Abstract: A device for adjusting the illumination dose on a photosensitive layer in a microlithographic projection exposure apparatus has a plurality of stop elements which are, in a direction perpendicularly to a scanning direction of the apparatus, arranged next to one another. Each stop element has an outer surface that absorbs substantially all projection light impinging thereon, and a substantially rectangular circumference. Each stop element furthermore has at least one recess in its circumference or at least one opening through which projection light is allowed to pass. A drive unit individually displaces the stop elements along the scanning direction into a light field.

Abstract: To eliminate or otherwise reduce non-uniform brightness of an image of a display apparatus, an image is projected through a projection optical system having a projection lens (2), curved surface reflection mirrors (4 and 5), and a reflection mirror (6) onto a rear surface of the rear-surface projection type screen (3). The rear-surface projection type screen includes a Fresnel lens sheet (8), wherein the prism surfaces of the Fresnel lens are formed in an aspheric configuration, thereby letting the light beams from the screen to exit at an exit angle of about zero (0) degree relative to a line perpendicular to the screen surface, over most of the entire surface thereof. It is possible to obtain a projection image that having uniform brightness in an image display apparatus while maintaining a thin cabinet (7) profile.

Abstract: An apparatus and method for selectively displaying data includes an aerial support mechanism, such as a helium balloon, adapted to be positioned at a desired location, which may be changed based on a user preference. The apparatus also includes a processor, coupled to the aerial support mechanism, which accesses, retrieves and stores display data. A projection module is coupled to the processing module and displays portions of the data, as a function of the processor. The projection module displays the portions of the data on a surface such as the ground, side of a building or screen. User-input commands determine the portions of the data displayed by the projection module and the projection module displays different data over a predetermined period of time. Also, a mobile display, mounted on a bus or taxi, can be used to display data based on the location of the mobile display.

Abstract: The present invention is a broadband projection-receiving surface that can function as a projection screen. This surface can, even in strong ambient light, provide high gain, prevent glare and speckle, provide high contrast, preserve of gray-scale linearity, provide a uniformity of brightness, provide rapid angular cut-off, preserve polarization, and provide the ability to function over a large spectral range. These achievements result from a production method that utilizes purposeful partitioning of the material processes used in sub-wavelength morphology (finish) from the processes used to make super-wavelength morphology (figure).

Abstract: A virtual input element image projection apparatus couples a suitable lens and an optical element to increase the diverging angle of a virtual input element image or generate a plurality of portions of the virtual input element image that are coupled to form the complete virtual input element image without reducing diffraction efficiency. The projection distance for generating the virtual input element image may also be shortened.

Abstract: A projection display includes three illumination units to emit red, green, and blue beams, at least one optical modulator to modulate the red, green, and blue beams to be suitable for image data, and projection optics to magnify and project the light beams emitted from the at least one optical modulator. Each of the illumination units includes: a collimator including a parabolic first reflective surface; a compact light source located at a focal point of the first reflective surface; a polarizer that transforms a light beam emitted from the collimator into a P- or S-polarized beam; and an integrator that transforms the light beam emitted from the polarizer to be emitted at a uniform intensity of light.

Abstract: An apparatus is comprised of a light source radiating into a peripheral forward solid angle and a center forward solid angle. A reflector is positioned to reflect light from the light source from the peripheral forward solid angle into a longitudinal beam about an optical axis of the reflector. A lens is disposed longitudinally forward of the light source for focusing light into a predetermined beam pattern from the center forward solid angle into a skewed beam in a skewed direction with respect to the optical axis of the reflector to project a composite beam of light comprised of the light radiated in the skewed beam and the longitudinal beam.

Abstract: A projection objective of a microlithographic projection exposure apparatus has a plurality of optical elements, for example lenses or mirrors. The objective furthermore includes an actuator for exerting a mechanical force that deforms a selected optical element of the projection objective. A manipulator modifies the spatial position of one of the optical elements as a function of the force exerted by the actuator.

Abstract: Light emitting diodes (LEDs) emit light at a first wavelength. A phosphor material close to LEDs converts at least some of the light to a second wavelength. The light at both wavelengths passes through a light collecting unit. A reflecting polarizer transmits both wavelengths in a first polarization state and reflects light at both wavelengths in a second, orthogonal, polarization state. Light reflected by the reflective polarizer is directed back towards the phosphor material without any substantial increase in angular range. The resulting output light beam contains polarized light at the first and second wavelengths. In some embodiments, an array of LEDs includes LEDs that emit light at a first wavelength and others that emit light at a second wavelength. The phosphor material is disposed on the LEDs emitting the light at the first wavelength.

Abstract: A projection system includes a projector and a computer connected to the projector, wherein the projector projects an image according to an image information output from the computer. The projector includes an adjustment operation section that adjusts the settings of the projector and an adjustment operation identification section that identifies the adjustment operation indicated by an adjustment signal output from the adjustment operation section. The projector includes an adjustment-signal generating section that generates an adjustment signal on the basis of the adjustment operation identified by the adjustment operation identification section and a two-way communication section that sends the generated adjustment signal to the computer, and receives a signal from the computer. The computer includes a two-way communication section that receives the adjustment signal and sends a signal and an image processor that processes the image signal to be output according to the received adjustment signal.

Abstract: A contrast adjustable projector apparatus including a body, a light source, an illumination unit, a lens assembly and a regulation device is disclosed. The light source is disposed in the body for generating light beams. The illumination unit connects the light source and the lens assembly to guide the light beams to project onto the lens assembly. The illumination unit includes a digital micromirror device (DMD) which is controlled by a controller to rotate at a specific angle according to the transmitted signals, thereby projecting the light beams transmitting from the light source as an on-state light, a flat state light or an off-state light. The regulation device is provided at an outer side of the lens assembly to adjustably shield at least a part of flat state light which is incident to a light inlet, in order to the contrast of the light emitted out of the lens assembly.

Abstract: A positioning device for positioning an integration rod module disposed in an optical path between a light source device and a projection lens within a projection apparatus includes a flexible element having a fixing plate section mounted securely on an inner surface of a casing interconnecting the light source device and the projection lens and enclosing the integration rod module, and a first distal plate section extending integrally from one end of the fixing plate section toward a rod cover mounted on the casing for resiliently urging a holder of the rod module to press against the inner surface of the casing at a position opposite to the flexible element. A stop member is disposed securely on the holder adjacent to the rod cover to facilitate abutment of the first distal plate section of the flexible element against the holder to enhance retention of the rod module within the casing.

Abstract: An array of individually controllable elements for a lithographic apparatus comprise reflectors that can be actuated by an actuator and are biased to return to a given position by a force that varies non-linearly with the displacement of the reflector from that position.

Abstract: The present invention is a pod for containing a particulate sensitive substrate and for providing pressure equalization between the exterior and an interior environment of the pod and for minimizing gaseous fluid flow inside adjacent to the particulate sensitive substrate. The pod comprises a primary pod, a diaphragm positioned in a cover, the diaphragm having a normal undeflected position, the diaphragm deflectable from the normal undeflected position. Preferably, the pod comprises a secondary pod disposed in the primary pod defining a second enclosure for containing the particulate sensitive substrate. The pod may comprise a filter attached to the pod and providing gaseous fluid communication between the exterior of the pod and the interior of the pod. The diaphragm is responsive to rapid pressure changes and the filter is responsive to slower pressure changes and allows the diaphragm to return to its normal undeflected position.

Abstract: A projector has a transmission time information reception unit for calculating the distances between a transmitter and first and second ultrasonic receivers based on reception times of ultrasonic and infrared pulses transmitted from a transmitter-equipped pointer rod for pointing to positions on a projection surface. The projector also has an image correcting information calculation unit, which, when a test pattern made up of a plurality of reference points including a plurality of points near the corners of the upper and lower edges of the projection surface is projected onto the projection surface, generates a coordinate transformation table to bring the coordinates of the reference points near the upper edge into conformity with the coordinates of corresponding desired corrective points, from the distance information acquired by the transmission time information reception unit through the transmitter-equipped pointer rod and positional information of the desired corrective points.

Abstract: A projector device includes a region designating unit that designates a specific region with respect to an image projected, a determining unit that determines a length as a reference for enlargement of an image portion defined within the region designated by the region designating unit, an image enlarging unit that enlarges the image portion in the region based on the length as the reference determined by the determining unit and a size of an entire image, and an enlarged image projecting unit that projects the enlarged image enlarged by the image enlarging unit.

Abstract: A system and method of operation for a lithographic system having multiple exposure stations sharing one or more post-expose bake station and a centralized control system that schedules work through the expose station to the post-expose bake station while taking into consideration the patterning time for work pieces to be scheduled as well as the amount of post-expose delay allowable for the exposed work pieces.

Abstract: A lithographic projection system has an illumination system with a polarization member. A plurality of directing elements reflect different sub-beams of an incident beam into adjustable, individually controllable directions. By means of re-directing optics any desired polarized spatial intensity distribution of the beam can be produced in its cross-sectional plane.

Abstract: An apparatus for a display dock with an integrated display screen are disclosed herein.

Abstract: For a projector, a CPU references an exposure calculation object scope setting table stored in an exposure calculation object scope setting table storing unit, and sets the exposure calculation object scope based on a zoom volume detected by a zoom volume detector. An exposure calculation object scope for each zoom volume is stipulated in the exposure calculation object scope setting table. Next, an imaging control unit images an adjustment pattern image projected onto a screen by a CCD module, and calculates an exposure calculation value for the set exposure calculation object scope. Then, the imaging control unit controls at least one item among the shutter speed, gain, and aperture for the imaging unit to perform exposure adjustment so that the exposure calculation value is about equal to a specified exposure target value.