an upper portion of the light emitter (1a) via the opening (21a) in a state where the supporting member (20) is hung from a ceiling.

Abstract: An apparatus, system, and method for a projection device having a camera to provide for adjustments based at least in part on a series of captured images are disclosed herein.

Abstract: A light source comprises a lamp such as an ultra-high pressure mercury lamp or a metal halide lamp and its irradiated light is emitted after being parallelized by a parabolic reflector. The parabolic reflector is made by pressing metal such as stainless and its light exit side aperture is covered with a transparent plate made of glass, etc. The transparent plate prevents fragments of glass of the lamp and the like from scattering when the lamp bursts. The parabolic reflector does not have an aperture (cut-out) for ventilation, but heat radiation fins are formed on the outer surface of it.

Abstract: A lithographic apparatus includes a first component; an actuator to move the first component relative to a second component; a measurement system to measure at least one of a position, velocity, acceleration and higher order time derivatives of the position; and a control system to control the actuator according to an output of the measurement system. The control system includes various filter branches, each branch acting on an output of the measurement system and determining therefrom characteristic parameters of a different one of a plurality of pre-determined independent variables of a first analytical expression of the output; and a prediction unit that the characteristic parameters and the first analytical expression to provide a version of the output that is time-shifted to at least partially compensate for a delay between a measurement of a property of the second component and the effect of the measurement on an operation of the actuator.

Abstract: A display apparatus includes a half mirror for allowing light incident from the rear to pass through to the front and reflecting light incident from the front toward the front, a display section placed at the rear of the half mirror, an image pickup section for picking up an image of the user and generating user image data, an image data retention section for retaining a plurality of pieces of attachment member image data, an image combining section for combining the attachment member image data selectively read from the image data retention section and the user image data to generate combined image data, and an image display control section for displaying the combined image data on the display section.

Abstract: Calibration of spot height offsets in a level sensor is performed on a resist-coated substrate to eliminate process dependencies of substrate position measurements obtained by the level sensor.

Abstract: A projector which projects an image, includes: an optical configuration section which includes: a light source which emits light; an optical conversion section which includes a conversion section which converts the light emitted from the light source into an image based on image data; and a projection lens which enlarges and projects the image converted by the optical conversion section; a circuit configuration section which operates the optical configuration section; a housing which is included in the exterior of the projector and includes, in its outer surface portion, a heat releasing section; and a heat transfer member which transfers, to the housing, heat emitted by heat emitting components of the circuit configuration section and the optical configuration section.

Abstract: Crosstalk between a drive coil and a primary feedback coil is eliminated by positioning a secondary feedback coil in proximity with the drive coil for contamination by the crosstalk to the same extent as the primary feedback coil, and by processing feedback signals generated by the feedback coils to cancel the crosstalk. The drive coil is used to oscillate a scan mirror employed in an image projection arrangement or an electro-optical reader.

Abstract: An illumination optical system for illuminating an object surface using light from a light source, the illumination optical system includes, a first optical system that includes a movable unit that is movable along an optical axis, said first optical system guiding the light to the object surface and varying an irradiation area on a certain plane, and a second optical system that can be located on and removed from an optical path of said first optical system, the second optical system varies, when located on the optical path of said first optical system, the irradiation area on the certain plane in cooperation with said first optical system, while maintaining a shape of a light intensity distribution on the certain plane, relative to the irradiation area irradiated only by said first optical system.

Abstract: For mixing different light colors from different LEDs or energized phosphors, an elongated mixing tunnel is used having a reflective inner surface. LEDs of different colors are optically coupled along the length of the mixing tunnel and at a first end of the tunnel. Light coupled along the length of the tunnel is reflected by an angled dichroic mirror that selectively reflects the incoming color light towards a single output port of the mixing tunnel. The dichroic mirror passes all other colors of light being transmitted towards the output port of the tunnel. Two, three, or more colors of LEDs can be used. Efficient and compact ways to energize phosphors are also described. Other optical techniques are also described.

Abstract: A camera that is able to capture images of moving subjects as video images, that has a large depth of field and is thus able to capture images of thick objects, and that is able to capture images of living cells and tissues as well as tissues in water. One example includes an image pickup element and an objective lens disposed between the image pickup element and a subject. A photosensitive surface of the image pickup element has elements sensitive to light in the red, green, and blue spectral regions. Using chromatic aberration of the objective lens to form an image, the respective elements sensitive to light from the red, green and blue spectral region, collect light from respective surface segments XR, XG, and XB that lie at different heights in the subject. The images taken by the respective elements are imaged individually and produced on a monitor.

Abstract: The present invention relates to a three-dimensional (3D) hologram display system. The 3D hologram display system includes a projector device for projecting an image upon a display medium to form a 3D hologram. The 3D hologram is formed such that a viewer can view the holographic image from multiple angles up to 360 degrees. Multiple display media are described, namely a spinning diffusive screen, a circular diffuser screen, and an aerogel. The spinning diffusive screen utilizes spatial light modulators to control the image such that the 3D image is displayed on the rotating screen in a time-multiplexing manner. The circular diffuser screen includes multiple, simultaneously-operated projectors to project the image onto the circular diffuser screen from a plurality of locations, thereby forming the 3D image. The aerogel can use the projection device described as applicable to either the spinning diffusive screen or the circular diffuser screen.

Abstract: An exposure apparatus includes an alignment station where an alignment measurement process is executed, an exposure station where an exposure process is executed, and two stages, which can be swapped between the alignment station and the exposure station. A first blowing unit blows temperature-adjusted gas toward the alignment station, a second blowing unit blows temperature-adjusted gas toward the exposure station, and an air curtain unit forms an air curtain between the alignment station and the exposure station. The air curtain unit includes a third blowing unit which is arranged between the alignment station and the exposure station and blows gas so as to form an air curtain to partition the alignment station and the exposure station, and a third temperature adjusting unit supplies temperature-adjusted gas to the third blowing unit.

Abstract: An exposure apparatus for exposing a substrate to light via an original plate. A projection optical system projects a pattern of the original plate onto the substrate, a liquid immersion mechanism generates a liquid immersion state in which a gap between the final surface of the projection optical system and the substrate is filled with liquid, a first photosensor detects light which has passed through the projection optical system, a second photosensor, different from the first photosensor, detects light that has passed through the projection optical system, and a controller calibrates an output from the first photosensor in the liquid immersion state based on a first output from the first photosensor in the liquid immersion state, a second output from the first photosensor in a non-liquid immersion state, and a third output from a reference illuminometer.

Abstract: An appropriate adjustment can be made on the basis of a gradation amplitude obtained from a photographing image even when the zoom position of a zoom lens is changed. According to exemplary embodiments a CPU obtains a zoom amount transmitted from a zoom lens position detecting section, and derives the width of a stripe element in a pattern image to be formed on a liquid crystal light valve on the basis of the obtained zoom amount by referring to a stripe element width table stored to a stripe element width table storing section. The CPU corrects the pattern image for an adjustment on the basis of the derived stripe element width and rewrites the contents of a pattern image memory and gives instructions of image projection to an image processing section, a liquid crystal light valve driving section, etc. Thus, the pattern image corrected with respect to the stripe element width is formed on the liquid crystal light valve.

Abstract: A displacement measurement system, in particular for measuring the displacement of a substrate table in a lithographic apparatus relative to a reference frame is presented. The displacement measure system includes a plurality of displacement sensors mounted to the substrate table and a target associated with each displacement sensor mounted to the reference frame.